CN104249065B - A kind of cleaning method of silicon material waste gas absorption tower - Google Patents

A kind of cleaning method of silicon material waste gas absorption tower Download PDF

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Publication number
CN104249065B
CN104249065B CN201310260525.4A CN201310260525A CN104249065B CN 104249065 B CN104249065 B CN 104249065B CN 201310260525 A CN201310260525 A CN 201310260525A CN 104249065 B CN104249065 B CN 104249065B
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CN
China
Prior art keywords
waste gas
absorption tower
gas absorption
silicon material
cleaning method
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201310260525.4A
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Chinese (zh)
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CN104249065A (en
Inventor
蔚建勇
崔凤磊
吴红星
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Zhejiang Yuhui Yangguang Energy Resources Co Ltd
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Zhejiang Yuhui Yangguang Energy Resources Co Ltd
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Priority to CN201310260525.4A priority Critical patent/CN104249065B/en
Publication of CN104249065A publication Critical patent/CN104249065A/en
Application granted granted Critical
Publication of CN104249065B publication Critical patent/CN104249065B/en
Expired - Fee Related legal-status Critical Current
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect

Abstract

The invention provides the cleaning method of a kind of silicon material waste gas absorption tower, comprise the following steps: the alkaline absorption solution of emptying waste gas absorption tower, then use water circulation flushing waste gas absorption tower for the first time;Use the waste gas absorption tower after the above-mentioned flushing of salpeter solution wash cycles of 4.5wt%~5.5wt%;Use water second time circulation flushing waste gas absorption tower.Present invention employs the stronger salpeter solution of oxidisability and clean waste gas absorption tower, the ability of the removal of impurity and dirt is gone owing to the oxidisability of nitric acid significantly enhances its dissolving, the filler in waste gas absorption tower is made to clean cleaner, improve the utilization rate of nitric acid, cleaning frequency is greatly prolonged, reduces silicon material waste gas absorption tower exhaust-gas treatment and clean cost.

Description

A kind of cleaning method of silicon material waste gas absorption tower
Technical field
The present invention relates to technical field of solar batteries, particularly relate to the cleaning method of a kind of silicon material waste gas absorption tower.
Background technology
In photovoltaic industry silicon material production process, using virgin polycrystalline silicon or regeneration silicon material as raw material, molten in single crystal growing furnace Monocrystal rod or polycrystalline cast ingot silicon material it is drawn into after change.Its purity requirement of silicon material of pulling monocrystal rod or polycrystalline cast ingot is higher, And silicon material processing, transport, store during surface can pollute, therefore its surface must be carried out clearly before using silicon raw material Wash.
The most general mix acid liquor cleaning silicon material surface impurity using Fluohydric acid. and nitric acid, silicon material table in cleaning process Metal impurities and the oxide of layer produce strong chemical reaction with acid solution, and temperature is up to about 60 DEG C, and the silicon on top layer is also simultaneously Chemical reaction can be produced with acid solution, produce the salt compounds such as prodan.The gas that above-mentioned salt compounds produces along with reaction The gas of body and volatilization enters waste gas tower and carries out alkali liquor absorption process, prodan, sodium silicate and the sulfur produced in absorption process The solid matters such as change sodium can slowly deposit and be attached to filler, nozzle and inner-walls of duct, thus the absorption of strong influence waste gas tower Effect, it is therefore desirable to be periodically carried out waste gas tower processing.
Traditional handicraft is that the technical-grade hydrochloric acid that concentration is 37wt% is diluted to 6wt%, then by the hydrochloric acid after dilution useless In gas tower, circulation is to reach the purpose of the removal of impurity and dirt, but wash result shows, hydrochloric acid cleans the effect of waste gas tower relatively Difference, the cleaning frequency is short, tends to have nitrogen dioxide tobacco simultaneously and blow out in cleaning process, and the feature of environmental protection is poor.
Summary of the invention
Present invention solves the technical problem that the cleaning method being to provide a kind of silicon material waste gas absorption tower, the cleaning of the present invention Method cleaning performance is preferable, and cleaning frequency length and the feature of environmental protection are preferable.
In view of this, the invention provides the cleaning method of a kind of silicon material waste gas absorption tower, comprise the following steps:
The alkaline absorption solution of emptying waste gas absorption tower, then uses water circulation flushing waste gas absorption tower for the first time;
Use the waste gas absorption tower after the above-mentioned flushing of salpeter solution wash cycles of 4.5wt%~5.5wt%;
Use water second time circulation flushing waste gas absorption tower.
Preferably, described first time circulation flushing waste gas absorption tower step particularly as follows:
Using water to rinse waste gas absorption tower 3~5 times, to waste gas absorption tower, the pH of liquid is 7~9.
Preferably, described second time circulation flushing waste gas absorption tower step particularly as follows:
Using water second time to rinse waste gas absorption tower 3~5 times, to waste gas absorption tower, the pH of liquid is 6~7.
Preferably, also include after the step of described first time circulation flushing waste gas absorption tower:
The emptying rate of liquid in waste gas absorption tower after rinsing.
Preferably, the time of described second time circulation flushing waste gas absorption tower is 1~2h.
Compared with prior art, the invention provides the cleaning method of a kind of silicon material waste gas absorption tower, comprise the following steps: First empty the alkaline absorption solution of waste gas absorption tower, and use water circulation flushing waste gas absorption tower for the first time, by waste gas absorption tower In alkaline absorption solution clean up, then use after the above-mentioned flushing of salpeter solution wash cycles of 4.5wt%~5.5wt% is useless Gas absorption tower;Finally use water second time circulation flushing waste gas absorption tower, by clean for the waste-liquid cleaning in waste gas absorption tower.This The bright stronger salpeter solution of oxidisability that have employed cleans waste gas absorption tower, and the oxidisability of nitric acid significantly enhances it and dissolves removal Impurity and the ability of dirt, make the filler in waste gas absorption tower clean cleaner;Due to the dissolving removal effect that nitric acid is good, Improve the utilization rate of nitric acid so that the cleaning frequency is greatly prolonged, reduce silicon material waste gas absorption tower exhaust-gas treatment and clean into This;Simultaneously because nitric acid cleaning performance is complete, it is to avoid chimney risks the risk of tobacco, makes the cleaning process environmental protection of waste gas absorption tower Property is preferable.
Detailed description of the invention
In order to be further appreciated by the present invention, below in conjunction with embodiment, the preferred embodiment of the invention is described, but Should be appreciated that these describe simply as to further illustrate the features and advantages of the present invention rather than to the claims in the present invention Limit.
During pickling silicon material, silicon causes waste gas tower packing and pipe with the chemical reaction of mixed acid and the volatilization of acid mist Road inwall adheres to the material of a large amount of indissolubles, and the attachment of these impurity and dirt reduces the specific surface area of filler, thus have impact on The assimilation effect of waste gas absorption tower.
Thus, the embodiment of the invention discloses the cleaning method of a kind of silicon material waste gas absorption tower, comprise the following steps:
The alkaline absorption solution of emptying waste gas absorption tower, then uses water circulation flushing waste gas absorption tower for the first time;
Use the waste gas absorption tower after the above-mentioned flushing of salpeter solution wash cycles of 4.5wt%~5.5wt%;
Use water second time circulation flushing waste gas absorption tower.
According to the present invention, needed before waste gas absorption tower is carried out first by the alkaline absorption solution in waste gas absorption tower Emptying, and use water circulation flushing waste gas absorption tower until the pH of liquid is 7~9 in waste gas absorption tower.If in waste gas absorption tower Absorbing liquid do not rinse well, then clean during waste gas absorption tower in the later stage, the amount of the nitric acid of interpolation will increase, with in With the alkaline absorption solution in waste gas absorption tower, thus cause the waste of cleanout fluid nitric acid.In order to make the alkalescence in waste gas absorption tower Absorbing liquid cleans up, and preferably, the present invention uses water to rinse waste gas absorption tower 2~3 times, rinses 2~3h, to waste gas In absorption tower, the pH of liquid is 7~9.
After the alkaline absorption solution in waste gas absorption tower is cleaned up, by the emptying rate of liquid in waste gas absorption tower.This Bright preferably interpolation nitric acid in the circulating box of waste gas absorption tower, filler and the indissoluble material fluorine of inwall attachment to waste gas absorption tower Sodium silicate, sodium silicate dissolve with sodium sulfide.In the present invention, nitric acid with the reaction principle of indissoluble material is:
(1) Na2SiF6+2HNO3=2NaNO3+H2SiF6
(2) Na2SiO3+2HNO3=H2SiO3+2NaNO3
(3) Na2S+2HNO3=2NaNO3+H2S。
The cleansing medium of the waste gas absorption tower of the present invention is nitric acid, and described nitric acid is a kind of strong oxidizing property, severe corrosive Mineral acid.Though nitric acid and hydrochloric acid belong to strong acid, soluble in water, but nitric acid not only has the general character of strong acid, also has stronger Oxidisability, and this oxidisability is higher in dilute nitric acid solution, also significantly enhances this just because of this oxidisability molten The dissolving removal ability of liquid.The concentration of described salpeter solution is 4.5wt%~5.5wt%, preferably 5wt%.In order to by waste gas absorption Indissoluble material in tower cleans up, and the present invention uses nitric acid to be carried out waste gas absorption tower circulation, and scavenging period is preferably 2 ~3h.
According to the present invention, after the indissoluble material in waste gas absorption tower uses nitric acid to clean, again with water wash cycles waste gas Absorption tower, discharges waste gas absorption tower with the impurity that will wash down in waste gas absorption tower and dirt.In order to ensure waste gas absorption tower In impurity and dirt clean up completely, the time of described cleaning is preferably 2~3h, until liquid in waste gas absorption tower PH is 6~7.
The invention provides the cleaning method of a kind of silicon material waste gas absorption tower, comprise the following steps: first emptying waste gas is inhaled Receive the alkaline absorption solution of tower, and use water circulation flushing waste gas absorption tower for the first time, by the alkaline absorption solution in waste gas absorption tower Clean up, then use the waste gas absorption tower after the above-mentioned flushing of salpeter solution wash cycles of 4.5wt%~5.5wt%;Finally Use water second time circulation flushing waste gas absorption tower, by clean for the waste-liquid cleaning in waste gas absorption tower.Present invention employs oxidation Property stronger salpeter solution clean waste gas absorption tower, the oxidisability of nitric acid significantly enhances it and dissolves removal ability, makes waste gas Filler in absorption tower cleans cleaner;Due to the dissolving removal effect that nitric acid is good, improve the utilization of nitric acid cleanout fluid Rate so that the cleaning frequency is greatly prolonged, reduces silicon material waste gas absorption tower exhaust-gas treatment and cleans cost;Simultaneously because nitric acid is clear Wash effect complete, it is to avoid chimney risks the risk of tobacco, and the feature of environmental protection making waste gas absorption tower is preferable.Test result indicate that, pass through The waste gas absorption tower cleaning performance that nitric acid cleans preferably and good stability, is emerged without tobacco, winter every cleaning in 30 days once, the summer It cleaned once every 40 days.
In order to be further appreciated by the present invention, below in conjunction with the embodiment cleaning method to the waste gas absorption tower that the present invention provides Being described in detail, protection scope of the present invention is not limited by the following examples.
Embodiment 1
Open waste gas absorption tower atmospheric valve, the absorbing liquid in waste gas absorption tower is emptied, add certainly in discarded absorption tower Water, to liquid level line under circulating box, uses tap water to rinse waste gas absorption tower 3 times, rinses 3h, until water in waste gas absorption tower PH is 7~9;
Flushing water is emptied after washing by waste gas absorption tower, then is 5wt% to the circulating box addition concentration of waste gas absorption tower Dust technology to the lower liquid level line of circulating box, clean waste gas absorption tower 3~4h;
Being emptied by the waste liquid of pickling in waste gas absorption tower, interpolation tap water is to liquid level line under circulating box, and ON cycle pump is clear Wash waste gas absorption tower 1~2h, until the pH of liquid is 6~7 in detection waste gas absorption tower.
After waste gas absorption tower uses nitric acid clean, observing the filler in waste gas absorption tower, the cleaning performance of filler is relatively Good, cleaning process is emerged without tobacco.Test result indicate that, using nitric acid to clean waste gas absorption tower, 30 days winters cleaned once, 40 days summers cleaned once.
Comparative example 1
Open waste gas absorption tower atmospheric valve, the absorbing liquid in waste gas absorption tower is emptied, add certainly in discarded absorption tower Water, to liquid level line under circulating box, uses tap water to rinse waste gas absorption tower 3 times, rinses 3h, until water in waste gas absorption tower PH is 7~9;
Flushing water is emptied after washing by waste gas absorption tower, then is 6wt% to the circulating box addition concentration of waste gas absorption tower Hydrochloric acid to the lower liquid level line of circulating box, clean waste gas absorption tower 3~4h;
Being emptied by the waste liquid of pickling in waste gas absorption tower, interpolation tap water is to liquid level line under circulating box, and ON cycle pump is clear Wash waste gas absorption tower 1~2h, until the pH of liquid is 6~7 in detection waste gas absorption tower.
After waste gas absorption tower uses hydrochloric acid clean, observing the filler in waste gas absorption tower, the cleaning performance of filler is relatively Difference, regular in cleaning process have tobacco to emerge.Test result indicate that, using hydrochloric acid to clean waste gas absorption tower, 15 days winters are clear Washing once, 25 days summers cleaned once.
The explanation of above example is only intended to help to understand method and the core concept thereof of the present invention.It is right to it should be pointed out that, For those skilled in the art, under the premise without departing from the principles of the invention, it is also possible to the present invention is carried out Some improvement and modification, these improve and modify in the protection domain also falling into the claims in the present invention.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses the present invention. Multiple amendment to these embodiments will be apparent from for those skilled in the art, as defined herein General Principle can realize without departing from the spirit or scope of the present invention in other embodiments.Therefore, the present invention It is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein and features of novelty phase one The widest scope caused.

Claims (5)

1. the cleaning method of a silicon material waste gas absorption tower, it is characterised in that comprise the following steps:
The alkaline absorption solution of emptying waste gas absorption tower, then uses water circulation flushing waste gas absorption tower for the first time;
Use the waste gas absorption tower after the above-mentioned flushing of salpeter solution wash cycles of 4.5wt%~5.5wt%;
Use water second time circulation flushing waste gas absorption tower.
Cleaning method the most according to claim 1, it is characterised in that the step of described first time circulation flushing waste gas absorption tower Rapid particularly as follows:
Using water to rinse waste gas absorption tower 3~5 times, to waste gas absorption tower, the pH of liquid is 7~9.
Cleaning method the most according to claim 1, it is characterised in that the step of described second time circulation flushing waste gas absorption tower Rapid particularly as follows:
Using water second time to rinse waste gas absorption tower 3~5 times, to waste gas absorption tower, the pH of liquid is 6~7.
Cleaning method the most according to claim 1, it is characterised in that the step of described first time circulation flushing waste gas absorption tower Also include after rapid:
The emptying rate of liquid in waste gas absorption tower after rinsing.
Cleaning method the most according to claim 1, it is characterised in that described second time circulation flushing waste gas absorption tower time Between be 1~2h.
CN201310260525.4A 2013-06-26 2013-06-26 A kind of cleaning method of silicon material waste gas absorption tower Expired - Fee Related CN104249065B (en)

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CN105013754B (en) * 2015-06-24 2018-09-25 山东浪潮华光光电子股份有限公司 A kind of MOCVD device exhaust treatment system in-site chemical cleaning method
CN105695161A (en) * 2016-03-16 2016-06-22 安徽海德石油化工有限公司 Filling material cleaning agent for waste gas absorption tower of oil refinery

Citations (3)

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Publication number Priority date Publication date Assignee Title
CN85107864A (en) * 1985-10-25 1987-05-06 王澍营 The Pollution abatement of sulfur-containing wasting alkali and utilization
CN1947869A (en) * 2006-05-12 2007-04-18 浙江昱辉阳光能源有限公司 Method for cleaning silicon material
CN101406887A (en) * 2007-10-12 2009-04-15 广州泰成生化科技有限公司 In situ cleaning method

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Publication number Priority date Publication date Assignee Title
JPS59215381A (en) * 1983-05-24 1984-12-05 Agency Of Ind Science & Technol Solar pond in gel
WO2009108286A1 (en) * 2008-02-28 2009-09-03 Corning Incorporated Electrochemical methods of making nanostructures
US20120219797A1 (en) * 2009-08-06 2012-08-30 Mitsui Mining & Smelting Co., Ltd. Semiconductor Powder and Method for Producing the Same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85107864A (en) * 1985-10-25 1987-05-06 王澍营 The Pollution abatement of sulfur-containing wasting alkali and utilization
CN1947869A (en) * 2006-05-12 2007-04-18 浙江昱辉阳光能源有限公司 Method for cleaning silicon material
CN101406887A (en) * 2007-10-12 2009-04-15 广州泰成生化科技有限公司 In situ cleaning method

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