CN104155771B - In a kind of semiconductor laser, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug - Google Patents
In a kind of semiconductor laser, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug Download PDFInfo
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- CN104155771B CN104155771B CN201410421443.8A CN201410421443A CN104155771B CN 104155771 B CN104155771 B CN 104155771B CN 201410421443 A CN201410421443 A CN 201410421443A CN 104155771 B CN104155771 B CN 104155771B
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Abstract
The invention provides micro optical lens in a kind of semiconductor laser and realize on-Line Monitor Device and the technical scheme of using method thereof that precision is debug, program the method uses CCD as hot spot data acquisition element, based on beam splitter principle, during micro optical lens is debug, on-line monitoring near field and far-field spot data simultaneously, by near field CCD hot spot data variation as the best spatial location criterion of micro optical lens rotary shaft, by far field CCD hot spot data variation as the best spatial location criterion of micro optical lens offset axis, the accurate control of semiconductor laser fast and slow axis beam divergence angle and directive property can be realized.This invention has that level of integrated system is high, the accurate feature such as reliable of monitoring criterion, and the low divergence, the semiconductor laser of high directivity that realize based on this invention can be applicable to the various fields such as light-pumped solid state laser, medical treatment and industrial processes.
Description
Technical field
The present invention relates to laser technology application, in a kind of semiconductor laser, micro optical lens realizes on-Line Monitor Device and the using method thereof that precision is debug.
Background technology
In the prior art, there is the advantages such as electro-optical efficiency height, good reliability, miniaturization due to semiconductor laser, all developed rapidly at the aspect such as laser pumping source and direct application and extensively applied, especially as solid state laser and the pumping source of optical fiber laser, promote the fast development of all solid state laser.Semiconductor laser is due to the non-axis symmetry waveguiding structure of itself, cause two axial angles of divergence bigger and asymmetric, the accurate control having a strong impact on its brightness and beam quality, the angle of divergence and directive property is the prerequisite basic condition that semiconductor laser moves towards backend application.
Micro optical lens (FAC lens, SAC lens, BTS lens etc.) has compact structure, lightweight, collimation coupling efficiency advantages of higher, it is that semiconductor laser beam realizes high pointing accuracy, the low first-selected device dissipating precise alignment, but such device causes its assembly precision requirement the highest due to features such as focal length are little, size is little, typically require displacement axially for sub-micrometer scale, axial rotary Asia milliradian magnitude.The monitoring system debug for semiconductor laser micro optical lens precision the most both at home and abroad cannot realize the on-line monitoring to micro optical lens six axle variable quantity simultaneously, need during micro optical lens is debug, toggle optical monitoring system, and cannot the influencing each other of accurate measurements offset axis and rotary shaft, it is impossible to reach semiconductor laser divergence angle and the accurate of directive property controls requirement.
Therefore the most accurately on-line monitoring always semiconductor laser that in semiconductor laser, micro optical lens precision is debug realizes the angle of divergence and a key technology of directive property precision control.
Summary of the invention
The purpose of the present invention, it is aiming at the deficiency existing for prior art, and provide micro optical lens in a kind of semiconductor laser to realize on-Line Monitor Device and the technical scheme of using method thereof that precision is debug, micro optical lens is fixed on six axle fine adjustment framves by the program, use CCD as hot spot data acquisition element, based on beam splitter principle, during micro optical lens precision is debug, on-line monitoring near field and far-field spot data simultaneously, utilize near field CCD hot spot data variation as the best spatial location criterion of micro optical lens rotary shaft, utilize far field CCD hot spot data variation as the best spatial location criterion of micro optical lens offset axis, the accurate control of semiconductor laser fast and slow axis beam divergence angle and directive property can be realized.
This programme is achieved by the following technical measures:
In a kind of semiconductor laser, micro optical lens realizes the on-Line Monitor Device that precision is debug, and includes semiconductor laser, micro optical lens, six axle fine adjustment framves, near field spectroscope, near field cylindrical lens, near field CCD, near field PC end, far field spectroscope, far field cylindrical lens, far field CCD, far field PC end and absorption cell；The laser beam that semiconductor laser goes out is through being fixed on directive near field spectroscope after the micro optical lens on six axle fine adjustment framves；By the laser beam after the dichroic mirror of near field through directive near field CCD after the cylindrical lens of near field；The data collected can be transferred near field PC end by near field CCD；Spectroscopical laser beam directive far field spectroscope through near field；By the laser beam after the dichroic mirror of far field through directive far field CCD after the cylindrical lens of far field；The data collected can be transferred to far field PC end by far field CCD；Spectroscopical laser beam directive absorption cell through far field.
Preferred as this programme: the curvature of near field cylindrical lens is distributed along the slow-axis direction of semiconductor laser；The spectroscopical transflector near field is than for 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °.
Preferred as this programme: the curvature of far field cylindrical lens is distributed along the quick shaft direction of semiconductor laser；The spectroscopical transflector in far field is than for 7:3；The incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °.
In a kind of semiconductor laser, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug: comprise the following steps:
Step one: first setting coordinate system: X-direction is semiconductor laser quick shaft direction as semiconductor laser slow-axis direction, Y-direction, Z-direction is that semiconductor laser beam penetrates direction；Then micro optical lens is fixed on six axle adjusting brackets, by near field cylindrical lens, spectroscopical near field reflection beam collection is entered in the CCD of near field simultaneously；
Step 2: by far field cylindrical lens, spectroscopical for far field reflection beam collection is entered in the CCD of far field, spectroscopical for far field transmitted light beam is imported absorption cell simultaneously；
Step 3: by the hot spot data variation of near field CCD, instructs six axle adjusting brackets that micro optical lens is adjusted to optimum position at three axial rotaries；
Step 4: by the hot spot data variation in the CCD of far field, instructs six axle adjusting brackets that micro optical lens is axially adjusted to optimum position three displacements.
Preferred as this programme: in step one, the curvature of near field cylindrical lens is distributed along the slow-axis direction of semiconductor laser, its focal length is 300 ~ 500mm, and the spectroscopical transflector near field is than for 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °；In X-direction and Y-direction, the spectroscopical reflection near field light beam barycenter is not more than ± 1mm with the geometric center deviation of near field cylindrical lens no more than ± 0.1mm, the optimal imaging range deviation of near field CCD and near field cylindrical lens.
Preferred as this programme: in step 2, the curvature of far field cylindrical lens is distributed along the quick shaft direction of semiconductor laser, its focal length is 300 ~ 500mm, and the spectroscopical transflector in far field is than for 7:3, and the incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °；In X-direction and Y-direction, the spectroscopical reflection in far field light beam barycenter is not more than ± 1mm with the geometric center deviation of far field cylindrical lens no more than ± 0.1mm, the rear focus deviation of far field CCD and far field cylindrical lens.
Preferred as this programme: in step 3, the rotary shaft optimum position of micro optical lens is that in the CCD of near field, around hot spot, shadow-free, leftmost side luminous point and rightmost side luminous point barycenter Y-direction deviation are not more than ± 5 μm, and all luminous point strength variances are less than ± 0.1%.
Preferred as this programme: in step 4, minimize along Y-direction spot size in requirement far field, the offset axis optimum position CCD of micro optical lens.
The beneficial effect of this programme can be learnt according to the narration of such scheme, owing to micro optical lens is fixed on six axle fine adjustment framves by the program, use CCD as hot spot data acquisition element, based on beam splitter principle, during micro optical lens precision is debug, on-line monitoring near field and far-field spot data simultaneously, utilize near field CCD hot spot data variation as the best spatial location criterion of micro optical lens rotary shaft, utilize far field CCD hot spot data variation as the best spatial location criterion of micro optical lens offset axis, the accurate control of semiconductor laser fast and slow axis beam divergence angle and directive property can be realized.
As can be seen here, the present invention is compared with prior art, there is the features such as level of integrated system is high, monitoring criterion precision is reliable, the low divergence, the semiconductor laser of high directivity that realize based on this invention can be applicable to the various fields such as light-pumped solid state laser, medical treatment and industrial processes, having prominent substantive distinguishing features and improve significantly, its beneficial effect implemented also is apparent from.
Accompanying drawing explanation
Fig. 1 is the structural representation of the specific embodiment of the invention.
In figure, 1 is semiconductor laser, and 2 is micro optical lens, and 3 is six axle fine adjustment framves, and 4 is near field spectroscope, 5 is near field cylindrical lens, and 6 is near field CCD, and 7 is near field PC end, and 8 is far field spectroscope, 9 is far field cylindrical lens, and 10 is far field CCD, and 11 is far field PC end, and 12 is absorption cell.
Detailed description of the invention
For the technical characterstic of this programme can be clearly described, below by a detailed description of the invention, and combine its accompanying drawing, this programme is illustrated.
First coordinate system is set: X-direction is as semiconductor laser slow-axis direction, Y-direction is semiconductor laser quick shaft direction, Z-direction is that semiconductor laser beam penetrates direction, micro optical lens is fixed on six axle adjusting brackets, semiconductor laser is driven to go out light with dc source, regulating six axle adjusting brackets, noise spectra of semiconductor lasers carries out preliminary collimation.
The semiconductor laser beam transmission path of preliminary collimation places transflector than the near field spectroscope for 1:1, in the range of the angle of near field spectroscope and incident laser beam constrains in (45 ± 1) °.
Dichroic mirror beam Propagation path, near field is placed near field cylindrical lens, in the range of the angle of near field cylindrical lens and near field dichroic mirror light beam constrains in (0 ± 1) °, the distance of semiconductor laser exiting surface and near field cylindrical lens is greater than the twice of near field cylindrical lens focal length simultaneously, in X and Y-direction, the spectroscopical reflection near field light beam barycenter is not more than ± 1mm with the geometric center deviation of near field cylindrical lens no more than ± 0.1mm, the optimal imaging range deviation of near field CCD and near field cylindrical lens.
Near field spectroscope transmitted light beam transmission path places transflector than the far field spectroscope for 7:3, in the range of the angle of far field spectroscope and near field spectroscope transmitted light beam constrains in (45 ± 1) °.
Dichroic mirror beam Propagation path, far field is placed far field cylindrical lens, in the range of the angle of far field cylindrical lens and far field dichroic mirror light beam constrains in (0 ± 1) °, in X and Y-direction, the geometric center deviation of the spectroscopical reflection in far field light beam barycenter and far field cylindrical lens is no more than ± 0.1mm, the rear focus deviation of far field CCD and far field cylindrical lens is not more than ± 1mm, spectroscopical for far field transmitted light beam is imported absorption cell simultaneously.
Use six axle adjusting brackets that micro optical lens offset axis and rotary shaft are carried out fine adjustment, by near field CCD hot spot data variation as the best spatial location criterion of micro optical lens rotary shaft, by far field CCD hot spot data variation as the best spatial location criterion of micro optical lens offset axis, shadow-free around hot spot in requirement near field, the rotary shaft optimum position CCD of micro optical lens, leftmost side luminous point and rightmost side luminous point barycenter Y-direction deviation are not more than ± 5 μm, and all luminous point strength variances are less than ± 0.1%；Requirement far field, the offset axis optimum position CCD of micro optical lens minimizes along Y-direction spot size.
The present invention is not only limited to above-mentioned detailed description of the invention, and persons skilled in the art are according to present disclosure, and other specific embodiments can be used to implement, and the present invention reached the present invention realizes purpose.Therefore, the design structure of every employing present invention and thinking, if carrying out a little or doing simple conversion, the design of change, both fall within the scope of protection of the invention.
Claims (3)
1. in a semiconductor laser, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug: it is characterized in that comprising the following steps:
Step one: first setting coordinate system: X-direction is semiconductor laser quick shaft direction as semiconductor laser slow-axis direction, Y-direction, Z-direction is that semiconductor laser beam penetrates direction；Then micro optical lens is fixed on six axle adjusting brackets, by near field cylindrical lens, spectroscopical near field reflection beam collection is entered in the CCD of near field simultaneously；The curvature of near field cylindrical lens is distributed along the slow-axis direction of semiconductor laser, and its focal length is 300 ~ 500mm, and the spectroscopical transflector near field ratio is for 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °；In X-direction and Y-direction, the spectroscopical reflection near field light beam barycenter is not more than ± 1mm with the geometric center deviation of near field cylindrical lens no more than ± 0.1mm, the optimal imaging range deviation of near field CCD and near field cylindrical lens；
Step 2: by far field cylindrical lens, spectroscopical for far field reflection beam collection is entered in the CCD of far field, spectroscopical for far field transmitted light beam is imported absorption cell simultaneously；The curvature of far field cylindrical lens is distributed along the quick shaft direction of semiconductor laser, and its focal length is 300 ~ 500mm, and the spectroscopical transflector in far field ratio is for 7:3, and the incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °；In X-direction and Y-direction, the spectroscopical reflection in far field light beam barycenter is not more than ± 1mm with the geometric center deviation of far field cylindrical lens no more than ± 0.1mm, the rear focus deviation of far field CCD and far field cylindrical lens；
Step 3: by the hot spot data variation of near field CCD, instructs six axle adjusting brackets that micro optical lens is adjusted to optimum position at three axial rotaries；
Step 4: by the hot spot data variation in the CCD of far field, instructs six axle adjusting brackets that micro optical lens is axially adjusted to optimum position three displacements.
In a kind of semiconductor laser the most according to claim 1, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug, it is characterized in that: in described step 3, the rotary shaft optimum position of micro optical lens is shadow-free around hot spot in the CCD of near field, leftmost side luminous point and rightmost side luminous point barycenter Y-direction deviation are not more than ± 5 μm, and all luminous point strength variances are less than ± 0.1%.
In a kind of semiconductor laser the most according to claim 1, micro optical lens realizes the using method of the on-Line Monitor Device that precision is debug, it is characterized in that: in described step 4, requirement far field, the offset axis optimum position CCD of micro optical lens minimizes along Y-direction spot size.
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| CN104897372B (en) * | 2015-06-09 | 2018-05-25 | 西安炬光科技股份有限公司 | The non-linear automatic test approach in multi-illuminating unit semiconductor laser near field and device |
| CN104865052A (en) * | 2015-06-09 | 2015-08-26 | 西安炬光科技有限公司 | Method and device for testing spatial light beam contour of multi-luminescence unit semiconductor laser |
| CN105140769B (en) * | 2015-09-28 | 2018-06-26 | 湖北航天技术研究院总体设计所 | A kind of Spectral beam combining light beam overlapping detection adjusting apparatus |
| KR102536386B1 (en) | 2016-12-14 | 2023-05-23 | 에이에스엠엘 네델란즈 비.브이. | Optical Devices and Associated Systems |
| US11454821B2 (en) | 2019-01-28 | 2022-09-27 | Panasonic Intellectual Property Management Co., Ltd. | Systems and methods for alignment of wavelength beam combining resonators |
| CN109802293B (en) * | 2019-03-12 | 2020-07-28 | 西北核技术研究所 | Laser external indicating light safe leading-in system and method |
| CN110161511B (en) * | 2019-04-30 | 2021-11-19 | 探维科技(北京)有限公司 | Laser radar system |
| CN112197940B (en) * | 2020-09-15 | 2022-09-02 | 中国科学院上海光学精密机械研究所 | Single-optical-path precise measurement near-far field reference and collimation device |
| CN112014977A (en) * | 2020-09-21 | 2020-12-01 | 温州泛波激光有限公司 | FAC mirror adjusting device and adjusting method thereof |
| CN113376857B (en) * | 2021-06-08 | 2023-05-05 | 福州市纳飞光电科技有限公司 | High-precision optical path debugging device and method |
| CN116053934B (en) * | 2023-03-28 | 2023-08-22 | 度亘核芯光电技术(苏州)有限公司 | Laser fast and slow axis collimation method and device |
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| CN2099299U (en) * | 1991-08-30 | 1992-03-18 | 华中理工大学 | Non-contact type ultra-precise surface measuring equipment |
| DE4218988A1 (en) * | 1992-06-10 | 1993-12-16 | Zeiss Carl Jena Gmbh | Centring measuring system for adjustment and testing of lenses or optical systems - has test object rotation angle sensor, laser, exchangeable objectives, half-wave plate for intensity regulation, light valve consisting of polarisation beam divider and quarter wave plate, and CCD line camera. |
| CN204101825U (en) * | 2014-08-26 | 2015-01-14 | 中国工程物理研究院应用电子学研究所 | In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug |
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Effective date of registration: 20191230 Address after: 330029 10th floor, science and technology building, Lianchuang photoelectric technology park, 168 Jingdong Avenue, Nanchang high tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee after: Jiangxi ZHONGJIU Laser Technology Co.,Ltd. Address before: 919 box 1013, box 621000, Mianyang City, Sichuan Province Patentee before: INSTITUTE OF APPLIED ELECTRONICS, CAEP |
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Effective date of registration: 20230924 Address after: Room 517, 5th Floor, Building 1, Linrui Youth Apartment, No. 955 Rulehu Street, Linkong Economic Zone, Nanchang City, Jiangxi Province, 330117 Patentee after: ZHONGJIU Optoelectronic Industry Co.,Ltd. Address before: 10th Floor, Science and Technology Building, Lianchuang Optoelectronic Technology Park, No. 168 Jingdong Avenue, Nanchang High tech Industrial Development Zone, Nanchang City, Jiangxi Province, 330029 Patentee before: Jiangxi ZHONGJIU Laser Technology Co.,Ltd. |