CN104267756A - Horizontal overlength precision equipment micro-vibration control system - Google Patents
Horizontal overlength precision equipment micro-vibration control system Download PDFInfo
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- CN104267756A CN104267756A CN201410479654.7A CN201410479654A CN104267756A CN 104267756 A CN104267756 A CN 104267756A CN 201410479654 A CN201410479654 A CN 201410479654A CN 104267756 A CN104267756 A CN 104267756A
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- 238000000034 method Methods 0.000 claims abstract description 34
- 238000002955 isolation Methods 0.000 claims description 45
- 229910000831 Steel Inorganic materials 0.000 claims description 18
- 239000010959 steel Substances 0.000 claims description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 14
- 239000004567 concrete Substances 0.000 claims description 6
- 239000011150 reinforced concrete Substances 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 abstract description 4
- 230000010355 oscillation Effects 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 2
- 239000003795 chemical substances by application Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 238000013016 damping Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000012938 design process Methods 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
The invention discloses a horizontal overlength precision equipment micro-vibration control system which comprises a horizontal overlength precision equipment container, a body structure support, a cushion plate structure, a built-in technology supporting platform, a vibration-isolating device, a vibration-isolating device support, a vacuum corrugated pipe sealing connecting component, a vibration-isolating platform and a high-rigidity table base. The horizontal overlength precision equipment container and the built-in technology supporting platform are separated through the flexible vacuum corrugated pipe sealing connecting component to form two relatively-independent supporting structures, so that the vibration-isolating platform only bears the load of the inner technology structure of the horizontal overlength precision equipment container. Ambient environment vibration and power equipment vibration, especially mechanical vibration caused by vibration generating equipment attached on the container can be effectively isolated. During an optical detecting process, only slight residual oscillation is allowed on a table face, the vibration phases of detecting equipment and detected equipment are the same, and alignment errors caused by vacuumizing deforming and low-temperature deforming are avoided.
Description
Technical field
The present invention relates to horizontal long precise equipment field, particularly a kind of horizontal long precise equips micro-vibration control system.
Background technology
Current horizontal long precise is equipped in the field such as Ultra-precision Turning, space optics detection and uses more and more, especially before being applied to spacecraft lift-off, ground space environmental simulation is tested, in the severe experiment condition of simulating vacuum and low temperature, micro-vibration control is one of gordian technique ensureing that this experiment is carried out smoothly.
The method of micro-vibration control that current horizontal long precise equipment is conventional has:
One, select comparatively quietly experimental situation, as the remote mountains away from city, mainly vibrate by selection one place natural surroundings the place do not exceeded standard, and this place's basement rock buries more shallow, directly the basis of equipment support system is built to basement rock.
Two, adopt ultra-large foundation stabilization and block formula basis, this method, mainly through to ground and strengthening of foundation, improves its base integral quality and rigidity.
Three, all-in-one-piece vibration isolating method is adopted.This method is mainly for the vibration insulating foundation of overlength equipment Design entirety, and together with being directly cast in vibration insulating foundation by overlength equipment, isolation mounting adopts mechanical spring or flexible air spring.
At present, the method for the first micro-vibration control of equipping with the horizontal long precise of the second above-mentioned, does not consider that environment has a strong impact on the factor of micro-vibration control effect, when ambient vibration environment changes, then and vibration exceeding the standard, equipment cannot work; In the third method, when overlength equipment quality is comparatively large and rigid support platform mass is excessive, integral vibration isolation mode weak effect, and also cost is high, length consuming time, once break down, and non-exchange and transformation.
Summary of the invention
In view of the foregoing defects the prior art has, the invention discloses a kind of horizontal long precise and equip micro-vibration control system, be a kind of based on air-floating apparatus penetration vibration control system, this system vibration control performance be high, cost is low, adjustable, easy replacing, multi-functional.
The invention discloses a kind of horizontal long precise and equip micro-vibration control system, comprise horizontal long precise equipment container, agent structure supports, backing structure, in-laid process support platform, isolation mounting and isolation mounting support, horizontal long precise equipment container is vacuum seal equipment, be arranged on agent structure by backing structure to support, horizontal long precise equipment internal tank is provided with in-laid process support platform, also comprise vacuum corrugated pipe to be in addition tightly connected component, vibration-isolating platform and high rigidity pedestal, the vacuum corrugated pipe component that is tightly connected supports in-laid process support platform be arranged on vibration-isolating platform, the two ends of vibration-isolating platform are arranged on above isolation mounting, the bottom of isolation mounting is arranged on isolation mounting and supports, the centre of vibration-isolating platform is provided with high rigidity pedestal.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, horizontal long precise equipment container can be Horizontal type vacuum tank, the preferred Steel Pressure Vessels tank of Horizontal type vacuum tank, its Main Function is for optical detection provides space environmental simulation.In addition, the tube wall of Horizontal type vacuum tank can be provided with power-equipment, as vacuum pump etc.Horizontal type vacuum tank is that horizontal optical detection internal process equipment provides a complete airtight vacuum, dark, low temperature space Experiments of Optics environment.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, the vacuum corrugated pipe component that is tightly connected is the vacuum seal connecting elements of flexible expandable, run through inside and outside horizontal long precise equipment container, and make horizontal long precise equip container No leakage.And can ensure that the medium-high frequency vibration of the power-equipment generation be attached on horizontal long precise equipment container can not be delivered in in-laid process support platform, thus reduction in-laid process support platform is subject to vibration interference.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, the vacuum corrugated pipe component horizontally set that is tightly connected is preferably three and is spaced apart from each other, and longitudinally can arrange multiple according to the longitudinal length of described horizontal long precise equipment container and be spaced apart from each other.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, isolation mounting can adopt mechanical spring or air spring, air spring is a kind of flexible encapsulated container of inner inflatable, and it utilizes air internal energy change to reach vibration isolation object.It has very low rigidity and adjustable damping value, because vibrating isolation system has very low natural vibration frequency, preferably damping capacity, therefore has good vibration isolating effect and anti-collision effect, micro-vibration control engineering of its particularly suitable precision equipment and instrument.Air spring can be divided into bellows and membrane type two kinds, wherein preferably adopts diaphragm type air spring in this project.In addition, air spring assembly inside is also provided with steel auxiliary chamber, and outside also can additional levels damper.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, and isolation mounting longitudinally can arrange multiple according to the longitudinal length of described horizontal long precise equipment container and be spaced apart from each other.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, agent structure supports and refers to only for the support of the agent structures such as the power-equipment on vacuum tank and tank skin, and agent structure supports can select reinforced concrete structure post, steel core concrete column or shear wall etc.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, high rigidity pedestal is mainly in order to utilize the Modal Performances of rigid structure self, in conjunction with sinking support depression of order principle, both vibrating isolation system can have been made to reach high frequency filter effect by depression of order, also can realize carrying out design effectively to the excellent frequency section of vibrating isolation system, make it rationally reduce outside vibration source to the adverse effect of inner characterization processes structure.So vibration isolation table holder structure should design in micro-vibration control system becomes high rigidity pedestal, main composition is steel reinforced concrete structure, and its steel content should be greater than 30%.In integral vibration isolation systems engineering, its vibration control leading role be that isolation mounting and vacuum corrugated pipe are tightly connected component, high rigidity pedestal to be mainly tightly connected component in conjunction with isolation mounting and vacuum corrugated pipe in the design process, increase whole vibrating isolation system quality, reduce whole vibrating isolation system basic frequency, and whole vibrating isolation system mass centre and center of rigidity can be overlapped by design.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, in-laid process support platform mainly for optical detection in Horizontal type vacuum tank and tested vacuum light pipe and and other process equipments provide support and fixation, support column, support frame or steel or concrete platform can be provided with.
Beneficial effect
The horizontal long precise of one disclosed by the invention equips micro-vibration control system, this system is in horizontal optical test experience process, by utilizing flexible vacuum sylphon seal connecting elements, horizontal long precise equipment container and parallel light tube and the in-laid process support platform of placing parallel light tube can be separated, become two relatively independent supporting constructions, make vibration-isolating platform only bear the load of horizontal long precise equipment internal tank process structure.This mode can effectively to ambient environment vibrations and power-equipment vibration, and the mechanical vibration that the equipment of shaking on container that is particularly attached to causes are isolated.Realization, in optical detection process, only allows residual oscillation table top occurring trace, and detects consistent with tested vibration equipment phase place, and avoids the alignment error owing to vacuumizing distortion and low-temperature deformation introducing.
Accompanying drawing explanation
Fig. 1 is the oblique view that one end that horizontal long precise equips the horizontal long precise equipment container of micro-vibration control system is broken away.
Fig. 2 is the cross sectional representation that horizontal long precise equips micro-vibration control system.
Fig. 3 is the longitudinal section skeleton view that horizontal long precise equips micro-vibration control system.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail, but not as a limitation of the invention.
As shown in Figures 1 and 2, the invention discloses a kind of horizontal long precise and equip micro-vibration control system, comprise horizontal long precise equipment container (01), agent structure supports (02), backing structure (03), in-laid process support platform (04), isolation mounting (05) and isolation mounting support (06), horizontal long precise equipment container (01) is vacuum seal equipment, being arranged on agent structure by backing structure (03) supports on (02), horizontal long precise equipment container (01) inside is provided with in-laid process support platform (04), also comprise vacuum corrugated pipe to be in addition tightly connected component (07), vibration-isolating platform (08) and high rigidity pedestal (09), the vacuum corrugated pipe component (07) that is tightly connected supports in-laid process support platform (04) be arranged on vibration-isolating platform (08), the two ends of vibration-isolating platform (08) are arranged on above isolation mounting (05), the bottom of isolation mounting (05) is arranged on isolation mounting and supports on (06), the centre of vibration-isolating platform (08) is provided with high rigidity pedestal (09).
As shown in Figure 1, a kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, horizontal long precise equipment container (01) can be Horizontal type vacuum tank, the preferred Steel Pressure Vessels tank of Horizontal type vacuum tank, its Main Function is for optical detection provides space environmental simulation.In addition, the tube wall of Horizontal type vacuum tank can be provided with power-equipment, as (not shown)s such as vacuum pumps.Horizontal type vacuum tank is that horizontal optical detection internal process equipment provides a complete airtight vacuum, dark, low temperature space Experiments of Optics environment.
As shown in Figure 2, a kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, vacuum corrugated pipe is tightly connected the vacuum seal connecting elements that component (07) is flexible expandable, run through inside and outside horizontal long precise equipment container (01), and make horizontal long precise equip container (01) No leakage.And can ensure that the medium-high frequency vibration of the power-equipment generation be attached on horizontal long precise equipment container (01) can not be delivered in in-laid process support platform (04), thus reduction in-laid process support platform (04) is subject to vibration interference.
A kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, as shown in Figure 2, vacuum corrugated pipe component (07) horizontally set that is tightly connected is preferably three and is spaced apart from each other, as shown in Figure 3, longitudinally can arrange multiple according to the longitudinal length of described horizontal long precise equipment container (01) and be spaced apart from each other.
As shown in Figures 2 and 3, a kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, isolation mounting (05) can adopt mechanical spring or air spring, air spring is a kind of flexible encapsulated container of inner inflatable, and it utilizes air internal energy change to reach vibration isolation object.It has very low rigidity and adjustable damping value, because vibrating isolation system has very low natural vibration frequency, preferably damping capacity, therefore has good vibration isolating effect and anti-collision effect, micro-vibration control engineering of its particularly suitable precision equipment and instrument.Air spring can be divided into bellows and membrane type two kinds, wherein preferably adopts diaphragm type air spring in this project.In addition, although not shown, air spring assembly inside is also provided with steel auxiliary chamber, and outside also can additional levels damper.
As shown in Figure 3, a kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, and isolation mounting (05) longitudinally can arrange multiple according to the longitudinal length of described horizontal long precise equipment container (01) and be spaced apart from each other.
As depicted in figs. 1 and 2, shown a kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, agent structure supports (02) and refers to that agent structure supports (02) can select reinforced concrete structure post, steel core concrete column or shear wall etc. only for the support of the agent structures such as horizontal long precise equipment container (01) and power-equipment thereof.
As depicted in figs. 1 and 2, a kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, high rigidity pedestal (09) is mainly in order to utilize the Modal Performances of rigid structure self, in conjunction with sinking support depression of order principle, both vibrating isolation system can have been made to reach high frequency filter effect by depression of order, also can realize carrying out design effectively to the excellent frequency section of vibrating isolation system, make it rationally reduce outside vibration source to the adverse effect of inner characterization processes structure.So vibration isolation table holder structure should design in micro-vibration control system becomes high rigidity pedestal (09), and main composition is steel reinforced concrete structure, and its steel content should be greater than 30%.In integral vibration isolation systems engineering, its vibration control leading role be that isolation mounting (05) and vacuum corrugated pipe are tightly connected component (07), high rigidity pedestal (09) to be mainly tightly connected component (07) in conjunction with isolation mounting (05) and vacuum corrugated pipe in the design process, increase whole vibrating isolation system quality, reduce whole vibrating isolation system basic frequency, and whole vibrating isolation system mass centre and center of rigidity can be overlapped by design.
As shown in Figure 1, Figure 2 and Figure 3, a kind of horizontal long precise disclosed by the invention is equipped in the embodiment of micro-vibration control system, in-laid process support platform (04) mainly for equipment container (01) interior the optical detection of horizontal long precise and tested vacuum light pipe with and other process equipments provide support and fixation, support column, support frame or steel or concrete platform can be provided with.
Claims (9)
1. a horizontal long precise equips micro-vibration control system, comprise horizontal long precise equipment container, agent structure supports, backing structure, in-laid process support platform, isolation mounting and isolation mounting support, it is characterized in that: described horizontal long precise is equipped micro-vibration control system and also comprised vacuum corrugated pipe and to be tightly connected component, vibration-isolating platform and high rigidity pedestal, described horizontal long precise equipment container is vacuum seal equipment, be arranged on agent structure by described backing structure to support, described horizontal long precise equipment internal tank is provided with described in-laid process support platform, the described vacuum corrugated pipe component that is tightly connected supports described in-laid process support platform and is arranged on described vibration-isolating platform, the two ends of described vibration-isolating platform are arranged on above described isolation mounting, the bottom of described isolation mounting is arranged on described isolation mounting and supports, the centre of described vibration-isolating platform is provided with described high rigidity pedestal.
2. the horizontal long precise of one according to claim 1 equips micro-vibration control system, it is characterized in that: described horizontal long precise equipment container can be Horizontal type vacuum tank, the preferred Steel Pressure Vessels tank of described Horizontal type vacuum tank, the tube wall of described Horizontal type vacuum tank can be provided with vacuum pump.
3. the horizontal long precise of one according to claim 1 equips micro-vibration control system, it is characterized in that: the described vacuum corrugated pipe component that is tightly connected is the vacuum seal connecting elements of flexible expandable, run through inside and outside described horizontal long precise equipment container, and make described horizontal long precise equipment container No leakage.
4. equip micro-vibration control system according to the horizontal long precise of the one described in claim 1 or 3, it is characterized in that: the described vacuum corrugated pipe component horizontally set that is tightly connected is preferably three and is spaced apart from each other, longitudinally can arrange multiple according to the longitudinal length of described horizontal long precise equipment container and be spaced apart from each other.
5. the horizontal long precise of one according to claim 1 equips micro-vibration control system, it is characterized in that: described isolation mounting can adopt mechanical spring or air spring, described air spring can be bellows or membrane type, preferred diaphragm type air spring, described air spring inside can be provided with steel auxiliary chamber, and outside can additional levels damper.
6. equip micro-vibration control system according to the horizontal long precise of the one described in claim 1 or 5, it is characterized in that: described isolation mounting longitudinally can arrange multiple according to the longitudinal length of described horizontal long precise equipment container and be spaced apart from each other.
7. the horizontal long precise of one according to claim 1 equips micro-vibration control system, it is characterized in that: described agent structure supports can select reinforced concrete structure post, steel core concrete column or shear wall.
8. the horizontal long precise of one according to claim 1 equips micro-vibration control system, it is characterized in that: described high rigidity pedestal main composition is steel reinforced concrete structure, and steel content is greater than 30%.
9. the horizontal long precise of one according to claim 1 equips micro-vibration control system, it is characterized in that: described in-laid process support platform can be provided with support column, support frame or steel or concrete platform.
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| CN201410479654.7A CN104267756B (en) | 2014-09-19 | 2014-09-19 | Horizontal overlength precision equipment micro-vibration control system |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104699114A (en) * | 2015-02-17 | 2015-06-10 | 中国科学院国家天文台 | Vacuum optical experiment system with extravehicular micro-adjusting mechanism |
| CN105334883A (en) * | 2015-10-21 | 2016-02-17 | 中国电子工程设计院 | Intelligent feedforward signal analysis method in vibration control system |
| CN106402261A (en) * | 2016-08-08 | 2017-02-15 | 中国电子工程设计院 | Penetration type micro-vibration air spring vibration isolation system |
| CN108380248A (en) * | 2018-03-02 | 2018-08-10 | 中科院南京天文仪器有限公司 | A kind of temperature baffling device for deep cooling vacuum environment simulation system |
| CN109932150A (en) * | 2018-12-28 | 2019-06-25 | 中国机械工业集团有限公司 | A kind of towering suspension detection structure micro-vibration control device |
| CN110031027A (en) * | 2019-03-22 | 2019-07-19 | 中国科学院微电子研究所 | A kind of detection device with vibration isolation nested structure |
| CN110925356A (en) * | 2019-12-12 | 2020-03-27 | 中国工程物理研究院应用电子学研究所 | Voltage-regulating vibration-damping stability-ensuring optical platform device |
| CN111609079A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| CN113565920A (en) * | 2021-07-26 | 2021-10-29 | 兰州理工大学 | Vibration isolation system for weakening influence of vibration on precision equipment and determination method |
| CN113981409A (en) * | 2021-12-27 | 2022-01-28 | 中国工程物理研究院应用电子学研究所 | Vacuum optical airtight cabin without negative pressure stress |
| WO2022262006A1 (en) * | 2021-06-18 | 2022-12-22 | 中国电子工程设计院有限公司 | Integrally-controlled vibration isolation system for large precision equipment |
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| CN104699114B (en) * | 2015-02-17 | 2017-07-14 | 中国科学院国家天文台 | A kind of vacuum Experiments of Optics system of band micro-adjusting mechanism out of my cabin |
| CN104699114A (en) * | 2015-02-17 | 2015-06-10 | 中国科学院国家天文台 | Vacuum optical experiment system with extravehicular micro-adjusting mechanism |
| CN105334883A (en) * | 2015-10-21 | 2016-02-17 | 中国电子工程设计院 | Intelligent feedforward signal analysis method in vibration control system |
| CN106402261A (en) * | 2016-08-08 | 2017-02-15 | 中国电子工程设计院 | Penetration type micro-vibration air spring vibration isolation system |
| CN108380248A (en) * | 2018-03-02 | 2018-08-10 | 中科院南京天文仪器有限公司 | A kind of temperature baffling device for deep cooling vacuum environment simulation system |
| CN108380248B (en) * | 2018-03-02 | 2020-12-01 | 中科院南京天文仪器有限公司 | Temperature separation device for cryogenic vacuum environment simulation system |
| CN109932150A (en) * | 2018-12-28 | 2019-06-25 | 中国机械工业集团有限公司 | A kind of towering suspension detection structure micro-vibration control device |
| CN109932150B (en) * | 2018-12-28 | 2020-11-10 | 中国机械工业集团有限公司 | Micro-vibration control device of towering suspension detection structure |
| CN110031027B (en) * | 2019-03-22 | 2021-07-13 | 中国科学院微电子研究所 | Detection apparatus with vibration isolation nested structure |
| CN110031027A (en) * | 2019-03-22 | 2019-07-19 | 中国科学院微电子研究所 | A kind of detection device with vibration isolation nested structure |
| CN110925356A (en) * | 2019-12-12 | 2020-03-27 | 中国工程物理研究院应用电子学研究所 | Voltage-regulating vibration-damping stability-ensuring optical platform device |
| CN111609079A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| CN111609079B (en) * | 2020-05-28 | 2022-07-12 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| WO2022262006A1 (en) * | 2021-06-18 | 2022-12-22 | 中国电子工程设计院有限公司 | Integrally-controlled vibration isolation system for large precision equipment |
| CN113565920A (en) * | 2021-07-26 | 2021-10-29 | 兰州理工大学 | Vibration isolation system for weakening influence of vibration on precision equipment and determination method |
| CN113981409A (en) * | 2021-12-27 | 2022-01-28 | 中国工程物理研究院应用电子学研究所 | Vacuum optical airtight cabin without negative pressure stress |
| CN113981409B (en) * | 2021-12-27 | 2022-03-15 | 中国工程物理研究院应用电子学研究所 | Vacuum optical airtight cabin without negative pressure stress |
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