CN103938276A - Monocrystalline silicon wafer texturing additive, texturing solution and corresponding texturing method - Google Patents
Monocrystalline silicon wafer texturing additive, texturing solution and corresponding texturing method Download PDFInfo
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- CN103938276A CN103938276A CN201310029560.5A CN201310029560A CN103938276A CN 103938276 A CN103938276 A CN 103938276A CN 201310029560 A CN201310029560 A CN 201310029560A CN 103938276 A CN103938276 A CN 103938276A
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Abstract
The invention provides a monocrystalline silicon wafer texturing additive, a texturing solution and a corresponding texturing method. In the prior art, sodium silicate and the like are taken as monocrystalline silicon wafer texturing additives, a silicon wafer is bad in defoaming performance, and the defoaming effect can be guaranteed only by increasing the amount of a defoaming organic solvent, and thus the manufacturing cost is high and a pyramid texture surface is relatively large and not uniform in density at texturing later period. The monocrystalline silicon wafer texturing additive comprises terpilenol, polyglycol ether, lactic acid, sodium acetate and an alkali. The monocrystalline silicon wafer texturing solution comprises the above monocrystalline silicon wafer texturing additive and a texturing primary liquid, and the texturing primary liquid comprises an alkali, a defoaming organic solvent and deionized water. The monocrystalline silicon wafer texturing method comprises firstly providing the above monocrystalline silicon wafer texturing solution, controlling the texturing solution to have a constant temperature of 75-85 DEG C, placing a monocrystalline silicon wafer into the solution to make texture for 10-20 min, and finally using deionized water to clean the monocrystalline silicon wafer subjected to texturing. According to the technical scheme, the size of the pyramid texture surface can be effectively reduced, the technology stability and consistency are improved, the texture surface density is improved, and the production cost is reduced.
Description
Technical field
The present invention relates to solar cell and manufacture field, particularly a kind of fine-hair maring using monocrystalline silicon slice additive, Woolen-making liquid and corresponding etching method.
Background technology
Crystal silicon solar battery still occupy dominant position in photovoltaic industry, and the preparation process of crystal silicon solar battery comprises the following steps: (1) chemical making herbs into wool and cleaning; (2) PN junction is prepared in diffusion; (3) etching trimming and cleaning; (4) prepare antireflective coating; (5) screen printing electrode sintering; (6) battery testing sorting.Chemical making herbs into wool in the above-mentioned the first step is on silicon chip surface, to form matte and remove the affected layer forming when silicon chip cuts, monocrystalline silicon piece adopts alkaline corrosion liquid to form the good pyramid matte of anti-reflection effect on its surface conventionally, described alkaline corrosion liquid mainly comprises alkali (can be sodium hydroxide (NaOH) or potassium hydroxide (KOH)), deaeration organic solvent (can be Virahol (IPA) or ethanol, use IPA effect is better), making herbs into wool additive (Additive) and deionized water etc., wherein the mass percent concentration of alkali is 0.5-3%, the mass percent concentration of deaeration organic solvent is 1%-5%, the mass percent concentration of making herbs into wool additive is 0.1-1%, making herbs into wool temperature is controlled at 75-85 DEG C conventionally.Silicon single crystal (111) the crystal orientation erosion rate (be also referred to as anisotropy) different with (100) crystal orientation when alkaline corrosion liquid utilizes compared with low alkaline concentration, prepare pyramid matte, deaeration organic solvent and making herbs into wool additive are larger to the matte quality influence of monocrystalline silicon piece.
In fine-hair maring using monocrystalline silicon slice process, main chemical reaction is as follows:
NaOH (or KOH), as etching reagent, reacts with silicon, forms metso, and enters in solution; Deaeration organic solvent can partly reduce the interfacial tension of silicon chip and Woolen-making liquid in reaction process, is conducive to eliminate the bubble forming at silicon chip surface in reaction process, thereby makes silicon chip more even with reacting of alkali, the consistent pyramid structure of formation outward appearance; The Main Function of making herbs into wool additive is for promoting the erosion rate of crystalline silicon (100) direction the erosion rate of reduction (111) direction, promote the anisotropy of silicon single crystal in low-concentration alkali liquor, in addition, can also improve the interfacial tension of silicon chip and solution, be conducive to silicon chip surface bubble disengagement.In current making herbs into wool process, use the additives such as water glass, its ability of improving silicon chip and solution interface tension force is more poor, need to add in a large number Virahol to improve bubble disengagement ability, and along with the carrying out of reaction, the sodium silicate silicate generating in solution progressively raises, additive is weakened the erosion rate control in crystal orientation, (100)/(111), thereby make to use the pyramid size in later stage to become large at Woolen-making liquid, as shown in Figure 1, Woolen-making liquid uses the pyramid size in later stage to exceed 5um.Thereby oarse-grained pyramid matte like this easily causes subsequent technique damage matte to make the efficiency of solar cell made lower.
Therefore, how to provide a kind of fine-hair maring using monocrystalline silicon slice technology to reduce the size of pyramid matte, improve leather producing process stability, consistence and matte density, reduce production costs, become industry technical problem urgently to be resolved hurrily.
Summary of the invention
The object of the invention is to provide a kind of fine-hair maring using monocrystalline silicon slice additive, Woolen-making liquid and etching method, can reduce the size of pyramid matte by described additive, Woolen-making liquid and etching method, improve leather producing process stability, consistence and matte density, reduce production costs.
For achieving the above object, the invention provides a kind of fine-hair maring using monocrystalline silicon slice additive, described additive comprises Terpineol 350 and polyglycol ether.
In a preferred embodiment, this additive also comprises lactic acid, sodium acetate and alkali, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, alkali is respectively 0.1-3%, 0.3-5%, 0.01-5%, 0.01-5% and 0.1-2%.
In further preferred embodiment, described alkali is sodium hydroxide, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 0.5%, 0.3%, 0.05%, 0.1% and 2.0%.
In further preferred embodiment, described alkali is sodium hydroxide, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 1% or 2%, 0.1%, 0.1% and 2.0%.
The present invention also provides a kind of wool making solution for monocrystalline silicon pieces, and it comprises fine-hair maring using monocrystalline silicon slice additive and fine-hair maring using monocrystalline silicon slice stoste described in above-mentioned any one, and described making herbs into wool stoste comprises alkali, deaeration organic solvent and deionized water
In a preferred embodiment, the volume proportion scope of described fine-hair maring using monocrystalline silicon slice additive and making herbs into wool stoste is 1: 400-600, and described deaeration organic solvent is Virahol or ethanol, described alkali is sodium hydroxide or potassium hydroxide.
In further preferred embodiment, the volume proportion scope of described fine-hair maring using monocrystalline silicon slice additive and making herbs into wool stoste is 1: 500, and described deaeration organic solvent is Virahol, and described alkali is sodium hydroxide.
In preferred embodiment further, described fine-hair maring using monocrystalline silicon slice additive is 0.2L, and wherein the mass percent concentration of Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 0.5%, 0.3%, 0.05%, 0.1% and 2.0%; Described fine-hair maring using monocrystalline silicon slice stoste is 100L, and wherein the mass percent concentration of sodium hydroxide, Virahol is respectively 1.5% and 2%.
Separately further in preferred embodiment, described fine-hair maring using monocrystalline silicon slice additive is 0.2L, and wherein the mass percent concentration of Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 1% or 2%, 0.1%, 0.1% and 2.0%; Described fine-hair maring using monocrystalline silicon slice stoste is 100L, and wherein the mass percent concentration of sodium hydroxide, Virahol is respectively 1.5% and 2%.
The present invention also provides a kind of fine-hair maring using monocrystalline silicon slice method, and the method comprises the following steps: a, provide the wool making solution for monocrystalline silicon pieces described in above-mentioned any one; B, by described wool making solution for monocrystalline silicon pieces constant temperature to 75-85 DEG C; C, monocrystalline silicon piece is placed to the making herbs into wool of carrying out 10-20min in described wool making solution for monocrystalline silicon pieces; Monocrystalline silicon piece after d, the making herbs into wool of use washed with de-ionized water.
Make with using the additives such as water glass in prior art that the deaeration performance of silicon chip surface is not good to need to add compared with relatively large deaeration organic solvent, fine-hair maring using monocrystalline silicon slice additive of the present invention comprises Terpineol 350, polyglycol ether, lactic acid, sodium acetate, alkali, making herbs into wool additive can effectively improve the interfacial tension between silicon chip and Woolen-making liquid, thereby making silicon chip surface react the bubble producing departs from fast, the present invention can reduce the usage quantity of deaeration organic solvent, effectively reduces costs.
Make Woolen-making liquid use later stage pyramid matte size larger with using the additives such as water glass in prior art, easily cause subsequent technique damage pyramid matte to compare, fine-hair maring using monocrystalline silicon slice additive of the present invention, Woolen-making liquid and corresponding etching method influencing each other by Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide and the each composition of deaeration organic solvent, make Woolen-making liquid use the later stage still to retain preferably making herbs into wool effect at Woolen-making liquid, improve stability and the consistence of leather producing process, and improved the homogeneity of matte size and density.
Brief description of the drawings
Fig. 1 uses the wool making solution for monocrystalline silicon pieces of prior art to use the SEM image of the monocrystalline silicon piece in later stage;
Fig. 2 is the schema of fine-hair maring using monocrystalline silicon slice method of the present invention;
Fig. 3 is the light micrograph through the monocrystalline silicon piece in the first embodiment making herbs into wool later stage of fine-hair maring using monocrystalline silicon slice method;
Fig. 4 is the light micrograph through the monocrystalline silicon piece in the second embodiment making herbs into wool later stage of fine-hair maring using monocrystalline silicon slice method;
Fig. 5 is the light micrograph through the monocrystalline silicon piece in the 3rd embodiment making herbs into wool later stage of fine-hair maring using monocrystalline silicon slice method;
Fig. 6 is the reflectivity comparison diagram of the monocrystalline silicon piece texture shown in Fig. 1 and Fig. 5.
Specific embodiments
Describe object of the present invention and effect in detail below in conjunction with specific embodiment and accompanying drawing.
Fine-hair maring using monocrystalline silicon slice additive of the present invention comprises Terpineol 350 (C
10h
18o), polyglycol ether (), lactic acid (C
3h
6o
3), sodium acetate (CH
3cOONa) and alkali, the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, alkali is respectively 0.1-3%, 0.3-5%, 0.01-5%, 0.01-5% and 0.1-2%.Described alkali is sodium hydroxide (NaOH) or potassium hydroxide (NaOH) etc.
In the first embodiment of fine-hair maring using monocrystalline silicon slice additive of the present invention, the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 0.5%, 0.3%, 0.05%, 0.1% and 2.0%.
In the second embodiment of fine-hair maring using monocrystalline silicon slice additive of the present invention, described alkali is sodium hydroxide, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 1%, 0.1%, 0.1% and 2.0%.
In the 3rd embodiment of fine-hair maring using monocrystalline silicon slice additive of the present invention, described alkali is sodium hydroxide, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 2%, 0.1%, 0.1% and 2.0%.
The present invention also provides a kind of wool making solution for monocrystalline silicon pieces, it comprises above-mentioned fine-hair maring using monocrystalline silicon slice additive and fine-hair maring using monocrystalline silicon slice stoste, described making herbs into wool stoste comprises alkali, deaeration organic solvent and deionized water, the volume proportion scope of described fine-hair maring using monocrystalline silicon slice additive and making herbs into wool stoste is 1: 400-600, described deaeration organic solvent is Virahol (IPA) or ethanol etc., and described alkali is sodium hydroxide or potassium hydroxide etc.
In the first embodiment of wool making solution for monocrystalline silicon pieces of the present invention, described deaeration organic solvent is Virahol, described alkali is sodium hydroxide, described fine-hair maring using monocrystalline silicon slice additive is 0.2L, and wherein the mass percent concentration of Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 0.5%, 0.3%, 0.05%, 0.1% and 2.0%; Described fine-hair maring using monocrystalline silicon slice stoste is 100L, and wherein the mass percent concentration of sodium hydroxide, Virahol is respectively 1.5% and 2%.
In the second embodiment of wool making solution for monocrystalline silicon pieces of the present invention, described deaeration organic solvent is Virahol, described alkali is sodium hydroxide, described fine-hair maring using monocrystalline silicon slice additive is 0.2L, and wherein the mass percent concentration of Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 1%, 0.1%, 0.1% and 2.0%; Described fine-hair maring using monocrystalline silicon slice stoste is 100L, and wherein the mass percent concentration of sodium hydroxide, Virahol is respectively 1.5% and 2%.
In the 3rd embodiment of wool making solution for monocrystalline silicon pieces of the present invention, described deaeration organic solvent is Virahol, described alkali is sodium hydroxide, described fine-hair maring using monocrystalline silicon slice additive is 0.2L, and wherein the mass percent concentration of Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 2%, 0.1%, 0.1% and 2.0%; Described fine-hair maring using monocrystalline silicon slice stoste is 100L, and wherein the mass percent concentration of sodium hydroxide, Virahol is respectively 1.5% and 2%.
Referring to Fig. 2, first fine-hair maring using monocrystalline silicon slice method of the present invention carries out step S20, the wool making solution for monocrystalline silicon pieces that comprises described fine-hair maring using monocrystalline silicon slice additive is provided, its be by above-mentioned fine-hair maring using monocrystalline silicon slice additive and making herbs into wool stoste by 1: the volume ratio of 400-600 is formulated.The first embodiment to the three embodiment of fine-hair maring using monocrystalline silicon slice method of the present invention use respectively the wool making solution for monocrystalline silicon pieces first of the invention described above to the formula of the 3rd embodiment.
Then continue step S21, by described wool making solution for monocrystalline silicon pieces constant temperature to 75-85 DEG C.In fine-hair maring using monocrystalline silicon slice method first of the present invention, to the 3rd embodiment, the equal constant temperature of wool making solution for monocrystalline silicon pieces is at 80 DEG C
Then continue step S22, monocrystalline silicon piece is placed to the making herbs into wool of carrying out 10-20min in described wool making solution for monocrystalline silicon pieces.In fine-hair maring using monocrystalline silicon slice method first of the present invention, to the 3rd embodiment, the making herbs into wool time is 15min.
Then continue step S23, use the monocrystalline silicon piece after washed with de-ionized water making herbs into wool.Described monocrystalline silicon piece cleans in corresponding rinse bath by the mode of immersion or hydro-peening, and described deionization resistivity of water is greater than 10M Ω.In the present embodiment, by the mode of water cutter hydro-peening, polysilicon chip is cleaned, washing time is 3～5min.
Referring to Fig. 3 to Fig. 5, it has shown that respectively the first to the 3rd embodiment that uses fine-hair maring using monocrystalline silicon slice method of the present invention is at the matte of the use later stage of wool making solution for monocrystalline silicon pieces gained, as shown in the figure, fine-hair maring using monocrystalline silicon slice method gained matte pyramid mean sizes through the first to the 3rd embodiment is respectively 4 μ m, 3 μ m and 2 μ m, with 5 μ m of the prior art, all effectively reduce matte size.
Referring to Fig. 6, it has shown that the Woolen-making liquid of the prior art shown in Fig. 1 uses the 3rd embodiment of the fine-hair maring using monocrystalline silicon slice method shown in matte and the Fig. 3 in later stage at the reflectivity comparison diagram of the matte in Woolen-making liquid use later stage, fine-hair maring using monocrystalline silicon slice method of the present invention can effectively reduce the reflectivity of matte, special in the wavelength region of 350-800nm.
It should be noted that, Woolen-making liquid described in the present invention and prior art uses the later stage, refer to last 1/3,1/4 or last 1/5 the period of making herbs into wool from preparation to the whole life cycle losing efficacy, if the life cycle of for example Woolen-making liquid is 15h, Woolen-making liquid uses the later stage to refer to last 5h, 3.75h or 3h.
In sum, fine-hair maring using monocrystalline silicon slice additive of the present invention comprises Terpineol 350, polyglycol ether, lactic acid, sodium acetate, alkali, making herbs into wool additive can effectively improve the interfacial tension between silicon chip and Woolen-making liquid, thereby making silicon chip surface react the bubble producing departs from fast, the present invention can reduce the usage quantity of deaeration organic solvent, effectively reduces costs; Fine-hair maring using monocrystalline silicon slice additive of the present invention, Woolen-making liquid and corresponding etching method influencing each other by Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide and the each composition of deaeration organic solvent, make Woolen-making liquid use the later stage still to retain preferably making herbs into wool effect at Woolen-making liquid, improve stability and the consistence of leather producing process, and improved the homogeneity of matte size and density.
Claims (10)
1. a fine-hair maring using monocrystalline silicon slice additive, is characterized in that, described additive comprises Terpineol 350 and polyglycol ether.
2. fine-hair maring using monocrystalline silicon slice additive according to claim 1, it is characterized in that, this additive also comprises lactic acid, sodium acetate and alkali, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, alkali is respectively 0.1-3%, 0.1-5%, 0.01-5%, 0.01-5% and 0.1-2%.
3. fine-hair maring using monocrystalline silicon slice additive according to claim 2, it is characterized in that, described alkali is sodium hydroxide, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 0.5%, 0.3%, 0.05%, 0.1% and 2.0%.
4. fine-hair maring using monocrystalline silicon slice additive according to claim 2, it is characterized in that, described alkali is sodium hydroxide, and the mass percent concentration of described Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 1% or 2%, 0.1%, 0.1% and 2.0%.
5. a wool making solution for monocrystalline silicon pieces, is characterized in that, comprises fine-hair maring using monocrystalline silicon slice additive and fine-hair maring using monocrystalline silicon slice stoste described in claim 1 to 4 any one, and described making herbs into wool stoste comprises alkali, deaeration organic solvent and deionized water.
6. wool making solution for monocrystalline silicon pieces according to claim 5, it is characterized in that, the volume proportion scope of described fine-hair maring using monocrystalline silicon slice additive and making herbs into wool stoste is 1: 400-600, and described deaeration organic solvent is Virahol or ethanol, described alkali is sodium hydroxide or potassium hydroxide.
7. wool making solution for monocrystalline silicon pieces according to claim 6, is characterized in that, the volume proportion scope of described fine-hair maring using monocrystalline silicon slice additive and making herbs into wool stoste is 1: 500, and described deaeration organic solvent is Virahol, and described alkali is sodium hydroxide.
8. wool making solution for monocrystalline silicon pieces according to claim 7, it is characterized in that, described fine-hair maring using monocrystalline silicon slice additive is 0.2L, and wherein the mass percent concentration of Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 0.5%, 0.3%, 0.05%, 0.1% and 2.0%; Described fine-hair maring using monocrystalline silicon slice stoste is 100L, and wherein the mass percent concentration of sodium hydroxide, Virahol is respectively 1.5% and 2%.
9. wool making solution for monocrystalline silicon pieces according to claim 7, it is characterized in that, described fine-hair maring using monocrystalline silicon slice additive is 0.2L, and wherein the mass percent concentration of Terpineol 350, polyglycol ether, lactic acid, sodium acetate, sodium hydroxide is respectively 1%, 1% or 2%, 0.1%, 0.1% and 2.0%; Described fine-hair maring using monocrystalline silicon slice stoste is 100L, and wherein the mass percent concentration of sodium hydroxide, Virahol is respectively 1.5% and 2%.
10. a fine-hair maring using monocrystalline silicon slice method, is characterized in that, the method comprises the following steps: a, provide the wool making solution for monocrystalline silicon pieces described in any one in claim 5 to 9; B, by described wool making solution for monocrystalline silicon pieces constant temperature to 75-85 DEG C; C, monocrystalline silicon piece is placed to the making herbs into wool of carrying out 10-20min in described wool making solution for monocrystalline silicon pieces; Monocrystalline silicon piece after d, the making herbs into wool of use washed with de-ionized water.
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| CN104576831A (en) * | 2014-12-31 | 2015-04-29 | 江苏顺风光电科技有限公司 | Monocrystalline silicon wafer alcohol-free texturing process and texturing additive |
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Application publication date: 20140723 |