CN103924195A - Vacuum Evaporating Device - Google Patents
Vacuum Evaporating Device Download PDFInfo
- Publication number
- CN103924195A CN103924195A CN201310721942.4A CN201310721942A CN103924195A CN 103924195 A CN103924195 A CN 103924195A CN 201310721942 A CN201310721942 A CN 201310721942A CN 103924195 A CN103924195 A CN 103924195A
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- Prior art keywords
- diffusion container
- evaporation
- evaporating materials
- diffusion
- deposition apparatus
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention provides a vacuum evaporating device which performs evaporation on a substrate (k) in vacuum. The vacuum evaporating device comprises the components of: a plurality of crucibles (2) which respectively evaporate an evaporating material (A) to evaporated material; valves (51) which are respectively connected with the downstream side of each crucible (2); a diffusion container (21) which introduces the evaporated material through an introducing pipe (11) and make the introduced evaporated material evaporate; and a plurality of nozzles (25) which release the evaporated material diffused in inner part (22) of the diffusion container to the substrate (K), wherein the total introducing pipe (11) is not provided with a branched part and the evaporation speed is 0.1-10 a/sec. The thickness (D) of the inner space of the diffusion container is smaller than 1m and the maximal distance (L) between the nozzles is smaller than 5m. Furthermore the relationship between the thickness (D) of the inner space of the diffusion container and the maximal distance (L) between the nozzles satisfies a random formula selected from preset formulae (1)-(3).
Description
Technical field
For example the present invention relates to for by the deposition material such as metallic substance, organic materials under negative pressure evaporation to the vacuum deposition apparatus of glass baseplate surface.
Background technology
For example, the display panel that uses organic EL Material by glass substrate etc. by evaporation member on the deposition material such as evaporation organic materials form.Conventionally, make its evaporation with container for evaporation heating deposition material, be directed in vacuum vessel as the evaporating materials of the deposition material after described evaporation, and be released to configuration in described vacuum vessel by the surface of evaporation member (substrate), thereby carry out evaporation.
The structure of disclosed this evaporation coating device was as follows in the past: distolateral raw material supplying source and another the distolateral multichannel that is divided into of being connected in of supply-pipe, described supply-pipe be formed with multiple supply sides for the opening that discharges evaporating materials and be connected, the part of the shunt of above-mentioned supply-pipe is provided with flow rate control device (for example, with reference to patent documentation 1).Described structure can obtain the vapor-deposited film of even thickness.
Patent documentation 1: No. 2007-332458, Japanese Patent Publication communique JP
, in the disclosed evaporation coating device of above-mentioned patent documentation 1, on supply-pipe or ingress pipe, there is shunt portion, therefore cause conductivity to reduce.So, according to existing above-mentioned evaporation coating device, hanker considering the reduction part of conductivity in adding of deposition material, have to higher the Heating temperature of deposition material setting.Therefore, the problem that existing above-mentioned evaporation coating device exists is to be unsuitable for especially decomposition temperature compared with low deposition material, the i.e. easy vacuum evaporation because of the deteriorated deposition material of heating.
Summary of the invention
The object of this invention is to provide a kind of vacuum deposition apparatus, hanker considering the reduction part of conductivity in adding of deposition material, Heating temperature that can lower setting deposition material.
In order to address the above problem, the vacuum deposition apparatus of first method of the present invention carries out evaporation to substrate under vacuum, and it comprises: multiple crucibles, make respectively deposition material evaporation and become evaporating materials; Valve, is connected with the downstream side of described crucible; Diffusion container, imports evaporating materials from described valve by ingress pipe and makes the evaporating materials diffusion importing; And multiple release aperture, the evaporating materials of the internal divergence at described diffusion container is discharged towards substrate, described vacuum deposition apparatus is characterised in that, whole described ingress pipes do not have shunt portion.
In addition, the vacuum deposition apparatus of second method of the present invention is on the basis of the vacuum deposition apparatus described in first method, and between the internal space thickness (D) of diffusion container and nozzle, the relation of ultimate range (L) meets following formula:
100×D≥－1.22×L
2＋25L－0.51。
And the vacuum deposition apparatus of Third Way of the present invention is on the basis of the vacuum deposition apparatus described in first method, evaporation speed is 0.1
/ sec above 10
below/sec, the internal space thickness (D) of diffusion container be that between the following and nozzle of 1m, ultimate range (L) is below 5m, and the relation of ultimate range (L) meets any one in following formula (1)～(3) between the internal space thickness (D) of diffusion container and nozzle:
100×D≥－1.22×L
2＋25L－0.51···（1）
100×D≤80×L＋244 ···（2）
100×D≤－0.25×L＋4.75 ···（3）。
According to described vacuum deposition apparatus, because conductivity in ingress pipe reduces hardly, so hanker considering the reduction part of conductivity in adding of deposition material, Heating temperature that can lower setting deposition material.Therefore, be particularly suitable for decomposition temperature compared with low deposition material, the i.e. easy vacuum evaporation because of the deteriorated deposition material of heating.
Brief description of the drawings
Fig. 1 is the overall sectional drawing of the vacuum deposition apparatus of embodiment of the present invention 1, is (a) front sectional drawing, is (b) the A-A sectional drawing of (a).
Fig. 2 is the schematic diagram that represents the model of the internal space of the diffusion container using in the simulation of same vacuum deposition apparatus.
Fig. 3 is the coordinate diagram that represents the result of same simulation, is (a) coordinate diagram of spacing Lt hour of release aperture, is (b) the spacing Lt of the release aperture coordinate diagram when large.
Fig. 4 represents as the result of same simulation, meets the coordinate diagram of the scope of formula (1).
Fig. 5 represents as the result of same simulation, meets the coordinate diagram of the scope of formula (1)～(3).
Fig. 6 is the overall sectional drawing of the vacuum deposition apparatus of embodiment of the present invention 2, (a) is front sectional drawing, is (b) side sectional drawing.
Fig. 7 is the overall sectional drawing of existing vacuum deposition apparatus.
Embodiment
(embodiment 1)
The vacuum deposition apparatus of embodiment of the present invention 1 is described below, with reference to the accompanying drawings.
As shown in Fig. 1 (a), described vacuum deposition apparatus 1 comprises: multiple (being two in Fig. 1 (a)) crucible 2, makes deposition material (for example Alq3) A evaporation; Many (being two in Fig. 1 (a)) ingress pipes 11, the evaporating materials importing as the deposition material A evaporation from crucible 2 respectively; Vacuum vessel 3, the substrate K that the evaporating materials being imported by above-mentioned ingress pipe 11 is directed to internal configuration above and with the vacuum tightness (negative pressure) of regulation carries out evaporation; And vacuum pump (omitting diagram), make the inside of described vacuum vessel 3 become the vacuum tightness (negative pressure) of regulation.In addition, described vacuum vessel 3 disposes: diffusion container (also referred to as menifold) 21, spreads the evaporating materials being imported by ingress pipe 11; Substrate carrier 31, remains on downside by substrate K with the state of fixing; And quartzy oscillatory type thickness meter (also referred to as QCM) 41, near the evaporation speed of measurement to substrate K described substrate carrier 31.And, as Fig. 1 (a) with (b), in the substrate opposed faces of described diffusion container 21, be formed with multiplely for discharging the release aperture 23 of the evaporating materials after diffusion all around, and in each release aperture 23, nozzle 25 is housed.In addition, below, the direction (left and right directions Fig. 1) of the crucible 2 of observing from diffusion container 21 is called to left and right directions.
In the downstream opening of described each crucible 2, be connected with respectively the valve 51 of the flow of controlling evaporating materials.In addition, described ingress pipe 11 configures in the mode of the sidewall 3s that runs through vacuum vessel 3, and connects the diffusion container 21 in each valve 51 and the vacuum vessel 3 outside vacuum vessel 3.And described diffusion container 21 is the rectangular shapes that are formed with internal space 22, this internal space 22 is for making evaporating materials diffusion.In addition,, on the substrate K that is held in substrate carrier 31, be provided with the vapor-deposited film that makes to be created on substrate K and be formed on the metal mask M in required scope.
Then, illustrate as the ingress pipe 11 of main idea of the present invention and the concrete structure of diffusion container 21.
Described ingress pipe 11 is fixing pipes of internal diameter in total length.Therefore, described ingress pipe 11 has the structure that is difficult for the conductivity reduction that makes the evaporating materials importing.
On the left and right side of described diffusion container 21, be formed with respectively inside for being communicated with described ingress pipe 11 and the introducing port 24 of described internal space 22.Therefore, described diffusion container 21 imports evaporating materials from introducing port 24, the evaporating materials importing is spread in described internal space 22, and the evaporating materials after diffusion is discharged towards substrate K from described nozzle 25.Described internal space 22 is also rectangular shape, and the two sides with maximum area is substrate opposed faces and opposite face thereof.
If the thickness of internal space 22 of diffusion container 21 is that when between the nozzle of D, nozzle 25, ultimate range is L, described diffusion container 21 meets:
100×D≥－1.22×L
2＋25L－0.51···（1）。
In addition, evaporation speed is 0.1
/ sec above 10
below/sec, the thickness (D) of the internal space 22 of diffusion container 21 is below 1m, and between the nozzle of nozzle 25, ultimate range (L) is below 5m, meets:
100×D≤80×L＋244 ···（2）
100×D≤－0.25×L＋4.75 ···（3）。
Although not shown, on crucible 2, be provided with the well heater (for example encapsulating well heater) that makes its evaporation for heating deposition material A.In addition, although not shown, on valve 51, ingress pipe 11, diffusion container 21 and nozzle 25, be respectively equipped with for for example preventing, by the cooling well heater adhering to of inner evaporating materials (encapsulating well heater).
The effect of described vacuum deposition apparatus 1 is below described.
First, drop into deposition material A to each crucible 2, utilize vacuum pump to make the inside of vacuum vessel 3 become the vacuum tightness (negative pressure) of regulation.Then, close whole valve 51, with heater heats crucible 2, valve 51, ingress pipe 11, diffusion container 21 and nozzle 25.If the deposition material A in crucible 2 is heated, described deposition material A evaporation.Subsequently, by opening a valve 51, be evaporating materials from the deposition material A(after the evaporation of described crucible 2), under the state reducing hardly in conductivity, pass through valve 51 and ingress pipe 11, and be imported into diffusion container 21.Then, evaporating materials is diffusion in the internal space 22 of diffusion container 21, and discharges towards substrate K from nozzle 25.Utilize the evaporating materials discharging to carry out evaporation, on substrate K, generate vapor-deposited film.In addition, measure evaporation speed near of substrate K by quartzy oscillatory type thickness meter 41, and suitably control the flow of evaporating materials with valve 51, so that evaporation speed becomes required value.If generate the vapor-deposited film of desired thickness, close described valve 51 and open another valve 51, similarly other vapor-deposited film of overlapping generation on described vapor-deposited film.
At this, because ultimate range (L) between the thickness (D) of evaporation speed, internal space 22 and the nozzle of nozzle 25 is described above, so the evaporating materials of internal space 22 is from nozzle 25, with the film uniformity of vapor-deposited film, the mode in ± 3% discharges.
Like this, according to the vacuum deposition apparatus of described embodiment 11, because conductivity in ingress pipe 11 reduces hardly, so hanker considering the reduction part of conductivity in adding of deposition material A, Heating temperature that can lower setting deposition material A.Therefore, be particularly suitable for decomposition temperature compared with low deposition material, the i.e. easy vacuum evaporation because of the deteriorated deposition material of heating.
In addition, can make the film uniformity of vapor-deposited film in ± 3%.
(simulation)
The simulation of formula (1)～(3) for deriving described embodiment 1 is described below.
As shown in Figure 2, in described simulation as internal space 22(rectangular shape to described embodiment 1) approximate, be provided with the internal space of the cylindrical shape of diameter Dt.In addition, in described simulation, at left and right directions, two release aperture 23t are set, the spacing of above-mentioned release aperture 23t is Lt.
Forming in the diffusion container 21t of this internal space 22t and release aperture 23t, when calculating the diameter Dt of flow rate Q, internal space 22t of the evaporating materials of importing and the spacing Lt of release aperture 23t and carrying out various change, the throughput ratio q1/q2 of the evaporating materials that discharges from release aperture 23t.
(a) of Fig. 3 represented that Lt is made as the result of smaller value, and (b) of Fig. 3 represented that Lt is made as the result of higher value.As shown in Fig. 3 (a), when Lt is less value, Dt is less, in the lower region of flow rate, throughput ratio is more stable, and Dt is larger, in the higher region of flow rate, throughput ratio is more stable.In addition, as shown in Fig. 3 (b), when Lt is larger value, too, Dt is less, in the lower region of flow rate, throughput ratio is more stable, and Dt is larger, in the higher region of flow rate, throughput ratio is more stable.This be because, if Dt is little, the flow rate of evaporating materials is below prescribed value, and evaporating materials becomes molecular flow, and if Dt is large, the flow rate of evaporating materials is more than other prescribed value, and evaporating materials becomes viscous flow.To this, in the time that the little and flow rate of Dt exceedes described prescribed value, or when the large and flow rate of Dt is less than described other prescribed value, because evaporating materials becomes the state that molecular flow mixes with viscous flow, so if change flow rate, throughput ratio is significantly change also.From described analog result obtain with flow rate irrelevant, throughput ratio becomes more than 0.94 Dt and the relational expression of Lt.Described relational expression becomes described formula (1).The shadow representation of Fig. 4 meet the scope of the Dt-Lt of described formula (1).In addition, if throughput ratio more than 0.94, the film uniformity of vapor-deposited film is in ± 3%.
And, according to described analog result, obtain flow rate 0.1
/ sec above 10
in scope below/sec, throughput ratio becomes more than 0.94 Dt and the relational expression of Lt.Be that ultimate range (L) is that under the condition below 5m, described relational expression becomes described formula (2) and (3) below 1m and between the nozzle of nozzle 25 at the thickness (D) of internal space 22 of diffusion container 21.
Therefore be, 0.1 in evaporation speed
/ sec above 10
below/sec, the thickness (D) of internal space 22 be between the nozzle of the following and nozzle 25 of 1m ultimate range (L) under the condition below 5m, as long as meet any one in described formula (1), (2) or (3), throughput ratio is just more than 0.94, and with the film uniformity of vapor-deposited film, the mode in ± 3% discharges evaporating materials.The shadow representation of Fig. 5 meet the scope of the Dt-Lt of above-mentioned condition.
In addition, because the value of described simulation is roughly decided by the mean free path of vapor molecule and the wall spacing of dispersion cup, be the diffusion container 21t of cylindrical shape so be not limited to internal space 22t, be also applicable to the diffusion container of other shapes such as rectangular shape.
(embodiment)
Below, the embodiment that more specifically represents described embodiment 1 is described.
In the present embodiment, as shown in Figure 1, used there are two crucibles 2, the vacuum deposition apparatus 1 of two ingress pipes 11.In addition, establish the deposition material A(A1 in a side crucible 2) be α-NPD, the deposition material A(A2 in the opposing party's crucible 2) be Alq3.Here used the diffusion container 21 that thickness (D) that between the nozzle of nozzle 25, ultimate range (L) is 1.0m, internal space 22 is 0.25m.
Use described vacuum deposition apparatus 1, with 1.0
the evaporation speed of/sec generates the vapor-deposited film of α-NPD on substrate K, and on described vapor-deposited film the vapor-deposited film of overlapping generation Alq3.Can make the film uniformity of above-mentioned vapor-deposited film all in ± 3%.
In addition, in described operation, the Heating temperature of deposition material A is 280 DEG C in the situation that of α-NPD, is 340 DEG C in the situation that of Alq3, than the vacuum deposition apparatus 1 of the ingress pipe 11 that possesses band shunt portion in the past, has reduced respectively 5 DEG C.
(embodiment 2)
The vacuum deposition apparatus 1 of present embodiment 2 is different from the vacuum deposition apparatus 1 of described embodiment 1, can carry out common evaporation.
Below, the vacuum deposition apparatus 1 of present embodiment 2 is described based on Fig. 6, be conceived to the configuration of explanation diffusion container 21, ingress pipe 11 and the quartzy oscillatory type thickness meter 41 different with described embodiment 1, and also the description thereof will be omitted for the formation mark same reference numerals identical with described embodiment 1.In addition, below the left and right directions in Fig. 6 (a) is called to left and right directions, and the left and right directions in Fig. 6 (b) is called to fore-and-aft direction.
As shown in Figure 6, in described vacuum deposition apparatus 1, diffusion container 21 is in the inside of vacuum vessel 3 multilayer (in Fig. 6 being three layers) overlay configuration.On the fore-and-aft direction of the left side lower surface of the diffusion container 21H on upper strata, be connected with many (being two in Fig. 6 (b)) ingress pipes 11.On the fore-and-aft direction of the right side lower surface of the diffusion container 21M in middle level, be connected with many (being two in Fig. 6 (b)) ingress pipes 11.On the fore-and-aft direction of the middle part lower surface of the diffusion container 21L of lower floor, be connected with many (being two in Fig. 6 (b)) ingress pipes 11.In addition be configured in, the below of vacuum vessel 3 with the crucible 2 of quantity and valve 51 with described ingress pipe 11.Therefore, whole ingress pipes 11 all runs through the diapire 3b vertically configuration substantially of vacuum vessel 3.And, as shown in Fig. 6 (b), on the rear surface of each diffusion container 21, a part for the evaporating materials that discharges each internal space 22 is installed so that the detection nozzle 26 detecting.In addition, the rear of respectively detecting nozzle 26 disposes respectively quartzy oscillatory type thickness meter 41, and the evaporating materials that described quartzy oscillatory type thickness meter 41 discharges according to described detection nozzle 26 detects the evaporation speed of each diffusion container 21H, 21M, 21L.
Below, about the effect of described vacuum deposition apparatus 1, the difference with described embodiment 1 is described.
In near of substrate K, utilize quartzy oscillatory type thickness meter 41 to measure the overall evaporation speed of multiple diffusion container 21H, 21M, 21L, and at the rear of diffusion container 21H, 21M, 21L, utilize quartzy oscillatory type thickness meter 41 to measure respectively each evaporation speed of described diffusion container 21H, 21M, 21L.And utilize valve 51 suitably to control the flow of evaporating materials, thereby make overall evaporation speed and each evaporation speed of diffusion container 21H, 21M, 21L become required value.
Like this, the vacuum deposition apparatus 1 of described embodiment 2 is same with the vacuum deposition apparatus 1 of embodiment 1, Heating temperature that can lower setting deposition material A, and make the film uniformity of vapor-deposited film in ± 3%.In addition, owing to disposing multiple diffusion containers 21, so by import different types of evaporating materials in each diffusion container 21, thereby can carry out common evaporation.
Although illustrate ingress pipe 11 in described embodiment 1 and 2 for level or cardinal principle vertically, are not limited to this substantially.
And, although illustrated in described embodiment 1 and 2 that diffusion container 21 is provided with nozzle 25 in substrate opposed faces, nozzle 25 also can be installed, but directly discharge evaporating materials from release aperture 23.
In addition,, although illustrated in described embodiment 1 that vacuum deposition apparatus 1 possesses multiple crucibles 2, also can only possess a crucible 2.
In addition, the deposition material A in the multiple crucibles 2 in described embodiment 1 can be different deposition material A(A1, A2), also can be identical.By using identical deposition material A, can further reduce the Heating temperature of setting deposition material A.
In addition, although in described embodiment 1 and 2 as diffusion container 21 internal space thickness (D) and illustrate height, as long as the substrate opposed faces interval of face corresponding thereto.That is, at the upper surface of diffusion container 21, while being substrate opposed faces, the thickness (D) of internal space is intervals, top and bottom, and on the left side of diffusion container 21 or when the right side is substrate opposed faces, the thickness (D) of internal space is face interval, left and right.
Claims (3)
1. a vacuum deposition apparatus carries out evaporation to substrate under vacuum, and it comprises: multiple crucibles, make respectively deposition material evaporation and become evaporating materials; Valve, is connected with the downstream side of described crucible; Diffusion container, imports evaporating materials from described valve by ingress pipe and makes the evaporating materials diffusion importing; And multiple release aperture, the evaporating materials of the internal divergence at described diffusion container is discharged towards substrate, described vacuum deposition apparatus is characterised in that,
Whole described ingress pipes do not have shunt portion.
2. vacuum deposition apparatus according to claim 1, is characterized in that, between the internal space thickness (D) of diffusion container and nozzle, the relation of ultimate range (L) meets following formula:
100×D≥－1.22×L
2＋25L－0.51。
3. vacuum deposition apparatus according to claim 1, is characterized in that,
Evaporation speed is 0.1
/ sec above 10
below/sec,
The internal space thickness (D) of diffusion container be that between the following and nozzle of 1m, ultimate range (L) is below 5m,
And the relation of ultimate range (L) meets any one in following formula (1)～(3) between the internal space thickness (D) of diffusion container and nozzle:
100×D≥－1.22×L
2＋25L－0.51···（1）
100×D≤80×L＋244 ···（2）
100×D≤－0.25×L＋4.75 ···（3）。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013004166A JP6222929B2 (en) | 2013-01-15 | 2013-01-15 | Vacuum deposition equipment |
| JP2013-004166 | 2013-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103924195A true CN103924195A (en) | 2014-07-16 |
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ID=51142582
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320858786.1U Expired - Lifetime CN203768445U (en) | 2013-01-15 | 2013-12-24 | Vacuum evaporation device |
| CN201310721942.4A Pending CN103924195A (en) | 2013-01-15 | 2013-12-24 | Vacuum Evaporating Device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320858786.1U Expired - Lifetime CN203768445U (en) | 2013-01-15 | 2013-12-24 | Vacuum evaporation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6222929B2 (en) |
| KR (1) | KR102180359B1 (en) |
| CN (2) | CN203768445U (en) |
| TW (1) | TWI596224B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104178734A (en) * | 2014-07-21 | 2014-12-03 | 京东方科技集团股份有限公司 | Evaporation coating device |
| CN109321884A (en) * | 2018-10-17 | 2019-02-12 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device |
| CN112877646A (en) * | 2021-01-13 | 2021-06-01 | 嘉讯科技(深圳)有限公司 | High-efficient vacuum plating device with mix and plate |
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| CN206396318U (en) * | 2017-01-24 | 2017-08-11 | 京东方科技集团股份有限公司 | A kind of crucible |
| KR102030683B1 (en) * | 2017-01-31 | 2019-10-10 | 어플라이드 머티어리얼스, 인코포레이티드 | Material Deposition Arrangements, Vacuum Deposition Systems, and Methods Thereof |
| KR102493131B1 (en) * | 2018-02-06 | 2023-01-31 | 삼성디스플레이 주식회사 | Apparatus for deposition a organic material, and deposition method of a organic material using the same |
| KR20200144098A (en) | 2018-04-12 | 2020-12-28 | 가부시키가이샤 도쿠야마 | Photochromic optical article and its manufacturing method |
| JP7473892B2 (en) * | 2020-03-10 | 2024-04-24 | 株式会社昭和真空 | Evaporation source |
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| JP2006225757A (en) * | 2005-01-21 | 2006-08-31 | Mitsubishi Heavy Ind Ltd | Vacuum vapor deposition apparatus |
| JP2007332458A (en) | 2006-05-18 | 2007-12-27 | Sony Corp | Vapor deposition apparatus, and vapor deposition source, and display device manufacturing method |
| WO2007135870A1 (en) * | 2006-05-19 | 2007-11-29 | Ulvac, Inc. | Vapor deposition apparatus for organic vapor deposition material and process for producing organic thin film |
| JP5506147B2 (en) * | 2007-10-18 | 2014-05-28 | キヤノン株式会社 | Film forming apparatus and film forming method |
| JP4551465B2 (en) * | 2008-06-24 | 2010-09-29 | 東京エレクトロン株式会社 | Vapor deposition source, film forming apparatus, and film forming method |
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| KR20120010736A (en) * | 2010-07-27 | 2012-02-06 | 히다치 조센 가부시키가이샤 | Deposition apparatus |
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2013
- 2013-01-15 JP JP2013004166A patent/JP6222929B2/en active Active
- 2013-12-24 CN CN201320858786.1U patent/CN203768445U/en not_active Expired - Lifetime
- 2013-12-24 CN CN201310721942.4A patent/CN103924195A/en active Pending
- 2013-12-26 KR KR1020130163500A patent/KR102180359B1/en active IP Right Grant
-
2014
- 2014-01-15 TW TW103101449A patent/TWI596224B/en active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104178734A (en) * | 2014-07-21 | 2014-12-03 | 京东方科技集团股份有限公司 | Evaporation coating device |
| CN109321884A (en) * | 2018-10-17 | 2019-02-12 | 武汉华星光电半导体显示技术有限公司 | Evaporation coating device |
| WO2020077719A1 (en) * | 2018-10-17 | 2020-04-23 | 武汉华星光电半导体显示技术有限公司 | Evaporation device |
| CN112877646A (en) * | 2021-01-13 | 2021-06-01 | 嘉讯科技(深圳)有限公司 | High-efficient vacuum plating device with mix and plate |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102180359B1 (en) | 2020-11-18 |
| TWI596224B (en) | 2017-08-21 |
| KR20140092221A (en) | 2014-07-23 |
| TW201428116A (en) | 2014-07-16 |
| JP2014136804A (en) | 2014-07-28 |
| JP6222929B2 (en) | 2017-11-01 |
| CN203768445U (en) | 2014-08-13 |
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Application publication date: 20140716 |