CN114383712B - High-temperature calibration method and device for sensitivity of vibration sensor - Google Patents
High-temperature calibration method and device for sensitivity of vibration sensor Download PDFInfo
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Abstract
The invention discloses a high-temperature calibration method and device for sensitivity of a vibration sensor, wherein the method comprises the following steps: the vibration excitation device, the temperature field environment control device and the laser interferometry and signal processing device which are required by sensitivity temperature calibration are combined into a system by using a special support frame for sensitivity calibration of the vibration sensor, so that the laser interferometry and the temperature environment field controllability can be realized simultaneously during the calibration of the sensor; providing vibration excitation, and collecting a sensor output voltage signal; collecting heterodyne laser interference signals, and extracting the phase of the interference signals by using a phase unwrapping method; and finally, the sine approximation method is used for fitting the phase of the laser interference signal and the voltage output signal, so that the calibration of the sensitivity amplitude and the phase of the vibration sensor is realized, the problem of low high-temperature sensitivity calibration precision of the existing vibration sensor is solved, the technical calibration precision of the device is high, and the operation of the calibration process is simple.
Description
Technical Field
The invention relates to the technical field of high-temperature calibration of sensitivity of a vibration sensor, in particular to a high-temperature calibration method and device of sensitivity of the vibration sensor.
Background
In recent years, with the continuous progress and development of China in the research fields of space technology, aviation and navigation technology, nuclear power technology and the like, the requirements on automatic control, monitoring and detection of precise instruments are also continuously improved, and the sensor can better overcome the influence of external environmental factors and becomes more and more important. The high-temperature vibration sensor is a vibration testing instrument working in a high-temperature environment, and is widely applied to the fields of impact vibration testing in the high-temperature environment, vibration testing of high-temperature gas turbine engines and aircraft gas turbines, and the like. In the use process of the sensor, in order to ensure the accuracy and uniformity of a measurement result and ensure that the sensor can accurately measure under a high-temperature environment, the sensitivity of the sensor must be calibrated periodically according to the requirements of national metrology verification regulations (JJG 233-2008, JJG 134-2003). However, due to the specificity of the working environment of the high-temperature vibration sensor, the sensitivity of the high-temperature vibration sensor is accurately measured when the high-temperature vibration sensor is calibrated, the temperature field environment is required to be controlled, and the measuring difficulty and the device cost are increased due to the influence of multiple factors. Therefore, most of factories and detection units in China adopt a comparison method with low cost to calibrate the sensitivity of the vibration sensor at high temperature. The uncertainty of vibration calibration by adopting a comparison method is larger than that of vibration calibration by adopting a laser interference absolute method, and because the friction between a temperature test box and a vibration extension rod of a vibration table in the vibration calibration device of the comparison method is easy to generate deviation, if the vibration calibration rule of the comparison method is performed by using a high-precision vibration table, the vibration calibration is realized at high cost, and the realization difficulty is high.
Therefore, the invention provides the vibration sensor sensitivity high-temperature calibration method and the vibration sensor sensitivity high-temperature calibration device which have higher calibration precision and simple and convenient calibration process operation, aiming at the defects of low sensitivity calibration precision, easy error generation, high implementation cost and high implementation difficulty of the existing high-temperature vibration sensor.
Disclosure of Invention
The invention aims to provide a high-temperature calibration method and device for sensitivity of a vibration sensor, which are used for solving the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a method of calibrating sensitivity of a vibration sensor at high temperature, the method comprising the steps of:
s1: the vibration excitation device, the temperature field environment control device and the laser interferometry and signal processing device which are required by the sensitivity temperature calibration of the vibration sensor are combined into a system by using the special support frame for the sensitivity calibration of the vibration sensor, so that the sensor can realize the laser interferometry and the flexible and controllable temperature environment field during the calibration;
s2, generating vibration excitation by using a vibration table, sensing vibration by a vibration sensor to be calibrated, outputting a voltage signal, and collecting the sensor output voltage signal by using a high-speed data collecting card;
s3, measuring vibration information of a vibration sensor to be calibrated by using a heterodyne laser interference vibration meter, outputting interference signal light, and extracting an interference signal phase by using a phase unwrapping method;
and S4, fitting the phase of the laser interference signal and the voltage output signal by using a sine approximation method, and calculating the sensitivity amplitude and the phase shift of the vibration sensor to be calibrated.
As still further aspects of the invention: the vibration excitation device comprises a signal generator, a power amplifier, a vibrating table, a ceramic transfer rod and a gold-plated film reflecting mirror, wherein the signal generator generates a stable sinusoidal signal, and the vibrating table is driven to vibrate after being amplified by the power amplifier. The vibration table, the ceramic transfer rod and the gold-plated film reflecting mirror are in threaded connection, the ceramic transfer rod is connected with the vibration table, the gold-plated film reflecting mirror is fixed on the surface of the transfer ceramic rod, and the ceramic transfer rod not only transfers vibration generated by the vibration table to the calibrated sensor fixed on the surface of the ceramic transfer rod, but also places the calibrated sensor in the center of the temperature field environment.
As still further aspects of the invention: the temperature field environment control device comprises an intelligent temperature controller, a semi-open type circular temperature cavity, aluminum silicate cotton, a sealing steel ring, incidence hole glass, a heating wire and a thermocouple temperature sensor group, wherein the intelligent temperature controller controls the temperature field environment in the semi-open type circular temperature cavity, the intelligent temperature controller is connected with the heating wire and a thermocouple temperature sensor binding post, the heating wire is respectively fixed on the inner wall of the semi-open type circular temperature cavity and the surface of the sealing steel ring, the thermocouple temperature sensor is suspended in the semi-open type circular temperature cavity, the aluminum silicate cotton is filled into the semi-open type circular temperature cavity to form a heat preservation layer, the incidence hole glass is fixed in a through hole at the top of the semi-open type circular temperature cavity, the sealing steel ring covers a through hole at the top end of a bottom support frame and forms a small gap with a ceramic transfer rod, and the characteristic that the air has good heat insulation performance is utilized, so that the small gap plays a role in heat insulation and sealing.
As still further aspects of the invention: the laser interferometry and signal processing device comprises a heterodyne laser interferometry vibration meter, a calibrated vibration sensor, a signal processor, a high-speed data acquisition card and a computer, wherein the heterodyne laser interferometry vibration meter is used for synchronously acquiring interference signal light and voltage signals output by the calibrated vibration sensor through the high-speed data acquisition card, the calibrated sensor is connected with the signal processor through the computer for calculation processing, the signal processor and the heterodyne laser interferometry vibration meter are synchronously connected with the high-speed data acquisition card, and the high-speed data acquisition card is connected with the computer.
As still further aspects of the invention: the special supporting frame comprises a bottom supporting frame, a supporting upright, a top cross beam, a vibration meter fixing table, a fixed pulley, a steel wire rope, a fixable sliding sleeve, a lead block, a semi-open type circular temperature cavity and a lifting handle, wherein the bottom supporting frame is fixedly welded with the supporting upright, the supporting upright is fixedly welded with the top cross beam, the top cross beam is fixedly connected with the vibration meter fixing table, the fixed pulley is fixedly screwed on the top end of the supporting upright, the fixable sliding sleeve is sleeved on the supporting upright and is fixed with the semi-open type circular temperature cavity, the fixed sliding sleeve is connected with one end of the steel wire rope, the other end of the steel wire rope is connected with the lead block and is suspended in the middle of the supporting upright, the lifting handle is fixed on the semi-open type circular temperature cavity, and the bottom supporting frame is designed to be disc-shaped in the top and is provided with a through hole in the center, so as to form a closed temperature field with the semi-open type circular temperature cavity, and simultaneously, a calibrated vibration sensor on a ceramic transfer rod is placed in the center position of the temperature field environment.
As still further aspects of the invention: the acquisition method based on the shannon sampling theorem, namely an NS acquisition method, is used for directly acquiring high-carrier-frequency laser interference signals, wherein the high-carrier frequency is realized by modulating a reference beam by adding a Bragg box in a heterodyne laser interferometer, the modulated reference beam interferes with a measuring beam reflected by a vibrating table to generate interference signal light carrying vibration information, and a photoelectric signal receiver is used for receiving the interference signal light. The high-speed data acquisition card is used for directly adopting the voltage output signal of the vibration sensor to be calibrated, and simultaneously, the interference signal is synchronously acquired through the high-speed data acquisition card.
As still further aspects of the invention: the laser interference signals are converted into electric signals through the photoelectric detector, the standard sine-cosine quadrature base is used for converting the interference signals into two paths of mutually orthogonal signals, and the phase of the two paths of interference signals is extracted by using a phase unwrapping method to obtain a phase expression.
As still further aspects of the invention: fitting the phase expression by using a sine approximation method, constructing a contradiction equation set, solving the contradiction equation set by using a least square method to obtain a vibration displacement expression, differentiating the vibration displacement expression to obtain the vibration speed and the acceleration of the vibration sensor to be calibrated, fitting the output voltage signal of the vibration sensor by using the sine approximation method to obtain the voltage signal amplitude and the initial phase, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor.
Further, the processing the phase of the collected interference signal and the voltage output signal by using the sine approximation method specifically includes:
(1) the photoelectric detector converts the laser interference signal into an electric signal, and the vibration table is driven by a sine signal to generate excitation, so that the receiver describes the collected interference signal as U R (t)：
Wherein the method comprises the steps ofu p 、/>Lambda is the peak value, the initial phase and the wavelength of the interference signal respectively; v p 、s p Is the vibration speed and displacement peak; f (f) v 、/>The vibration frequency and the initial phase.
(2) Interference signal U by using standard sine and cosine orthogonal basis R (t) into two mutually orthogonal signals, and describing the signals as:
t is in i For sampling time, i=0, 1,2, …, N-1, N is sampling pointA number.
(3) Phase unwrapping method for formula u recommended by international standard ISO 16063-11 1 (t i )、u 2 (t i ) Extracting the phase of the interference signal to obtain:
n pi in equation (3) is a compensation phase introduced to avoid introducing phase discontinuities in the interference signal zero crossing by the arctangent function, where n=0, 1,2, …. Every time n increases by 1, the phaseIncreasing pi, the vibration displacement varies by lambda/4.
(4) Fitting the formula (3) by using a sine approximation method to obtain:
in which ω=2pi f v . The phase of a plurality of sampling points is selected to form an equation set, and a least square method is used for fitting and solving parameters A, B, C, D to obtain vibration displacement s (t) i ):
(5) Performing first-order differentiation and second-order differentiation on the formula (5) to obtain the vibration speed and the acceleration of the vibration sensor to be calibrated, wherein the acceleration expression is described as follows:
wherein the vibration acceleration amplitude isThe initial phase of the vibration acceleration signal is +.>
(6) Similarly, the calibrated sensor output voltage signal V (t) is fitted using a sinusoidal approximation i )：
V(t i )＝A S cos(ωt i )-B S sin(ωt i )+C S t i +D S (7)
Obtaining voltage V (t) i )：
Wherein the medium voltage signal has an amplitude ofThe primary phase of the voltage signal is +.>
So the sensor sensitivity amplitude S and phaseThe calculated expression of (2) is:
as still further aspects of the invention: the calibration device comprises: the system comprises a signal generator, a power amplifier, a vibrating table, a ceramic transfer rod, a calibrated vibration sensor, a signal processor, a heterodyne laser interference vibration meter, a high-speed data acquisition card, an intelligent temperature controller, a semi-open type circular temperature cavity, a computer, a bottom support frame, a support upright post, a top cross beam, a vibration meter fixing table, a fixed pulley, a steel wire rope, a lead block, a fixable sliding sleeve, a lifting handle, incident hole glass, a heating wire, a thermocouple temperature sensor, a sealing steel ring, aluminum silicate cotton and a gold-plated film reflecting mirror, wherein the signal generator provides a stable sinusoidal signal, and the stable sinusoidal signal is amplified by the power amplifier to drive the vibrating table to generate vibration excitation; the semi-open circular temperature cavity, the bottom support frame, the sealing steel ring and the ceramic transfer rod form a closed temperature environment field; the intelligent temperature controller controls the temperature in the closed temperature environment field through the heating wire and the thermocouple temperature sensor; the heterodyne laser interference vibrometer acquires interference signal light containing vibration information through incident hole glass and a gold-plated film reflecting mirror; the calibrated vibration sensor is fixed on the ceramic transmission rod and is used for outputting a voltage signal by vibrating the sensitive vibrating table; the high-speed data acquisition card synchronously acquires interference signals output by the heterodyne laser interference vibration meter and voltage signals output by the vibration sensor to be calibrated, and the interference signals and the voltage signals are transmitted to the computer for calculation processing to obtain the sensitivity and the phase shift of the vibration sensor to be calibrated.
Compared with the prior art, the invention has the beneficial effects that:
(1) The method and the device are stable, reliable and practical, and can realize the high-temperature calibration of the sensitivity of the vibration sensor with different frequencies in the intermediate frequency range.
(2) The method realizes the high-temperature calibration of the sensitivity of the vibration sensor based on the laser interferometry, and improves the high-temperature calibration precision of the sensitivity of the vibration sensor.
(3) The method has the advantages of simple and convenient calibration operation and flexible temperature environment control, greatly reduces the calibration and measurement difficulty and effectively reduces the operation error in the experiment.
(4) The invention provides an absolute method calibration method and a calibration device based on a laser interferometry, which solve the problems of low calibration precision and inconvenient operation in the calibration process in the prior art.
Drawings
FIG. 1 is a schematic diagram of an apparatus for practicing the method of the present invention;
FIG. 2 is a flow chart of a method for calibrating sensitivity of a vibration sensor at high temperature;
FIG. 3 is a schematic diagram of heterodyne sinusoidal approximation vibration measurement signal acquisition and demodulation calculation;
FIG. 4 is a graph showing the result of high temperature calibration of the sensitivity of the vibration sensor according to an embodiment of the method of the present invention.
In the figure: the device comprises a signal generator-1, a power amplifier-2, a vibrating table-3, a ceramic transmission rod-4, a calibrated vibration sensor-5, a signal processor-6, a heterodyne laser interference vibrometer-7, a high-speed data acquisition card-8, an intelligent temperature controller-9, a semi-open circular temperature cavity-10, a computer-11, a bottom support frame-12, a support column-13, a top beam-14, a vibrometer fixing table-15, a fixed pulley-16, a steel wire rope-17, a lead block-18, a fixable sliding sleeve-19, a lifting handle-20, an incident hole glass-21, a heating wire-22, a thermocouple temperature sensor-23, a sealing steel ring-24, aluminum silicate cotton-25 and a gold-plated film reflector-26.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 to 4, in an embodiment of the present invention, the apparatus mainly includes: the device comprises a signal generator 1, a power amplifier 2, a vibrating table 3, a ceramic transfer rod 4, a calibrated vibration sensor 5, a signal processor 6, a heterodyne laser interference vibration meter 7, a high-speed data acquisition card 8, an intelligent temperature controller 9, a semi-open circular temperature cavity 10, a computer 11, a bottom support frame 12, a support upright post 13, a top cross beam 14, a vibration meter fixing table 15, a fixed pulley 16, a steel wire rope 17, a lead block 18, a fixable sliding sleeve 19, a lifting handle 20, incident hole glass 21, a heating wire 22, a thermocouple temperature sensor 23, a sealing steel ring 24, aluminum silicate cotton 25 and a gold-plated film reflecting mirror 26. The signal generator 1 provides a stable sinusoidal signal, and the stable sinusoidal signal is amplified by the power amplifier 2 and then drives the vibrating table 3 to generate vibration excitation; the semi-open circular temperature cavity 10, the bottom support frame 12, the sealing steel ring 24 and the ceramic transfer rod 4 form a closed temperature environment field; the intelligent temperature controller 9 controls the temperature in the closed temperature environment field through the heating wire 22 and the thermocouple temperature sensor 23; the heterodyne laser interference vibrometer 7 obtains interference signal light containing vibration information through the entrance glass 21 and the gold-plated film reflector 26; the calibrated vibration sensor 5 is fixed on the ceramic transmission rod 4 and is used for sensing the vibration of the vibration table 3 to output a voltage signal; the high-speed data acquisition card 8 synchronously acquires interference signals output by the heterodyne laser interference vibration meter 7 and voltage signals output by the vibration sensor 5 to be calibrated, and transmits the interference signals and the voltage signals to the computer 11 for calculation processing to obtain the sensitivity and the phase shift of the vibration sensor 5 to be calibrated.
Referring to fig. 2, the calibration flow of the high temperature calibration method for the sensitivity of the vibration sensor of the present invention comprises the following steps:
s1: a vibration excitation device, a temperature field environment control device and a laser interferometry and signal processing device which are required by sensitivity temperature calibration of a vibration sensor are combined into a system by using a special support frame for sensitivity calibration of the vibration sensor, so that the sensor can realize laser interferometry and flexible and controllable temperature environment field during calibration, a semi-open type circular temperature cavity in the system is lifted upwards and fixed through a fixable sliding sleeve, the vibration sensor to be calibrated is fixed on a ceramic transfer rod, the semi-open type circular temperature cavity is put down to form a closed temperature field environment with a bottom support frame, the temperature value in the temperature field environment cavity is set through an intelligent temperature controller, and the temperature environment field required by calibration is provided.
S2: the vibration table is controlled by the signal generator and the power amplifier to generate vibration excitation, the vibration excitation is transmitted to the vibration sensor to be calibrated by the ceramic transmission rod, the vibration sensor to be calibrated senses the vibration output voltage signal, and the high-speed data acquisition card is used for directly acquiring the output voltage signal of the vibration sensor to be calibrated.
S3: the measuring beam of the heterodyne laser interference vibrometer vertically irradiates the gold-plated film reflecting mirror through the incidence hole glass of the semi-open circular temperature cavity, interference signal light containing information such as the movement speed, displacement or phase of the vibration sensor to be calibrated is obtained, and the heterodyne laser interference signal phase is extracted based on a phase expansion method.
S4: and fitting the phase of the interference signal by using a sine approximation method, and differentiating to obtain the vibration acceleration amplitude and the initial phase of the vibration sensor to be calibrated. And similarly, fitting the output voltage signal by using a sine approximation method to obtain the amplitude and the initial phase of the output signal of the vibration sensor to be calibrated in each temperature field environment, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor to be calibrated.
Referring to fig. 3, a schematic diagram of acquisition and demodulation of vibration measurement signals by heterodyne sine approximation method used in the high-temperature calibration method of the sensitivity of the vibration sensor of the invention comprises the following steps:
s11: and directly acquiring a laser interference signal by using an NS acquisition method based on the shannon sampling theorem.
S12: and transmitting the acquired laser interference signals to a computer for processing through a high-speed data acquisition card.
S13: multiplying the acquired heterodyne laser interference signal with a group of standard sine and cosine quadrature bases, and converting the interference signal into two paths of mutually orthogonal interference signals.
S14: after two paths of mutually orthogonal interference signals are subjected to digital filtering, the phase of the interference signals is extracted by using a phase unwrapping method.
S15: and fitting the phases by using a sine approximation method, selecting a plurality of sampling point phases to form a contradiction equation set, and solving the contradiction equation set by using a least square method.
S16: and obtaining a vibration displacement expression through the solution of the contradictory equation set, and differentiating the vibration displacement expression to obtain the vibration acceleration expression containing the vibration acceleration amplitude and the vibration acceleration phase.
S21: and filtering and amplifying the output voltage signal of the vibration sensor to be calibrated.
S22: and directly collecting the processed voltage signals by using a high-speed data collecting card.
S23: fitting the voltage signal by using a positive line approximation method, selecting a plurality of sampling point phases to form a contradiction equation set, solving the contradiction equation set by using a least square method, and obtaining an output voltage expression containing the voltage signal amplitude and the initial phase by solving the contradiction equation set.
S17: and calculating to obtain the acceleration sensitivity amplitude and the phase shift of the vibration sensor to be calibrated through a vibration acceleration expression containing the vibration acceleration amplitude and the phase and an output voltage expression containing the voltage signal amplitude and the initial phase.
As still further aspects of the invention: the vibration excitation device comprises a signal generator, a power amplifier, a vibrating table, a ceramic transfer rod and a gold-plated film reflecting mirror, wherein the signal generator generates a stable sinusoidal signal, and the vibrating table is driven to vibrate after the signal generator is amplified by the power amplifier. The vibration platform, ceramic transfer pole and gilding membrane speculum threaded connection, ceramic transfer pole are connected with the vibration platform, and gilding membrane speculum is fixed on the transfer ceramic pole surface, and the ceramic transfer pole not only transmits the vibration that the vibration platform produced to fix at its surperficial quilt school's sensor, also will be proofreaded the sensor and put into temperature field environment central point department.
As still further aspects of the invention: the temperature field environment control device comprises an intelligent temperature controller, a semi-open circular temperature cavity, aluminum silicate cotton, a sealing steel ring, incidence hole glass, heating wires and a thermocouple temperature sensor group, wherein the intelligent temperature controller controls the temperature field environment in the semi-open circular temperature cavity, the intelligent temperature controller is connected with the heating wires and thermocouple temperature sensor binding posts, the heating wires are respectively fixed on the inner wall of the semi-open circular temperature cavity and the surface of the sealing steel ring, the thermocouple temperature sensor is suspended in the semi-open circular temperature cavity, the aluminum silicate cotton is filled into the semi-open circular temperature cavity to form an insulating layer, the incidence hole glass is fixed in a through hole at the top of the semi-open circular temperature cavity, the sealing steel ring covers the through hole at the top of a bottom support frame and forms a small gap with a ceramic transfer rod, and the characteristic that the air has good heat insulation performance is utilized, so that the small gap plays a role in heat insulation and sealing.
The laser interferometry and signal processing device comprises a heterodyne laser interferometry vibration meter, a calibrated vibration sensor, a signal processor, a high-speed data acquisition card and a computer, wherein the heterodyne laser interferometry vibration meter outputs interference signal light and the calibrated vibration sensor outputs voltage signals through the high-speed data acquisition card in a synchronous mode, the calibrated sensor is connected with the signal processor through computer computing, the signal processor and the heterodyne laser interferometry vibration meter are connected with the high-speed data acquisition card in a synchronous mode, and the high-speed data acquisition card is connected with the computer.
The special supporting frame comprises a bottom supporting frame, a supporting upright, a top cross beam, a vibration meter fixing table, a fixed pulley, a steel wire rope, a fixable sliding sleeve, a lead block, a semi-open type circular temperature cavity and a lifting handle, wherein the bottom supporting frame is fixedly welded with the supporting upright, the supporting upright is fixedly welded with the top cross beam, the top cross beam is fixedly connected with the vibration meter fixing table, the fixed pulley is fixedly fixed on the top end of the supporting upright through threads, the fixable sliding sleeve is sleeved on the supporting upright and is fixed with the semi-open type circular temperature cavity together, the fixed sliding sleeve is connected with one end of the steel wire rope, the other end of the steel wire rope is connected with the lead block and suspended in the middle of the supporting upright through the fixed pulley, the lifting handle is fixed on the semi-open type circular temperature cavity, and the bottom supporting frame is designed into a disc shape at the top end and a through hole is reserved in the center.
The acquisition method based on the shannon sampling theorem, namely an NS acquisition method, is used for directly acquiring high-carrier-frequency laser interference signals, wherein the high-carrier frequency is realized by modulating a reference beam by adding a Bragg box in a heterodyne laser interferometer, the modulated reference beam interferes with a measuring beam reflected by a vibrating table to generate interference signal light carrying vibration information, and a photoelectric signal receiver is used for receiving the interference signal light. The high-speed data acquisition card is used for directly adopting the voltage output signal of the vibration sensor to be calibrated, and simultaneously, the interference signal is synchronously acquired through the high-speed data acquisition card.
The laser interference signals are converted into electric signals through the photoelectric detector, the standard sine-cosine quadrature base is used for converting the interference signals into two paths of mutually orthogonal signals, and the phase of the two paths of interference signals is extracted by using a phase unwrapping method to obtain a phase expression.
Fitting the phase expression by using a sine approximation method, constructing a contradiction equation set, solving the contradiction equation set by using a least square method to obtain a vibration displacement expression, differentiating the vibration displacement expression to obtain the vibration speed and the acceleration of the vibration sensor to be calibrated, fitting the output voltage signal of the vibration sensor by using the sine approximation method to obtain the voltage signal amplitude and the initial phase, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor.
Further, the processing the phase of the collected interference signal and the voltage output signal by using the sine approximation method specifically includes:
(1) the photoelectric detector converts the laser interference signal into an electric signal, and the vibration table is driven by a sine signal to generate excitation, so that the receiver describes the collected interference signal as U R (t)：
Wherein the method comprises the steps ofu p 、/>Lambda is the peak value, the initial phase and the wavelength of the interference signal respectively; v p 、s p Is the vibration speed and displacement peak; f (f) v 、/>The vibration frequency and the initial phase.
(2) Interference signal U by using standard sine and cosine orthogonal basis R (t) into two mutually orthogonal signals, and describing the signals as:
t is in i For sampling time, i=0, 1,2, …, N-1, N is the number of sampling points.
(3) Phase unwrapping method for formula u recommended by international standard ISO 16063-11 1 (t i )、u 2 (t i ) Extracting the phase of the interference signal to obtain:
n pi in equation (3) is a compensation phase introduced to avoid introducing phase discontinuities in the interference signal zero crossing by the arctangent function, where n=0, 1,2, …. Every time n increases by 1, the phaseIncreasing pi, the vibration displacement varies by lambda/4.
(4) Fitting the formula (3) by using a sine approximation method to obtain:
in which ω=2pi f v . The phase of a plurality of sampling points is selected to form an equation set, and a least square method is used for fitting and solving parameters A, B, C, D to obtain vibration displacement s (t) i ):
(5) Performing first-order differentiation and second-order differentiation on the formula (5) to obtain the vibration speed and the acceleration of the vibration sensor to be calibrated, wherein the acceleration expression is described as follows:
wherein the vibration acceleration amplitude isThe initial phase of the vibration acceleration signal is +.>
(6) Similarly, the calibrated sensor output voltage signal V (t) is fitted using a sinusoidal approximation i )：
V(t i )＝A S cos(ωt i )-B S sin(ωt i )+C S t i +D S (7)
Obtaining voltage V (t) i )：
Wherein the medium voltage signal has an amplitude ofThe primary phase of the voltage signal is +.>
So the sensor sensitivity amplitude S and phaseThe calculated expression of (2) is:
the specific parameters of the device in this embodiment are: the maximum acceleration of the vibration frequency range is 2-5000 Hz and 100m/s 2 The standard medium frequency vibration table comprises a self-developed special support frame for high-temperature calibration of the sensitivity of a vibration sensor capable of flexibly adjusting the position of an ambient temperature field, a temperature controller with the control range of room temperature to 500 ℃ and the control precision of +/-2 ℃, wherein the calibrated vibration sensor is a MODEL (moderate temperature piezoelectric acceleration) 6237M70 high-temperature piezoelectric acceleration sensor manufactured by ENDEVCO company, a Germany Polytec OFV-5000 heterodyne laser interferometers with the displacement resolution as high as nanometers are used for vibration measurement, and an NI PXI-5122 high-speed data acquisition card with the frequency of 100MHz is used for acquisition of laser interference signals and sensor output signals.
In order to verify the feasibility and the calibration precision of the high-temperature calibration method for the sensitivity of the vibration sensor, the calibration method realizes 160Hz frequency and 30m/s 2 Under various temperature environments during accelerationIs effective for calibrating the sensitivity amplitude and phase shift of the sensor. Referring to fig. 4, a diagram of a result of high-temperature calibration of sensitivity of a vibration sensor according to an embodiment of the method of the present invention is shown, where the sensitivity amplitude of the vibration sensor is ideally not affected by the temperature environment.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation. The term "comprising" an element defined by the term "comprising" does not exclude the presence of other identical elements in a process, method, article or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. A high-temperature calibration method for the sensitivity of a vibration sensor is characterized by comprising the following steps of: the calibration method comprises the following steps:
s1: the vibration excitation device, the temperature field environment control device and the laser interferometry and signal processing device which are required by sensitivity temperature calibration of the vibration sensor are combined into a system by using a special support frame for sensitivity calibration of the vibration sensor, so that the sensor can realize laser interferometry and flexible and controllable temperature environment field during calibration, a semi-open type circular temperature cavity in the system is lifted upwards and fixed through a fixable sliding sleeve, the vibration sensor to be calibrated is fixed on a ceramic transfer rod, the semi-open type circular temperature cavity is put down to form a closed temperature field environment with a bottom support frame, the temperature value in the temperature field environment cavity is set through an intelligent temperature controller, and the temperature environment field required by calibration is provided;
s2, controlling the vibration table to generate vibration excitation through the signal generator and the power amplifier, transmitting the vibration excitation to a vibration sensor to be calibrated through the ceramic transmission rod, sensing the vibration output voltage signal by the vibration sensor to be calibrated, and directly collecting the output voltage signal of the vibration sensor to be calibrated by using the high-speed data acquisition card;
s3, measuring light beams of the heterodyne laser interference vibrometer vertically irradiate a gold-plated film reflecting mirror through a semi-open circular temperature cavity incidence hole glass to obtain interference signal light containing information of the movement speed, displacement or phase of a vibration sensor to be calibrated, and extracting heterodyne laser interference signal phases based on a phase expansion method;
s4, fitting the phase of the interference signal by using a sine approximation method, differentiating to obtain the vibration acceleration amplitude and the initial phase of the vibration sensor to be calibrated, fitting the output voltage signal by using a sine approximation method to obtain the amplitude and the initial phase of the output signal of the vibration sensor to be calibrated in each temperature field environment, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor to be calibrated;
the vibration excitation device comprises a vibration signal generator, a power amplifier, a vibration table, a ceramic transmission rod and a gold-plated film reflecting mirror, wherein the vibration signal generator generates a stable sinusoidal signal, the vibration table is driven to vibrate after being amplified by the power amplifier, the vibration table, the ceramic transmission rod and the gold-plated film reflecting mirror are in threaded connection, the ceramic transmission rod is connected with the vibration table, the gold-plated film reflecting mirror is fixed on the surface of the transmission ceramic rod, and the ceramic transmission rod not only transmits vibration generated by the vibration table to a calibrated sensor fixed on the surface of the ceramic transmission rod, but also places the calibrated sensor in the center position of a temperature field environment;
the temperature field environment control device comprises an intelligent temperature controller, a semi-open circular temperature cavity, aluminum silicate cotton, a sealing steel ring, incidence hole glass, a heating wire and a thermocouple temperature sensor group, wherein the intelligent temperature controller is used for controlling the temperature field environment in the semi-open circular temperature cavity, the intelligent temperature controller is connected with the heating wire and a thermocouple temperature sensor binding post, the heating wire is respectively fixed on the inner wall of the semi-open circular temperature cavity and the surface of the sealing steel ring, the thermocouple temperature sensor is suspended in the semi-open circular temperature cavity, the aluminum silicate cotton is filled in the semi-open circular temperature cavity to form a heat preservation layer, the incidence hole glass is fixed in a through hole at the top of the semi-open circular temperature cavity, the sealing steel ring covers a through hole at the top end of a bottom support frame and forms a small gap with a ceramic transmission rod, and the small gap plays a role in heat insulation and sealing by utilizing the characteristic that air has good heat insulation property;
the laser interferometry and signal processing device comprises a heterodyne laser interferometry vibrometer, a calibrated vibration sensor, a signal processor, a high-speed data acquisition card and a computer, wherein the heterodyne laser interferometry vibrometer synchronously acquires interference signal light and voltage signals output by the calibrated vibration sensor through the high-speed data acquisition card, the calibrated sensor is connected with the signal processor through the computer for calculation, the signal processor and the heterodyne laser interferometry vibrometer are synchronously connected with the high-speed data acquisition card, and the high-speed data acquisition card is connected with the computer;
the special supporting frame comprises a bottom supporting frame, a supporting upright, a top cross beam, a vibration meter fixing table, a fixed pulley, a steel wire rope, a fixable sliding sleeve, a lead block, a semi-open type circular temperature cavity and a lifting handle, wherein the bottom supporting frame is fixedly welded with the supporting upright, the supporting upright is fixedly welded with the top cross beam, the top cross beam is fixedly connected with the vibration meter fixing table, the fixed pulley is fixedly screwed on the top end of the supporting upright, the fixable sliding sleeve is sleeved on the supporting upright and is fixed with the semi-open type circular temperature cavity, the fixed sliding sleeve is connected with one end of the steel wire rope, the other end of the steel wire rope is connected with the lead block and is suspended in the middle of the supporting upright, the lifting handle is fixed on the semi-open type circular temperature cavity, and the bottom supporting frame is designed to be disc-shaped in the top and is provided with a through hole in the center, so as to form a closed temperature field with the semi-open type circular temperature cavity, and simultaneously, a calibrated vibration sensor on a ceramic transfer rod is placed in the center position of the temperature field environment.
2. The method for calibrating sensitivity and high temperature of a vibration sensor according to claim 1, wherein: the acquisition method based on the shannon sampling theorem, namely an NS acquisition method, is used for directly acquiring high-carrier-frequency laser interference signals, wherein the high-carrier frequency is realized by modulating a reference beam by adding a Bragg box in a heterodyne laser interferometer, the modulated reference beam interferes with a measuring beam reflected by a vibrating table to generate interference signal light carrying vibration information, an optical signal receiver is used for receiving the interference signal light, a high-speed data acquisition card is used for directly adopting a voltage output signal of a vibration sensor to be calibrated, and meanwhile, the interference signal is synchronously acquired by the high-speed data acquisition card.
3. The method for calibrating sensitivity and high temperature of a vibration sensor according to claim 1, wherein: converting the laser interference signals into electric signals through a photoelectric detector, converting the interference signals into two paths of mutually orthogonal signals by using standard sine and cosine quadrature, and extracting the phases of the two paths of interference signals by using a phase unwrapping method to obtain a phase expression.
4. The method for calibrating sensitivity and high temperature of a vibration sensor according to claim 1, wherein: fitting the phase expression by using a sine approximation method, constructing a contradiction equation set, solving the contradiction equation set by using a least square method to obtain a vibration displacement expression, differentiating the vibration displacement expression to obtain the vibration speed and the acceleration of the vibration sensor to be calibrated, fitting the output voltage signal of the vibration sensor by using the sine approximation method to obtain the voltage signal amplitude and the initial phase, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor.
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