CN103777158A - Rotating cathode magnetic field homogeneity measuring device and test method - Google Patents
Rotating cathode magnetic field homogeneity measuring device and test method Download PDFInfo
- Publication number
- CN103777158A CN103777158A CN201410031748.8A CN201410031748A CN103777158A CN 103777158 A CN103777158 A CN 103777158A CN 201410031748 A CN201410031748 A CN 201410031748A CN 103777158 A CN103777158 A CN 103777158A
- Authority
- CN
- China
- Prior art keywords
- magnetic field
- instrument
- handwheel
- field intensity
- gauss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measuring Magnetic Variables (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Abstract
The invention relates to a magnetron sputtering cathode magnetic field homogeneity measuring device and a test method thereof. The device and method are particularly used for measuring magnetic field intensity change of a cathode magnetic bar in the same area in the axial direction. The measuring device comprises a machine framework part provided with a guide rail, a moving trolley is in sliding connection with the guide rail of the machine framework part, the machine framework part further comprises a first hand wheel moving mechanism, a second hand wheel moving mechanism and an instrument clamp part, wherein the first hand wheel moving mechanism is used for controlling back and forth movement of the trolley, the second hand wheel moving mechanism is used for adjusting the vertical height of an instrument for measuring the magnetic field intensity, and the instrument clamp part is used for fixing the instrument for measuring the magnetic field intensity. The rotating cathode magnetic field homogeneity measuring device is simple in structure, the device is utilized for a test, the magnetic field intensity change of the magnetic bar at the position of the same horizontal height can be accurately measured, operation is simple and convenient, and the device can be repeatedly used.
Description
Technical field
The present invention relates to magnetic control sputtering cathode magnetic field homogeneity measuring equipment, particularly measure the negative electrode bar magnet change of magnetic field strength of the same area in the axial direction.
Background technology
Along with the extensive use of energy-saving glass, magnetron sputtering film production line for the production of low radiation coated glass is extensively installed and is put into production, the sputter cathode bar magnet of many production lines is cooled, and water constantly corrodes and the variation of circulating water temperature causes magnetic field very inhomogeneous in the axial direction, thereby the properties of product of producing decline or even substandard product, therefore need regularly to detect in order in time defective bar magnet being changed do homogeneity for the Cathod magnetic field of sputter, the main armrest of industry is held Gauss's instrument anticathode magnetic field and is done magnetic-field measurement at present, but all magnetic field position intensity different in space is different, thereby by artificial very large at magnetic field space same level sustained height measurement bar magnet homogeneity error with hand, cannot make and accurately judge that whether the homogeneity of bar magnet is qualified.
Summary of the invention
Object of the present invention has overcome above deficiency, provides the magnetic field that a kind of equipment simple to operation accurately measures bar magnet to change in the power of axial distribution and magnetic field intensity.
Rotating cathode magnetic field homogeneity testing apparatus, rotating cathode magnetic field homogeneity testing apparatus, comprise the board frame section that is provided with guide rail, travelling car is slidably connected on the guide rail of described board frame section, also comprise the first handwheel travel mechanism, the second handwheel travel mechanism and instrument folder part, wherein, described the first handwheel travel mechanism is used for controlling dolly and seesaws, described the second handwheel travel mechanism is for regulating the height up and down of measuring magnetic field intensity instrument, and described instrument folder part is for fixation measuring magnetic field intensity instrument.
Described board frame section comprises board base, level governor and two guide rails, and described board base top is provided with four for regulating the level governor of described board level, and the top of described level governor is fixedly installed described two guide rails.
On described travelling car car body, be fixedly connected with described instrument folder, on described instrument folder, be fixedly connected with described measurement magnetic field intensity instrument.
Described measurement magnetic field intensity instrument is Gauss's instrument.
The method of testing that adopts described rotating cathode magnetic field homogeneity testing apparatus to test: comprise following step:
The first step, rotating cathode is imported to negative electrode roll-over table, and four jiaos are locked with pressing plate;
Second step, to turn roll-over table dolly shake wheel by 180 ° of negative electrode upsets to level and insert in locking bar position is fixed;
The 3rd step, Cathod magnetic field test board is hung on negative electrode cover plate according to cathode targets direction;
The 4th step, four level governor height of adjustment test board, be adjusted to horizontality by whole board;
The 5th step, rotation the second handwheel travel mechanism are adjusted to extreme higher position at above-below direction by instrument stand;
The 6th step, Gauss's instrument is arranged on to instrument folder goes up and fix locked;
The 7th step, rotation the first handwheel travel mechanism move to magnet steel one and magnet steel two centers at fore-and-aft direction by Gauss's instrument;
The 8th step, rotation the second handwheel travel mechanism move to certain altitude position, surface, two magnetic cylinder centers at above-below direction by Gauss's instrument;
The 9th step, open Gauss's instrument;
The tenth step, manually promote frame dolly and move from left to right, record at a certain distance magnet steel intensity record, institute's numerical value that records plots curve by EXCEL and calculating magnetic field intensity tolerance is judged that whether bar magnet is qualified or again magnetizes to guarantee homogeneity;
Further, along mobile the first screw mechanism handwheel after the axial every 50mm test of magnetic cylinder magnetic field intensity, Gauss's instrument is moved to magnetic cylinder surfaces 1mm height, promote from left to right successively the every 50mm test magnetic field intensity of dolly record.
Beneficial effect: rotating cathode magnetic field homogeneity testing apparatus of the present invention is simple in structure, utilize the magnetic field that can meet bar magnet after this invention testing equipment in the position of same level sustained height Measurement accuracy bar magnet change of magnetic field strength, easy to operate simple, equipment division is reused.
Accompanying drawing explanation
Fig. 1 is the front view of present device;
Fig. 2 is the left view of Fig. 1;
Wherein, 1, board base; 2, guide rail; 3, level governor; 4, travelling car; 5, the first handwheel travel mechanism; 6, the second handwheel travel mechanism; 7, instrument folder; 8, Gauss's instrument; 9, magnetic cylinder one; 10, magnetic cylinder two.
Embodiment
Below in conjunction with accompanying drawing, rotating cathode magnetic field homogeneity testing apparatus of the present invention is described in further detail.
Rotating cathode magnetic field homogeneity testing apparatus of the present invention comprises as lower member:
Comprise the long 3900-4500mm of two guide rails, the board framework of wide 820-900mm, high 200-300mm;
One dolly that can carry magnetic field strong detecting instrument device and slide on guide rail;
One screw mechanism seesawing for dolly and handwheel;
One measures magnetic field intensity instrument screw mechanism and the handwheel of height up and down for regulating;
One folder of the instrument for fixation measuring magnetic field intensity instrument;
Four for regulating the regulator of board framework level;
For facilitating the keel ear of lifting appliance;
Utilize the inhomogeneity method of the inhomogeneity testing of equipment of above-mentioned measurement Cathod magnetic field, comprise the following steps:
The first step, rotating cathode is imported to negative electrode roll-over table, and four jiaos are locked with pressing plate;
Second step, to turn roll-over table dolly shake wheel by 180 ° of negative electrode upsets to level and insert in locking bar position is fixed;
The 3rd step, Cathod magnetic field test board is hung on negative electrode cover plate according to cathode targets direction;
The 4th step, four level governor height of adjustment test board, be adjusted to horizontality by whole board;
The 5th step, rotation the second handwheel travel mechanism are adjusted to extreme higher position at above-below direction by instrument stand;
The 6th step, Gauss's instrument is arranged on to instrument folder goes up and fix locked;
The 7th step, rotation the first handwheel travel mechanism move to magnet steel one and magnet steel two centers at fore-and-aft direction by Gauss's instrument;
The 8th step, rotation the second handwheel travel mechanism move to certain altitude position, surface, two magnetic cylinder centers at above-below direction by Gauss's instrument;
The 9th step, open Gauss's instrument;
The tenth step, manually promote frame dolly and move from left to right, record at a certain distance magnet steel intensity record, institute's numerical value that records plots curve by EXCEL and calculating magnetic field intensity tolerance is judged that whether bar magnet is qualified or again magnetizes to guarantee homogeneity.
In described the tenth step, along mobile the first screw mechanism handwheel after the axial every 50mm test of magnetic cylinder magnetic field intensity, Gauss's instrument is moved to magnetic cylinder surfaces 1mm height, promote from left to right successively the every 50mm test magnetic field intensity of dolly record.
Claims (5)
1. rotating cathode magnetic field homogeneity testing apparatus, it is characterized in that, comprise the board frame section that is provided with guide rail, travelling car is slidably connected on the guide rail of described board frame section, also comprise the first handwheel travel mechanism, the second handwheel travel mechanism and instrument folder part, wherein, described the first handwheel travel mechanism is used for controlling dolly and seesaws, described the second handwheel travel mechanism is for regulating the height up and down of measuring magnetic field intensity instrument, and described instrument folder part is for fixation measuring magnetic field intensity instrument.
2. rotating cathode magnetic field homogeneity testing apparatus according to claim 1, it is characterized in that, described board frame section comprises board base, level governor and two guide rails, described board base top is provided with four for regulating the level governor of described board level, and the top of described level governor is fixedly installed described two guide rails.
3. rotating cathode magnetic field homogeneity testing apparatus according to claim 2, is characterized in that, is fixedly connected with described instrument folder on described travelling car car body, on described instrument folder, is fixedly connected with described measurement magnetic field intensity instrument.
4. rotating cathode magnetic field homogeneity testing apparatus according to claim 3, is characterized in that, described measurement magnetic field intensity instrument is Gauss's instrument.
5. the method for testing that described in employing claim 1, rotating cathode magnetic field homogeneity testing apparatus is tested: comprise following step:
The first step, rotating cathode is imported to negative electrode roll-over table, and four jiaos are locked with pressing plate;
Second step, to turn roll-over table dolly shake wheel by 180 ° of negative electrode upsets to level and insert in locking bar position is fixed;
The 3rd step, Cathod magnetic field test board is hung on negative electrode cover plate according to cathode targets direction;
The 4th step, four level governor height of adjustment test board, be adjusted to horizontality by whole board;
The 5th step, rotation the second handwheel travel mechanism are adjusted to extreme higher position at above-below direction by instrument stand;
The 6th step, Gauss's instrument is arranged on to instrument folder goes up and fix locked;
The 7th step, rotation the first handwheel travel mechanism move to magnet steel one and magnet steel two centers at fore-and-aft direction by Gauss's instrument;
The 8th step, rotation the second handwheel travel mechanism move to magnetic cylinder surfaces certain altitude position at above-below direction by Gauss's instrument;
The 9th step, open Gauss's instrument;
The tenth step, manually promote frame dolly and move from left to right, record at a certain distance magnetic cylinder intensity record, institute's numerical value that records plots curve by EXCEL and calculating magnetic field intensity tolerance is judged that whether bar magnet is qualified or again magnetizes to guarantee homogeneity;
Method according to claim 5, it is characterized in that, in described the tenth step, along mobile the first screw mechanism handwheel after the axial every 50mm test of magnetic cylinder magnetic field intensity, Gauss's instrument is moved to magnetic cylinder surfaces 1mm height, promote from left to right successively the every 50mm test magnetic field intensity of dolly record.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410031748.8A CN103777158B (en) | 2014-01-23 | 2014-01-23 | Rotating cathode magnetic field homogeneity test equipment and method of testing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410031748.8A CN103777158B (en) | 2014-01-23 | 2014-01-23 | Rotating cathode magnetic field homogeneity test equipment and method of testing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103777158A true CN103777158A (en) | 2014-05-07 |
| CN103777158B CN103777158B (en) | 2017-07-28 |
Family
ID=50569626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410031748.8A Active CN103777158B (en) | 2014-01-23 | 2014-01-23 | Rotating cathode magnetic field homogeneity test equipment and method of testing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103777158B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106707204A (en) * | 2016-11-14 | 2017-05-24 | 浙江上方电子装备有限公司 | Rotating cathode magnetic rod magnetic field automatic calibration device |
| CN109932666A (en) * | 2019-03-28 | 2019-06-25 | 京东方科技集团股份有限公司 | Mgnetic observations jig and the method that mgnetic observations are carried out using the jig |
| CN110967562A (en) * | 2019-11-27 | 2020-04-07 | 北京无线电计量测试研究所 | Method and device for measuring uniform domain of radiation sensitivity test field |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1113283A2 (en) * | 1999-12-27 | 2001-07-04 | Delta Tooling Co., Ltd. | Magnetic field measuring equipment |
| CN1632609A (en) * | 2004-12-28 | 2005-06-29 | 陕西师范大学 | Testing device for magnetic field and magnetic force in three-dimensional space |
| CN1963555A (en) * | 2006-12-08 | 2007-05-16 | 哈尔滨工业大学 | Three-dimension measuring apparatus and method for space magnetic field of minitype permanent-magnet |
| CN101509961A (en) * | 2009-03-23 | 2009-08-19 | 哈尔滨工业大学 | Bar permanent magnet section magnetic-flux measurement apparatus and measurement method thereof |
| CN201322791Y (en) * | 2008-12-23 | 2009-10-07 | 中国科学院电工研究所 | Device for measuring magnetic field distribution of superconducting magnet |
| CN201387681Y (en) * | 2008-12-11 | 2010-01-20 | 浙江天煌科技实业有限公司 | Helmholtz coil magnetic field measuring experimental apparatus |
-
2014
- 2014-01-23 CN CN201410031748.8A patent/CN103777158B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1113283A2 (en) * | 1999-12-27 | 2001-07-04 | Delta Tooling Co., Ltd. | Magnetic field measuring equipment |
| CN1632609A (en) * | 2004-12-28 | 2005-06-29 | 陕西师范大学 | Testing device for magnetic field and magnetic force in three-dimensional space |
| CN1963555A (en) * | 2006-12-08 | 2007-05-16 | 哈尔滨工业大学 | Three-dimension measuring apparatus and method for space magnetic field of minitype permanent-magnet |
| CN201387681Y (en) * | 2008-12-11 | 2010-01-20 | 浙江天煌科技实业有限公司 | Helmholtz coil magnetic field measuring experimental apparatus |
| CN201322791Y (en) * | 2008-12-23 | 2009-10-07 | 中国科学院电工研究所 | Device for measuring magnetic field distribution of superconducting magnet |
| CN101509961A (en) * | 2009-03-23 | 2009-08-19 | 哈尔滨工业大学 | Bar permanent magnet section magnetic-flux measurement apparatus and measurement method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106707204A (en) * | 2016-11-14 | 2017-05-24 | 浙江上方电子装备有限公司 | Rotating cathode magnetic rod magnetic field automatic calibration device |
| CN109932666A (en) * | 2019-03-28 | 2019-06-25 | 京东方科技集团股份有限公司 | Mgnetic observations jig and the method that mgnetic observations are carried out using the jig |
| CN110967562A (en) * | 2019-11-27 | 2020-04-07 | 北京无线电计量测试研究所 | Method and device for measuring uniform domain of radiation sensitivity test field |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103777158B (en) | 2017-07-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110082668B (en) | Element fixing device for Helmholtz coil magnetic field test | |
| CN203274665U (en) | Back adjustment type flatness detection apparatus | |
| CN103777158A (en) | Rotating cathode magnetic field homogeneity measuring device and test method | |
| CN110542369A (en) | Flatness and straightness detection device | |
| CN103675723B (en) | A kind of magnetic-field measurement analysis system | |
| CN202548307U (en) | Detection device for magnetic field intensity of planar target | |
| CN204009087U (en) | Ionization chamber position regulator | |
| CN103837131B (en) | A kind of high precision towing basin track level measurement device | |
| CN104020004A (en) | Testing machine for testing mechanical performance of chair | |
| CN107941279B (en) | For measuring the measuring device of air film various parameters in air-flotation system | |
| CN102641895B (en) | Side guide opening quick calibration method for hot-continuous-rolling finishing mill group | |
| CN203616462U (en) | Magnetic field measurement and analysis device | |
| CN203324604U (en) | Liquid crystal display panel detecting device | |
| CN104865541A (en) | Equipment for detecting magnetic flux of magnetic element | |
| CN202925090U (en) | Magnetic steel detection device for magnetron sputtering film plating | |
| CN107576510A (en) | Compartment method for testing performance and detecting system based on laser measurement displacement | |
| CN104075636A (en) | Device for measuring position degree of disc hole | |
| CN204832637U (en) | High accuracy lens holding frame | |
| CN203928939U (en) | Rail measurement mechanism in slide rail | |
| CN205037855U (en) | Barrel edges and corners measuring device | |
| CN205642337U (en) | Thickness tester | |
| CN203396750U (en) | Magnetic memory detection test platform | |
| CN110017930A (en) | A kind of scaling method of millimicro ox magnitude thrust-measuring device | |
| CN204555884U (en) | A kind of crystal wafer measurer for thickness | |
| CN205138353U (en) | Frame check out test set |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |