CN104009125B - 多晶硅片的制绒工艺 - Google Patents

多晶硅片的制绒工艺 Download PDF

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CN104009125B
CN104009125B CN201410267478.0A CN201410267478A CN104009125B CN 104009125 B CN104009125 B CN 104009125B CN 201410267478 A CN201410267478 A CN 201410267478A CN 104009125 B CN104009125 B CN 104009125B
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CN104009125A (zh
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邬时伟
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Guilin Sunshine Energy Technology Co.,Ltd.
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Abstract

本发明公开了一种多晶硅片的制绒工艺，包括以下步骤：(1)在硅片表面喷涂一层碳化硅颗粒；(2)在含有硝酸和氢氟酸的混合液中进行酸制绒；(3)在氢氧化钾溶液中进行碱制绒；(4)在含有盐酸和氢氟酸的混合液中进行酸洗；(5)清洗并烘干。通过本工艺生产出来的太阳能电池片反射率低，多晶硅太阳能电池片的电池转换效率高。

Description

多晶硅片的制绒工艺
技术领域
本发明涉及太阳能电池的制作领域，尤其是涉及一种多晶硅片的制绒工艺。
背景技术
近年来，多晶硅太阳能电池以其转换效率较高、性能稳定和成本适中的特点而得到越来越广泛的应用，其产量已超越单晶硅，占据了市场的主导地位。
为了提高太阳能电池的电池转换效率，在制作时，需要先对硅片进行化学处理，使得硅表面做成一个具有一定形状的绒面，但是，依照现有技术，在对多晶硅太阳能电池片进行制绒后，所得硅片反射率偏高，且绒面的均匀性较差，多晶硅太阳能电池片的电池转换效率低。
发明内容
本发明为了克服上述的不足，提供了一种反射率较低，电池转换效率高的多晶硅片的制绒工艺。
本发明的技术方案如下：
一种多晶硅片的制绒工艺，包括以下步骤：
(1)在硅片表面喷涂一层碳化硅颗粒；
(2)在含有硝酸和氢氟酸的混合液中进行酸制绒；
(3)在氢氧化钾溶液中进行碱制绒；
(4)在含有盐酸和氢氟酸的混合液中进行酸洗；
(5)清洗并烘干。
步骤(1)中碳化硅颗粒的粒径在1-10μm之间。
步骤(2)混合液中硝酸的质量分数为35％，氢氟酸的质量分数为7％，硅片在15℃下制绒1.5min。
步骤(3)中氢氧化钾的质量分数为8％，硅片在35℃下制绒2min。
步骤(4)混合液中盐酸的质量分数为15％，氢氟酸的质量分数为10％，硅片在25℃下酸洗0.5min，以去除氧化层和附着的碱液。
步骤(5)中在清洗之后，在35℃下烘干2.5min。
本发明的有益效果是：
本发明先喷涂碳化硅颗粒作为保护颗粒，再用酸制绒，在多晶硅片表面形成腐蚀坑，而在该过程中，由于有保护颗粒，表面被颗粒覆盖处腐蚀缓慢，降低了硅片的反射率；然后再用碱制绒，在酸腐蚀形成的凹坑中腐蚀出金字塔的形貌，形成更多的光陷阱，改变了硅片表面的形貌结构，进一步降低了多晶硅制绒后的反射率，提高了多晶硅太阳能电池片的电池转换效率。
具体实施方式
现在对本发明作进一步详细的说明。
实施例1
一种多晶硅片的制绒工艺，包括以下步骤：
(1)在硅片表面喷涂一层粒径在1-2μm的碳化硅颗粒作为保护颗粒；
(2)在15℃的条件下，在含有质量分数为35％的硝酸和质量分数为7％的氢氟酸的混合液中酸制绒1.5min；
(3)在35℃的条件下，在质量分数为8％的氢氧化钾溶液中碱制绒2min；
(4)在25℃的条件下，在含有质量分数为15％的盐酸和质量分数为10％的氢氟酸的混合液中酸洗0.5min，以去除氧化层和附着的碱液；
(5)在清水中清洗，并在35℃下烘干2.5min。
通过上述方法生产出来的太阳能电池片反射率为24.8％，电池转换效率为17.51％。
实施例2
(1)在硅片表面喷涂一层粒径在5-6μm的碳化硅颗粒作为保护颗粒；
(2)在15℃的条件下，在含有质量分数为35％的硝酸和质量分数为7％的氢氟酸的混合液中酸制绒1.5min；
(3)在35℃的条件下，在质量分数为8％的氢氧化钾溶液中碱制绒2min；
(4)在25℃的条件下，在含有质量分数为15％的盐酸和质量分数为10％的氢氟酸的混合液中酸洗0.5min，以去除氧化层和附着的碱液；
(5)在清水中清洗，并在35℃下烘干2.5min。
通过上述方法生产出来的太阳能电池片反射率为22.3％，电池转换效率为17.62％。
实施例3
(1)在硅片表面喷涂一层粒径在9-10μm的碳化硅颗粒作为保护颗粒；
(2)在15℃的条件下，在含有质量分数为35％的硝酸和质量分数为7％的氢氟酸的混合液中酸制绒1.5min；
(3)在35℃的条件下，在质量分数为8％的氢氧化钾溶液中碱制绒2min；
(4)在25℃的条件下，在含有质量分数为15％的盐酸和质量分数为10％的氢氟酸的混合液中酸洗0.5min，以去除氧化层和附着的碱液；
(5)在清水中清洗，并在35℃下烘干2.5min。
通过上述方法生产出来的太阳能电池片反射率为23.1％，电池转换效率为17.55％。
对比例
传统的多晶硅制绒工艺如下：
将多晶硅片在温度为4-10℃的氢氟酸和硝酸的混液中制绒1-2min，其中氢氟酸和硝酸的质量分数分别为6-8％和35-40％。用该方法生产出来的太阳能电池片反射率在27％以上。
上述依据本发明为启示，通过上述的说明内容，相关技术人员完全可以在不偏离本项发明技术思想的范围内，进行多样的变更以及修改。本项发明的技术性范围并不局限于说明书上的内容，必须要根据权利要求范围来确定其技术性范围。

Claims (1)

1.一种多晶硅片的制绒工艺，其特征在于，包括以下步骤：
(1)在硅片表面喷涂一层碳化硅颗粒，碳化硅颗粒的粒径在1-10μm之间；
(2)在含有硝酸和氢氟酸的混合液中进行酸制绒，混合液中硝酸的质量分数为35％，氢氟酸的质量分数为7％，硅片在15℃下制绒1.5min；
(3)在氢氧化钾溶液中进行碱制绒，氢氧化钾的质量分数为8％，硅片在35℃下制绒2min；
(4)在含有盐酸和氢氟酸的混合液中进行酸洗，混合液中盐酸的质量分数为15％，氢氟酸的质量分数为10％，硅片在25℃下酸洗0.5min；
(5)清洗并在35℃下烘干2.5min。
CN201410267478.0A 2014-06-08 2014-06-08 多晶硅片的制绒工艺 Expired - Fee Related CN104009125B (zh)

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CN111524985A (zh) * 2020-04-28 2020-08-11 中国科学院电工研究所 一种多晶硅片表面制绒的方法

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CN104241449A (zh) * 2014-09-18 2014-12-24 百力达太阳能股份有限公司 一种多晶硅太阳能电池制造工艺
CN106012027B (zh) * 2016-07-05 2018-06-26 常州大学 一种单多晶硅链式酸碱一体制绒及其制备方法
CN106328734B (zh) * 2016-08-31 2018-04-06 东方日升新能源股份有限公司 太阳能电池硅片的制绒方法
CN107393818B (zh) * 2017-06-27 2020-06-09 江苏大学 一种多晶硅太阳能电池的酸碱二次制绒方法及其多晶硅
CN110752273B (zh) * 2019-10-30 2022-07-01 无锡尚德太阳能电力有限公司 应用在多晶硅片上简化的背面钝化电池工艺

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CN103151423A (zh) * 2013-02-28 2013-06-12 常州捷佳创精密机械有限公司 一种多晶硅片制绒清洗工艺方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111524985A (zh) * 2020-04-28 2020-08-11 中国科学院电工研究所 一种多晶硅片表面制绒的方法

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