CN103760452A - Electronic gun heat measurement system for electron beam analyzer and monitoring and correction method thereof - Google Patents
Electronic gun heat measurement system for electron beam analyzer and monitoring and correction method thereof Download PDFInfo
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- CN103760452A CN103760452A CN201410057251.3A CN201410057251A CN103760452A CN 103760452 A CN103760452 A CN 103760452A CN 201410057251 A CN201410057251 A CN 201410057251A CN 103760452 A CN103760452 A CN 103760452A
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Abstract
The invention provides an electronic gun heat measurement system for an electron beam analyzer and a monitoring and correction method of the electronic gun heat measurement system. The electronic gun heat measurement system comprises a main vacuum cavity, an electronic gun, a concentric shaft assembly, an optical monitoring system and a zero-touch circuit. The electronic gun is located in the main vacuum cavity and comprises an anode, a grid and a cathode, wherein the anode, the grid and the cathode are sequentially arranged in the axial direction of the vacuum cavity, the anode is fixed to the front end of the main vacuum cavity, and the grid is annular. One end of the concentric shaft assembly is inserted into the main vacuum cavity, and the other end of the concentric shaft assembly extends out of the main vacuum cavity. The concentric shaft assembly comprises a cathode inner concentric shaft and a grid outer concentric shaft, wherein the cathode inner concentric shaft is sleeved with the grid outer concentric shaft. The optical monitoring system is used for monitoring the position of the cathode and the position of the grid through a transparent observation window formed in the main vacuum cavity and a narrow and long through hole in the side face of a grid support cylinder. The zero-touch circuit is connected with the anode and the grid through feed heads arranged on the main vacuum cavity respectively and used for correcting the relative positions of the anode and the grid. The electronic gun heat measurement system for the electron beam analyzer and the monitoring and correction method of the electronic gun heat measurement system can reduce the workload of heat measurement work of the electronic gun and improve the measurement accuracy.
Description
Technical field
The present invention relates to vacuum electronics field, relate in particular to the hot examining system of a kind of electron gun for electron beam analyser and monitoring bearing calibration thereof.
Background technology
Electron optics Dynamic Thermal examining system is a kind of when gun cathode, grid, anode construction with after axial distance has been determined mutually, the system of measurement electron gun electro-optical performance.But because will being heated to supporting construction that working temperature makes each electrode of electron gun, cathode temperature is subject to the anode-cathode distance that thermal expansion has in various degree changed negative electrode, grid and anode.Therefore the variable quantity of each interelectrode distance in the time of will surveying negative electrode working temperature before heat survey is shelved, and revise when shelving.Otherwise heat survey result and actual Electron optics design result differ and greatly cannot provide the correct electron optic results of property of this electron gun.Therefore existing method is the additional detection system of doing a set of seal glass cover, ceramic bar, observation measuring instrument, the negative electrode working temperature while normally working for measuring the thermal expansion amount of each electrode and negative electrode.
Fig. 1 is the schematic diagram that in prior art, electron beam analyser is measured cathode temperature and each electrode thermal expansion of electron gun.Please refer to Fig. 1, in this electron beam analyser, the electron gun anode of having shelved by design size is changed to a large seal glass cover in vacuum system with upper part, outside the center of anode hole and anode hole, on certain appropriate location, open several little axially extending bores, vertically insert as shown in Figure 1 the elongated ceramic bar in diameter 1.5mm left and right or quartz rod, until the cathode surface center that will survey, top portions of gates or other the electrode ends that will survey.
Ignore the thermal expansion amount of inserted link own, the curve of each electrode thermal expansion amount and time relationship while doing a negative electrode work heating by longitudinal range finding reading microscope.In the situation that cooling structure is more suitable, through the sufficiently long time, when the increment temporal evolution of thermal expansion amount very little, in the time of can ignoring, reach state in a basic balance, now in hot examining system, the increment of each electrode all reaches two hours and is no more than above 0.01mm left and right.Now the required time has 3-5 hour conventionally, is the state time in a basic balance, after this each electrode thermal expansion total increment of record.As the correction of newly shelving each electrode separation of electron gun, proofreaied and correct.And the system of also will reinstalling will measure cathode temperature time is measured ceramic bar and is removed each, heated cathode temperature is to working temperature, with optics high-temperature measurement instrument directly by cloche top planes or separately establish as shown in Figure 1 the temperature that a glass window is measured anode hole inner cathode central plane.It is later cathode work current value that record reaches the heater current value of heated cathode after predetermined negative electrode working temperature.Conventionally before thermometric experiment is placed on calorimetric expansion, to there is the time that can start hot survey work after state in a basic balance that reaches more accurately.
2012, the application's applicant proposed a kind of electron gun system for high current electron beam analyser.Fig. 2 A and Fig. 2 B are respectively prior art for the electron gun system of high current electron beam analyser and the structural representation of concentric shafts assembly thereof.Please refer to Fig. 2 A, this electron gun system comprises: main vacuum cavity 301 and the electron gun that is positioned at this main vacuum cavity 301.Described electron gun comprises an anode 7, negative electrode 8 and a grid 9.Described main vacuum cavity 301 comprises that one for drawing the low voltage feeder head 17 outside described main vacuum cavity 301 by described anode 7.Described main vacuum cavity 301 transverse horizontal are settled, and comprise a view window 1, and it is for observing and measure the distance of described negative electrode 8 and grid 9.Described anode 7 is fixed on the front end of described main vacuum cavity 301 by an anode stationary installation 303.
Described electron gun system also comprises a concentric shafts assembly 302, its level is inserted described main vacuum cavity 301, and, its one end is positioned at described main vacuum cavity 301, the other end extends outside described main vacuum cavity 301, comprise: the outer concentric shafts 5 of concentric shafts 4 and grid in negative electrode, is nested inside and outside the outer concentric shafts 5 of concentric shafts 4 and described grid in described negative electrode.In described negative electrode, concentric shafts 4 is positioned at one end of main vacuum cavity 301, for fixing described negative electrode 8; The outer concentric shafts 5 of described grid is positioned at one end of main vacuum cavity 301, for fixing described grid 9.
Electron gun system also comprises an optical table 305, and described optical table 305 is positioned at the outside of described main vacuum cavity 301, and is positioned at the below of described concentric shafts assembly 302, for supporting and locate described concentric shafts assembly 302.This optical table 305 comprises negative electrode optical table 13 and grid optical table 14, it is respectively used to support concentric shafts 4 and the outer concentric shafts 5 of grid in described negative electrode, and make it can axially move horizontally respectively, and described negative electrode optical table 13 is arranged on described grid optical table 14.
For above-mentioned electron gun system, although can regulate with servo electrical machinery system the system of the anode-cathode distance of negative electrode, grid phase antianode in heat survey process, measure, proofread and correct thermal expansion and monitor cathode temperature and still continue to use old way.In vacuum system front portion, load onto the whole method of seal glass cover.
In realizing process of the present invention, applicant finds that prior art electron beam analyser exists following technological deficiency:
(1) due to the interference of ceramic bar on optical path, can not be compatible when testing temperature and survey dilatometric experiment, change the elongated ceramic bar in vacuum system, system is cooling, opens vacuum cavity and then vacuumizes again, reheating cathode temperature measures again, and to repeatedly repeat experiment, obtain mean pole spacing variable quantity, therefore length consuming time, expend a large amount of human and material resources, and thermal expansion amount in real hot survey work is also difficult to accurate grasp.
(2) grid that the tested electron gun occurring in cannot the hot survey work of direct-detection in electron beam analyzer produces due to thermal expansion and anode apart from and the increment of grid and cathode distance, can only add a cloche, ceramic bar structure and simulate and obtain in the experiment of analyzer.Due to have can the hot examining system of traveling electrode die opening electron gun in negative electrode grid support that kinematic system is all very long, and complex structure is directly measured cathode temperature difficulty from top, reach state in a basic balance very long while being used for measuring thermal expansion.Even want tens hours, just can reach " relatively " equilibrium state.The increment of relative equilibrium state thermal expansion, the 0.01mm that is greater than per hour.Once large experiment reaches 5 to 6 hours as optimized electron gun die opening structural experiment, every group of experiment is also all at 1 to 2 hour, the experiment of Ji Zu group is done, the electrode thermal expansion increment of accumulative total, before and after making, the structural deviation of practical vacuum electron gun anode-cathode distance is well beyond permissible scope, and experimental precision cannot guarantee.Therefore adopting prior art is the requirement that is difficult to guarantee experiment.
Summary of the invention
(1) technical matters that will solve
In view of above-mentioned technical matters, the invention provides the hot examining system of a kind of electron gun for electron beam analyser and monitoring bearing calibration thereof, to reduce the workload of the hot survey work of electron gun, improve the accuracy of measuring.
(2) technical scheme
According to an aspect of the present invention, provide a kind of electron gun for electron beam analyser hot examining system.The hot examining system of this electron gun comprises: main vacuum cavity; Electron gun, is positioned at main vacuum cavity, comprising: the anode axially setting gradually along main vacuum cavity, grid and negative electrode, and wherein, anode is fixed on the front end of main vacuum cavity, and grid is annular; Concentric shafts assembly, insert in main vacuum cavity its one end, the other end extends outside main vacuum cavity, comprising: inside and outside concentric shafts and the outer concentric shafts of grid in the negative electrode that is nested, in negative electrode, concentric shafts is positioned at one end of main vacuum cavity, for fixed negative pole; The outer concentric shafts of grid is positioned at one end of main vacuum cavity, for being fixed for supporting the grid of grid, props up cylinder; Optical table, is positioned at outside main vacuum cavity, for supporting and drive concentric shafts and the outer concentric shafts of grid in negative electrode; Optical monitoring system, for monitoring the position of cathode in electron gun and grid by being opened in long and narrow penetrating hole that transparent windows on main vacuum cavity and grid prop up a side; And touch zero circuit, by the feed head being arranged on main vacuum cavity, be connected with grid with the anode in vacuum cavity respectively, for proofreading and correct the relative position of anode and grid.
According to another aspect of the present invention, also provide a kind of to above-mentioned electron gun hot examining system electron gun negative electrode and gate pitch from, anode and gate pitch from the monitoring bearing calibration of monitoring and proofreading and correct.This monitoring bearing calibration comprises: steps A, anode, grid, negative electrode are installed on the hot examining system of electron gun, and then electron beam analyser is vented to default air pressure; Step B, is measured unique point now or scale to the distance of negative electrode end face and is defined as electron gun cathode grid anode-cathode distance H by telescope and CCD camera
cG, it is the design load h to negative electrode end face distance corresponding to grid head
cG; Step C, driving grid servomotor accurately slowly moves to anode and " hits " and go, when anode head baseplane " is hit " in grid end, the resistance value of touching in zero circuit sports " zero " by " infinity ", and recording the distance definition that now grid servomotor moves is that the hot examining system grid of this electron gun anode spacing is from H
gA, it is the design load h to the distance of grid head corresponding to anode head
gA; Step D, gun cathode activates and decomposes to working condition; And step e, the long and narrow penetrating hole of being opened by telescope, front glass view window, grid support tube by CCD camera, observe the unique point on the long and narrow penetrating hole of negative electrode end face and grid, readjust the distance that negative electrode servo electrical machinery system makes grid and negative electrode and be transferred to grid head to the design load h of negative electrode end face distance
cG; Again by regulate grid servo electrical machinery system make grid, the synchronous anode motion of negative electrode realize " touching zero " operation and with this put regulate grid servo electrical machinery system draw back to grid anode spacing from design load h
gA.
(3) beneficial effect
From technique scheme, can find out, the present invention has following beneficial effect for the hot examining system of electron gun and the monitoring bearing calibration thereof of electron beam analyser:
(1) the special detection thermal expansion in early stage of doing for special measurement electron gun electrode thermal expansion before removing from and cloche, ceramic bar system and the previous experiments of negative electrode working temperature, saved a large amount of time, labour, material resources.
(2) the present invention directly installs view window on vacuum cavity, and grid support member is opened viewport, by reading microscope direct measuring system electron gun electrode position and cathode taps temperature.The hot examining system of electron optics that the method for this directly monitoring, correcting electrode anode-cathode distance, monitoring negative electrode working temperature method make movable electronic rifle die opening can be surveyed experiment Real-Time Monitoring more accurately and revise the variation of each electrode distance that thermal expansion brings in heat from being difficult to guarantee that the requirement of experiment becomes.Guarantee true, the reliability of experiment.And real-time, intuitive is strong.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that in prior art, electron beam analyser is measured cathode temperature and each electrode thermal expansion of electron gun;
Fig. 2 A and Fig. 2 B are respectively prior art for the hot examining system of electron gun of high current electron beam analyser and the structural representation of concentric shafts assembly thereof;
Fig. 3 A and Fig. 3 B are respectively stereographic map and the vertical view for the hot examining system of electron gun of electron beam analyser according to the embodiment of the present invention;
Fig. 4 is the cut-open view of the interior part of main vacuum cavity in the hot examining system of electron gun shown in Fig. 3 A;
Fig. 5 props up the schematic diagram that cylinder and grid prop up unique point on cylinder or scale for negative electrode, the grid being obtained by optical monitoring system monitoring in the hot examining system of electron gun shown in Fig. 3 A;
Fig. 6 for the gun cathode that causes according to the support member thermal expansion of embodiment of the present invention electron beam analyser electrode anode-cathode distance and gate pitch from, anode and gate pitch from the variation process flow diagram that carries out Real-Time Monitoring bearing calibration.
[main element]
The main vacuum cavity of 100-;
101-transparent windows; 102-point arc lamp;
103-the first bull low voltage feeder head;
200-electron gun;
201-anode; 202-grid;
203-negative electrode; 204-grid props up cylinder;
The long and narrow penetrating hole of 205-; 206-scale or unique point;
300-concentric shafts assembly;
Concentric shafts in 301 negative electrodes; The outer concentric shafts of 302 grids;
400-optical table;
401-negative electrode servo electrical machinery system; 402-grid servo electrical machinery system;
500-optical monitoring system;
501-telescope; 502-CCD camera;
504-instrument support platform;
600-touches zero circuit;
601-the second bull low voltage feeder head; 602-first paragraph vacuum insulation wire;
603-bull high-voltage feedback power head; 604-second segment vacuum insulation wire;
605-ohmmeter.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.It should be noted that, in accompanying drawing or instructions description, similar or identical part is all used identical figure number.The implementation that does not illustrate in accompanying drawing or describe is form known to a person of ordinary skill in the art in affiliated technical field.In addition, although the demonstration of the parameter that comprises particular value can be provided herein, should be appreciated that, parameter is without definitely equaling corresponding value, but can in acceptable error margin or design constraint, be similar to corresponding value.The direction term of mentioning in embodiment, such as " on ", D score, 'fornt', 'back', " left side ", " right side " etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is to be not used for limiting the scope of the invention for explanation.
In one exemplary embodiment of the present invention, provide a kind of electron beam analyser with electrode anode-cathode distance calibration function.Fig. 3 A and Fig. 3 B are respectively stereographic map and the vertical view for the hot examining system of electron gun of electron beam analyser according to the embodiment of the present invention.Please refer to Fig. 3 A and Fig. 3 B, the present embodiment electron beam analyser comprises:
Optical table 400, is positioned at outside main vacuum cavity 100, for driving concentric shafts 301 and the outer concentric shafts 302 of grid in the negative electrode of concentric shafts assembly 300;
Touch zero circuit 600, by the feed head being arranged on main vacuum cavity 100, be connected with grid with the anode in vacuum cavity respectively, for proofreading and correct the relative position of anode and grid.
Below respectively each ingredient of the present embodiment electron beam analyser is elaborated.
Optical table 400 is positioned at the outside of main vacuum cavity 100, and is positioned at the below of concentric shafts assembly 300, for supporting and location concentric shafts assembly 300.This optical table 400 comprises: negative electrode servo electrical machinery system 401 and grid servo electrical machinery system 402, be respectively used to support concentric shafts 301 and the outer concentric shafts 302 of grid in negative electrode, and make it can axially move horizontally respectively, and negative electrode servo electrical machinery system 401 is arranged on grid servo electrical machinery system 402.
It should be noted that, application servo electrical machinery system is a preferred embodiment of the present invention, so long as can realize concentric shafts 301 and the outer support of concentric shafts 302 of grid and the drive unit of driving in anticathode, can be applied in the present invention equally, no longer repeat herein.
Fig. 4 is the cut-open view of the interior part of main vacuum cavity in the hot examining system of electron gun shown in Fig. 3 A.In Fig. 4, concentric shafts assembly 300 parts are omitted.Please refer to Fig. 4, grid 202 is positioned at the centre of anode 201 and negative electrode 203, is circular, props up cylinder 204 support by a grid cylindraceous.
At grid, prop up on cylinder 204, along it, axially offer rectangular long and narrow penetrating hole 205.Generally, the width in this long and narrow penetrating hole between between 1.5mm to 2.0mm, length is between between 10mm to 15mm, depending on electron gun size, determine.This long and narrow penetrating hole 205 does not affect electron gun inner potential and distributes.Side above and/or under long and narrow penetrating hole, is marked with axial scale or unique point 206.
At main vacuum cavity 100 and the correspondence position in this long and narrow penetrating hole, offer transparent windows 101.This transparent windows 101 is made by the undistorted planar optics glass of water white transparency.By this transparent windows 101 and grid, prop up the combination in long and narrow penetrating hole 205 on cylinder 204, should be able to observe scale or unique point that negative electrode end face mobile in preset range and long and narrow penetrating hole 205 upper and lower sides are carved.
In main vacuum cavity 100, transparent windows 101 above, set-point arc lamp 102.This arc lamp 102 illuminates grid and props up long and narrow penetrating hole 205, scale or the unique point 206 of cylinder on 204 and the end face of long and narrow penetrating hole 205 inner cathodes 203.On main vacuum cavity 100, have the first bull low voltage feeder head 103, some arc lamp 102 is connected on this multistage low voltage feeder head 103 by two vacuum insulation supply lines, by the external world, to it, is powered.
In the present embodiment, optical monitoring system 500 comprises: telescope 501, the CCD camera 502 arranging over against telescope 501 or optics temperature measurer and the test platform 504 of supporting instrument.
In the time need to observing the position of electron gun grid and negative electrode and distance between the two, optical monitoring system is the combination of telescope 501 and CCD camera 502.By CCD camera 502 and telescope 501, see through view window and grid and prop up the long and narrow penetrating hole 205 on cylinder 204, can clearly observe scale or unique point that negative electrode end face and long and narrow penetrating hole 205 upper and lower sides are carved, as shown in Figure 5.
When needs are observed gun cathode temperature, optical monitoring system is the combination of telescope 501 and optics temperature measurer.Optics temperature measurer, by telescope 501, is seen through to view window and grid and props up the long and narrow penetrating hole on cylinder 204, aim at negative electrode end face, can read the actual temperature of negative electrode.
For the position of the elements such as rigid telescope, optical monitoring system 500 is also fixed on the main vacuum cavity support in front view window below and crosses out horizontal supporting plate and the test platform 504 being fixed in back up pad outside main vacuum chamber with an one end.Those skilled in the art can rationally arrange position, the shape and size of horizontal supporting plate and test platform 504 as required, are not described in detail herein.
Please refer to Fig. 4, touching zero circuit 600 comprises: the second bull low voltage feeder head 601, be positioned on described main vacuum cavity, electron gun anode 201 is connected in one end of the main vacuum cavity of being positioned at of the second bull low voltage feeder head 601 inner side by first paragraph vacuum insulation wire 602; Bull high-voltage feedback power head 603, is positioned on described main vacuum cavity, and electron gun grid 202 is connected in one end of the main vacuum cavity of being positioned at of bull high-voltage feedback power head 603 inner side by second segment vacuum insulation wire 604; Ohmmeter 605, its one end is connected to the one end in the main vacuum cavity of being positioned at of the second bull low voltage feeder head 601 outside, and the other end is connected to the one end in the main vacuum cavity of being positioned at of bull high-voltage feedback power head 603 outside.
It should be noted that, in original electron beam analyzer system, the parts such as the second bull low voltage feeder head 601, first paragraph vacuum insulation wire 602, bull high-voltage feedback power head 603 and the second vacuum insulation wire 604 are all existing.The present embodiment electron beam analyser is to utilize the ohmmeter of these existing parts and increase to realize to touch zero power energy.Certainly, also can utilize other newly-increased feed heads to realize and touch zero circuit, be not limited to high-voltage feedback power head or low voltage feeder head.
In addition, between negative electrode and anode, there is high pressure.Therefore, ohmmeter is not fix in the system of receiving, and only has while implementing to touch zero power energy, close high-voltage power supply and just can connect use, touches zero and takes off immediately ohmmeter after completing, touch zero circuit under normal conditions in off-state to avoid dangerous.
So far, the electron beam analyser that the present embodiment has an electrode anode-cathode distance calibration function is introduced complete.
Electron beam analyser based on above-mentioned, a kind of method that the present invention also provides electrode anode-cathode distance monitoring to proofread and correct.
Before narration monitoring bearing calibration first by the present embodiment in method, use touch zero feature operation and monitoring cathode temperature time change the specific practice of instrument on test platform and be described.
Touching zero circuit refers to: as shown in Figure 4, in fact comprise the outer test circuit of grid sun electrode resistance vacuum, this circuit is to be placed in the outer test circuit of vacuum cavity, and it shows that with complete measurement anode and the grid head moving contact of original interior the electric circuit constitute in vacuum cavity resistance is " touching zero " circuit of zero.
Described " touch zero " behaviour refers to that the grid that has been provided with on Operations Analyst instrument and the accurate slow mobile grid of negative electrode servo electrical machinery system 402 and negative electrode " assembly " structure anode " hit " and goes.When " hit " when the anode head baseplane grid end, the resistance value in " touching zero " circuit sports " zero " by " infinity ", and the displacement of recording is defined as now the hot examining system grid of this electron gun anode spacing from H
gA, this value can converse actual gate, the anode spacing of grid and anode under actual this state.
While measuring in the present embodiment negative electrode working temperature, on test platform 504, use optics temperature measurer, conventionally when the complete confirmation negative electrode of cathode disintegration and activation working temperature and when experiment finishes or is necessary, survey cathode temperature.And all substantially changing At All Other Times telescope 501, CCD camera 502 for monitoring grid, negative electrode position.
Fig. 6 for the gun cathode that causes according to the support member thermal expansion of embodiment of the present invention electron beam analyser electrode anode-cathode distance and gate pitch from, anode and gate pitch from the variation process flow diagram that carries out Real-Time Monitoring bearing calibration.Please refer to Fig. 6, this monitoring bearing calibration comprises:
Steps A, system shelves and is vented to 1 * 10
-6pa: first by the design of theory or computer result, anode, grid, negative electrode etc. are installed on the hot examining system of electron gun, anode head is h to the design load of the distance of grid head
gA, grid head is h to the design load of negative electrode end face distance
cG, then electron beam analyser is vented to 1 * 10
-6pa;
Step B, measures this electron gun at the cathode grid spacing H of the hot examining system definition of this electron gun
cG, by telescope 501, CCD camera 502, directly measure unique point now or scale 206 to the distance of negative electrode end face and be defined as the former design electron gun cathode grid anode-cathode distance H that the hot examining system of this electron gun is shelved
cG, it is corresponding to design load h
cG;
Step C, driving grid and negative electrode servo electrical machinery system 401 and 402 accurately slowly move to anode and " hit " and go, when anode head baseplane " is hit " in grid end, resistance value in " touch zero " circuit sports " zero " by " infinity ", and the displacement of recording is defined as now the hot examining system grid of this electron gun anode spacing from H
gA, by touching Z-operation, can measure and shelve rear electron gun anode head baseplane to the distance of grid head and be defined as the former design electron gun grid anode anode-cathode distance H that the hot examining system of this electron gun is shelved
gA, it is corresponding to design load h
gA;
Step D, gun cathode activates and to decompose to working condition: negative electrode progressively heats decomposition activation to duty, minimumly wants 5～6 hours, and after this system enters hot state;
Step e, directly monitors H under hot state under duty
cG, H
gAvariable and proofread and correct.The long and narrow penetrating hole that directly operator directly opens by CCD camera, telescope, front glass view window, grid support tube under negative electrode normal operating conditions, observe the unique point on the long and narrow penetrating hole of negative electrode end face and grid, readjust the distance that negative electrode servo electrical machinery system 402 makes grid and negative electrode and be transferred to former design load.Again by regulating grid servomotor 401 to make grid, the synchronous anode motion of negative electrode realize " touching zero " operation and put to calculate with this to regulate the cloudy servomotor 401 of grid to draw back to grid and the anode distance of design.Because anode is fixed on main vacuum cavity front end, it is very little with the distance of main vacuum cavity thermal expansion, within tens of hours working times, is negligible.So far just completely eliminate and by cathode activation, be heated to each interelectrode thermal expansion amount of electron gun that duty is brought for the previous period.Can directly carry out heat survey has tested.In the past view window is seen negative electrode end face simultaneously, thereby also can directly with optics high-temperature measurement instrument, measure real-time negative electrode working temperature;
Step F, H under Real-Time Monitoring in experimentation
cG, H
gAvariable quantity, proofreaies and correct on request in time;
The structure that it is pointed out that removable die opening electron gun is longer, and it is consuming time very long, very inaccessible reaching thermal equilibrium state.Be necessary will monitor at any time grid anode spacing and grid cathode spacing in many groups that reach five, six hours to ten several hours are tested, if increment meets or exceeds 0.02mm, just they must be regulated with 401,402, this increment is eliminated.Correction in common 2 hours is once suitable.The checking work that can accomplish also can to carry out again after every group of significant data completes each electrode die opening of primary electron rifle is true and reliable to guarantee experimental data.
Step G, disposal data provides the heat that test electron rifle series structure is new and surveys design load and corresponding test result.After the test approval that complete electron gun series electronic optical property, first to arrange respectively the instant H of each test figure
cG, H
gAvalue, is scaled newly-designed h
cG, h
gAtherefore value is exactly the new design load directly providing from the electro-optical performance that has new electron gun grid anode spacing that the electron beam analyzer of removable die opening electron gun structure provides and cathode grid spacing and test out.
So far, by reference to the accompanying drawings the present invention two embodiment be have been described in detail.According to above, describe, those skilled in the art should have clearly understanding for the hot examining system of electron gun of electron beam analyser and monitoring bearing calibration thereof to the present invention.
In addition, the above-mentioned definition to each element and method is not limited in various concrete structures, shape or the mode of mentioning in embodiment, and those of ordinary skills can change simply or replace it.
In sum, the present invention has electron beam analyser and the bearing calibration thereof of electrode anode-cathode distance calibration function can directly observe cathode temperature, measure under cold conditions and real-time hot survey state electrode distance and negative electrode and gate electrode spacing between grid and anode, can measure thermal expansion amount between electrode, can provide and utilize the former Heating Cathode Source of analyser to proofread and correct cathode temperature, utilize grid movable cathode servo electrical machinery system and negative electrode servo electrical machinery system to revise in real time thermal expansion amount, guarantee that in heat survey experiment, cathode temperature meets the requirements, between each electrode of electron gun, distance meets heat survey experimental precision, and accurate each anode-cathode distance of the electron gun that can directly provide optimal design.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. for the hot examining system of electron gun of electron beam analyser, it is characterized in that, comprising:
Main vacuum cavity;
Electron gun, is positioned at described main vacuum cavity, comprising: the anode axially setting gradually along main vacuum cavity, grid and negative electrode, and wherein, described anode is fixed on the front end of main vacuum cavity, and described grid is annular;
Concentric shafts assembly, insert in described main vacuum cavity its one end, and the other end extends outside described main vacuum cavity, comprising: inside and outside concentric shafts and the outer concentric shafts of grid in the negative electrode that is nested, in described negative electrode, concentric shafts is positioned at one end of main vacuum cavity, for fixing described negative electrode; The outer concentric shafts of described grid is positioned at one end of main vacuum cavity, for being fixed for supporting the grid of grid, props up cylinder;
Optical table, is positioned at outside described main vacuum cavity, for supporting and drive concentric shafts and the outer concentric shafts of grid in described negative electrode;
Optical monitoring system, for monitoring the position of cathode in electron gun and grid by being opened in long and narrow penetrating hole that transparent windows on described main vacuum cavity and described grid prop up a side; And
Touch zero circuit, by the feed head being arranged on described main vacuum cavity, be connected with grid with the anode in vacuum cavity respectively, for proofreading and correct the relative position of described anode and grid.
2. the hot examining system of electron gun according to claim 1, is characterized in that, described long and narrow penetrating hole is axially opened in described grid along it and props up cylinder above, and side above and/or under this long and narrow penetrating hole, is marked with axial scale or unique point;
Described transparent windows is opened on described main vacuum cavity the correspondence position with described long and narrow penetrating hole, by the combination in described transparent windows and long and narrow penetrating hole, can observe in preset range side is carved above and/or under mobile negative electrode end face and long and narrow penetrating hole scale or unique point.
3. the hot examining system of electron gun according to claim 2, is characterized in that, described optical monitoring system comprises: telescope, the CCD camera or the optics temperature measurer that over against described telescope, arrange; Wherein:
By the combination of described telescope and optics temperature measurer, see through described view window and long and narrow penetrating hole, aim at negative electrode end face, read the temperature of negative electrode;
By the combination of described telescope and CCD camera, see through described transparent windows and long and narrow penetrating hole, observe side is carved above and/or under negative electrode end face mobile in preset range and long and narrow penetrating hole scale or unique point.
4. the hot examining system of electron gun according to claim 2, is characterized in that, described long and narrow penetrating hole is rectangle, and its width is between between 1.5mm to 2.0mm, and its length is between between 10mm to 15mm.
5. the hot examining system of electron gun according to claim 2, is characterized in that, also comprises:
Point arc lamp, is arranged in described main vacuum cavity, the top of described transparent windows, for illuminating described grid, props up described long and narrow penetrating hole, scale or unique point and the negative electrode end face on cylinder.
6. the hot examining system of electron gun according to claim 3, is characterized in that, described in touch zero circuit and comprise:
The second bull low voltage feeder head, is positioned on described main vacuum cavity, and described electron gun anode is connected in one end of the described main vacuum cavity of being positioned at of this second feed head inner side by first paragraph vacuum insulation wire;
Bull high-voltage feedback power head, is positioned on described main vacuum cavity, and described electron gun grid is connected in one end of the described main vacuum cavity of being positioned at of this bull high-voltage feedback power head inner side by second segment vacuum insulation wire; And
Ohmmeter, its one end is connected to the one end in the described main vacuum cavity of being positioned at of the second feed head outside, and the other end is connected to the one end in the described main vacuum cavity of being positioned at of described bull high-voltage feedback power head outside.
7. the hot examining system of electron gun according to claim 6, it is characterized in that, described ohmmeter is when implementing to touch zero power energy, close be connected with bull high-voltage feedback power head for generation of access in the situation of the high-voltage power supply of voltage between negative electrode and anode, touch zero circuit, in other situations beyond this state, touch zero circuit in off-state.
8. the hot examining system of electron gun according to claim 6, it is characterized in that, described optical table comprises: negative electrode servo electrical machinery system and grid servo electrical machinery system, be respectively used to support concentric shafts and the outer concentric shafts of grid in described negative electrode, and make it can axially move horizontally respectively, and described negative electrode servo electrical machinery system is arranged on described grid servo electrical machinery system.
9. a monitoring bearing calibration, is characterized in that, for to the hot examining system electron gun negative electrode of electron gun described in claim 7 and gate pitch from, anode and gate pitch from monitoring and proofreading and correct, comprising:
Steps A installs described anode, grid, negative electrode on the hot examining system of electron gun, and then electron beam analyser is vented to default air pressure;
Step B, is measured unique point now or scale to the distance of negative electrode end face and is defined as the hot examining system cathode grid of electron gun anode-cathode distance H by described telescope and CCD camera
cG, it is the design load h to negative electrode end face distance corresponding to grid head
cG;
Step C, driving described grid servomotor accurately slowly to move to anode " hits " and goes, when anode head baseplane " is hit " in grid end, described resistance value of touching in zero circuit sports " zero " by " infinity ", and recording the distance definition that now grid servomotor moves is that the hot examining system grid of this electron gun anode spacing is from H
gA, it is the design load h to the distance of grid head corresponding to anode head
gA;
Step D, gun cathode activates and decomposes to working condition;
Step e, the long and narrow penetrating hole of being opened by telescope, front glass view window, grid support tube by described CCD camera, observe the unique point on the long and narrow penetrating hole of negative electrode end face and grid, readjust described negative electrode servo electrical machinery system and make the now distance H of grid and negative electrode
cGbe transferred to corresponding grid head to the design load h of negative electrode end face distance
cGformer H
cGvalue; Again by regulate described grid servo electrical machinery system make the synchronous anode motion of grid, negative electrode realize " touching zero " operation and with this put regulate grid servo electrical machinery system draw back to described corresponding grid anode spacing from design load h
gAformer H
gAvalue.
10. monitoring bearing calibration according to claim 9, is characterized in that, described step e also comprises:
The long and narrow penetrating hole of being opened by telescope, front glass view window, grid support tube by optics temperature measurer, observation gun cathode is in the temperature of working condition.
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