CN104142225A - High current electron beam small-section optical fiber YAG probe detection device - Google Patents
High current electron beam small-section optical fiber YAG probe detection device Download PDFInfo
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- CN104142225A CN104142225A CN201410383766.2A CN201410383766A CN104142225A CN 104142225 A CN104142225 A CN 104142225A CN 201410383766 A CN201410383766 A CN 201410383766A CN 104142225 A CN104142225 A CN 104142225A
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Abstract
The invention discloses a high current electron beam small-section optical fiber YAG probe detection device. The high current electron beam small-section optical fiber YAG probe detection device comprises a high vacuum cavity, an optical fiber YAG feeler pin, a flexible optical cable, an image output detection device and a probe horizontal motion positioning device. The cavity is transversely placed, the front end of the cavity is used for being connected with a detected electron beam drift tube, and the rear end of the cavity is used for containing the probe horizontal motion positioning device. The probe horizontal motion positioning device is inserted into the high vacuum cavity from the rear end of the high vacuum cavity and is fixedly connected with the feeler pin, and then the front end of the feeler pin can be right opposite to the detected electron beam drift tube and is axially positioned and moves along the high vacuum cavity. The feeler pin is connected to the image output detection device located outside the high vacuum cavity through the flexible optical cable. The image output detection device is used for acquiring current intensity distribution of electron beams, moving in the detected electron beam drift tube, on the front end face of the optical fiber YAG feeler pin, and the current intensity distribution is converted into optical images. According to the device, electron beams with the diameter of an electron transmission channel ranging from below 10 mm to about 1 mm can be measured.
Description
Technical field
The present invention relates to microwave device or high current electron beam analyzer and survey the technical field of electron gun and electron beam transmitting procedure electro-optical performance, relate in particular to the diameter of ultrahigh frequency microwave vacuum device electron beam drift tube in the Detection Techniques of the thin channel electron beam below several millimeters.
Background technology
Fig. 1 is the structural representation of microwave electron tube high current electron beam analyzer traditional miniature electric note section gauge system used.This system utilizes the direct impact fluorescence screen of high current electron beam or YAG screen to detect.Fig. 2 is the schematic diagram of the video screen detecting head machinery of this measuring system.
As depicted in figs. 1 and 2, this measuring system is vertically placed, and it is upper that high current electron beam is launched direct impact fluorescence screen straight up, and video screen mechanism comprises video screen and the pull bar being fixedly connected with video screen.Operator operates this pull bar, thereby video screen moves up and down.
Now, along with microwave frequency requires more and more higher, in the diameter of electron beam and device, the passage of electron beam drift tube is also more and more thinner,, the drift tube that the device that this electron-like note cross section is surveyed and various modified thereof are all difficult to logarithm mm dia is surveyed.
Secondly, because electron beam drift tube in device and electron beam diameter are very approaching, be all a millimeter magnitude, the reflection of the light distributing on probe place video screen on the tube wall that drifts about also affected the luminous intensity measurement of video screen electron beam cross section light image.More trouble is that the light image that video screen is popped one's head in transmits out from vacuum cavity, required optical channel is straight line in a vacuum, therefore the synchronous moving mechanism of required vacuum cavity and checkout equipment is just long and complicated, and in measuring process, cross pattern distortion that the optical instrument of long-focus brings has just affected and measure the electron beam spatial resolution on video screen simultaneously greatly.
Summary of the invention
(1) technical matters that will solve
The present invention aims to provide a kind of sniffer of measuring the spatial resolution of electron beam for surveying small-bore drift tube high current electron beam electro-optical performance raising.
(2) technical scheme
For solving the problems of the technologies described above, the present invention proposes the small cross section of a kind of high current electron beam optical fiber YAG probe detection device, for surveying the electro-optical performance of tested electron beam drift tube ejected electron note, comprise high vacuum cavity, optical fiber YAG probe, flexible optical cable, image output detecting apparatus and probe tangential movement locating device; Wherein, described high vacuum cavity is laterally settled, and comprises relative rear and front end, and front end is used for connecting described tested electron beam drift tube, and rear end is used for settling probe tangential movement locating device; Described probe tangential movement locating device inserts in described high vacuum cavity from the rear end of described high vacuum cavity, be fixedly connected with described optical fiber YAG probe, make the front end of described optical fiber YAG probe can be over against described tested electron beam drift tube and along the axial location of described high vacuum cavity with move; Described optical fiber YAG probe is connected to the image output detecting apparatus that is positioned at described high vacuum cavity outside by described flexible optical cable; Described image output detecting apparatus is for gathering the beam current intensity distributions of being advanced by described tested electron beam drift tube on the front end end face of optical fiber YAG probe, and is converted into optical imagery.
According to the specific embodiment of the present invention, described high vacuum cavity comprises front port, view window, pull rod seal device and chamber body, and wherein, described chamber body transverse horizontal is placed, and comprises relative rear and front end; Described front port is positioned at the front end of described chamber body, for connecting described measured device drift tube; Described view window is positioned in the middle of the rear side of described chamber body, as the window of output electron beam optical imagery; Described pull rod seal device be positioned at described chamber body rear end directly over, for the tangential movement locating device of popping one's head in described in vacuum seal.
According to the specific embodiment of the present invention, described optical fiber YAG probe and flexible optical cable comprise fibre bundle, the optical fiber that described fibre bundle does not surpass 5% φ 0.01mm or thinner uniform cross-section by every error is arranged lock ring and is become φ 5mm or thinner bundle, every optical fiber, from optical fiber YAG probe to flexible optical cable, again to signal output part, is all there is no joint and arrange in each cross section of whole fibre bundle by same arrangement sequence number.
According to the specific embodiment of the present invention, described optical fiber YAG probe comprises optical fiber YAG probe, probe tailstock and the probe body of rod, and wherein, described optical fiber YAG probe is positioned at the front end of the described probe body of rod; Described probe tailstock is fastened on the described probe body of rod in the horizontal direction the leading section of described probe tangential movement locating device and makes YAG probe without any rotation.
According to the specific embodiment of the present invention, described probe tailstock comprises probe tail end fibre bundle set collar and fixed connecting rod, described probe tail end fibre bundle set collar is fixed in the rear end of the probe body of rod, and fixed connecting rod is fixedly connected on the periphery of probe tail end optical fiber set collar.
According to the specific embodiment of the present invention, the described probe body of rod comprises fibre bundle, is coated in vacuum insulation sealing material coating and the flexible rind outside coating in fibre bundle outside, and described flexible rind is wound around by elastic vacuum material.
According to the specific embodiment of the present invention, described optical fiber YAG probe comprises the YAG thin layer of the front end face that is plated in fibre bundle, at the outside surface of thin layer, is provided with a molybdenum thin layer.
According to the specific embodiment of the present invention, the periphery of the front end of popping one's head at optical fiber YAG is provided with probe front fibre bundle set collar and probe protection ring, and described probe protection ring is partly stacked and placed on the outer end of probe front fibre bundle set collar.
According to the specific embodiment of the present invention, described image output detecting apparatus be included in the position seals of described view window transparent optical element, be positioned at the CCD camera of chamber body outside and viewed straight-on window and the detecting instrument supporting platform that is fixed on chamber body lower support CCD camera.
According to the specific embodiment of the present invention, described flexible optical cable comprises vacuum material external coating and the fastening fibre bundle end snap ring of fibre bundle end that the fibre bundle that extended out by described optical fiber YAG probe, fibre bundle outside apply, and described fibre bundle end snap ring is adhesively fixed on the middle position of transparent optical element medial surface of view window of the inner side of chamber body with vacuum glue.
According to the specific embodiment of the present invention, described probe tangential movement locating device is positioned at the central upper of the rear end of described chamber body, comprise probe tangential movement linear bearing, the motion pull rod seal device with lengthy bellows, servo electrical machinery system, probe movement positioning tie bar and optical table, wherein, described probe movement pull bar stretches into the inside of chamber body by the cooperation of described motion pull rod seal device and described pull rod seal device; Described servo electrical machinery system drives the tangential movement of described probe movement positioning tie bar on described optical table.
(3) beneficial effect
One, the present invention can measure electron propagation ducts diameter be 10mm with down to 1mm left and right the electron gun of ultrahigh frequency microwave electron tube and transmitting procedure in the equipment of electro-optical performance of electron beam, to the development of research and design Novel ultra-high frequency microwave electron tube, can play very vital role.
Its two, the present invention can be used as parts provides the horizontal high current electron beam analyzer of large-sized multifunction to use as crucial pencil electron beam detector, has greatly improved the application of high current electron beam analyzer.
Its three, the present invention has very high spatial resolution, can reach 0.03mm.
Accompanying drawing explanation
Fig. 1 is the structural representation of traditional small-sized high current electron beam section gauge system;
Fig. 2 is the schematic diagram of the video screen mechanism of the high current electron beam section gauge system shown in Fig. 1;
Fig. 3 is the present invention for the schematic diagram of an embodiment of the sniffer of the small cross section of high current electron beam optical fiber YAG probe, and this figure is front view;
Fig. 4 is the vertical view of Fig. 3;
Fig. 5 is the structural representation of optical fiber YAG probe of the present invention, flexible optical cable;
Fig. 6 is the structural representation of optical fiber YAG probe of the present invention.
Description of reference numerals:
400. high vacuum cavitys, 401. front ports, 402. view windows, 403. pull rod seal device, 404. chamber body, 405. gas exhaust ducts, 406. high-vacuum exhaust systems, 407. mountings.
100. optical fiber YAG probes, 110. optical fiber YAG probes, 111.YAG thin layer; 112. molybdenum thin layers; 113. probe front fibre bundle set collars, 114. probe protection rings, 120. probe tailstocks; 121. probe tail end fibre bundle set collars; 122. fixed connecting rods, the 130. probe bodies of rod, 101. fibre bundles; 102. coatings, 131. flexible rinds.
200. flexible optical cables, 201. fibre bundles, 202. coatings, 203. fibre bundle end snap rings, 300. image output detecting apparatus, 301. transparent optical elements, 302.CCD camera, 303 detecting instrument supporting platforms.
500. probe tangential movement locating devices, 501. probe tangential movement linear bearings, 502. motion pull rod seal device, 503. servo electrical machinery systems, 504. probe movement positioning tie bars, 505. optical tables.
Embodiment
In order to solve the problems of the technologies described above, the invention provides the sniffer of the small cross section of high current electron beam fibre-optical probe, this device comprises high vacuum cavity 400, optical fiber YAG probe 100, flexible optical cable 200, image output detecting apparatus 300, probe tangential movement and locating device 500.
Described high vacuum cavity 400 is laterally settled, and comprises relative rear and front end, and front end is used for connecting described tested electron beam drift tube, and rear end is used for settling probe tangential movement and locating device 500; Described probe tangential movement locating device 500 inserts in described high vacuum cavity 400 from the rear end of described high vacuum cavity 400, be fixedly connected with described optical fiber YAG probe 100, make the front end of described optical fiber YAG probe 100 can be over against described tested electron beam drift tube and along the axial location of described high vacuum cavity 400 with move; Described optical fiber YAG probe 100 is connected to the image output detecting apparatus 300 that is positioned at described high vacuum cavity 400 outsides by described flexible optical cable 200; The optical imagery that described image output detecting apparatus 300 transforms for the beam current intensity distributions of being advanced by described tested electron beam drift tube gathering on the front end end face of optical fiber YAG probe 100.
Fig. 3 is the schematic diagram of an embodiment of the small cross section of high current electron beam of the present invention optical fiber YAG probe detection device, and this figure is front view, and Fig. 4 is the vertical view of Fig. 3.As shown in Figure 3,4, this sniffer comprises a high vacuum cavity 400, optical fiber YAG probe 100, flexible optical cable 200, image output detecting apparatus 300, probe tangential movement and locating device 500.
Wherein, described high vacuum cavity 400 comprises front port 401, view window 402, pull rod seal device 403, chamber body 404, also can further comprise mounting 405, gas exhaust duct 406 and high-vacuum exhaust system 407.Chamber body 404 transverse horizontal are placed, comprise relative rear and front end, its front end has interface 401, for connecting the electron beam drift tube of measured device, is convenient to make optical fiber YAG probe 100 from chamber body 404, to put in the electron beam cross section electric current distribution that this drift tube detects different cross section.In the middle of the rear side of chamber body 404, there is a view window 402, as the window of output and detected electrons note optical imagery.Directly over the rear end of chamber body 404, being provided with a pull rod seal device 403, for example, is vacuum seal flange dish.High vacuum cavity 400 also comprises high-vacuum exhaust system 407, high-vacuum exhaust system 407 is the side access high vacuum cavity 400 from the front end of chamber body 404 by gas exhaust duct 406, this exhaust system 407 is comprised of mechanical pump, molecular pump, ionic pump, high vacuum valve and high vacuum pipe etc., can when the duty of single unit system, make the vacuum tightness of described chamber body 404 reach and be better than 1 * 10
-6pa, high vacuum cavity 400 is also furnished with the mounting 405 for fixed cavity main body 404 in addition, and mounting 405 can guarantee the present invention's not vibration and displacement of cavity 400 when exhaust and work.
Described optical fiber YAG probe 100, flexible optical cable 200, image output detecting apparatus 300 are cores of the present invention.Described optical fiber YAG probe 100 and flexible optical cable 200 mainly comprise the fibre bundle 101,201 of high quality optical performance, in embodiment, the optical fiber that fibre bundle does not surpass 5% φ 0.01mm or thinner uniform cross-section by every error becomes φ 5mm or thinner bundle by certain cross sectional arrangements lock ring, and area of beam determines according to the aperture of measured device electron drift pipe.Every optical fiber, from optical fiber YAG probe 100 to flexible optical cable 200, again to signal output part, is all there is no joint and arrange in each cross section of whole fibre bundle by same arrangement sequence number.Between optical fiber, strictly there is no the mutual interference of light signal phase, and fibre bundle skin scribbles the protection of vacuum insulation thin layer.
Fig. 5 is the schematic diagram of optical fiber YAG probe 100.As shown in the figure, optical fiber YAG probe 100 comprises optical fiber YAG probe 110, probe tailstock 120 and the probe body of rod 130.Optical fiber YAG probe 100 is placed in the central authorities of chamber body 404, and YAG probe 110 changes electron beam cross section strength of current distributed image into light intensity distributed image.Described optical fiber YAG probe 110 is positioned at the front end of the described probe body of rod 130; Probe tailstock 120 comprises probe tail end fibre bundle set collar 121, fixed connecting rod 122, and probe tail end fibre bundle set collar 121 is fixed in the rear end of the probe body of rod 130, and fixed connecting rod 122 is fixedly connected on the periphery of probe tail end optical fiber set collar 121.Probe tailstock 120 is fastened on the probe body of rod 130 in the horizontal direction the leading section of probe tangential movement locating device 500 and makes YAG probe 100 without any rotation.Along with accurate location, the movement of probe tangential movement locating device 500, YAG probe 100 can stretch in the electron beam drift tube of measured device and come and go accurately location, motion.
The described probe body of rod 130 comprises fibre bundle 101, be coated in the vacuum insulation sealing material coating 102 in fibre bundle 101 outsides and at the flexible rind 131 in coating 102 outsides.Flexible rind 131 can be by having flexible spring steel band strip or other elastic vacuum material is wound around, for supporting collimating status the energy slight elasticity of the probe body of rod 130 crooked, be convenient to optical fiber YAG probe 100 at the measured device electron beam drift inner telescoping tube approaching with probe 100 diameters.A critical function of flexible rind is the beam current of leading away bombardment on optical fiber YAG probe 110, prevents that on YAG thin layer, electronics is heaped, the fluoroscopic bombardment of rejection electron pair.
Fig. 6 is the structural representation of optical fiber YAG probe 110.As shown in Figure 6; optical fiber YAG probe 110 comprises the YAG thin layer 111 that is plated in the smooth smooth front end face of fibre bundle 101; outside surface at thin layer 111 is provided with a molybdenum thin layer 112; in the periphery of probe 110 front end, be provided with probe front fibre bundle set collar 113 and probe protection ring 114, probe protection ring 114 parts are stacked and placed on the outer end of probe front fibre bundle set collar 113.The effect of probe 110 is for surveying the cross section distribution of current of measured device electron beam, and is translated into optical imagery.
As shown in Figure 4, image output detecting apparatus 300, be included in the position seals of view window 402 transparent optical element 301, be positioned at the CCD camera 302 of chamber body 404 outsides and viewed straight-on window 402, and the detecting instrument supporting platform 303 that is fixed on chamber body 404 lower support CCD cameras 302.CCD camera 302 for detection of and record the optical imagery of fibre bundle 201 ends.Transparent optical element 301 is for example plane optical glass.
As shown in Figure 3, Figure 4, flexible optical cable 200 comprises that optical fiber YAG probe 100 extends out, and the fibre bundle 201 being extended by the optical fiber tow 101 of same bundle cable is, vacuum material external coating 202 and the fastening fibre bundle end snap ring 203 of fibre bundle end that fibre bundle outside applies.201 be exactly wherein the same prolongation bundle of fibre bundle 101 as previously mentioned, external coating 202 is exactly 102 same external coatings, but the optical cable of this prolongation is more soft, can coil and be stacked in chamber body 404 bottoms, the optical imagery that optical fiber YAG probe can be changed is delivered on the smooth end face of fibre bundle end undistortedly.Fibre bundle end snap ring 203 use vacuum glue are adhesively fixed on the middle position of transparent optical element 301 medial surfaces of chamber body 404 lateral blisters 402.Whole piece optical cable is from probe 100, and its every optical fiber is at fibre bundle middle section spread geometry, sequence of positions strict conformance all, and every rhizoid is even thickness and non junction all.The optical imagery of 110 conversions of making to pop one's head in is accurately delivered in fibre bundle distal end faces.
Described image output detecting apparatus 300 by transparent optical element 301, optical imagery detecting instrument CCD3 02, support the detecting instrument platform 303 of CCD 302 to form.The direct vacuum seal of transparent optical element 301 is on the ring flange of view window 402, and CCD 302 sees through this glass 301 and directly gathers the optical imagery that the beam current intensity distributions in fibre bundle distal end faces transforms.
As shown in Figure 3, Figure 4, probe tangential movement locating device 500 is positioned at the central upper of the rear end of chamber body 404, comprises probe tangential movement linear bearing 501, the motion pull rod seal device 502 with lengthy bellows, servo electrical machinery system 503, probe movement positioning tie bar 504 and optical table 505.Probe movement pull bar 504 stretches into the inside of chamber body 404 by the cooperation of motion pull rod seal device 502 and pull rod seal device 403.Servo electrical machinery system 503 drives 504 tangential movements of probe movement positioning tie bar on optical table 505, thereby drives optical fiber YAG probe 100 accurate motion positions in the electron drift pipe of surveyed device.Wherein optical table 505, linear bearing 501 have guaranteed the motion pull bar 504 transverse horizontal depth of parallelism at the volley.Servo electrical machinery system 503 has guaranteed motion pull bar precise displacement and location at the volley, and precision is in 0.05mm.In the end of motion pull bar 504, by fixed connecting rod 122, probe tail end optical fiber set collar 121 that can firm stationary probe tailstock also guarantees to drive probe 100 not rotate, the synchronous and accurate motion positions of pull bar 504.
Principle of work of the present invention
The present invention sends the characteristic of 550nm wavelength yellow-green light while utilizing YAG crystal to be excited, and modern optical-fibre communications can be made diameter 0.01mm following high quality optical performance optical fiber and do technological achievement and the principle of work of the optical fiber cable of the compact arranged large volume transport optical information of poling.
1, utilize YAG crystal to be excited to send the characteristic of 550nm wavelength green-yellow light: in the specific embodiment of the invention, to use two kinds of forms.
The first is at electron beam modulation voltage when 40kV is following, and we adopt electron beam directly to bombard the form of YAG crystallo-luminescence.YAG thin crystal layer thickness 0.1～0.5mm plates about 0.1～1 about μ m of molybdenum thin layer incident electron note energy is reduced to below 10keV before YAG thin layer, then bombards YAG crystal and inspire green-yellow light.In this state beam current Density Distribution to be excited the intensity distributions of YAG crystallo-luminescence and be directly proportional, use light intensity distributions image and carry out detected electrons note current density distributing figure picture.The ruddiness that in the present embodiment, molybdenum thin layer can also block electrons rifle heated cathode sends sees through the interference that anode hole forms.Also will select different-thickness molybdenum thin layer according to different electron beam modulation voltages in the present embodiment, only molybdenum layer or light image are too secretly not easy to measure thoroughly to prevent electron beam.
It two is if electron beam modulation voltage during higher than 40kV, will adopt X-ray bremsstrahlung mode.Select thicker molybdenum layer, make electron beam bombardment molybdenum sheet produce X-ray and by X-ray, excite YAG crystal to send the green-yellow light image of 550nm wavelength again, same, can use light intensity distributions image and carry out detected electrons note current density distributing figure picture.It is to be noted that the YAG light image spatial resolution that X-ray bremsstrahlung produces will directly bombard the spatial resolution that YAG crystallo-luminescence produces lower than electron beam, and relevant with molybdenum layer thickness.In this mode, electronics cannot pass molybdenum layer, and molybdenum layer thickness is generally several microns to hundreds of microns.It should be noted that the too thick meeting of molybdenum layer causes X-ray to be absorbed and cannot on YAG crystal, form green-yellow light image by molybdenum layer.Emphasize to be pointed out that, in order to prevent that the electron beam of excess energy from damaging YAG crystal and molybdenum layer, the electron beam modulation voltage that we use is in the present embodiment the narrow pulsewidth mode of monopulse, and pulsewidth is from hundreds of nanoseconds to several microseconds.
2, utilize the optical fiber technology in modern communication.At present optical fiber can accomplish that diameter is less than 0.01mm, and between optical fiber, information does not interfere with each other, more conveniently light can be in optical fiber curve transmission.Can make in the present embodiment optical fiber YAG probe diameter below several millimeters, and obtain high spatial resolution, that high vacuum cavity can also be done is short and small.
Compared with prior art, the invention has the beneficial effects as follows:
One, can make and use the size of the drift tube bore that approaches high-frequency microwave electron tube high current electron beam pencil and go deep into the optical fiber YAG probe in electron beam passage, realization is less than 10mm so that the device electron beam drift tube electron gun of 1mm left and right and the electro-optical performance in Electronic beam focusing transmitting procedure to diameter and surveys, and this is that existing equipment cannot be realized.
Its two, can obtain electron beam Section Space resolution and reach 0.03mm with interior high resolving power level, meet the object of Accurate Analysis research.
They are three years old, realizing light path curve propagates, can reduce the size of chamber body, save and detect auxiliary cost and space, also reduce the Refractive focusing process of long light path, optical instrument and aberration and the distortion of generation in detection record image transmitting process in the past simultaneously.
Its four, the present invention can be used as parts will optical fiber probe 100, use in flexible optical cable 200, the horizontal high current electron beam analyser of image output detecting apparatus 300 access.
Above-described specific embodiment, object of the present invention, technical scheme and beneficial effect are further described, be understood that, the foregoing is only specific embodiments of the invention, be not limited to the present invention, for example the YAG crystal of optical fiber YAG probe can substitute with other high resolving power fluorescent material; And for example for reducing the added metal molybdenum thin layer of electronics bombarding energy, can substitute with other metal stainless steel, oxygen-free copper etc.; For another example electron beam passage is not deformed sections optical fiber YAG probe circular and that make etc.Within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (11)
1. the small cross section of a high current electron beam optical fiber YAG probe detection device, for surveying the electro-optical performance of the electron beam that tested electron beam drift tube advances, it is characterized in that, comprise high vacuum cavity (400), optical fiber YAG probe (100), flexible optical cable (200), image output detecting apparatus (300) and probe tangential movement locating device (500); Wherein,
Described high vacuum cavity (400) is laterally settled, and comprises relative rear and front end, and front end is used for connecting described tested electron beam drift tube, and rear end is used for settling described probe tangential movement locating device (500):
Described probe tangential movement locating device (500) inserts in described high vacuum cavity (400) from the rear end of described high vacuum cavity (400), be fixedly connected with described optical fiber YAG probe (100), make the front end of described optical fiber YAG probe (100) can be over against described tested electron beam drift tube and along axial location and the motion of described high vacuum cavity (400);
Described optical fiber YAG probe (100) is connected to and is positioned at the outside image output detecting apparatus (300) of described high vacuum cavity (400) by described flexible optical cable (200);
Described image output detecting apparatus (300) is for gathering the beam current intensity distributions of being advanced by described tested electron beam drift tube on the front end end face of optical fiber YAG probe (100), and is converted into optical imagery.
2. the small cross section of high current electron beam as claimed in claim 1 optical fiber YAG probe detection device, it is characterized in that, described high vacuum cavity (400) comprises front port (401), view window (402), pull rod seal device (403) and chamber body (404), wherein
Described chamber body (404) transverse horizontal is placed, and comprises relative rear and front end;
Described front port (401) is positioned at the front end of described chamber body (404), for connecting described measured device drift tube;
Described view window (402) is positioned in the middle of the rear side of described chamber body (404), as the window of output electron beam optical imagery;
Described pull rod seal device (403) be positioned at described chamber body (404) rear end directly over, for the tangential movement locating device (500) of popping one's head in described in vacuum seal.
3. the small cross section of high current electron beam as claimed in claim 1 optical fiber YAG probe detection device, it is characterized in that, described optical fiber YAG probe (100) and flexible optical cable (200) comprise fibre bundle, the optical fiber that described fibre bundle does not surpass 5% φ 0.01mm or thinner uniform cross-section by every error is arranged lock ring and is become φ 5mm or thinner bundle, every optical fiber, from optical fiber YAG probe (100) to flexible optical cable (200), again to signal output part, is all there is no joint and arrange in each cross section of whole fibre bundle by same arrangement sequence number.
4. the small cross section of high current electron beam as claimed in claim 1 optical fiber YAG probe detection device, it is characterized in that, described optical fiber YAG probe (100) comprises optical fiber YAG probe (110), probe tailstock (120) and the probe body of rod (130), wherein
Described optical fiber YAG probe (110) is positioned at the front end of the described probe body of rod (130);
Described probe tailstock (120) is fastened on the described probe body of rod (130) leading section of described probe tangential movement locating device (500) in the horizontal direction.
5. the small cross section of high current electron beam as claimed in claim 4 optical fiber YAG probe detection device, it is characterized in that, described probe tailstock (120) comprises probe tail end fibre bundle set collar (121) and fixed connecting rod (122), described probe tail end fibre bundle set collar (121) is fixed in the rear end of the probe body of rod (130), and described fixed connecting rod (122) is fixedly connected on the periphery of probe tail end optical fiber set collar (121).
6. the small cross section of the high current electron beam optical fiber YAG probe detection device as described in claim 4 or 5, it is characterized in that, the described probe body of rod (130) comprises fibre bundle (101), is coated in vacuum insulation sealing material coating (102) and the flexible rind (131) outside coating (102) in fibre bundle (101) outside, and described flexible rind (131) is wound around by elastic vacuum material.
7. the small cross section of high current electron beam as claimed in claim 4 optical fiber YAG probe detection device, it is characterized in that, described optical fiber YAG probe (110) comprises the YAG thin layer (111) of the front end face that is plated in fibre bundle (101), at the outside surface of described YAG thin layer (111), is provided with a molybdenum thin layer (112).
8. the small cross section of high current electron beam as claimed in claim 7 optical fiber YAG probe detection device; it is characterized in that; periphery at the front end of optical fiber YAG probe (110) is provided with probe front fibre bundle set collar (113) and probe protection ring (114), and described probe protection ring (114) is partly stacked and placed on the outer end of probe front fibre bundle set collar (113).
9. the small cross section of high current electron beam as claimed in claim 2 optical fiber YAG probe detection device, it is characterized in that, described image output detecting apparatus (300) be included in the position seals of described view window (402) transparent optical element (301), be positioned at the CCD camera (302) of chamber body (404) outside and viewed straight-on window (402) and the detecting instrument supporting platform (303) that is fixed on chamber body (404) lower support CCD camera (302).
10. the small cross section of high current electron beam as claimed in claim 9 optical fiber YAG probe detection device, it is characterized in that, described flexible optical cable (200) comprises vacuum material external coating (202) and the fastening fibre bundle end snap ring (203) of fibre bundle end that the fibre bundle (201) that extended out by described optical fiber YAG probe (100), fibre bundle outside apply, and described fibre bundle end snap ring (203) is fixed on the middle position of transparent optical element (301) of view window (402) of the inner side of chamber body (404).
The 11. small cross section of high current electron beam optical fiber YAG probe detection devices as described in any one in claim 2-5, is characterized in that,
Described probe tangential movement locating device (500) is positioned at the central upper of the rear end of described chamber body (404), comprise probe tangential movement linear bearing (501), the motion pull rod seal device (502) with lengthy bellows, servo electrical machinery system (503), probe movement positioning tie bar (504) and optical table (505), wherein
Described probe movement pull bar (504) stretches into the inside of chamber body (404) by the cooperation of described motion pull rod seal device (502) and described pull rod seal device (403);
Described servo electrical machinery system (503) is in the tangential movement of the upper drive of described optical table (505) described probe movement positioning tie bar (504).
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| CN110057293A (en) * | 2019-05-31 | 2019-07-26 | 大理大学 | Electronics drop point site detection device |
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| CN104142225B (en) | 2016-11-09 |
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