CN103078248B - A kind of high-power semiconductor laser beam collimation method of adjustment and device - Google Patents
A kind of high-power semiconductor laser beam collimation method of adjustment and device Download PDFInfo
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- CN103078248B CN103078248B CN201210591411.3A CN201210591411A CN103078248B CN 103078248 B CN103078248 B CN 103078248B CN 201210591411 A CN201210591411 A CN 201210591411A CN 103078248 B CN103078248 B CN 103078248B
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Abstract
The present invention relates to a kind of high-power semiconductor laser beam collimation method of adjustment and device, comprise the following steps: light semiconductor laser, after the light beam that each luminous point sends passes sequentially through fast axle, slow axis collimating mirror, incide body grating (VBG), laser after being incident to body grating (VBG) imports spectrometer and carries out spectrum test, regulate fast axle, slow axis collimating mirror respectively, until the light-metering of spectrometer institute is composed and is the most significantly narrowed, the laser that then semiconductor laser is launched is collimated light beam after speed, slow axis, fixing fast axle, slow axis collimating mirror position.This invention is capable of in compact space adjusting the high-precision collimation of multichannel light beam, and spectrum narrowing signal distinguishing is simple simultaneously, whether easily determines beam path alignment.
Description
Technical field
The invention belongs to field of semiconductor lasers, relate to a kind of high-power semiconductor laser beam collimation and adjust
Adjusting method and device.
Background technology
The fiber coupling system of semiconductor laser develops towards the direction of high-output power, high brightness at present,
And be increasingly widely applied in the field such as industrial, medical, military.For improving semiconductor laser
High power high luminance output, people are usually taken and many luminous points carry out the mode of optical fiber coupling realize,
I.e. by first multiple luminous points being collimated, then the multichannel light beam after collimation is converged through condenser lens
Export in simple optical fiber.During the propagation path of multiple luminous points is collimated, generally adopt
In two ways: mode one, arranging reference point on the expensive photodetectors such as CCD, luminous point passes
Carry out imaging in a segment distance after broadcasting to CCD, regulate fast and slow axis collimating mirror, when luminous point is at CCD
When upper imaging and reference point overlap, many luminous points collimation is complete；Mode two, in direction of beam propagation
Upper movable CCD so that luminous point is imaged on CCD in former and later two positions, regulation fast and slow axis is accurate
Straight mirror, when at front and back's two positions, two imaging points overlap luminous point, many luminous points collimation is complete.
Above two method includes three deficiencies significantly: 1) expensive；This alignment method uses
CCD expensive, common technical grade CCD camera also more than units up to ten thousand, the higher CCD of precision
Camera is the most expensive；2) precision is low；On the CCD that method is a kind of, the selected of reference point is many in supposition
Between luminescence unit relative distance be certain in the case of, but relative between the multi-illuminating unit of reality
Distance there are differences, and can be substantially reduced for this alignment precision；3) operation complexity；Standard in method two
Straight operation must be carried out in one section of fairly long distance, and distance is the longest, and alignment precision is the highest, grasps for this
Make inconvenience.
Summary of the invention
It is an object of the invention to the shortcoming overcoming above-mentioned technology, it is provided that a kind of high-power semiconductor laser light
Bundle collimation method of adjustment and device, to realize realizing the high-precision collimation of multichannel light beam in compact space
Property, spectrum narrowing signal distinguishing is simple simultaneously, whether easily determines beam path alignment.
The present invention is a kind of external cavity feedback formula multiple beam collimation adjustment method based on body grating (VBG) and dress
Put, mainly by detection multiple beam spectrum of laser after body grating (VBG) external cavity feedback exports,
Monitor and regulate fast and slow axis collimating mirror.When multiple beam can collimate between semiconductor laser and VBG
During propagation, relative to the spectrum not collimated under propagation condition, output spectrum can narrow a lot.
The control method of the present invention specifically includes following steps:
Step one: light semiconductor laser, the light beam that each luminous point sends passes sequentially through fast axle, slow
After axle collimating mirror, incide body grating (VBG)；
Step 2: the laser after being incident to body grating (VBG) imports spectrometer and carries out spectrum test；
Step 3: regulate fast axle, slow axis collimating mirror respectively, until the light-metering of spectrometer institute is composed the most obvious
Narrow, then the laser that semiconductor laser is launched is collimated light beam after speed, slow axis；
Step 4: fixing fast axle, slow axis collimating mirror position.
Based on above method, the external cavity feedback formula multiple beam based on body grating (VBG) that the present invention proposes is accurate
Straight adjusting apparatus, this adjusting apparatus includes: installation base plate and the laser socket being arranged on installation base plate
Frame and in order to adjust and to fix fast axis collimation mirror, the regulation instrument of slow axis collimating mirror position, Yi Jiyan respectively
Body grating (VBG) that laser emitting light path sets gradually, light collector, light-conducting system, saturating through body grating
The laser penetrated and collected by light collector imports spectrometer by light-conducting system.
Above-mentioned regulation instrument uses sextuple adjusting bracket to grip fast axle, slow axis collimating mirror.Certainly, it is possible to
To use other conventional installation fixed forms.
Above-mentioned light collector can be lens, set of lenses, integrating sphere etc..
Above-mentioned light-conducting system can be optical fiber, photoconductive tube, fiber waveguide etc..
When adjusting semiconductor laser beam collimation, semiconductor laser is placed on laser instrument mounting,
The fast axle of semiconductor laser, slow axis collimating mirror are clamped on two sextuple adjusting brackets respectively, light half
Conductor laser, light beam is incident to body grating (VBG) by after fast, slow axis collimating mirror, and part light is by body light
Grid (VBG) reflection also feeds back in laser chamber through fast, slow axis collimating mirror, forms light reponse system, thoroughly
The light penetrated after light collector is collected with light-conducting system transmission in spectrometer, spectrometer can test spectral,
Adjust two sextuple adjusting brackets to be used for regulating fast, the position of slow axis collimating mirror, when spectrometer tests out spectrum
When occurring substantially narrowing, then the laser that semiconductor laser is launched is collimated light after speed, slow axis
Bundle, the relative position of fixing fast axle, slow axis collimating mirror and semiconductor laser.
The present invention is capable of in compact space adjusting the high-precision collimation of multichannel light beam, same to time
Compose the signal distinguishing that narrows simple, whether easily determine beam path alignment.The adjusting means of the present invention is easy to adjust,
Simply, alignment precision is high, feasible.
Accompanying drawing explanation
Fig. 1 is high-power semiconductor laser beam steering devices structural representation of the present invention.
Wherein, 1 is installation base plate；2 is laser instrument mounting；3,4 is sextuple adjusting bracket；5 is body grating
(VBG)；6 is light collector；7 is light-conducting system；8 is spectrometer；9 is semiconductor laser；10
For fast axis collimation mirror；11 is slow axis collimating mirror.
Fig. 2 shows the spectrum contrast situation before and after using apparatus of the present invention to collimate multiple beam.
Detailed description of the invention
Below in conjunction with accompanying drawing, invention is further described.
As it is shown in figure 1, the method for adjustment of the present invention a kind of high-power semiconductor laser light beam is as follows
Step one: light semiconductor laser 9, the light beam that semiconductor laser 9 sends passes sequentially through fast axle
After collimating mirror 10, slow axis collimating mirror 11, incide body grating (VBG) 5；
Step 2: the laser after being incident to grating (VBG) 5 imports spectrometer 8 and carries out spectrum test；
Step 3: regulation fast axis collimation mirror 10, slow axis collimating mirror 11 respectively, until 8 light-meterings of spectrometer
Compose and the most significantly narrow, then the laser that semiconductor laser 9 is launched is through fast axis collimation mirror 10, slow
It is collimated light beam after after axle collimating mirror 11 collimation；
Step 4: fixing fast axis collimation mirror 10 and the position of slow axis collimating mirror 11.
High-power semiconductor laser beam steering devices of the present invention includes installation base plate 1 and is arranged on installation
Laser instrument mounting 2 on substrate 1, two sextuple adjusting brackets 3,4, body grating (VBG) 5, at body light
At grid (VBG) 5 emergent light, light collector 6 is set, light-conducting system 7 is set in light collector 6 rear end and uses
In deriving light, spectrometer 8 is connected on light-conducting system 7 for test spectral.
During high-power semiconductor laser beam steering devices of the present invention work, it would be desirable to carry out what collimation adjusted
Semiconductor laser 9 is placed on laser instrument mounting 2, by the fast axis collimation mirror 10 of semiconductor laser 9
It is clamped on sextuple adjusting bracket 3, the slow axis collimating mirror 11 of semiconductor laser 9 is clamped in sextuple regulation
On frame 4, lighting semiconductor laser, light beam is incident to body grating (VBG) by after fast, slow axis collimating mirror
5, part light by body grating (VBG) 5 reflection and feeds back to semiconductor laser 9 through fast, slow axis collimating mirror
In chamber, formed light reponse system, the light of transmission through light collector 6 collect after through light-conducting system 7 transmit to
In spectrometer 8, spectrometer 8 can test spectral, the sextuple adjusting bracket 3,4 of regulation is used for regulating fast axis collimation
10 mirrors and the position of slow axis collimating mirror 11, when spectrometer 8 test out spectrum occur substantially narrowing time, then half
The laser that conductor laser 9 is launched is collimated light beam after fast axis collimation mirror 10, slow axis collimating mirror 11,
The relative position of fixing fast axis collimation mirror 10, slow axis collimating mirror 11 and semiconductor laser 9.
It is emission wavelength 808nm's that the present embodiment uses the method and device of the present invention to adjust alignment laser
Single bar bar semiconductor laser.
Fig. 2 provides the spectrum before and after the single bar bar semiconductor laser collimation adjusting this emission wavelength 808nm
Contrast situation, from the figure, it can be seen that spectrum narrows significantly, it is inferred that many from Physical Mechanism
Light path light beam is the most entirely collimated and defines external cavity feedback vibration.Visible, this adjusting apparatus can facilitate,
Realize multiple beam collimation accurately.
Claims (5)
1. a high-power semiconductor laser beam collimation method of adjustment, comprises the following steps:
1) lighting semiconductor laser, the light beam that each luminous point sends passes sequentially through fast axle, slow axis standard
After straight mirror, incide body grating (VBG)；
2) laser after being incident to body grating (VBG) imports spectrometer and carries out spectrum test；
3) fast axle, slow axis collimating mirror are regulated respectively, until the light-metering of spectrometer institute is composed and is the most significantly narrowed,
The laser that then semiconductor laser is launched is collimated light beam after speed, slow axis；
4) fixing fast axle, slow axis collimating mirror position.
2. external cavity feedback formula multiple beam based on body grating (VBG) collimation adjusting apparatus, it is characterised in that:
The laser instrument mounting that including installation base plate and is arranged on installation base plate and in order to adjust respectively and fixing fast
Axle collimating mirror, the regulation instrument of slow axis collimating mirror position and the body set gradually along laser emitting light path
Grating (VBG), light collector, light-conducting system, through body grating transmission the laser collected by light collector
Spectrometer is imported by light-conducting system.
External cavity feedback formula multiple beam the most according to claim 2 collimation adjusting apparatus, it is characterised in that:
Described regulation instrument uses sextuple adjusting bracket to grip fast axle, slow axis collimating mirror.
External cavity feedback formula multiple beam the most according to claim 2 collimation adjusting apparatus, it is characterised in that:
Described light collector is lens, set of lenses or integrating sphere.
External cavity feedback formula multiple beam the most according to claim 2 collimation adjusting apparatus, it is characterised in that:
Described light-conducting system uses optical fiber, photoconductive tube or fiber waveguide.
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| CN201210591411.3A CN103078248B (en) | 2012-12-28 | 2012-12-28 | A kind of high-power semiconductor laser beam collimation method of adjustment and device |
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| CN103078248B true CN103078248B (en) | 2016-08-31 |
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| CN104701733A (en) * | 2014-07-02 | 2015-06-10 | 长春理工大学 | Wide-strip-shaped semiconductor laser cavity mode selecting method |
| CN104701732A (en) * | 2014-07-02 | 2015-06-10 | 长春理工大学 | External-cavity wide-strip semiconductor laser cavity mode selection method |
| CN104374414A (en) * | 2014-12-09 | 2015-02-25 | 国家电网公司 | Fiber Bragg grating demodulating system based on volume holographic grating |
| CN107180560B (en) * | 2017-07-12 | 2024-02-02 | 北京中科冠达科技有限公司 | Car stopping prompt device and car stopping prompt system |
| CN108152909A (en) * | 2017-12-25 | 2018-06-12 | 北京凯普林光电科技股份有限公司 | A kind of device and method of grating in adjusting capsulation structure for semiconductor laser |
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| CN203071396U (en) * | 2012-12-28 | 2013-07-17 | 西安炬光科技有限公司 | High-power semiconductor laser beam collimation and adjustment device |
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| US7298771B2 (en) * | 2003-07-03 | 2007-11-20 | Pd-Ld, Inc. | Use of volume Bragg gratings for the conditioning of laser emission characteristics |
| US20070268572A1 (en) * | 2006-05-20 | 2007-11-22 | Newport Corporation | Multiple emitter coupling devices and methods with beam transform system |
| CN102183359B (en) * | 2011-02-23 | 2012-07-04 | 浙江大学 | Method and device for detecting collimation of light beams |
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| CN203071396U (en) * | 2012-12-28 | 2013-07-17 | 西安炬光科技有限公司 | High-power semiconductor laser beam collimation and adjustment device |
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Address after: 710077 high power semiconductor laser Industrial Park, Shaanxi, Xi'an, Shaanxi Province, No. 86, No. 56 Patentee after: FOCUSLIGHT TECHNOLOGIES INC. Address before: 710119 high tech Zone, Shaanxi, Xi'an new industrial park information Avenue, building 17, building three, floor 10 Patentee before: Xi'an Focuslight Technology Co., Ltd. |