CN104267756B - Horizontal overlength precision equipment micro-vibration control system - Google Patents
Horizontal overlength precision equipment micro-vibration control system Download PDFInfo
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- CN104267756B CN104267756B CN201410479654.7A CN201410479654A CN104267756B CN 104267756 B CN104267756 B CN 104267756B CN 201410479654 A CN201410479654 A CN 201410479654A CN 104267756 B CN104267756 B CN 104267756B
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- 238000000034 method Methods 0.000 claims abstract description 31
- 238000007789 sealing Methods 0.000 claims abstract description 5
- 238000002955 isolation Methods 0.000 claims description 44
- 229910000831 Steel Inorganic materials 0.000 claims description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 17
- 239000010959 steel Substances 0.000 claims description 17
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- 239000004567 concrete Substances 0.000 claims description 6
- 239000011150 reinforced concrete Substances 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 241001237728 Precis Species 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000010355 oscillation Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 238000013016 damping Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000012938 design process Methods 0.000 description 2
- 239000011435 rock Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
The invention discloses a horizontal overlength precision equipment micro-vibration control system which comprises a horizontal overlength precision equipment container, a body structure support, a cushion plate structure, a built-in technology supporting platform, a vibration-isolating device, a vibration-isolating device support, a vacuum corrugated pipe sealing connecting component, a vibration-isolating platform and a high-rigidity table base. The horizontal overlength precision equipment container and the built-in technology supporting platform are separated through the flexible vacuum corrugated pipe sealing connecting component to form two relatively-independent supporting structures, so that the vibration-isolating platform only bears the load of the inner technology structure of the horizontal overlength precision equipment container. Ambient environment vibration and power equipment vibration, especially mechanical vibration caused by vibration generating equipment attached on the container can be effectively isolated. During an optical detecting process, only slight residual oscillation is allowed on a table face, the vibration phases of detecting equipment and detected equipment are the same, and alignment errors caused by vacuumizing deforming and low-temperature deforming are avoided.
Description
Technical field
The present invention relates to horizontal long precise equips field, particularly a kind of horizontal long precise equipment micro-vibration control system
System.
Background technology
At present horizontal long precise be equipped in the fields such as Ultra-precision Turning, space optics detection use it is more and more, especially
It is to be applied to spacecraft to rise unprecedented ground space environmental simulation experiment, in simulation vacuum and the severe experiment condition of low temperature
In, micro-vibration control is to ensure one of key technology for being smoothed out of the experiment.
The method of the conventional micro-vibration control of horizontal long precise equipment at present has：
First, relatively quiet experimental situation is selected, such as away from the remote mountains in city, mainly by selecting natural surroundings at
Where vibration is not exceeded, and at this, basement rock is buried than shallower, is directly poured the basis of equipment support system to basement rock.
2nd, using ultra-large foundation stabilization and block formula basis, this method mainly by ground and strengthening of foundation,
Improve its basic total quality and rigidity.
3rd, using all-in-one-piece vibration isolating method.This method is primarily directed to the overall vibration insulating foundation of overlength equipment Design,
Overlength is equipped together with directly pouring with vibration insulating foundation, isolation mounting adopts mechanical spring or flexible air spring.
At present, above-mentioned the first method with the micro-vibration control of second horizontal long precise equipment, does not consider environment
The factor of micro-vibration control effect is had a strong impact on, when ambient vibration environment changes, then vibration exceeding the standard, equipment cannot work；
In the third method, when overlength equipment quality is larger and rigid support platform mass is excessive, integral vibration isolation mode effect is poor, and
And high cost, time-consuming, once break down, non-exchange and transformation.
The content of the invention
In view of the foregoing defects the prior art has, the invention discloses a kind of horizontal long precise equipment micro-vibration control
System, be it is a kind of based on air-floating apparatus penetration vibration control system, system vibration control performance height, low cost, can adjust,
Easily change, it is multi-functional.
The invention discloses a kind of horizontal long precise equips micro-vibration control system, hold including horizontal long precise equipment
Device, agent structure support, backing structure, in-laid process support platform, isolation mounting and isolation mounting are supported, horizontal long precise
Equipment container is equipped for vacuum tightness, is arranged on agent structure by backing structure and is supported, and horizontal long precise equips container
In-laid process support platform is internally provided with, vacuum corrugated pipe is additionally included and is tightly connected component, vibration-isolating platform and high rigidity
Pedestal, vacuum corrugated pipe are tightly connected component and support in-laid process support platform and be arranged on vibration-isolating platform, vibration-isolating platform
Two ends are arranged on above isolation mounting, and the bottom of isolation mounting is arranged on isolation mounting and supports, the middle setting of vibration-isolating platform
There is high rigidity pedestal.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, horizontal long precise
Equipment container can be Horizontal type vacuum tank, the preferred steel pressure container tank of Horizontal type vacuum tank, its Main Function be for
Optical detection provides space environmental simulation.Additionally, power-equipment on the tube wall of Horizontal type vacuum tank, can be provided with, it is such as true
Empty pump etc..Horizontal type vacuum tank for horizontal optical detect internal process equipment provide a completely closed vacuum, dark,
Low temperature space Experiments of Optics environment.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, vacuum corrugated pipe is close
Vacuum sealing connecting elements of the envelope connecting elements for flexible expandable, inside and outside horizontal long precise equipment container, and makes
Horizontal long precise equips container No leakage.And can guarantee that the power-equipment being attached on horizontal long precise equipment container is produced
Medium-high frequency vibration be not transferred in in-laid process support platform, it is vibrated dry so as to reduce in-laid process support platform
Disturb.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, vacuum corrugated pipe is close
Envelope connecting elements horizontally set is preferably three and is spaced apart from each other, and longitudinally can be held according to the horizontal long precise equipment
The longitudinal length of device is arranged multiple and is spaced apart from each other.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, isolation mounting can be with
Using mechanical spring or air spring, air spring is a kind of flexible encapsulated container of inner inflatable, and it is become using air internal energy
Change reaches vibration isolation purpose.It has very low rigidity and adjustable damping value, because vibrating isolation system has and very low inherently shakes
Dynamic frequency, preferable damping capacity, therefore with good vibration isolating effect and anti-collision effect, its particularly suitable precision equipment and instrument
The micro-vibration control engineering of device.Air spring can be divided into two kinds of bellows and membrane type, preferably empty using membrane type wherein in this project
Gas spring.Additionally, being additionally provided with steel auxiliary chamber inside air spring assembly, outside can also additional levels damper.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, isolation mounting longitudinal direction
Can arrange multiple and be spaced apart from each other according to the longitudinal length of the horizontal long precise equipment container.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, agent structure is supported
The support only for agent structures such as the power-equipments on vacuum tank and tank skin is referred to, agent structure supports and reinforcing bar can be selected to mix
Xtah Crude Clay structure post, steel core concrete column or shear wall etc..
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, high rigidity pedestal master
If for the Modal Performances using rigid structure itself, with reference to sinking support depression of order principle, can both make vibration isolation by depression of order
System reaches high frequency filter effect, it is also possible to realize carrying out design effectively to the excellent frequency section of vibrating isolation system so as to rationally
Reduce outside adverse effect of the vibration source to internal characterization processes structure.So, vibration isolation pedestal structure is in micro-vibration control system
High rigidity pedestal should be designed to, main composition is steel reinforced concrete structure, and its steel content should be greater than 30%.In integral vibration isolation system
In system engineering, its vibration control leading role is that isolation mounting and vacuum corrugated pipe are tightly connected component, and high rigidity pedestal exists
Component is tightly connected mainly in conjunction with isolation mounting and vacuum corrugated pipe in design process, increase whole vibrating isolation system quality,
Whole vibrating isolation system fundamental frequency is reduced, and whole vibrating isolation system mass centre and center of rigidity can be made to overlap by design.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, in-laid process is supported
Platform mainly for optical detection in Horizontal type vacuum tank and tested vacuum light pipe with and other process equipments support is provided
And fixation, support column, support frame or steel or concrete platform can be provided with.
Beneficial effect
A kind of horizontal long precise disclosed by the invention equips micro-vibration control system, and the system is real in horizontal optical detection
During testing, horizontal long precise can be equipped into container and directional light by using flexible vacuum sylphon seal connecting elements
The in-laid process support platform of pipe and placement parallel light tube separates, and becomes two relatively independent supporting constructions, makes vibration-isolating platform
The load that horizontal long precise equips container internal process structure is undertaken only.This mode can effectively to ambient environment vibrations
And power-equipment vibrates, the mechanical oscillation that the equipment of shaking especially being attached on container causes are isolated.Realize in optics
In detection process, only allow micro residual oscillation on table top, occur, and detect consistent with tested vibration equipment phase place, and avoid
Due to vacuumizing the alignment error that deformation and low-temperature deformation are introduced.
Description of the drawings
Fig. 1 is that one end of the horizontal long precise equipment container of horizontal long precise equipment micro-vibration control system is broken away
Oblique view.
Fig. 2 is the cross-sectional view that horizontal long precise equips micro-vibration control system.
Fig. 3 is the longitudinal section perspective view that horizontal long precise equips micro-vibration control system.
Specific embodiment
The present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings, but not as the limit to the present invention
It is fixed.
As shown in Figures 1 and 2, the invention discloses a kind of horizontal long precise equips micro-vibration control system, including
Horizontal long precise equipment container (01), agent structure support (02), backing structure (03), in-laid process support platform (04),
Isolation mounting (05) and isolation mounting support (06), and horizontal long precise equipment container (01) is equipped for vacuum tightness, by pad
Hardened structure (03) is arranged on agent structure and supports on (02), and horizontal long precise equipment container (01) is internally provided with in-laid process
Support platform (04), additionally includes vacuum corrugated pipe and is tightly connected component (07), vibration-isolating platform (08) and high rigidity pedestal
(09), vacuum corrugated pipe is tightly connected component (07) and supports in-laid process support platform (04) and be arranged on vibration-isolating platform (08)
On, the two ends of vibration-isolating platform (08) are arranged on isolation mounting (05) above, and the bottom of isolation mounting (05) is arranged on isolation mounting
Support on (06), the middle setting of vibration-isolating platform (08) has high rigidity pedestal (09).
As shown in figure 1, in a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, water
Flat long precise equipment container (01) can be Horizontal type vacuum tank, the preferred steel pressure container tank of Horizontal type vacuum tank,
Its Main Function is to provide space environmental simulation for optical detection.Additionally, can be provided with the tube wall of Horizontal type vacuum tank
The (not shown)s such as power-equipment, such as vavuum pump.Horizontal type vacuum tank is provided for horizontal optical detection internal process equipment
One complete closed vacuum, dark, low temperature space Experiments of Optics environment.
As shown in Fig. 2 in a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, very
The vacuum sealing connecting elements of empty sylphon seal connecting elements (07) for flexible expandable, holds through horizontal long precise equipment
Device (01) it is inside and outside, and make horizontal long precise equipment container (01) No leakage.And can guarantee that being attached to horizontal long precise fills
The medium-high frequency vibration that power-equipment on standby container (01) is produced is not transferred in in-laid process support platform (04), so as to subtract
Little in-laid process support platform (04) interference vibrated.
In a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, as shown in Fig. 2 very
Empty sylphon seal connecting elements (07) horizontally set is preferably three and is simultaneously spaced apart from each other, as shown in figure 3, longitudinal direction can be with
Arrange multiple and be spaced apart from each other according to the longitudinal length of horizontal long precise equipment container (01).
As shown in Figures 2 and 3, a kind of horizontal long precise disclosed by the invention equips the embodiment of micro-vibration control system
In, isolation mounting (05) can adopt mechanical spring or air spring, and air spring is that a kind of flexible encapsulated of inner inflatable is held
Device, it reaches vibration isolation purpose using air internal energy change.It has very low rigidity and adjustable damping value, because vibration isolation system
System is with very low eigentone, preferable damping capacity, therefore with good vibration isolating effect and anti-collision effect, it is special
The micro-vibration control engineering of precision equipment and instrument is not suitable for.Air spring can be divided into two kinds of bellows and membrane type, wherein this
Diaphragm type air spring is adopted in mesh preferably.Additionally, although it is not shown in the figure, being additionally provided with steel inside air spring assembly
Auxiliary chamber, outside can also additional levels damper.
As shown in figure 3, in a kind of embodiment of horizontal long precise equipment micro-vibration control system disclosed by the invention, every
Vibrating device (05) longitudinal direction can arrange multiple and to each other according to the longitudinal length of horizontal long precise equipment container (01)
Every distribution.
As depicted in figs. 1 and 2, a kind of shown horizontal long precise disclosed by the invention equips the reality of micro-vibration control system
Apply in example, agent structure supports (02) to refer to only for body junctions such as horizontal long precise equipment container (01) and its power-equipments
The support of structure, agent structure support (02) can select reinforced concrete structure post, steel core concrete column or shear wall etc..
As depicted in figs. 1 and 2, a kind of horizontal long precise disclosed by the invention equips the embodiment of micro-vibration control system
In, high rigidity pedestal (09) is primarily to using the Modal Performances of rigid structure itself, with reference to sinking support depression of order principle, lead to
Crossing depression of order can both make vibrating isolation system reach high frequency filter effect, it is also possible to realize entering the excellent frequency section of vibrating isolation system
Row design effectively so as to rationally reduce outside adverse effect of the vibration source to internal characterization processes structure.So, vibration isolation pedestal structure
High rigidity pedestal (09) should be designed in micro-vibration control system, and main composition is steel reinforced concrete structure, its steel content
Should be greater than 30%.In integral vibration isolation system engineering, its vibration control leading role is isolation mounting (05) and vacuum ripple
Seal of tube connecting elements (07), high rigidity pedestal (09) in the design process mainly in conjunction with isolation mounting (05) and vacuum ripple
Line seal of tube connecting elements (07), increases whole vibrating isolation system quality, reduces whole vibrating isolation system fundamental frequency, and can pass through
Design makes whole vibrating isolation system mass centre and center of rigidity overlap.
As shown in Figure 1, Figure 2 and Figure 3, a kind of horizontal long precise disclosed by the invention equips the reality of micro-vibration control system
Apply in example, in-laid process support platform (04) is mainly the interior optical detection of horizontal long precise equipment container (01) and tested
Vacuum light pipe and and other process equipments provide and support and fixation, can be provided with support column, support frame or steel or
Concrete platform.
Claims (11)
1. a kind of horizontal long precise equips micro-vibration control system, including horizontal long precise equipment container, agent structure
Support, backing structure, in-laid process support platform, isolation mounting and isolation mounting are supported, it is characterised in that：The horizontal overlength essence
Close equipment micro-vibration control system is also tightly connected component, vibration-isolating platform and high rigidity pedestal, the water including vacuum corrugated pipe
Flat long precise equipment container is equipped for vacuum tightness, is arranged on agent structure by the backing structure and is supported, the water
Flat long precise equipment container is internally provided with the in-laid process support platform, and the vacuum corrugated pipe is tightly connected component
Support the in-laid process support platform and be arranged on the vibration-isolating platform, the two ends of the vibration-isolating platform are arranged on the vibration isolation
Above device, the bottom of the isolation mounting is arranged on the isolation mounting and supports, and the middle setting of the vibration-isolating platform has
The high rigidity pedestal.
2. horizontal long precise according to claim 1 equips micro-vibration control system, it is characterised in that：The level surpasses
Long precision assembly container can be Horizontal type vacuum tank, can be provided with vacuum on the tube wall of the Horizontal type vacuum tank
Pump.
3. horizontal long precise according to claim 1 equips micro-vibration control system, it is characterised in that：The level crouches
Formula vacuum tank is GB150-1998 tank.
4. horizontal long precise according to claim 1 equips micro-vibration control system, it is characterised in that：The vacuum ripple
Vacuum sealing connecting elements of the line seal of tube connecting elements for flexible expandable, through the horizontal long precise equipment container
It is inside and outside, and make the horizontal long precise equip container No leakage.
5. according to the horizontal long precise equipment micro-vibration control system described in claim 1 or 4, it is characterised in that：It is described
Vacuum corrugated pipe is tightly connected component horizontally set for three and is spaced apart from each other, longitudinally can be according to the horizontal overlength essence
The longitudinal length of close equipment container is arranged multiple and is spaced apart from each other.
6. horizontal long precise according to claim 1 equips micro-vibration control system, it is characterised in that：The vibration isolation dress
Putting can be using mechanical spring or air spring, and the air spring can be bellows or membrane type, can inside the air spring
To be provided with steel auxiliary chamber, outside can be with additional levels damper.
7. horizontal long precise according to claim 6 equips micro-vibration control system, it is characterised in that：The air bullet
Spring is diaphragm type air spring.
8. according to the horizontal long precise equipment micro-vibration control system described in claim 1 or 6, it is characterised in that：It is described
Isolation mounting longitudinally can be arranged multiple and is spaced apart from each other according to the longitudinal length of the horizontal long precise equipment container.
9. horizontal long precise according to claim 1 equips micro-vibration control system, it is characterised in that：The body junction
Structure is supported and can select reinforced concrete structure post, steel core concrete column or shear wall.
10. horizontal long precise according to claim 1 equips micro-vibration control system, it is characterised in that：The Gao Gang
Property pedestal main composition be steel reinforced concrete structure, steel content is more than 30%.
11. horizontal long precises according to claim 1 equip micro-vibration control system, it is characterised in that：It is described built-in
Support column, support frame or steel or concrete platform can be provided with processing support platform.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410479654.7A CN104267756B (en) | 2014-09-19 | 2014-09-19 | Horizontal overlength precision equipment micro-vibration control system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410479654.7A CN104267756B (en) | 2014-09-19 | 2014-09-19 | Horizontal overlength precision equipment micro-vibration control system |
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| CN104267756A CN104267756A (en) | 2015-01-07 |
| CN104267756B true CN104267756B (en) | 2017-03-22 |
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104699114B (en) * | 2015-02-17 | 2017-07-14 | 中国科学院国家天文台 | A kind of vacuum Experiments of Optics system of band micro-adjusting mechanism out of my cabin |
| CN105334883B (en) * | 2015-10-21 | 2017-10-13 | 中国电子工程设计院 | A kind of Intelligent Feed-forward signal analysis method in vibration control system |
| CN106402261B (en) * | 2016-08-08 | 2018-10-12 | 中国电子工程设计院 | A kind of penetration micro-vibration air spring vibrating isolation system |
| CN108380248B (en) * | 2018-03-02 | 2020-12-01 | 中科院南京天文仪器有限公司 | Temperature separation device for cryogenic vacuum environment simulation system |
| CN109932150B (en) * | 2018-12-28 | 2020-11-10 | 中国机械工业集团有限公司 | Micro-vibration control device of towering suspension detection structure |
| CN110031027B (en) * | 2019-03-22 | 2021-07-13 | 中国科学院微电子研究所 | Detection apparatus with vibration isolation nested structure |
| CN110925356B (en) * | 2019-12-12 | 2021-11-30 | 中国工程物理研究院应用电子学研究所 | Voltage-regulating vibration-damping stability-ensuring optical platform device |
| CN111609079B (en) * | 2020-05-28 | 2022-07-12 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| CN113294487A (en) * | 2021-06-18 | 2021-08-24 | 中国电子工程设计院有限公司 | Integrally controlled vibration isolation system for large-scale precision equipment |
| CN113565920B (en) * | 2021-07-26 | 2022-08-23 | 兰州理工大学 | Vibration isolation system for weakening influence of vibration on precision equipment and determination method |
| CN113981409B (en) * | 2021-12-27 | 2022-03-15 | 中国工程物理研究院应用电子学研究所 | Vacuum optical airtight cabin without negative pressure stress |
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| DE102007052243A1 (en) * | 2007-11-02 | 2009-05-07 | Daimler Ag | Exhaust pipe component |
| CN101581347B (en) * | 2009-06-23 | 2011-01-19 | 上海微电子装备有限公司 | Vibration reduction support device and photoetching machine using same |
| CN101701615B (en) * | 2009-11-20 | 2011-06-15 | 南京航空航天大学 | Bellow-type mixed medium vibration isolating and absorbing unit |
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| US5100096A (en) * | 1987-04-17 | 1992-03-31 | Bridgestone Corporation | Vibration free container for transportation |
| JP2005127460A (en) * | 2003-10-27 | 2005-05-19 | Mitsubishi Heavy Ind Ltd | Base isolation and quake removing floor system |
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