CN103926278A - Graphene-based ternary composite film gas sensor and preparation method thereof - Google Patents

Graphene-based ternary composite film gas sensor and preparation method thereof Download PDF

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CN103926278A
CN103926278A CN201410166226.9A CN201410166226A CN103926278A CN 103926278 A CN103926278 A CN 103926278A CN 201410166226 A CN201410166226 A CN 201410166226A CN 103926278 A CN103926278 A CN 103926278A
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graphene
gas sensor
substrate
tri compound
film gas
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CN103926278B (en
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太惠玲
叶宗标
蒋亚东
何应飞
郭宁杰
谢光忠
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University of Electronic Science and Technology of China
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Abstract

The invention discloses a graphene-based ternary composite film gas sensor and a preparation method thereof. The graphene-based ternary composite film gas sensor consists of a ternary composite film and a substrate, wherein the ternary composite film is formed by compounding graphene, metal or metal oxide nanoparticles and conducting polymers. The high specific surface area and excellent electric and physicochemical characteristics of the graphene and the nanoparticles and the specific gas-sensitive response characteristic of the conducting polymers are fully utilized, a gain complementary mechanism is formed between different materials due to ternary compounding, and the gas-sensitive characteristic and stability of the system are enhanced. Meanwhile, the preparation method is combined with a self-assembling process with high ordering property and can be used for preparing the high-sensitivity room temperature detection gas sensor.

Description

Graphene-based tri compound thin film gas sensor and preparation method thereof
Technical field
The present invention relates to nano composite material and gas sensor technical field, be specifically related to a kind of graphene-based tri compound thin film gas sensor and preparation method thereof.
Background technology
Graphene is a kind of new material of the individual layer schistose texture being made up of carbon atom, is with sp by carbon atom 2hybrid orbital composition hexangle type be honeycomb lattice flat film, only have the two-dimensional material of a carbon atom thickness.The scientific circles that appear at of Graphene have evoked huge great waves, and its unusual electric conductivity, the excellent characteristic such as machinery and optical property make Graphene cause new round revolution in hyundai electronics scientific domain.Graphene has very large advantage as gas sensor, and first Graphene is two-dimensional material, and all carbon atoms are all exposed in adsorption gas molecule, means in unitary space maximum sensitive area can be provided; Secondly, the new approach that provides is provided for the diffusion that the thickness of Graphene atom level is gas molecule and electric charge; The 3rd, Johnson's noise of Graphene is very little, makes the sensitivity of Graphene sensor very high; The 4th, the measurement of sonde method can realize on Graphene crystal, and forms Ohmic contact, and resistance is very little.In addition, Graphene also has the advantage of practical application in gas sensor field, as favorable compatibility and the good stability etc. of film build method and traditional printing technique.As the novel gas sensitive of one, Graphene gas sensor has good electrology characteristic, higher sensitivity and lower detection limit while detection for gas molecule, but selectivity is poor; Meanwhile, the chemical property of sensitive membrane excellence also depends on the dispersiveness that Graphene is good, and single Graphene is because effect and high surface are easy to reunite.
Metal nano material has excellent mechanical property, physical property and chemical property, utilizes platinum, gold, silver etc. to modify and can effectively strengthen electrology characteristic and chemical activity conducting polymer; And metal oxide has higher chemical stability and different characteristic of semiconductor, can form heterostructure with conducting polymer, change barrier height, improve the characteristic of semiconductor of compound substance.By metal or metal oxide nano-material and Graphene recombination energy enhancing Graphene electrology characteristic and mechanical property, there are some researches show, the tin ash that possesses positive tetrahedron Rutile structure is evenly attached to Graphene surface and forms compound substance, can obviously improve the performances such as hardness, conductance and the electrochemistry capacitance of material, therefore such compound substance is subject to extensive concern in technical fields such as gas sensor, ultracapacitor, solar cells.
Conducting polymer belongs to macromolecular material, because its structure diversification, environmental stability are good, easily process as study hotspot.But pure conducting polymer is generally insulator, homogenous material exist conductance low, than problems such as capacitance are not high, expensive.
Summary of the invention
The object of this invention is to provide a kind of graphene-based tri compound thin film gas sensor and preparation method thereof, make to form gain complementary mechanisms between different composite material, gas sensitization characteristic and the stability of reinforced composite body system, meet practical demand.
The present invention to achieve these goals, by the following technical solutions:
Graphene-based tri compound thin film gas sensor, it is made up of tri compound film and substrate, tri compound film is by Graphene, metal or metal oxide nanoparticles, conducting polymer is composited, described tri compound film is divided into layered membrane and monofilm, described layered membrane is made up of the composite bed being formed by metal or metal oxide nanoparticles and conducting polymer that is deposited on on-chip graphene layer and cover on graphene layer, described monofilm is by Graphene, three kinds of materials mixing of metal or metal oxide nanoparticles and conducting polymer are composited.
Further, described substrate is interdigital electrode (IDTs), SAW oscillator (SAW) or QCM (Quartz Crystal Microbalance) (QCM).
Further, described grapheme material is powder, colloidal sol or the dispersion liquid of electronation graphene oxide, intrinsic Graphene and their quantum dot, nanometer sheet, nanobelt or nano wire form.
Further, described metal nanoparticle comprises gold, palladium, platinum, silver, titanium, tin, nickel, cobalt, manganese or lanthanum nano particle; Metal oxide nanoparticles is the nano particle of the oxide morphology of gold, palladium, platinum, silver, titanium, tin, nickel, cobalt, manganese or lanthanum.
Further, conducting polymer monomer is aniline monomer and derivant, pyrrole monomer and derivant thereof or thiophene monomer and derivant thereof.
The invention also discloses the preparation method of graphene-based tri compound thin film gas sensor, prepare monofilm gas sensor and comprise the steps:
1. clean substrate, and substrate is carried out to hydrophilic treatment and Electrostatic Treatment;
2. utilize magnetic agitation or ultrasonic technique, prepare Graphene, metal or metal oxide nanoparticles composite dispersion liquid;
3. in the composite dispersion liquid 2. obtaining, add conducting polymer monomer, and regulate polymerization parameter;
4. add reagent and additive in polymerization;
5. on step basis 4., divide two kinds of modes, the first: in the time that polyreaction occurs, substrate is inserted in polymeric solution, carry out in-situ polymerization self assembly; Then take out substrate, clean and be dried, be placed in vacuum drying chamber and preserve, obtain tri compound self-assembled monolayer film gas transducer; The second: composite solution, after abundant home position polymerization reaction, obtains reaction product by filtration, washing and grinding, is configured to composite dispersion liquid; Be coated in deposit film on substrate by revolving Tu, spraying or dripping, obtain tri compound self-assembled monolayer film gas transducer.
Preparing layered membrane gas sensor comprises the steps:
1. clean substrate, and substrate is carried out to hydrophilic treatment and Electrostatic Treatment;
2. utilize magnetic agitation or ultrasonic technique, prepare graphene dispersing solution; On substrate, deposit one deck graphene film by revolving Tu, spraying or dripping to be coated in again;
3. prepare metal or metal oxide nanoparticles dispersion liquid, in dispersion liquid, add conducting polymer monomer, regulate polymerization process condition;
4. add reagent and additive in polymerization;
5. in the time that polyreaction occurs, the graphene film substrate 2. obtaining is inserted in polymeric solution, carry out in-situ polymerization self assembly; Then take out substrate, clean and be dried, be placed in vacuum drying chamber and preserve, obtain tri compound layered film gas sensor.
In the preparation method of above-mentioned graphene-based tri compound thin film gas sensor, step 1. in, cleaning substrate step is at acetone, ethanol, ultrasonic 15 ~ the 30min of difference in deionized water, hydrophilic treatment step is at deionized water, ammoniacal liquor, ultrasonic 30min ~ 120min in hydrogen peroxide (volume ratio 5:1:1), Electrostatic Treatment step comprises: the substrate after hydrophilic treatment is first placed on to 5min ~ 60min in said polycation solution and polyanion solution, wherein said polycation solution comprises: diallyl dimethyl ammoniumchloride (PDDA) or polyethyleneimine (PEI), polyanion solution is kayexalate (PSS) or polyacrylic acid (PAA).
In the preparation method of above-mentioned graphene-based tri compound thin film gas sensor, step 2. in, the solvent of preparing dispersion liquid comprises water, ethanol, acetone, tetrahydrofuran, 1-METHYLPYRROLIDONE, N, N-dimethyl acetamide or N, in dinethylformamide one or more, step 3. in, regulate polymerization parameter be that telo merization pH is 1 ~ 3, polymeric reaction temperature is 0 DEG C ~ 30 DEG C.
In the preparation method of above-mentioned graphene-based tri compound thin film gas sensor, step 4. in, described reagent and additive in polymerization is oxygenant, trigger monomer carries out chemical polymerization, in the time that being aniline monomer and derivant thereof, conducting polymer monomer adopts ammonium persulfate, in the time that conducting polymer monomer is pyrrole monomer and derivant thereof, adopt iron chloride, in the time that conducting polymer monomer is thiophene monomer and derivant thereof, use p-toluenesulfonic acid iron.
The present invention compared with prior art has following beneficial effect:
The present invention utilizes Graphene, conducting polymer and metal or metal oxide nanoparticles three-phase composite to form new nano material system, both electric property and the chemical activity of Graphene and nano particle excellence can be fully represented, and the special response performance of conducting polymer can be brought into play again; Graphene can play the effect of conductive channel between polymkeric substance and metal-based nano particle simultaneously, and strengthens the transfer ability of electronics by effect, reduces the resistivity of system, improves environmental stability.Three's interface bond effect and synergistic enhancing effect also may make compound substance embody new chemistry or physical characteristics, and realize the fine dispersion of Graphene and nano particle and architecture strengthens, make to demonstrate more excellent performance based on the gas sensor of trielement composite material.
Content of the present invention provides that method is simple, cost is low; The graphene-based tri compound thin film gas sensor that utilizes the method to prepare, because being Nano grade, metal or metal oxide nanoparticles be uniformly distributed, again in conjunction with Graphene specific surface area greatly itself, after being compounded with conducting polymer in position, in performance different materials sensitivity characteristic, three's interface bond effect and cooperative effect have strengthened motion or the diffusion of charge carrier, therefore increased matrix electric conductivity, realize Graphene and nano particle fine dispersion and architecture and strengthened, improved electricity and the sensitivity characteristic of polymkeric substance.Compare homogenous material gas sensor, greatly improved response characteristic and the stability of sensor, for new approach has been opened up in the development of gas sensor under room temperature condition.
Brief description of the drawings
Fig. 1 is variable concentrations NH 3response characteristic comparison diagram,
Fig. 2 is 20ppmNH 3repeat property comparison diagram,
Fig. 3 is for preparing tri compound self-assembled monolayer schematic flow sheet,
Fig. 4 is for preparing tri compound self assembly layered membrane schematic flow sheet.
Embodiment
Embodiment 1 prepares individual layer laminated film gas sensor
Taking golden interdigital electrode as sensor substrate, its structural representation as shown in Figure 1.Prepare redox graphene (rGO)/tin ash (SnO on interdigital electrode surface 2)/polyaniline (PANI) tri compound thin film gas sensor, its concrete implementation step is as follows:
1. golden interdigital electrode is placed in to acetone, ethanol, deionized water for ultrasonic 15min successively;
2. carry out hydrophilic treatment, substrate is placed in to the mixed solution (1:1:5) of ammoniacal liquor, hydrogen peroxide and deionized water, and is heated to 70 DEG C, keep 1h;
3. carry out Electrostatic Treatment, the interdigital electrode after hydrophilic treatment is placed in and is placed in successively PDDA and PSS solution, keep respectively 10min;
4. at 50ml, in the HCl solution of 1M, add 15mg Graphene, 15mg tin ash mixed-powder then by sufficient sonic oscillation and magnetic agitation, obtain composite dispersion liquid.
5. in above-mentioned dispersion liquid, add 0.1ml aniline monomer, and remain in ice-water bath and fully stir;
6. in aniline monomer composite dispersion liquid, add 10ml ammonium persulfate aqueous solution (solute quality is 0.244g), keep magnetic agitation at a slow speed;
7. after in-situ polymerization 12h, reaction solution is used respectively to ethanol, washed with de-ionized water, until filtrate becomes colorless;
8. above-mentioned filtration product is dried, ground, then be dispersed to (volume ratio 3:7) in ethanol water, be configured to 1mg/ml composite dispersion liquid;
Utilize revolve Tu technique, forward 500r/min, 10s, after turn 3000r/min, 20s; Above-mentioned composite dispersion liquid is revolved to Tu on interdigital electrode surface, then interdigital electrode is placed in to 50 DEG C of vacuum drying chambers and preserves, obtain Graphene/tin ash/polyaniline tri compound thin film gas sensor.
Embodiment 2 prepares individual layer self assembly laminated film gas sensor
Taking golden interdigital electrode as sensor substrate, its structural representation as shown in Figure 1.Prepare redox graphene (rGO)/tin ash (SnO on interdigital electrode surface 2)/polyaniline (PANI) ternary individual layer laminated film gas sensor, its concrete implementation step is as follows:
1. golden interdigital electrode is placed in to acetone, ethanol, deionized water for ultrasonic 15min successively;
2. carry out hydrophilic treatment, substrate is placed in to the mixed solution (1:1:5) of ammoniacal liquor, hydrogen peroxide and deionized water, and is heated to 70 DEG C, keep 1h;
3. carry out Electrostatic Treatment, the interdigital electrode after hydrophilic treatment is placed in and is placed in successively PDDA and PSS solution, keep respectively 10min;
4. at 50ml, in the HCl solution of 1M, add 15mg Graphene, 15mg tin ash mixed-powder then by sufficient sonic oscillation and magnetic agitation, obtain composite dispersion liquid.
5. in above-mentioned dispersion liquid, add 0.1ml aniline monomer, and remain in 20 DEG C of room temperatures and fully stir with glass bar;
6. in above-mentioned aniline monomer composite dispersion liquid, add 10ml ammonium persulfate aqueous solution (solute quality is 0.244g);
7. when polyreaction occurs, pretreated interdigital electrode is inserted in polymeric dispersion, in the time that solution temperature no longer changes, take out substrate, with the HCl solution cleaning of 1M, nitrogen dries up, and is placed in 50 DEG C of vacuum drying chambers and preserves, and obtains Graphene/tin ash/polyaniline ternary individual layer self assembly laminated film gas sensor.Its mechanism schematic diagram as shown in Figure 3.
Embodiment 3 prepares layered film gas sensor
1. golden interdigital electrode is placed in to acetone, ethanol, deionized water for ultrasonic 15min successively;
2. carry out hydrophilic treatment, substrate is placed in to the mixed solution (1:1:5) of ammoniacal liquor, hydrogen peroxide and deionized water, and is heated to 70 DEG C, keep 1h;
3. carry out Electrostatic Treatment, the interdigital electrode after hydrophilic treatment is placed in and is placed in successively PDDA and PSS solution, keep respectively 10min;
4. at 10ml, in the HCl solution of 1M, add 10mg graphene powder to carry out ultrasonic and magnetic agitation fully, prepare graphene dispersing solution;
5. utilize gas spraying process, spraying height 20cm, adds the above-mentioned graphene dispersing solution of 1ml in airbrush, put into interdigital electrode in effective coverage, center, by even graphene dispersing solution gas blowout in interdigital electrode;
6. at 50ml, in the HCl solution of 1M, add 15mg tin ash mixed-powder then by sufficient sonic oscillation and magnetic agitation, obtain composite dispersion liquid.
7. in above-mentioned dispersion liquid, add 0.1ml aniline monomer, and remain in ice-water bath and fully stir;
8. in aniline monomer composite dispersion liquid, add 10ml ammonium persulfate aqueous solution (solute quality is 0.244g), keep magnetic agitation at a slow speed;
9. after in-situ polymerization 12h, reaction solution is used respectively to ethanol, washed with de-ionized water, until filtrate becomes colorless;
10. above-mentioned filtration product is dried, ground, then be dispersed to (volume ratio 3:7) in ethanol water, be configured to 1mg/ml composite dispersion liquid;
11. utilize revolve Tu technique, forward 500r/min, 10s, after turn 3000r/min, 20s; Above-mentioned composite dispersion liquid is revolved to Tu on interdigital electrode surface, obtain Graphene/tin ash/polyaniline ternary hierarchical composite thin film gas sensor.Its mechanism schematic diagram as shown in Figure 4.
Graphene/tin ash/polyaniline tri compound the thin film gas sensor and the single polyaniline film gas sensor that obtain are carried out to gas-sensitive property test, and its gas-sensitive property curve as shown in Figures 1 and 2.
Comparison diagram 1 and Fig. 2, rGO/SnO 2/ PANI tri compound thin film gas sensor is to variable concentrations ammonia response apparently higher than single PANI, and Repeatability is good.
The method providing by this patent, between Graphene, metal or metal oxide nanoparticles and conducting polymer, form collaborative and complementary effect, overcome the deficiency of homogenous material aspect air-sensitive performance, the technique combining with self assembly by in-situ polymerization has increased the adhesion of film at substrate surface, has formed orderly controlled composite Nano air-sensitive film; By the compound conductivity that improves film, strengthened environmental stability simultaneously.

Claims (10)

1. graphene-based tri compound thin film gas sensor, it is characterized in that, it is made up of tri compound film and substrate, tri compound film is by Graphene, metal or metal oxide nanoparticles, conducting polymer is composited, described tri compound film is divided into layered membrane and monofilm, described layered membrane is made up of the composite bed being formed by metal or metal oxide nanoparticles and conducting polymer that is deposited on on-chip graphene layer and cover on graphene layer, described monofilm is by Graphene, three kinds of materials mixing of metal or metal oxide nanoparticles and conducting polymer are composited.
2. graphene-based tri compound thin film gas sensor according to claim 1, is characterized in that, described substrate is interdigital electrode (IDTs), SAW oscillator (SAW) or QCM (Quartz Crystal Microbalance) (QCM).
3. graphene-based tri compound thin film gas sensor according to claim 1, it is characterized in that, described grapheme material is powder, colloidal sol or the dispersion liquid of electronation graphene oxide, intrinsic Graphene and their quantum dot, nanometer sheet, nanobelt or nano wire form.
4. graphene-based tri compound thin film gas sensor according to claim 1, is characterized in that, described metal nanoparticle comprises gold, palladium, platinum, silver, titanium, tin, nickel, cobalt, manganese or lanthanum nano particle; Metal oxide nanoparticles is the nano particle of the oxide morphology of gold, palladium, platinum, silver, titanium, tin, nickel, cobalt, manganese or lanthanum.
5. graphene-based tri compound thin film gas sensor according to claim 1, is characterized in that, conducting polymer monomer is aniline monomer and derivant, pyrrole monomer and derivant thereof or thiophene monomer and derivant thereof.
6. according to a preparation method for the graphene-based tri compound thin film gas sensor described in claim 1~5 any one, it is characterized in that, prepare monofilm gas sensor and comprise the steps:
1. clean substrate, and substrate is carried out to hydrophilic treatment and Electrostatic Treatment;
2. utilize magnetic agitation or ultrasonic technique, prepare Graphene, metal or metal oxide nanoparticles composite dispersion liquid;
3. in the composite dispersion liquid 2. obtaining, add conducting polymer monomer, and regulate polymerization parameter;
4. add reagent and additive in polymerization;
5. on step basis 4., divide two kinds of modes, the first: in the time that polyreaction occurs, substrate is inserted in polymeric solution, carry out in-situ polymerization self assembly; Then take out substrate, clean and be dried, be placed in vacuum drying chamber and preserve, obtain tri compound self-assembled monolayer film gas transducer; The second: composite solution, after abundant home position polymerization reaction, obtains reaction product by filtration, washing and grinding, is configured to composite dispersion liquid; Be coated in deposit film on substrate by revolving Tu, spraying or dripping, obtain tri compound self-assembled monolayer film gas transducer.
7. according to a preparation method for the graphene-based tri compound thin film gas sensor described in claim 1~5 any one, it is characterized in that, prepare layered membrane gas sensor and comprise the steps:
1. clean substrate, and substrate is carried out to hydrophilic treatment and Electrostatic Treatment;
2. utilize magnetic agitation or ultrasonic technique, prepare graphene dispersing solution; On substrate, deposit one deck graphene film by revolving Tu, spraying or dripping to be coated in again;
3. prepare metal or metal oxide nanoparticles dispersion liquid, in dispersion liquid, add conducting polymer monomer, regulate polymerization process condition;
4. add reagent and additive in polymerization;
5. in the time that polyreaction occurs, the graphene film substrate 2. obtaining is inserted in polymeric solution, carry out in-situ polymerization self assembly; Then take out substrate, clean and be dried, be placed in vacuum drying chamber and preserve, obtain tri compound layered film gas sensor.
8. according to the preparation method of the graphene-based tri compound thin film gas sensor described in claim 6 or 7, it is characterized in that, step 1. in, cleaning substrate step is at acetone, ethanol, ultrasonic 15 ~ the 30min of difference in deionized water, hydrophilic treatment step is at deionized water, ammoniacal liquor, ultrasonic 30min ~ 120min in hydrogen peroxide (volume ratio 5:1:1), Electrostatic Treatment step comprises: the substrate after hydrophilic treatment is first placed on to 5min ~ 60min in said polycation solution and polyanion solution, wherein said polycation solution comprises: diallyl dimethyl ammoniumchloride (PDDA) or polyethyleneimine (PEI), polyanion solution is kayexalate (PSS) or polyacrylic acid (PAA).
9. according to the preparation method of the graphene-based tri compound thin film gas sensor described in claim 6 or 7, it is characterized in that, step 2. in, the solvent of preparing dispersion liquid comprises water, ethanol, acetone, tetrahydrofuran, 1-METHYLPYRROLIDONE, N, in N-dimethyl acetamide or DMF one or more, step 3. in, regulating polymerization parameter is that telo merization pH is 1 ~ 3, and polymeric reaction temperature is 0 DEG C ~ 30 DEG C.
10. according to the preparation method of the graphene-based tri compound thin film gas sensor described in claim 6 or 7, it is characterized in that, step 4. in, described reagent and additive in polymerization is oxygenant, trigger monomer carries out chemical polymerization, in the time that conducting polymer monomer is aniline monomer and derivant thereof, adopt ammonium persulfate, in the time that conducting polymer monomer is pyrrole monomer and derivant thereof, adopt iron chloride, in the time that conducting polymer monomer is thiophene monomer and derivant thereof, use p-toluenesulfonic acid iron.
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