CN103869609A - Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing - Google Patents
Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing Download PDFInfo
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- CN103869609A CN103869609A CN201410101905.8A CN201410101905A CN103869609A CN 103869609 A CN103869609 A CN 103869609A CN 201410101905 A CN201410101905 A CN 201410101905A CN 103869609 A CN103869609 A CN 103869609A
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Abstract
The invention discloses an ultraviolet lamp light source structure in roll-to-plane photoetching impression, which comprises an ultraviolet lamp light source and a control circuit capable of controlling the illumination intensity change of the light source, wherein the ultraviolet lamp light source comprises a parabolic lampshade, an ultraviolet lamp tube and a convex lens column; the position between the ultraviolet lamp light source and the mandrel of the roller die is kept unchanged; the control circuit comprises an induction coil probe fixedly arranged on a mandrel at one side end face of the roller die, a plurality of permanent magnets which can correspond to the induction coil probe are uniformly arranged on the end face of the roller die, the polarity of the magnetic poles of the permanent magnets is alternately changed, and the induction coil probe is connected with the ultraviolet lamp tube through an amplifying circuit and a rectifying circuit to form a closed loop.
Description
Technical field
The invention belongs to micro-nano manufacturing technology, especially one is rolled plane photoetching impression medium ultraviolet lamp source structure.
Background technology
At present, in photoetching stamping technique, constantly need to reduce the characteristic dimension in photoengraving pattern, to improve the density of feature in given substrate region, owing to the continuous growth of higher geometric properties density requirements having been promoted to the development of immersion lithographic and extreme ultraviolet lithography.But their price is all quite expensive.
Photoetching impression is can the cheap a kind of important channel that obtains less geometric properties, and it is usually directed to the geometric scheme on impression block to be transferred on substrate.The advantage of this technology is the emission wavelength in not raying of resolution source or the restriction of the pore size of optical projection system of feature, and its resolution is mainly limited to the density of the characteristic pattern on impression block.
Plane is to realize two kinds of technology that micro-nano geometric scheme shifts to plane formula with rolling plane formula photoetching impression, can greatly improve to planar technique the efficiency that photoetching impresses and roll, it is conventionally laid in impression liquid medium curable ultraviolet light (photoresist of for example ultraviolet-curing) roll extrusion and prints on substrate, then the roller impressing mould with characteristic pattern surface is rolled across with the substrate that can impress liquid medium, the patterned surface of mould is contacted successively with liquid medium, again lip-deep roller impressing mould architectural feature is stayed on substrate, pass through again afterwards the irradiation of ultraviolet light, being stamped medium will solidify, finally can obtain the patterned layer of self-supporting.Requirement for ultraviolet source is: in the time that roller impressing mould rolls across substrate, ultraviolet source is wanted to solidify the impression liquid medium with characteristic pattern that roller impressing mould is rolling across, and can not affect also not patterned actuating medium.Current ultraviolet source, due to project organization difference, is difficult to realize above-mentioned requirements.
Summary of the invention
The object of the invention is for overcoming above-mentioned the deficiencies in the prior art, provide one to roll plane photoetching impression medium ultraviolet lamp source structure, this light source can focus on ultraviolet light on the transparent mould surface of photoetching impression, improves the utilization ratio of light source; Can also, according to the operating rate of photoetching marking press, automatically adjust the light intensity of light source, have formed precision high, molding character is stable.
For achieving the above object, the present invention adopts following technical proposals:
One is rolled plane photoetching impression medium ultraviolet lamp source structure, comprise ultraviolet light source and can control the control circuit of described light source light according to Strength Changes, described ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube and convex lens post, described ultraviolet lamp tube is arranged in the para-curve focus of described lampshade, through the reflex of parabolic shape lampshade, will form a branch of parallel beam of light, convex lens post is arranged on paraboloidal opening part, parallel beam of light pools straight line at its focus place after the refraction action of convex lens post, a focus of convex lens post is on rolling the machining area of plane formula photoetching impression, namely the focus of convex lens post is positioned on the tangent line of drum die surface and substrate, between described ultraviolet light source and the mandrel of drum die at roller impressing mould in the time that mandrel rotates, holding position is constant,
Described control circuit comprises the inductive coil probe being fixedly installed on the mandrel of drum die one end, and on aforementioned drum die end face evenly and pole polarity alternately change ground be provided with multiple can with the inductive coil relative permanent magnet of popping one's head in, inductive coil is popped one's head in and is connected to form a closed-loop path through amplifying circuit and rectification circuit and ultraviolet lamp tube; Induction electromotive force is by producing with the synchronous permanent magnet rotating of drum die and fixed inductive coil probe cutting magnetic line, in the time rolling the cylinder rotation that plane photoetching is impressed, in the closed-loop path of coil, will produce induction current, the effective value of this electric current is relevant with drum die rotating speed, the larger effective value of rotating speed is just larger, otherwise just lower; So just can make the intensity of illumination of ultraviolet light source change with the rotating speed of drum die, the larger intensity of illumination of rotating speed of drum die just will be stronger.
One is rolled plane photoetching impression medium ultraviolet lamp source structure, comprise ultraviolet light source and can control the control circuit of described light source light according to Strength Changes, described ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube and convex lens post, focus of described convex lens post and the confocal point of parabolic type lampshade, ultraviolet tube is installed on this confocal point, through the reflex of parabolic shape lampshade, will form a branch of parallel beam of light, convex lens post is arranged on paraboloidal opening part, parallel beam of light another focus place at convex lens post after the refraction action of convex lens post pools straight line, this straight line overlaps with the tangent line of drum die periphery and substrate plane, between described ultraviolet light source and the mandrel of drum die at roller impressing mould in the time that mandrel rotates, holding position is constant,
Described control circuit comprises the inductive coil probe on the mandrel that is fixedly installed in drum die one end face, and on aforementioned drum die end face, be evenly provided with that multiple pole polarity alternately change and can with the inductive coil corresponding permanent magnet of popping one's head in, inductive coil probe is connected to form a closed-loop path through amplifying circuit and rectification circuit and ultraviolet lamp tube; Induction electromotive force is by producing with the synchronous permanent magnet rotating of drum die and fixed inductive coil probe cutting magnetic line, in the time rolling the cylinder rotation that plane photoetching is impressed, in the closed-loop path of coil, will produce induction current, the effective value of this electric current is relevant with drum die rotating speed, the larger effective value of rotating speed is just larger, otherwise just lower; So just can make the intensity of illumination of ultraviolet light source change with the rotating speed of drum die, the larger intensity of illumination of rotating speed of drum die just will be stronger.
The size of described parabolic shape lampshade opening is less than 2 times of drum die inner radial.
Described inductive coil center probe is just to permanent magnet.
The end face of described coil probe and permanent magnet are at a distance of 1-2mm.
Described amplifying circuit is transistor amplifier, its input end is connected with the output terminal of inductive coil probe, transistor amplifier and rectification circuit join, electric signal after rectification is directly inputted in ultraviolet lamp tube, the light intensity of realizing ultraviolet light source rolls the variation of the drum die rotating speed to plane photoetching impression and changes, and completes the speed automatic regulation function of the light intensity roll extrusion seal of light source.
In the present invention, ultraviolet lamp tube is placed on the position of parabolic type lampshade focus, through the reflex of parabolic shape lampshade, will forms a branch of parallel beam of light.Install convex lens post additional in the exit of parabolic shape lampshade, parallel beam of light will pool straight line at its focus place after the refraction action of convex lens post like this.Converge the straight luminous energy inswept hydraulic fluid with roller impressing mould pattern characteristics successively, it is solidified, the hydraulic fluid of non-processing district can not be affected simultaneously.The design of this kind of lamp can not only meet the requirement of rolling light source in plane photoetching impression, because ultraviolet light reflects to cross through reflection and convex lens post, the efficiency of light energy utilization of ultraviolet source is improved greatly.
Ultraviolet tube is placed on simultaneously in a focus of parabolic shape lampshade and convex lens post, and another focus of convex lens post should be at the working interface (being the imprinting moulding district of roller impressing mould and actuating medium) rolling plane formula photoetching impression, its ultraviolet light source capacity usage ratio will be higher.Accurately say, when practical application, also should consider quartzy cylinder, tack coat and the refraction action of roll printing mould to light, whole light source position is finely tuned to (this fine setting is common practise for a person skilled in the art, do not repeat them here), guarantee that the light of light source output is on rolling the machining area of plane formula photoetching impression, and focus of convex lens post and parabolic type lampshade will confocal points, the optical energy utilization efficiency of light source can be higher like this.
The big or small D of parabolic shape lampshade opening will determine according to the size of cylinder internal diameter, convex lens post and ultraviolet lamp tube (to determine that the big or small D of parabolic shape lampshade opening is general knowledge for a person skilled in the art here, do not need creative work, do not repeat them here), general D<2R (R is quartzy cylinder inner radial), the selection of para-curve focus f is wanted to make ultraviolet lamp tube be placed in the focal line of parabolic shape lampshade.By opening D, para-curve focus f and convex lens column dimension with and focal length length determine that (determining of the concrete shape of object plane type lampshade and size is conventional design to those skilled in the art for the concrete shape of parabolic shape lampshade and size, do not need additionally to pay creative work, do not repeat them here).
Ultraviolet light will just in time be radiated on the liquid of ultraviolet curable that quartzy cylinder just printing in roll extrusion, can not be radiated on the actuating medium that also roll extrusion does not print, it is the smaller the better that planoconvex lens post reflects the area that the ultraviolet light that pools stays on substrate under normal circumstances, so equaling convex lens post substantially, the length of convex lens post focal length (to consider quartzy cylinder to the distance of substrate simultaneously, tack coat and the refraction action of roll printing mould to light, the consideration of these factors is to be routine techniques for a person skilled in the art, do not repeat them here), make like this ultraviolet light straight line that refraction forms at focus place through convex lens post just in time drop in substrate plane.Can guarantee like this ultraviolet luminous energy very first time very first time printing in roll extrusion be radiated at will be curing liquid medium on, when cylinder complete after roll extrusion prints, just can form as soon as possible can self-supporting patterned layer.
Ultraviolet source is placed in roller impressing mould, is placed in the inside of quartzy cylinder.Ultraviolet light can see through quartzy cylinder and be irradiated on substrate, roll printing mold material and tack coat should be also light transmissive materials, at roller impressing mould in the time that mandrel rotates, there is not relative motion with respect to mandrel axial line in ultraviolet source position, so just can make quartzy cylinder roll moulding process medium ultraviolet light source can be irradiated to all the time mould just roll extrusion print actuating medium on, and do not affect not roll extrusion print part.
Rolling in moulding process, there is not relative motion in ultraviolet source (comprising ultraviolet lamp tube, parabolic shape lampshade, convex lens post) relatively centre of the drum's axis, be that the ultraviolet light that ultraviolet lamp tube sends converges formation straight line through the reflection of parabolic shape lampshade and the refraction of convex lens post, this straight line drops on the tangent line of quartzy drum die surface and substrate just and always.Respectively add a bearing at the two ends of quartzy cylinder, cylinder rotates around bearing, and ultraviolet source is relative static with the axle center of cylinder, so just can guarantee that cylinder does not change in the position of the relatively quartzy centre of the drum of process medium ultraviolet light source of rolling.
In order to guarantee that the uviol lamp in quartzy cylinder normally works, generally, the intensity of illumination of ultraviolet source is a definite value (voltage and current that is power supply is constant), and what it can not adapt to that process velocity changes rolls plane formula photoetching imprint process.The present invention requires according to the rotating speed of cylinder, to adjust the intensity of illumination of ultraviolet source, and the rotating speed of cylinder is larger, and the time of illumination is shorter, and needed intensity of illumination will be stronger; The rotating speed of cylinder is less, and the time of illumination is just long, and the intensity of illumination of required ultraviolet source is more weak.For the permanent magnet that a uniform circle pole polarity alternately changes on the bearing cap in roller impressing mould outside that achieves the above object, then pop one's head in and just keep 1-2mm apart to permanent magnet and with the end face of permanent magnet with inductive coil.In the time that drum die rotates, permanent magnet also rotates thereupon, and inductive coil probe is to be fixed on the mandrel of cylinder, in coil, produce an induction electromotive force due to inductive coil probe cutting magnetic line like this, this induction electromotive force can change with the rotation speed change of cylinder, if circuit is closed-loop path, in circuit, will produce the electric current with the rotation speed change of cylinder, the watt current that the rotating speed of cylinder induces is more greatly just larger.The rectification after amplifying circuit of this induction current, as the power supply of uviol lamp, so just can make the intensity of illumination of ultraviolet source change with the rotating speed of cylinder, and the larger intensity of illumination of rotating speed of cylinder is just stronger.
In the time that roller impressing mould rolls across substrate, the liquid curing with characteristic pattern that it can make roller impressing mould roll across, and can not affect the curable hydraulic fluid also not rolling across, this device can also be according to the operating rate of photoetching marking press simultaneously, automatically the light intensity of adjusting light source, makes to roll the variation that can automatically be suitable for different speed of imprint to plane formula photoetching Embosser.
Accompanying drawing explanation
Fig. 1 rolls plane photoetching impression light source optical path principle cross-sectional view (line with arrow represents ultraviolet light);
Fig. 2 rolls the cut-open view to plane photoetching impression light source optical path principle A-A;
Fig. 3 rolls plane photoetching impression light source intensity control principle drawing (K is to view);
Fig. 4 uviol lamp intensity control circuit theory diagrams;
Wherein, 1, roll impressing mould; 101, convex pattern characteristics; 102, female pattern feature; 2, tack coat; 3, quartzy cylinder; 4, ultraviolet light source; 401, parabolic shape lampshade; 402, ultraviolet tube; 403, convex lens post; 5, inductive coil probe; 6, mandrel; 7, bearing; 8, permanent magnet; 9, amplifying circuit; 10, rectification circuit.
Embodiment
The present invention is described further from five aspects to Fig. 4 and embodiment below in conjunction with Fig. 1.
Roll the implementation process to plane formula photoetching impression: in rolling plane photoetching impression, conventionally photoetching stamp work medium curable ultraviolet light is placed on impression substrate, then the impressing mould 1 that rolls with pattern characteristics is placed on this substrate, mould is to be fixed on quartzy cylinder 3 by tack coat 2, when roller impressing mould rolls across when can impressing liquid-working-medium, printable liquid-working-medium will be full of the protruding of roller impressing mould, female pattern feature 101, in 102, as shown in fig. 1, ultraviolet light source 4(is by parabolic shape lampshade 401, ultraviolet lamp tube 402, convex lens post 403 forms) ultraviolet light that sends is through quartzy cylinder 3, tack coat 2 and roll impressing mould 1 after be radiated on the substrate with pattern characteristics, make the liquid-working-medium of ultraviolet-curing occur to solidify, formation has characteristic pattern layer that can self-supporting.The structure of roller impressing mould 1, ultraviolet light source 4 and the light source installation site in roller impressing mould 1 as shown in Figure 1 and Figure 2.
The implementation process of ultraviolet source: in Fig. 1, a kind of light that ultraviolet lamp tube can be sent pools the ultraviolet source 4 of straight line, it is made up of parabolic shape lampshade 401, ultraviolet lamp tube 402, convex lens post 403.Ultraviolet lamp tube 402 is placed on the focus f position of parabolic type lampshade 401, through the reflex of parabolic shape lampshade, will forms a branch of parallel beam of light.Install convex lens post 403 additional in the exit of parabolic shape lampshade, parallel beam of light will pool straight line at its focus place after the refraction action of convex lens post like this.Converge the straight luminous energy inswept hydraulic fluid with roller impressing mould pattern characteristics successively, it is solidified, and can not be affected at the liquid medium of processing district, because ultraviolet light reflects and crosses the capacity usage ratio of ultraviolet source is improved greatly through reflection and convex lens post.
While accurately enforcement, convex lens post 403 will be arranged on paraboloidal opening part, focus of convex lens post 403 and parabolic type lampshade 401 are wanted confocal point, another focus will be on rolling the machining area of plane formula photoetching impression, namely the focal line of convex lens post 403 will be positioned on the tangent line of cylinder and substrate, when installation, also should consider quartzy cylinder, tack coat and the refraction action of roll printing mould to light, whole light source position is finely tuned, guarantee that the light of light source output is on rolling the machining area of plane formula photoetching impression, and another focus of convex lens post and parabolic type lampshade are wanted confocal point, the utilization ratio of optical energy of light source can be higher like this.
In the ultraviolet source structural design of Fig. 1, the big or small D of parabolic shape lampshade opening will determine according to the size of cylinder internal diameter, ultraviolet lamp tube and convex lens post and focal length thereof, D<2R (R is quartzy cylinder inner radial), the selection of para-curve focus f is wanted to make ultraviolet lamp tube be placed on the focal line of parabolic shape lampshade.By opening D, para-curve focus f and convex lens column dimension with and focal length length determine that concrete shape and the size of parabolic shape lampshade, ultraviolet light will be radiated on the perform region that quartzy cylinder just printing in roll extrusion.Planoconvex lens post reflects the ultraviolet light pooling to throw area on substrate the smaller the better in general, is ideally straight line.The length of convex lens post focal length equals convex lens post and (in enforcement, passes through to consider quartzy cylinder, tack coat and the refraction action of roll printing mould to light to the distance of substrate, to suitably be finely tuned), make like this ultraviolet light straight line that refraction forms at focus place through convex lens post just in time drop in substrate plane.Can guarantee to be radiated on liquid-working-medium in the ultraviolet luminous energy very first time very first time of roll extrusion, when cylinder complete after roll extrusion prints, can form as soon as possible can self-supporting patterned layer.There is the advantages such as formed precision is high, molding character stable, reliable.
The installation site of ultraviolet source: ultraviolet source is placed in roller impressing mould, is placed in the inside of quartzy cylinder.Ultraviolet light can see through quartzy cylinder 3, tack coat 2 and roll impressing mould 1 and be irradiated on substrate.When roller impressing mould is in the time that mandrel rotates, there is not relative motion with respect to wire mandrel in ultraviolet source, so just can make quartzy cylinder rolling in moulding process, and ultraviolet source can be irradiated to the liquid working medium place that roller impressing mould is just printing in roll extrusion all the time.Rolling in moulding process, ultraviolet light source position (comprising ultraviolet lamp tube, parabolic shape lampshade, convex lens post) cylinder mandrel not change of center relatively, it is in alignment to be that ultraviolet light that ultraviolet lamp tube sends crosses after the reflection of parabolic shape lampshade and the refraction of convex lens post, and this straight line drops on the tangent line of quartzy drum die surface and substrate just and always.Ultraviolet light source 4 keeps static with the mandrel of cylinder, can guarantee that like this cylinder does not move at the center line of the relatively quartzy cylinder of process medium ultraviolet light source rolling.
The implementation process of controlled uviol lamp: from Fig. 2, Fig. 3 and Fig. 4, inductive coil probe 5 is mounted in the side of quartzy cylinder, is fixed on mandrel 6, and keeps relative static with mandrel 6.In the time that quartzy cylinder rotates by bearing 7 with respect to mandrel 6, the permanent magnet 8 being arranged on the bearing cap of quartzy cylinder one side will synchronously rotate with quartzy cylinder, due to multiple permanent magnets be evenly and pole polarity alternately change and be arranged on the bearing cap of quartzy cylinder side, static like this inductive coil probe 5 will alternately cut the magnetic line of force of the different magnetic poles that permanent magnet 8 sends, thereby produce the induction electromotive force that effective value changes with quartzy drum rotation speed, after amplifying circuit 9 and rectification circuit 10, for uviol lamp power supply, the light power that uviol lamp sends like this will change with the variation of roll extrusion print-out rate.
The implementation process of control circuit: the intensity of illumination of ultraviolet source is wanted to change according to the rotating speed of cylinder, and the rotating speed of cylinder is larger, and the time of illumination is shorter, and needed intensity of illumination is just stronger; The rotating speed of cylinder is less, and the time of illumination is long, and the intensity of illumination of required ultraviolet source is just more weak.For achieving the above object us at the alternately permanent magnet 8 of variation of the uniform circle pole polarity in the outside of roller impressing mould, then pop one's head in 5 centers just to permanent magnet with inductive coil, make end face and the permanent magnet 1-2mm apart of coil probe.In the time that drum die rotates, coupled permanent magnet also synchronously rotates thereupon, will pop one's head in 5 and produce an alternating voltage signal u at inductive coil like this
i, this voltage can change with the rotation speed change of cylinder, and the effective value of the larger voltage of rotating speed of cylinder is just larger.This signal is input to the input end of amplifying circuit 9, after the input end that is loaded into rectification circuit 10 through amplifying signal, its output terminal obtains output voltage u
1, this voltage is just the power supply of uviol lamp, so just can make the intensity of illumination of ultraviolet source change with the degree of turning of cylinder, the larger intensity of illumination of degree of turning of cylinder will be stronger.R in Fig. 4
bfor base biasing resistor, it provides quiescent point, R for amplifying circuit
cfor collector load resistor, thereby the variation that it is voltage by the change transitions of electric current in transistor amplifier realizes the amplification output of voltage, C
1, C
2for coupling capacitance plays the logical effect exchanging of stopping direct current.Certainly while specifically enforcement, also can use other amplifying circuit.
By reference to the accompanying drawings the specific embodiment of the present invention is described although above-mentioned; but not limiting the scope of the invention; one of ordinary skill in the art should be understood that; on the basis of technical scheme of the present invention, those skilled in the art do not need to pay various modifications that creative work can make or distortion still in protection scope of the present invention.
Claims (6)
1. one kind is rolled plane photoetching impression medium ultraviolet lamp source structure, it is characterized in that, comprise ultraviolet light source and can control the control circuit of described light source light according to Strength Changes, described ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube and convex lens post, described ultraviolet lamp tube is arranged in the para-curve focus of described lampshade, through the reflex of parabolic shape lampshade, will form a branch of parallel beam of light, convex lens post is arranged on paraboloidal opening part, parallel beam of light pools straight line at its focus place after the refraction action of convex lens post, a focus of convex lens post is on rolling the machining area of plane formula photoetching impression, namely the focus of convex lens post is positioned on the tangent line of drum die surface and substrate, between described ultraviolet light source and the mandrel of drum die at roller impressing mould in the time that mandrel rotates, holding position is constant,
Described control circuit comprises the inductive coil probe being fixedly installed on drum die one side end face mandrel, and on aforementioned drum die end face evenly and pole polarity alternately change ground be provided with multiple can with the inductive coil corresponding permanent magnet of popping one's head in, inductive coil is popped one's head in and is connected to form a closed-loop path through amplifying circuit and rectification circuit and ultraviolet lamp tube; Induction electromotive force is by producing with the synchronous permanent magnet rotating of drum die and fixed inductive coil probe cutting magnetic line, in the time rolling the cylinder rotation that plane photoetching is impressed, in the closed-loop path of coil, will produce induction current, the effective value of this electric current is relevant with drum die rotating speed, the larger effective value of rotating speed is just larger, otherwise just lower; So just can make the intensity of illumination of ultraviolet light source change with the rotating speed of drum die, the larger intensity of illumination of rotating speed of drum die will be stronger.
2. one kind is rolled plane photoetching impression medium ultraviolet lamp source structure, it is characterized in that, comprise ultraviolet light source and can control the control circuit of described light source light according to Strength Changes, described ultraviolet light source comprises parabolic shape lampshade, ultraviolet lamp tube and convex lens post, focus of described convex lens post and the confocal point of parabolic type lampshade, ultraviolet tube is installed on this confocal point, through the reflex of parabolic shape lampshade, will form a branch of parallel beam of light, convex lens post is arranged on paraboloidal opening part, parallel beam of light another focus place at convex lens post after the refraction action of convex lens post pools straight line, this straight line overlaps with the tangent line of drum die periphery and substrate plane, between described ultraviolet light source and the mandrel of drum die at roller impressing mould in the time that mandrel rotates, holding position is constant,
Described control circuit comprises the inductive coil probe on the mandrel that is fixedly installed in drum die one side end face, and on aforementioned drum die end face, be evenly provided with that multiple pole polarity alternately change and can with the inductive coil corresponding permanent magnet of popping one's head in, inductive coil probe is connected to form a closed-loop path through amplifying circuit and rectification circuit and ultraviolet lamp tube; Induction electromotive force is by producing with the synchronous permanent magnet rotating of drum die and fixed inductive coil probe cutting magnetic line, in the time rolling the cylinder rotation that plane photoetching is impressed, in the closed-loop path of coil, will produce induction current, the effective value of this electric current is relevant with drum die rotating speed, the larger effective value of rotating speed is just larger, otherwise just lower; So just can make the intensity of illumination of ultraviolet light source change with the rotating speed of drum die, the larger intensity of illumination of rotating speed of drum die will be stronger.
3. ultraviolet light source structure as claimed in claim 1 or 2, is characterized in that, the size of described parabolic shape lampshade opening is less than 2 times of drum die inner radial.
4. ultraviolet light source structure as claimed in claim 1 or 2, is characterized in that, described inductive coil center probe is just to permanent magnet.
5. ultraviolet light source structure as claimed in claim 1 or 2, is characterized in that, the end face of described coil probe and permanent magnet are at a distance of 1-2mm.
6. ultraviolet light source structure as claimed in claim 1 or 2, it is characterized in that, described amplifying circuit is transistor amplifier, its input end is connected with the output terminal of inductive coil probe, transistor amplifier and rectification circuit join, electric signal after rectification is directly inputted in ultraviolet lamp tube, and the light intensity of realizing ultraviolet light source rolls the variation of the drum die rotating speed to plane photoetching impression and changes, and completes the speed automatic regulation function of the light intensity roll extrusion seal of light source.
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| CN201410101905.8A CN103869609B (en) | 2014-03-18 | 2014-03-18 | Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing |
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| CN201410101905.8A CN103869609B (en) | 2014-03-18 | 2014-03-18 | Ultraviolet lamp light source structure in roll-to-plane photoetching and embossing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104635433A (en) * | 2015-01-26 | 2015-05-20 | 青岛理工大学 | External roll-to-plane micro-nano photoetching impression light source device |
| US20210364913A1 (en) * | 2020-05-22 | 2021-11-25 | Stensborg A/S | Method of, and Apparatus for, Simultaneous Dual-Sided Imprinting |
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| CN103869609B (en) | 2018-04-06 |
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