CN103842887B - 提供具有和化学蚀刻有关的高硬度和低惯性的镜子的***和方法 - Google Patents
提供具有和化学蚀刻有关的高硬度和低惯性的镜子的***和方法 Download PDFInfo
- Publication number
- CN103842887B CN103842887B CN201280031879.5A CN201280031879A CN103842887B CN 103842887 B CN103842887 B CN 103842887B CN 201280031879 A CN201280031879 A CN 201280031879A CN 103842887 B CN103842887 B CN 103842887B
- Authority
- CN
- China
- Prior art keywords
- mirror
- mirror structure
- liquid etchant
- beryllium
- etchant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/30—Acidic compositions for etching other metallic material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optical Elements Other Than Lenses (AREA)
- ing And Chemical Polishing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161513274P | 2011-07-29 | 2011-07-29 | |
US61/513,274 | 2011-07-29 | ||
PCT/US2012/048513 WO2013019607A2 (en) | 2011-07-29 | 2012-07-27 | Systems and methods for providing mirrors with high stiffness and low inertia involving chemical etching |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103842887A CN103842887A (zh) | 2014-06-04 |
CN103842887B true CN103842887B (zh) | 2017-03-08 |
Family
ID=47597023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280031879.5A Expired - Fee Related CN103842887B (zh) | 2011-07-29 | 2012-07-27 | 提供具有和化学蚀刻有关的高硬度和低惯性的镜子的***和方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US20130027795A1 (zh) |
EP (1) | EP2737357A4 (zh) |
JP (1) | JP6188692B2 (zh) |
KR (1) | KR102108022B1 (zh) |
CN (1) | CN103842887B (zh) |
CA (1) | CA2839308A1 (zh) |
WO (1) | WO2013019607A2 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7273780B2 (ja) * | 2020-12-09 | 2023-05-15 | 矢崎総業株式会社 | ヘッドアップディスプレイ装置 |
JP2022140128A (ja) * | 2021-03-12 | 2022-09-26 | 京セラ株式会社 | ミラーアクチュエータ |
JP2022140129A (ja) * | 2021-03-12 | 2022-09-26 | 京セラ株式会社 | ミラーアクチュエータ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101930088A (zh) * | 2010-08-04 | 2010-12-29 | 中国建筑材料科学研究总院 | 一种表面玻璃化铍金属平面反射镜及一种特种玻璃 |
JP2011064964A (ja) * | 2009-09-17 | 2011-03-31 | Hoya Corp | 光スキャナ |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2162590A (en) * | 1939-01-14 | 1939-06-13 | James L Richter | Simulated bevel vanity mirror |
US2439999A (en) * | 1944-12-09 | 1948-04-20 | Pittsburgh Plate Glass Co | Process of forming films upon the surfaces of glass plates |
US2658317A (en) * | 1951-02-23 | 1953-11-10 | Libbey Owens Ford Glass Co | Process of working glass |
US3487520A (en) * | 1966-10-19 | 1970-01-06 | Hughes Aircraft Co | Process for producing heat transfer panels |
US3524132A (en) * | 1967-07-06 | 1970-08-11 | Honeywell Inc | Galvanometer having a wide reflective mirror with low inertia |
US3799680A (en) * | 1972-01-03 | 1974-03-26 | Kollmorgen Corp | Photometer optical system having viewing magnification and light attenuation means |
DE2936667A1 (de) | 1978-09-12 | 1980-03-20 | Canon Kk | Kopiergeraet |
US4492669A (en) * | 1983-03-21 | 1985-01-08 | The Perkin-Elmer Corporation | Method and means for making a beryllium mirror |
US4685778A (en) * | 1986-05-12 | 1987-08-11 | Pollock David B | Process for nuclear hardening optics and product produced thereby |
US5076700A (en) * | 1990-12-20 | 1991-12-31 | Litton Systems, Inc. | Bonded lightweight mirror structure |
JP3968788B2 (ja) * | 1997-03-21 | 2007-08-29 | セイコーエプソン株式会社 | 半導体装置及びフィルムキャリアテープの製造方法 |
US6108121A (en) * | 1998-03-24 | 2000-08-22 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined high reflectance deformable mirror |
JP3531554B2 (ja) * | 1999-10-21 | 2004-05-31 | 松下電器産業株式会社 | 光学ミラーと光学スキャナーおよびレーザ加工機 |
US6939475B2 (en) * | 2001-08-31 | 2005-09-06 | Daishinku Corporation | Etching method, etched product formed by the same, and piezoelectric vibration device, method for producing the same |
EP1438256A2 (en) * | 2001-10-22 | 2004-07-21 | Montana State University-Bozeman | Stiffened surface micromachined structures and process for fabricating the same |
JP4151959B2 (ja) * | 2003-06-19 | 2008-09-17 | 株式会社リコー | 振動ミラー及びその製造方法、光書込装置、画像形成装置 |
US7365464B2 (en) * | 2003-09-05 | 2008-04-29 | Gsi Group Corporation | Composite rotor and output shaft for galvanometer motor and method of manufacture thereof |
EP1695131A2 (en) | 2003-11-24 | 2006-08-30 | GSI Group Corporation | Improved mirror mounting structures for scanners employing limited rotation motors |
US7404647B1 (en) * | 2003-12-11 | 2008-07-29 | Gsi Group Corporation | Method for optimal material selection and processing for dynamic mirror applications |
WO2005119309A1 (ja) * | 2004-06-04 | 2005-12-15 | Brother Kogyo Kabushiki Kaisha | 反射ミラー製作方法および反射ミラー |
WO2007008727A2 (en) * | 2005-07-12 | 2007-01-18 | Gsi Group Corporation | System and method for high power laser processing |
KR100707133B1 (ko) * | 2006-05-16 | 2007-04-13 | 삼성전자주식회사 | 미러구조 및 이를 포함하는 광스캐너 |
JP2008209653A (ja) * | 2007-02-26 | 2008-09-11 | Brother Ind Ltd | 光走査装置、網膜走査型表示装置及び光走査装置の製造方法 |
US20090062024A1 (en) * | 2007-08-27 | 2009-03-05 | Gsi Group Corporation | Mirror Mounting |
JP2010008613A (ja) * | 2008-06-25 | 2010-01-14 | Panasonic Electric Works Co Ltd | 半導体機械構造体及びそれを用いた光走査ミラー |
DE102008039042B4 (de) * | 2008-08-21 | 2011-04-14 | Schott Ag | Substrat für einen Spiegelträger mit reduziertem Gewicht sowie Spiegel mit gewichtsreduziertem Spiegelträger |
KR101757277B1 (ko) * | 2009-04-23 | 2017-07-13 | 노반타 코포레이션 | 제한된 회전 모터에 연결된 스캐닝 미러의 향상된 성능을 제공하는 시스템 및 방법 |
-
2012
- 2012-07-27 KR KR1020147001191A patent/KR102108022B1/ko active IP Right Grant
- 2012-07-27 CN CN201280031879.5A patent/CN103842887B/zh not_active Expired - Fee Related
- 2012-07-27 US US13/560,023 patent/US20130027795A1/en not_active Abandoned
- 2012-07-27 JP JP2014523988A patent/JP6188692B2/ja active Active
- 2012-07-27 WO PCT/US2012/048513 patent/WO2013019607A2/en unknown
- 2012-07-27 CA CA2839308A patent/CA2839308A1/en not_active Abandoned
- 2012-07-27 EP EP12819641.7A patent/EP2737357A4/en not_active Withdrawn
-
2016
- 2016-06-28 US US15/195,156 patent/US10761293B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011064964A (ja) * | 2009-09-17 | 2011-03-31 | Hoya Corp | 光スキャナ |
CN101930088A (zh) * | 2010-08-04 | 2010-12-29 | 中国建筑材料科学研究总院 | 一种表面玻璃化铍金属平面反射镜及一种特种玻璃 |
Also Published As
Publication number | Publication date |
---|---|
WO2013019607A2 (en) | 2013-02-07 |
US20130027795A1 (en) | 2013-01-31 |
JP2014524594A (ja) | 2014-09-22 |
JP6188692B2 (ja) | 2017-08-30 |
WO2013019607A3 (en) | 2013-03-28 |
EP2737357A4 (en) | 2015-04-22 |
US10761293B2 (en) | 2020-09-01 |
KR20140105709A (ko) | 2014-09-02 |
US20170045709A1 (en) | 2017-02-16 |
KR102108022B1 (ko) | 2020-05-28 |
CN103842887A (zh) | 2014-06-04 |
CA2839308A1 (en) | 2013-02-07 |
EP2737357A2 (en) | 2014-06-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Massachusetts, USA Patentee after: Wanda Address before: Massachusetts, USA Patentee before: GSI Group Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170420 Address after: Massachusetts, USA Patentee after: GSI Group Ltd. Address before: Massachusetts, USA Patentee before: Cambridge Technology, Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170308 Termination date: 20200727 |