CN103376460A - Electron beam section measuring system of high-current electron beam analysis meter - Google Patents
Electron beam section measuring system of high-current electron beam analysis meter Download PDFInfo
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- CN103376460A CN103376460A CN2012101325105A CN201210132510A CN103376460A CN 103376460 A CN103376460 A CN 103376460A CN 2012101325105 A CN2012101325105 A CN 2012101325105A CN 201210132510 A CN201210132510 A CN 201210132510A CN 103376460 A CN103376460 A CN 103376460A
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Abstract
The invention discloses an electron beam section measuring system of a high-current electron beam analysis meter. The electron beam section measuring system of the high-current electron beam analysis meter comprises a high-vacuum cavity body (101). A front port (101) is formed in the high-vacuum cavity body (101) and used for being connected with an external device. The high-vacuum cavity body (101) is installed in a transversely horizontal mode. The electron beam section measuring system further comprises a YAG supporting cylinder supporting and moving mechanism (301) and a YAG crystal detector (201). The YAG supporting cylinder supporting and moving mechanism (301) is located in the high-vacuum cavity body (101) and is used for supporting the YAG crystal detector (201); the YAG crystal detector (201) is used for detecting the spatial density distribution of an electron beam. The electron beam section measuring system can be connected with the transverse high-current electron beam analysis meter to measure the transmission character of the electron beam in the whole process under the condition of electromagnetic focusing and can also measure the optical performance of 20kV-100kV high-current electron beams.
Description
Technical field
The present invention relates to the microwave electronic device technical field, particularly a kind of electron beam section gauge system of high current electron beam analyser.
Background technology
Fig. 1 is the structural representation that the used traditional miniature electric of microwave vacuum device high current electron beam analyser is annotated the section gauge system.This system utilizes longitudinally, and the direct impact fluorescence screen of high current electron beam detects.Fig. 2 is the video screen synoptic diagram of this measuring system.
As depicted in figs. 1 and 2, this measuring system is vertically placed, and the high current electron beam is launched straight up, and directly gets on the video screen, and video screen comprises glass sheet, molybdenum net, video screen support, pull bar.By pull bar video screen is moved control.
The problem that this traditional high current electron beam section gauge system exists is:
One, vertically minor structure can not access in the large-sized transversal high current electron beam analyser and use, and therefore can not test the electron beam transport property under the electromagnetic structure focus state;
They are two years old, video screen pull bar location survey distance is that commonly used pulling stretched and measured the sectional position with Steel Ruler, only have minority to add the small machine command range, but positioning guide rail does not slide in the vacuum cavity of surveying work chamber, light path in measuring process comprises video screen testing agency, optical observation photograph light path and electromagnetic field center line can not fine centerings, so the photo of taking pictures in measuring often has left and right displacement, need in a large number afterwards artificial treatment;
They are three years old, the most important thing is, measured electron beam voltage only adapts to the bombardment that the following pulsed electron of 10kV is annotated, video screen holds bombardment that can't stand 20-100kV high current electron beam, can't detect now the just situation of relativistic effect in developing high-power high modulation voltage microwave vacuum device and novel microwave vacuum device at all.
Fig. 3 is the structural representation of the measuring system of the traditional three-dimensional Faraday cylinder scanning survey electron beam of another kind.It forms as shown in the figure, and its principle of work is, by the three-dimensional mobile Faraday cylinder of controlling of the stepper motor on X, Y, the Z all directions, the high current electron beam of incident is carried out 3-D scanning, and then obtain the electric current distribution of electron beam in the space.
The problem of this measuring system is:
One, complex structure, detection will spend the plenty of time, human and material resources;
Its two, the three-dimensional Faraday cylinder Scan Architecture of this vertical structure can not laterally use, and can not access in the large-sized transversal high current electron beam analyzer electron beam transport property of measuring electromagnetic focusing as parts;
Its three, its Faraday cylinder also holds electron beam bombardment that can't stand 20-100kV, can not detect relativistic effect to the impact of electro-optic structure.
Summary of the invention
The technical matters that (one) will solve
Technical matters to be solved by this invention has provided a kind of electron beam section gauge system of high current electron beam analyser, be intended to solve not good, the inefficiency of electron beam section gauge system performance of traditional problem high current electron beam analyser, and can not measure the problem that the electron beam electro-optical performance of remarkable relativistic effect is arranged under the electron beam transport property of electromagnetic focusing and the 20～100kV.
(2) technical scheme
In order to solve the problems of the technologies described above, the present invention proposes a kind of electron beam section gauge system for high current electron beam analyser, comprise a high vacuum cavity, this high vacuum cavity has a front port, be used for connecting external unit, and the incident of reception high current electron beam, described high vacuum cavity transverse horizontal is settled, and, described electron beam section gauge system comprises that also a YAG props up a support and motion and a YAG crystal counter, described YAG props up the cylinder support and is positioned at described high vacuum cavity with motion, is used for described YAG crystal counter is supported; Described YAG crystal counter is used for surveying the electron beam Spatial Density Distribution.
According to a specific embodiment of the present invention, described YAG crystal counter is an X-ray bremstrahlen YAG crystal counter, and it comprises the YAG crystal of mixing Ce and the molybdenum sheet of settling before this YAG crystal.
According to a specific embodiment of the present invention, described YAG props up the cylinder support and comprises that with motion YAG props up cylinder, and described YAG crystal counter is placed in the front end that described YAG props up cylinder.
According to a specific embodiment of the present invention, described YAG props up cylinder by making without magnetic metal material double-skin duct, and is the tube element of a hollow, and inner tube consists of an optical channel.
According to a specific embodiment of the present invention, described YAG props up the cylinder support and also comprises optics guide rail and sliding support with motion, described sliding support is used for supporting described YAG and props up cylinder (5), and described optics guide rail is fixed on the bottom of high vacuum cavity, and described sliding support and the coupling of described optics guide rail also can relatively be slided.
According to a specific embodiment of the present invention, described electron beam section gauge system also comprises a mobile jib motion positions mechanism that is positioned on the outer optical table of high vacuum cavity, and it is used for controlling described YAG and props up cylinder and support motion and location with motion.
According to a specific embodiment of the present invention, described mobile jib motion positions mechanism comprises servomotor, YAG mobile jib and rigid connector, described YAG mobile jib is used for driving described YAG and props up cylinder and move at described optics guide rail, and described rigid connector is used for connecting described YAG mobile jib and described sliding support.
According to a specific embodiment of the present invention, described electron beam section gauge system also comprises a servo-actuated optical table and an optical observation camera component, described servo-actuated optical table is placed in a side of described YAG mobile jib motion positions mechanism, and be synchronized with the movement with this YAG mobile jib motion positions mechanism, but and described compliant platform three-dimensional regulation, described optical observation camera component is installed on the described servo-actuated optical table, and it is used for the optical imagery that the YAG detector produces is surveyed.
According to a specific embodiment of the present invention, described optical observation camera component comprises right angle prism, telescope and CCD camera, described right angle prism is used for optical path-deflecting 90 degree are entered described CCD camera, and described telescope and CCD camera are used for observed image.
(3) beneficial effect
The invention has the beneficial effects as follows: one, the present invention can be used as parts and laterally accesses in the large-sized transversal high current electron beam analyser and use, and can further finish to measure the high current electron beam the omnidistance transport property of electromagnetic field under focusing on arranged; They are two years old, measuring process of the present invention is simple, does not need manually to go in a large number to revise the displacement that photo often occurs, and can form continuous detection image, be more convenient for software result's direct processing formed curved surface, the curve of 3-D view and electron-optical properties, become hundred times saved the time, manpower, financial resources; Its three, the most important thing is that the present invention can detect 20-100kV left and right sides high current electron beam, the electron-optical properties such as position, electron beam cross section shape, electric current distribution of obvious relativistic effect is arranged.
Description of drawings
Fig. 1 is the structural representation of traditional small-sized high current electron beam section gauge system;
Fig. 2 is the video screen synoptic diagram of high current electron beam section gauge system shown in Figure 1.
Fig. 3 is the structural representation of traditional three-dimensional Faraday cylinder scanning survey electron beam system;
Fig. 4 is the electron beam section gauge system architecture synoptic diagram of high current electron beam analyser of the present invention, and this figure is front view;
Fig. 5 is the vertical view of Fig. 4;
Fig. 6 is X-ray bremstrahlen YAG panel detector structure synoptic diagram of the present invention;
Fig. 7 is the enlarged diagram that YAG of the present invention props up cylinder support and motion;
Fig. 8 be YAG mobile jib motion positions mechanism of the present invention and optical observation camera component 501 enlarged diagram.
1. front ports among the figure, 2. view window, 3.YAG crystal, 4. molybdenum sheet, 5.YAG cylinder, 6. sliding support, 7. optics guide rail, 8. optical table, 9. servomotor, 10. right angle prism, 11.YAG mobile jib, 12.CCD camera, 13. servo-actuated optical table, 14. rigid connectors, 15. telescopes, 101. the high vacuum cavity, 102. high vacuum exhaustion parts, 201.YAG detector, 301.YAG a cylinder supports and motion 401.YAG mobile jib motion positions mechanism, 501. optical observation camera components.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
Fig. 4 is the electron beam section gauge system architecture synoptic diagram of high current electron beam analyser of the present invention, and this figure is front view; Fig. 5 is the vertical view of Fig. 4; Fig. 6 is X-ray bremstrahlen YAG panel detector structure synoptic diagram of the present invention; Fig. 7 is the enlarged diagram that YAG of the present invention props up cylinder support and motion; Fig. 8 is the enlarged diagram of YAG mobile jib motion positions mechanism of the present invention and optical observation camera component 501.
Shown in Fig. 4,5, the electron beam section gauge system that the present invention is used for high current electron beam analyser comprises that a high vacuum cavity 101, a YAG crystal counter 201, a YAG prop up cylinder and support and motion 301, a YAG mobile jib motion positions mechanism 401, an optical observation camera component 501.
Described high vacuum cavity 101 is cylindrical, and the transverse horizontal arrangement, and it comprises view window 2, front port 1, high vacuum exhaustion parts 102.
Described high vacuum cavity 101 comprises a view window 2, and it is used for transmitting the image of electron beam space density detector to image acquisition device; Also comprise a front port 1, it is used for connecting external unit; Also comprise high vacuum exhaustion parts 102, it is used for being evacuated in the main vacuum cavity 101 of height, for example reaches 1 * 10
-6The condition of high vacuum degree of Pa.
Described YAG detector 201 is positioned at the front end that YAG props up cylinder 5, and it is used for surveying the electron beam Spatial Density Distribution, and detected electrons is annotated spatial resolution can reach 0.05mm; YAG is made by the crystal that mixes the Ce element, and adds molybdenum sheet before YAG, the thick 0.5mm of YAG wherein, thick 20～50 μ m of molybdenum sheet.
Described YAG props up the cylinder support and is positioned at high vacuum cavity 101 with motion 301, and it is used for supporting YAG detector 201, comprises that YAG props up cylinder 5, sliding support 6, high vacuum precision optics guide rail 7.
Described YAG props up the cylinder support and comprises that with motion 301 YAG props up cylinder 5, and it is by making without magnetic metal material double-skin duct, is the tube element of a hollow, and inner tube consists of an optical channel, and with circulating water cooling system;
Described YAG props up the cylinder support and comprises sliding support 6 with motion 301, and it is used for supporting YAG and props up cylinder 5; YAG props up the central axis of cylinder 5 and the central axis concentricity of high vacuum cavity 101 is 0.05mm;
Described YAG props up the cylinder support and comprises high vacuum precision optics guide rail 7 with motion 301, and it is positioned at high vacuum cavity 101 inner bottom parts; Described sliding support 6 also can relatively slide with described optics guide rail 7 couplings, can slide on the optics guide rail 7 by this sliding support 6 thereby YAG props up cylinder 5.
The electron beam section gauge system that the present invention is used for high current electron beam analyser also comprises an optical table 8, described optical table 8 is positioned at outside the high vacuum cavity (101), described YAG mobile jib motion positions mechanism 401 is positioned on the optical table 8, it is used for control YAG and props up cylinder support and motion 301 motions and location, comprises servomotor 9, YAG mobile jib 11, rihid coupling 14;
Described YAG mobile jib 11 is used for driving YAG and props up cylinder 5 in 7 motions of high vacuum precision optics guide rail, and the running fix precision is 0.05mm; Described rigid connector 14 is used for connecting YAG mobile jib 11 and sliding support 6.
The electron beam section gauge system that the present invention is used for high current electron beam analyser also comprises a servo-actuated optical table 13, described servo-actuated optical table 13 is placed in a side of YAG mobile jib motion positions mechanism 401, and be synchronized with the movement with YAG mobile jib motion positions mechanism 401, but and described compliant platform 13 three-dimensional regulation.
Described optical observation camera component 501 is installed on the described servo-actuated optical table 13, and it is used for the optical imagery that YAG detector 201 produces is surveyed; After mixing up light path and making image on the YAG detector 201 focus on the CCD camera 12, namely lockable telescope 15 and CCD camera 12 keep focus state this moment, and then survey this image; Described optical observation camera component 501 comprises right angle prism 10, telescope 15, CCD camera 12; Right angle prism 10 is used for optical path-deflecting 90 degree are entered the CCD camera; Telescope 15 and CCD camera 12 are used for observed image.
Principle of work of the present invention: by the motion of industrial computer sequencing control servomotor, according to the input regulation apart from spacing, pointwise location institute detected electrons is annotated the position in cross section, provides synchronously trigger pip and opens monopulse high modulation device voltage and send the monopulse electron beam; The molybdenum sheet 4 that high-pressure electronic is annotated bombardment YAG detector 201 produces X-ray, this X-ray is converted into electron beam position shape and electric current distribution the X-ray intensity image of X-ray bremstrahlen pro rata, and excite YAG, this moment just to show and electron beam position shape and the yellowish green light intensity image of the proportional respective wavelength 550nm of electric current distribution on the YAG; Industrial computer has triggered the CCD camera switch synchronously, has recorded image, and taking a picture by the pointwise of electron beam traveling distance just to obtain the space distribution image of this electron beam position shape and current density.Spatial resolution can reach 0.05mm; The electron beam sectional position running fix precision 0.1mm that detects.
Adopt advantage of the present invention to be: one, the present invention can access in the large-sized transversal high current electron beam analyser, can detect without free diffusing curve, minimum the annotate parameters such as cross section, range, laminar coefficient image of the electron beam under the electromagnetic focusing in equipotential space; The omnidistance transport property that also can annotate in recorded electronic under the electromagnetic focusing, and directly reappear three-dimensional image, bundle contour images and equal percentage electron number layering curve and ad-hoc location three-dimensional, two-dimentional electric current distribution Curve On The Surface etc. by associated electrical optical performance test software by industrial computer and be applicable to analyze image, the parameter of judging that electron optics is controlled.Because it is highly concentric that optical beam path central axis and electromagnetic field center line can guarantee, greatly reduced picture displacement, makes the industry control function immediately finish above-mentioned analysis and information processing, can become on hundred times save time thousandfold, manpower, financial resources; They are two years old, electron beam cross section performance before the present invention can detect under the above electron beam of the immeasurable 20～100kV of the measuring system acceleration high modulation voltage can satisfy the novel microwave vacuum device that developing and the electro-optic structure of the large-scale microwave vacuum device of high-power high voltage fully; They are three years old; The present invention has very high spatial resolution.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; be understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. electron beam section gauge system that is used for high current electron beam analyser, comprise a high vacuum cavity (101), this high vacuum cavity (101) has a front port (101), be used for connecting external unit, it is characterized in that described high vacuum cavity (101) transverse horizontal is settled, and, described electron beam section gauge system comprises that also a YAG props up cylinder and supports and motion (301) and a YAG crystal counter (201)
Described YAG props up the cylinder support and is positioned at described high vacuum cavity (101) with motion (301), is used for described YAG crystal counter (201) is supported;
Described YAG crystal counter (201) is used for surveying the electron beam Spatial Density Distribution.
2. electron beam section gauge as claimed in claim 1 system, it is characterized in that, described YAG crystal counter (201) is an X-ray bremstrahlen YAG crystal counter, and it comprises the YAG crystal (3) of mixing Ce and the molybdenum sheet (4) of settling before this YAG crystal.
3. electron beam section gauge as claimed in claim 1 system, it is characterized in that, described YAG props up the cylinder support and comprises that with motion (301) YAG props up cylinder (5), and described YAG crystal counter (201) is placed in the front end that described YAG props up cylinder (5).
4. electron beam section gauge as claimed in claim 3 system is characterized in that, described YAG props up cylinder (5) by making without magnetic metal material double-skin duct, and is the tube element of a hollow, and inner tube consists of an optical channel.
5. electron beam section gauge as claimed in claim 4 system, it is characterized in that, described YAG props up the cylinder support and also comprises optics guide rail (7) and sliding support (6) with motion (301), described sliding support (6) is used for supporting described YAG and props up cylinder (5), and described optics guide rail (7) is fixed on the bottom of high vacuum cavity (101), and described sliding support (6) also can relatively slide with described optics guide rail (7) coupling.
6. electron beam section gauge as claimed in claim 5 system, it is characterized in that, described electron beam section gauge system also comprises a mobile jib motion positions mechanism (401) that is positioned on the outer optical table (8) of high vacuum cavity (101), and it is used for controlling described YAG and props up cylinder and support motion and location with motion (301).
7. electron beam section gauge as claimed in claim 6 system, it is characterized in that, described mobile jib motion positions mechanism (401) comprises servomotor (9), YAG mobile jib (11) and rigid connector (14), described YAG mobile jib (11) is used for driving described YAG and props up cylinder (5) in described optics guide rail (7) motion, and described rigid connector (14) is used for connecting described YAG mobile jib (11) and described sliding support (6).
8. electron beam section gauge as claimed in claim 7 system, it is characterized in that, described electron beam section gauge system also comprises a servo-actuated optical table (13) and an optical observation camera component (501), described servo-actuated optical table (13) is placed in a side of described YAG mobile jib motion positions mechanism (401), and be synchronized with the movement with this YAG mobile jib motion positions mechanism (401), and described compliant platform (13) but three-dimensional regulation, described optical observation camera component (501) is installed on the described servo-actuated optical table (13), and it is used for the optical imagery that YAG detector (201) produces is surveyed.
9. electron beam section gauge as claimed in claim 7 system, it is characterized in that, described optical observation camera component (501) comprises right angle prism (10), telescope (15) and CCD camera (12), described right angle prism (10) is used for optical path-deflecting 90 degree are entered described CCD camera (12), and described telescope (15) and CCD camera (12) are used for observed image.
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Cited By (7)
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| CN103760452A (en) * | 2014-02-20 | 2014-04-30 | 中国科学院电子学研究所 | Electronic gun heat measurement system for electron beam analyzer and monitoring and correction method thereof |
| CN103941278A (en) * | 2014-05-13 | 2014-07-23 | 中国工程物理研究院流体物理研究所 | Electron beam emittance measuring equipment and measuring method |
| CN104142225A (en) * | 2014-08-06 | 2014-11-12 | 中国科学院电子学研究所 | High current electron beam small-section optical fiber YAG probe detection device |
| CN104237927A (en) * | 2014-09-05 | 2014-12-24 | 兰州空间技术物理研究所 | Variable parameter testing system for cesium source emitting beam intensity |
| CN104570045A (en) * | 2014-12-30 | 2015-04-29 | 江苏安德信超导加速器科技有限公司 | Rectangular profile beam section multi-target position detector |
| CN105044764A (en) * | 2015-08-31 | 2015-11-11 | 中广核达胜加速器技术有限公司 | Electron accelerator beam dynamic acquisition device |
| CN104237672B (en) * | 2014-08-06 | 2017-04-12 | 中国科学院电子学研究所 | Multifunctional modular high current electronic beam analyzing system |
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| CN103760452A (en) * | 2014-02-20 | 2014-04-30 | 中国科学院电子学研究所 | Electronic gun heat measurement system for electron beam analyzer and monitoring and correction method thereof |
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| CN104142225A (en) * | 2014-08-06 | 2014-11-12 | 中国科学院电子学研究所 | High current electron beam small-section optical fiber YAG probe detection device |
| CN104142225B (en) * | 2014-08-06 | 2016-11-09 | 中国科学院电子学研究所 | The small area fiber YAG probe detection device of high current electronics note |
| CN104237672B (en) * | 2014-08-06 | 2017-04-12 | 中国科学院电子学研究所 | Multifunctional modular high current electronic beam analyzing system |
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| CN104570045A (en) * | 2014-12-30 | 2015-04-29 | 江苏安德信超导加速器科技有限公司 | Rectangular profile beam section multi-target position detector |
| CN105044764A (en) * | 2015-08-31 | 2015-11-11 | 中广核达胜加速器技术有限公司 | Electron accelerator beam dynamic acquisition device |
| CN105044764B (en) * | 2015-08-31 | 2017-11-10 | 中广核达胜加速器技术有限公司 | A kind of electron accelerator line dynamic acquisition device |
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