CN103941518A - Adjustable all-optical oscillator based on silicon-based micro-ring resonant cavity thermo-optically tuning mechanism - Google Patents
Adjustable all-optical oscillator based on silicon-based micro-ring resonant cavity thermo-optically tuning mechanism Download PDFInfo
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Abstract
The invention discloses an adjustable all-optical oscillator based on a silicon-based micro-ring resonant cavity thermo-optically tuning mechanism. The adjustable all-optical oscillator comprises an incidence light source, a light amplifier, a tunable micro-ring resonant cavity, a light signal test system and a feedback control system. The light amplifier is located on a light path of the incidence light source and used for adjusting light power. The tunable micro-ring resonant cavity is located on the light path of the incidence light source and used for generating adjustable MHz magnitude optical oscillation waveforms. The light signal test system is located on the light path of the incidence light source and used for testing signals of output light. The input end of the feedback control system is connected with the output end of the light signal test system, the output end of the feedback control system is connected with the control end of the light amplifier, and the control end of the feedback control system is connected with an electrode pin of the tunable micro-ring resonant cavity. The feedback control system extracts code patterns and the frequency information of the signals of the output light, controls the currents and the duration of a micro type heater and controls the power of the output light of the light amplifier. The technology of the adjustable all-optical oscillator is compatible with the CMOS technology, integration and miniaturization are facilitated, the external interference resisting performance of the adjustable all-optical oscillator is good, and the output oscillation frequency and the waveform stability is high.
Description
Technical field
The present invention relates to optical communication and photon information process field, relate in particular to the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism in all optical communication.
Background technology
In optical communication and photon information process field, realize full photocontrol is the direction that people lay siege to always.And full optical generator can be for the generation of optical clock signal and signal Route Selection etc.The conventional method that produces at present optics vibration is to use electric signal frequency generator and electrooptic modulator, and electrical signal is transferred on light signal.But the maximum drawback of this method is to use high frequency electrical signal generator and electrooptic modulator, so power consumption is large, and be unfavorable for the integrated and quick Route Selection of full light.
Based on silica-based micro-dish, can realize full light generation, the article of delivering such as people such as T.J.Johnson (" Self-induced optical modulation of the transmission through a high-Q silicon microdisk resonator, " Opt.Express14 (2), 2006:817-831), this micro-dish adopts hanging structure, it is around air layer, adopt optical fiber to be coupled, therefore its thermal diffusion time and carrier lifetime are difficult to be realized on a large scale and being regulated by process means, also the frequency that just means the full light generation realizing based on this structure can only change in very narrow scope.The hanging structure adopting and coupling fiber mode are owing to lacking external force restriction, so less stable, and occur opto-mechanical oscillatory occurences under strong incident light, thereby the long-time stable oscillation stationary vibration waveform of more difficult realization.
And the primary structure of the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism of the present invention is silica-based micro-dish resonator cavity, it adopts planar design structure, light transmission waveguide is around low refractive index dielectric material, thereby mechanical stability is very good, and interference free performance is very good; In low refractive index dielectric material surrounding, rationally add high conducting medium material, by project organization size, can control flexibly light transmission waveguide thermal diffusion time around, thereby realize the object that regulates oscillation frequency on a large scale.
Summary of the invention
The object of the invention is to, a kind of adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism is provided, it is directly modulated to periodic oscillation light wave based on silicon-based micro ring resonator by the continuous light wave of incident, regulate micro-ring resonant cavity thermal diffusion time can realize the oscillation frequency variation range of 100kHz mono-100MHz, the frequency-tuning range and the waveform dutycycle from 0 to 1 that regulate lambda1-wavelength and power can realize fast over an octave change continuously, the preparation of silicon-based micro ring resonator structure and CMOS process compatible, good in anti-interference performance, frequency and stability of waveform are high.
The invention provides a kind of adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism, comprising:
One incident light source;
One image intensifer, it is positioned in the light path of incident light source, for regulating optical power;
One tunable micro-ring resonant cavity, it is positioned in the light path of incident light source, for generation of adjustable MHz magnitude optics waveform;
One light signal test macro, it is positioned in the light path of incident light source, for testing the signal of output light;
One feedback control system, its input end is connected with the output terminal of light signal test macro, its output terminal is connected with the control end of image intensifer, its control end is connected with the electrode pin of tunable micro-ring resonant cavity, this feedback control system 0 is extracted pattern and the frequency information of output optical signal, and control size of current and the duration of microheater and the Output optical power of controlling image intensifer.
The invention has the beneficial effects as follows, a kind of adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism is provided, it is based on silicon-based micro ring resonator thermo-optical nonlinear effect and the acting in conjunction of free carrier effect of dispersion, a branch of continuous light wave is directly modulated and become periodic oscillation light wave, oscillation frequency and waveform dutycycle all have controllability, and regulate simple; Regulating micro-ring resonant cavity thermal diffusion time can realize surge frequency range is 100kHz～100MHz, regulates incident optical power and wavelength can realize oscillation frequency variation range and surpasses an octave, from 0 to 1 variation of waveform dutycycle; Make technique and the CMOS process compatible of silicon-based micro ring resonator structure, be convenient to integrated and miniaturization, its anti-external interference performance is good, and output oscillation frequency and stability of waveform are high.
Accompanying drawing explanation
For further illustrating content of the present invention and feature, below in conjunction with drawings and Examples, the present invention is described in detail, wherein:
Fig. 1 is the workflow schematic diagram of realizing adjustable full optical generator based on silicon-based micro ring resonator of the present invention.
Fig. 2 is silicon-based micro ring resonator disc waveguide cross sectional representation of the present invention.
In Fig. 3, (a) is in the embodiment of the present invention, the output light generation oscillogram of experiment test during the relative resonance wavelength red shift of lambda1-wavelength 600pm.
In Fig. 3, (b) is in the embodiment of the present invention, the output light generation oscillogram of experiment test during the relative resonance wavelength red shift of lambda1-wavelength 1000pm.
Fig. 4 exports light generation frequency curve, waveform duty cycle curve map under the different frequency off resonance that in the embodiment of the present invention, simulation obtains.
Embodiment
Refer to shown in Fig. 1 and Fig. 2, the invention provides a kind of adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism, comprising:
One incident light source 10, the described single wavelength continuous wave of incident light source 10 output;
One image intensifer 20, it is positioned in the light path of incident light source 10, and for regulating optical power, described image intensifer 20 is Erbium-Doped Fiber Amplifier (EDFA)s, or semiconductor optical amplifier;
One tunable micro-ring resonant cavity 30, it is positioned in the light path of incident light source 10, and for generation of adjustable optics waveform, surge frequency range is at 100kHz～100MHz; Described tunable micro-ring resonant cavity 30 comprises:
One optically resonant structure, this optically resonant structure is comprised of a straight wave guide 31 and a disc waveguide 32, and wherein straight wave guide 31 two ends are tapered transmission line coupled structure;
One temperature regulation structure, this temperature regulation structure is comprised of a microheater 33 and electrode pin 34;
Wherein straight wave guide 31 and disc waveguide 32 are strip structure, ridge structure or slot structure; Spacing between straight wave guide 31 and disc waveguide 32 be tens nanometers to hundreds of nanometer, selected spacing makes the spectrogram harmonic peak extinction ratio of disc waveguide 32 surpass 5dB; Straight wave guide 31 is with the cross sectional dimensions of disc waveguide 32 for being highly less than 500 nanometers, and width is less than 1 micron, and guarantees the rarest light spread modes; The material of straight wave guide 31 and disc waveguide 32 comprises silicon-on-insulator 310 ' and the overlayer 311 ' of above making at silicon-on-insulator 310 '; The material of overlayer 311 ' is silicon dioxide or silicon nitride; The upper metallizing conductive material of overlayer 311 ' is made microheater 33, for controlling the temperature of disc waveguide 32, and the temperature diffusion time of reducing disc waveguide 32; The thickness of overlayer 311 ' should guarantee that light has less loss while transmitting in disc waveguide 32, and can effectively reduce temperature diffusion time, and for example thickness is 1～3 micron; Disc waveguide 32 surroundings can be made metallic conduction through hole, further to reduce the temperature diffusion time of disc waveguide 32, metallic conduction through hole should not affect the transport behavior of light in disc waveguide 32 apart from the minor increment of silicon waveguide core, and for example this distance is 2～5 microns.
Because the cross sectional dimensions of disc waveguide 32 center silicon waveguides is all less than 1 micron, transmission light pattern is had to larger constraint ability, therefore realize the incident optical power that full light generation needs lower, for example milliwatt magnitude.The material of the silicon-based micro ring resonator using and structure all can be passed through complementary metal oxide semiconductor (CMOS) (CMOS) technique and realize, and are therefore convenient to integrated and miniaturization; Because the silicon-based micro ring resonator of making is Planar integration structure, its anti-external disturbance ability is strong, and stability is high.
Nonlinear effect in disc waveguide 32 has Kerr effect, two-photon absorption effect, free-carrier Absorption effect, free carrier effect of dispersion and thermo-optic effect.On the one hand, the linear absorption of two-photon absorption, free-carrier Absorption and waveguide can cause waveguide temperature to raise, and thermo-optic effect occurs, and increases waveguide index; Because waveguide temperature reduces by modes such as thermal diffusions, thereby adopt thermal diffusion time to characterize the speed degree of temperature variation.On the other hand, free carrier dispersion reduces the refractive index of waveguide, just contrary with the effect of thermo-optic effect, and the main factor that affects free carrier concentration is two-photon absorption effect, relevant with the light intensity in disc waveguide; Because free carrier concentration mainly reduces compound by nonequilibrium electronics and hole, thereby adopt the free carrier life-span to characterize the speed degree of free carrier concentration decay.For silica-based nanowire waveguide, the magnitude of thermal diffusion time is generally millisecond to microsecond magnitude, and it is subject to the factor impacts such as waveguiding structure, covering layer material and size; The magnitude in free carrier life-span is generally nanosecond order, and it is mainly subject to the impact of waveguide sidewalls roughness.When the impact of thermo-optic effect and free carrier effect of dispersion refractive index variable quantity is at the same order of magnitude, or differ hour, output light generation self-pulsing phenomenon, output light-wave shape is vibrated.Oscillation frequency is subject to the impact of material thermal diffusion time, and magnitude is conventionally in MHz left and right, and scope is 100kHz100MHz.
In order to make to export light, there is light intensity oscillatory occurences, require free carrier life-span and the thermal diffusion time of disc waveguide 32 to keep certain relation, for example thermal diffusion time is than large 13 orders of magnitude of free carrier life-span, make when incident optical power surpasses non-linear threshold power, free carrier effect of dispersion has close numerical value to the maximum change absolute value of disc waveguide 32 refractive indexes and thermo-optic effect to the maximum change absolute value of disc waveguide 32 refractive indexes.Designing requirement for device is: in disc waveguide 32, without deep level recombination center, the free carrier life-span is at nanosecond order; Do not affecting under the condition of light normal transmission in waveguide, in the left and right of disc waveguide 32 or cover up and down high thermal diffusion coefficient material, as metallic conduction through hole or plain conductor, improving Speed of diffusion, reducing thermal diffusion time.
The adjustable properties of output light refers to that the dutycycle of output oscillation light changes to 1 from 0, and output light frequency variation range can cover 1 even a plurality of octave.Realize the adjustable properties of output light by regulating the relative position of the output light wavelength of incident light source 10 and the resonance wavelength of disc waveguide 30, regulate the power of incident light after image intensifer 20 to realize.The former regulates the refractive index of disc waveguide 32 to realize the adjusting to its linear resonance wavelength, by feedback control system 50, control the size of current of microheater 33 and the temperature that time length is controlled disc waveguide 32, and then regulate the refractive index of disc waveguide 32; The latter controls the Output optical power of image intensifer 20 by feedback control system 50.Feedback control system 50 is taked real-time feedback control method, be Real-Time Monitoring output oscillation light wave frequency and dutycycle, the linear resonance wavelength of quick adjustment disc waveguide 32 and the output power of image intensifer 20, realize the object of oscillator output frequency and waveform stabilization.
One light signal test macro 40, it is positioned in the light path of incident light source 10, for testing the signal of output light; Light signal test macro 40 comprises a beam splitter 41, and these beam splitter 41 output terminals are connected with respectively a light power meter 42 and a signal detection system 43; Wherein signal detection system 43 comprises a high-speed oscilloscope and/or frequency spectrograph and/or spectrometer.
One feedback control system 50, its input end is connected with the output terminal of light signal test macro 40, its output terminal is connected with the control end of image intensifer 20, its control end is connected with the electrode pin 34 of tunable micro-ring resonant cavity 30, this feedback control system 50 is extracted pattern and the frequency information of output optical signal, and control size of current and the duration of microheater 33 and the Output optical power of image intensifer 20.
In the present embodiment, in order more intuitively to understand the oscillation effect of output light, the silicon-based micro ring resonator that we take under a certain size is example, but the actual silicon-based micro ring resonator that occurs that optics vibrates is not limited to this kind of concrete size.The radius of disc waveguide 32 is 10 microns, and cross sectional shape is ridged, the high 220nm of ridge, and wide 500nm, dull and stereotyped district height 60nm, covers 2 micron silicas in waveguide, and plated metal aluminium thereon.Position apart from 4 microns of waveguides makes metallic aluminium through hole, reduces the thermal diffusion coefficient of disc waveguide 32.According to experimental data, be back-calculated to obtain carrier lifetime in this micro-ring waveguide and be about 3ns, thermal diffusion time is about 120ns.Experiment test obtains the output light generation figure under different relative wavelengths (△ λ), as (a) in Fig. 3 (b) as shown in, the output shape of light and frequency be difference to some extent with relative wavelength.As shown in Figure 4, oscillation frequency and waveform duty cycle change with relative wavelength relation curve between output light generation frequency, waveform duty cycle and relative wavelength, and waveform duty cycle variation range approaches 0-1.Obviously, fixedly incident optical power, only needs slight modification incident light relative wavelength, just can regulate and control very neatly oscillation frequency and the waveform of output light.Owing to being subject to the silicon-based micro ring resonator of ad hoc structure and having the impact of fixing thermal diffusion time, the output surge frequency range of this silicon-based micro ring resonator is that 11MHz is to 17MHz.
It may be noted that and realize the specific silicon-based micro ring resonator structure that full light generation output is not limited to enumerate in the present embodiment.According to general criterion, reduce the thermal diffusion time of disc waveguide 32 and increase the carrier lifetime in disc waveguide 32, make absolute value that thermo-optic effect and charge carrier effect of dispersion change waveguide index at the same order of magnitude, can under lower incident optical power, observe obvious output light generation phenomenon.
Claims (10)
1. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism, comprising:
One incident light source;
One image intensifer, it is positioned in the light path of incident light source, for regulating optical power;
One tunable micro-ring resonant cavity, it is positioned in the light path of incident light source, for generation of adjustable MHz magnitude optics waveform;
One light signal test macro, it is positioned in the light path of incident light source, for testing the signal of output light;
One feedback control system, its input end is connected with the output terminal of light signal test macro, its output terminal is connected with the control end of image intensifer, its control end is connected with the electrode pin of tunable micro-ring resonant cavity, this feedback control system 0 is extracted pattern and the frequency information of output optical signal, and control size of current and the duration of microheater and the Output optical power of controlling image intensifer.
2. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 1, wherein said incident light source is exported single wavelength continuous wave.
3. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 1, wherein said image intensifer is Erbium-Doped Fiber Amplifier (EDFA), or semiconductor optical amplifier.
4. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 1, wherein said tunable micro-ring resonant cavity comprises:
One optically resonant structure, this optical resonator structures is comprised of a straight wave guide and a disc waveguide, and wherein straight wave guide two ends are tapered transmission line coupled structure;
One temperature regulation structure, this temperature regulation structure is comprised of a microheater and electrode pin.
5. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 4, wherein said straight wave guide and disc waveguide are strip structure, ridge structure or slot structure.
6. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 5, the spacing between wherein said straight wave guide and disc waveguide is that tens nanometers are to hundreds of nanometer.
7. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 6, the cross sectional dimensions of wherein said straight wave guide and disc waveguide is for being highly less than 500 nanometers, width is less than 1 micron, and guarantees the rarest light spread modes.
8. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 7, the material of wherein said straight wave guide and disc waveguide comprises silicon-on-insulator and the overlayer of making on silicon-on-insulator.
9. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 1, wherein said tectal material is silicon dioxide or silicon nitride.
10. the adjustable full optical generator based on silicon-based micro ring resonator thermo-optical tunability mechanism according to claim 1, wherein said light signal test macro comprises:
One beam splitter, this beam splitter output terminal is connected with respectively a light power meter and a signal detection system; Wherein signal detection system comprises a high-speed oscilloscope and/or frequency spectrograph and/or spectrometer.
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| WO2016192617A1 (en) * | 2015-06-05 | 2016-12-08 | Huawei Technologies Co., Ltd. | A tunable optical element |
| CN106940298A (en) * | 2017-03-28 | 2017-07-11 | 中国电子科技集团公司第三十八研究所 | A kind of integrated-type biology sensor and preparation method thereof |
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| CN109727849A (en) * | 2018-12-17 | 2019-05-07 | 浙江大学 | A method of no crosstalk instantaneously improves the carrier depletion type silicon luminous-power monitor responsiveness based on defect state mechanism |
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| CN104614877A (en) * | 2015-02-05 | 2015-05-13 | 中国科学院半导体研究所 | Tunable cascading micro-ring filter |
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| CN107179616A (en) * | 2016-03-10 | 2017-09-19 | 拉诺沃斯公司 | Use the apparatus and method finely tuned after the light toroidal cavity resonator manufacture of miscellaneous base heater |
| CN107179616B (en) * | 2016-03-10 | 2021-11-30 | 拉诺沃斯公司 | Apparatus and method for post-fabrication trimming of optical ring resonators using hetero-based heaters |
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| CN109727849A (en) * | 2018-12-17 | 2019-05-07 | 浙江大学 | A method of no crosstalk instantaneously improves the carrier depletion type silicon luminous-power monitor responsiveness based on defect state mechanism |
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