CN202548307U - Detection device for magnetic field intensity of planar target - Google Patents
Detection device for magnetic field intensity of planar target Download PDFInfo
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- CN202548307U CN202548307U CN2012201082999U CN201220108299U CN202548307U CN 202548307 U CN202548307 U CN 202548307U CN 2012201082999 U CN2012201082999 U CN 2012201082999U CN 201220108299 U CN201220108299 U CN 201220108299U CN 202548307 U CN202548307 U CN 202548307U
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Abstract
The utility model relates to a detection device for the magnetic field intensity of a planar target in magnetron sputtering equipment, which belongs to the detection technology in the magnetron sputtering coating field. The detection device for the magnetic field intensity of a planar target comprises a detection mechanism, a frame and a platform. A planar target is placed on the platform of the frame. The frame is provided with a movement unit and the detection mechanism is installed on the sliding support of the movement unit. The sliding support drives the detection mechanism to move in the X direction and in the Y direction, so that the consistency of a measurement position is ensured. Meanwhile, the accuracy and the reproducibility of measurement data are ensured. The device is simple and convenient in operation, and low in cost.
Description
Technical field
The utility model relates to a kind of checkout equipment of magnetic field intensity of magnetic control sputtering device midplane target, belongs to the detection technique in magnetron sputtering plating field.
Background technology
Magnetron sputtering plating is through magnetic field the electronic action sputtering target material to be deposited to substrate, and the magnetic field intensity of flat target directly influences coating quality.Therefore need to measure the magnetic field intensity and the distribution of new target, and when target consumed to a certain degree, the measurement changes of magnetic field on same position was sought the reason that plated film goes wrong, with adjustment magnetic field.
The present Magnetic Field Design of plated film industrial circle midplane target becomes the magnetic field of various structures, the middle use of putting into production again with magnetic small magnet of the same size through permutation and combination usually.In theory; The magnetic field that is combined by small magnet is evenly distributed on the target plane of sustained height; But, make that the target surface DISTRIBUTION OF MAGNETIC FIELD is inhomogeneous after the assembling, in view of the situation in fact because the influence of the factors such as smooth situation of the error of artificial assembling or target cathode; Need carry out control measurement to the size in target surface magnetic field, with the adjustment Distribution of Magnetic Field.The measurement in magnetic field generally is by manual operations, and the data reproduction property that obtains is poor, and error is big, is easy to mislead produce.Chinese patent 200980128084.4 discloses a kind of " being used to detect the measurement mechanism of magnetic "; Be mainly used in the pattern on identification and the securities; The bank note, the check that for example have soft magnetism and/or Hard Magnetic pattern are not suitable for detecting the magnetic field intensity of magnetron sputtering flat target.
Summary of the invention
To the problem that above-mentioned prior art exists, a kind of pick-up unit that is used to measure magnetic field intensity of this use new design solves and how to realize the consistance of flat target measuring position, guarantees the accuracy and the repeatability of measurement data.
In order to realize above task; The technical scheme that the utility model adopts: the pick-up unit of inventing a kind of flat target magnetic field intensity; Comprise testing agency, frame and platform thereof, flat target is placed on the platform of frame, and the major technique characteristic is: frame is provided with mobile device; Testing agency is installed on the travelling carriage of mobile device, travelling carriage drive testing agency be X to Y to motion.
The testing agency that the utility model adopts is that magnetometer or other are used to measure the instrument of magnetic field intensity, and the probe of magnetometer end has certain elasticity.
The travelling carriage of mobile device comprises column, slide rail, crossbeam and slide block, and crossbeam is installed on the column, and column is installed in is Y to motion on the slide rail, and slide block is installed in is X to motion on the crossbeam.Crossbeam is positioned at the platform top, and crossbeam is marked with scale.On the slide block of magnetometer installation and moving device, this slide block is marked with scale.Magnetometer can vertically or tilt to be installed on the slide block adjustable positions of magnetometer on slide block.
Flat target is placed on the platform, limits the position locating piece.
The slide rail of mobile device is a cylinder axis, and it is marked with scale, and slide rail is fixed by the back-up block at frame two ends.
The column of mobile device is provided with the mounting hole of slide rail and crossbeam, and column moves along slide rail.The travelling carriage of mobile device is moved and the location by electric control system control automatically.
The good effect that the utility model produces:
1. because testing agency is mounted on the mobile device, flat target is placed on the platform of pick-up unit, measures the magnetometer of magnetic field intensity and can be X to reaching Y to moving; Through the shift position of control travelling carriage, control the position of magnetometer, realize the consistance of measuring position; Guarantee the accuracy and the repeatability of measurement data; Easy and simple to handle, cost is low, can avoid manual work to hold the uncertainty of detection.
2. flexible design can be used for detecting the flat target of all size and specification, and magnetometer can move up and down at slide block, can test the flat target of different-thickness.
3. the measuring position is accurate, after target consumption to a certain degree, still can accurately measure same position, guarantees to obtain Distribution of Magnetic Field accurately.
4. when institute's coatings quality defects, can detect the magnetic field situation easily, judge whether to cause because of changes of magnetic field.
Description of drawings
Fig. 1: the structural representation of the utility model
Fig. 2: the front view of the utility model
Among the figure: 1, platform, 2, column, 3, slide rail, 4, the slide rail back-up block, 5, slide block, 6, crossbeam, 7, magnetometer, 8, locating piece, 9, frame, 10, flat target.
Embodiment
The pick-up unit of the flat target magnetic field intensity of the utility model design mainly is made up of platform 1, column 2, slide rail 3, slide rail back-up block 4, slide block 5, crossbeam 6, magnetometer 7, locating piece 8 and frame 9, and platform 1 is installed on the frame 9; Slide rail 3 is a cylinder axis, and slide rail back-up block 4 is fixed on the two ends of frame 9, and slide rail 3 is installed in the axis hole of slide rail back-up block 4; Shaft hole sleeve on the column 2 can move on slide rail 3 on slide rail 3, and crossbeam 6 is two cylinder axis; Two is plugged in the axis hole of column 2, and slide block 5 is enclosed within on the axle of crossbeam 6, can on crossbeam 6, move freely; Magnetometer 7 is installed on the slide block 5, is fixed by jackscrew after adjusting the position, and locating piece 9 is installed on the platform 1; During measurement flat target 10 is placed on the platform 1, limits the position, realize magnetic field intensity measurement like this optional position of flat target 10 locating piece 9.
When flat target 10 is new target; The adjustment height of magnetometer 7 on slide block 5, the front-end probe that makes magnetometer 7 is contact plane target 10 surfaces just, write down this moment magnetometer 7 in the scale value of slide block 5; The reference altitude of magnetometer 7 when this value is measured later on as this flat target 10; Because magnetometer 7 front-end probes have certain elasticity, there is strict control in target supplier to the flatness of target plane simultaneously, therefore can realize that the left-right and front-back of magnetometer 7 moves.
The technical scheme of the utility model is not limited to the foregoing description; In the ken that those of ordinary skills possessed; Can also under the prerequisite that does not break away from the utility model aim, make various variations; From all distortion that the disclosed content of the utility model directly derives or associates, all should think the protection domain of the utility model.
Claims (10)
1. the pick-up unit of a flat target magnetic field intensity; Comprise testing agency, frame and platform thereof, flat target is placed on the platform of frame, it is characterized in that frame is provided with mobile device; Testing agency is installed on the travelling carriage of mobile device, travelling carriage drive testing agency be X to Y to motion.
2. the pick-up unit of flat target magnetic field intensity according to claim 1 is characterized in that said testing agency is a magnetometer, and the probe of its end has certain elasticity.
3. the pick-up unit of flat target magnetic field intensity according to claim 2; The travelling carriage that it is characterized in that said mobile device comprises column, slide rail, crossbeam and slide block; Crossbeam is installed on the column, and column is installed in is Y to motion on the slide rail, and slide block is installed in is X to motion on the crossbeam.
4. the pick-up unit of flat target magnetic field intensity according to claim 3 it is characterized in that the crossbeam of said mobile device is positioned at the platform top, and crossbeam is marked with scale.
5. the pick-up unit of flat target magnetic field intensity according to claim 3 is characterized in that this slide block is marked with scale on the slide block of said magnetometer installation and moving device.
6. the pick-up unit of flat target magnetic field intensity according to claim 5 is characterized in that said magnetometer is vertical or tilts to be installed on the slide block adjustable positions of magnetometer on slide block.
7. the pick-up unit of flat target magnetic field intensity according to claim 1 is characterized in that said flat target is placed on the platform, limits the position locating piece.
8. the pick-up unit of flat target magnetic field intensity according to claim 3 is characterized in that the slide rail of said mobile device is a cylinder axis, and it is marked with scale, and slide rail is fixed by the back-up block at frame two ends.
9. the pick-up unit of flat target magnetic field intensity according to claim 3 is characterized in that the travelling carriage of said mobile device is moved and the location by electric control system control automatically.
10. the pick-up unit of flat target magnetic field intensity according to claim 3 is characterized in that the column of said mobile device is provided with the mounting hole of slide rail and crossbeam, and column moves along slide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201082999U CN202548307U (en) | 2012-03-21 | 2012-03-21 | Detection device for magnetic field intensity of planar target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201082999U CN202548307U (en) | 2012-03-21 | 2012-03-21 | Detection device for magnetic field intensity of planar target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202548307U true CN202548307U (en) | 2012-11-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012201082999U Expired - Lifetime CN202548307U (en) | 2012-03-21 | 2012-03-21 | Detection device for magnetic field intensity of planar target |
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| CN (1) | CN202548307U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675723A (en) * | 2013-12-24 | 2014-03-26 | 上海子创镀膜技术有限公司 | Magnetic field measurement analysis system |
| WO2018098870A1 (en) * | 2016-12-01 | 2018-06-07 | 深圳市新益技术有限公司 | Testing apparatus for determining electromagnetic performance of tested object |
| CN108132389A (en) * | 2016-12-01 | 2018-06-08 | 深圳市新益技术有限公司 | Probe polarization rotating device, electromagnetic field sampling system, the electromagnetic field method of sampling |
| CN109932666A (en) * | 2019-03-28 | 2019-06-25 | 京东方科技集团股份有限公司 | Mgnetic observations jig and the method that mgnetic observations are carried out using the jig |
| CN110031781A (en) * | 2019-05-21 | 2019-07-19 | 京东方科技集团股份有限公司 | A kind of detection jig and its detection method |
| WO2020030125A1 (en) * | 2018-08-10 | 2020-02-13 | 领凡新能源科技(北京)有限公司 | Target core magnetic field scanning device |
| CN114674913A (en) * | 2022-03-16 | 2022-06-28 | 南京理工大学 | Magnetization field distribution measuring device based on ellipsoid unexploded bomb |
-
2012
- 2012-03-21 CN CN2012201082999U patent/CN202548307U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675723A (en) * | 2013-12-24 | 2014-03-26 | 上海子创镀膜技术有限公司 | Magnetic field measurement analysis system |
| CN103675723B (en) * | 2013-12-24 | 2017-11-21 | 上海子创镀膜技术有限公司 | A kind of magnetic-field measurement analysis system |
| WO2018098870A1 (en) * | 2016-12-01 | 2018-06-07 | 深圳市新益技术有限公司 | Testing apparatus for determining electromagnetic performance of tested object |
| CN108132389A (en) * | 2016-12-01 | 2018-06-08 | 深圳市新益技术有限公司 | Probe polarization rotating device, electromagnetic field sampling system, the electromagnetic field method of sampling |
| CN108132388A (en) * | 2016-12-01 | 2018-06-08 | 深圳市新益技术有限公司 | A kind of test device of determining measured object electromagnetic performance |
| CN108132388B (en) * | 2016-12-01 | 2019-12-06 | 深圳市新益技术有限公司 | Test device for determining electromagnetic performance of measured object |
| CN108132389B (en) * | 2016-12-01 | 2023-11-10 | 深圳市新益技术有限公司 | Electromagnetic field sampling system and method for sampling using multiple single polarized probes in target electromagnetic field detection |
| WO2020030125A1 (en) * | 2018-08-10 | 2020-02-13 | 领凡新能源科技(北京)有限公司 | Target core magnetic field scanning device |
| CN109932666A (en) * | 2019-03-28 | 2019-06-25 | 京东方科技集团股份有限公司 | Mgnetic observations jig and the method that mgnetic observations are carried out using the jig |
| CN110031781A (en) * | 2019-05-21 | 2019-07-19 | 京东方科技集团股份有限公司 | A kind of detection jig and its detection method |
| CN114674913A (en) * | 2022-03-16 | 2022-06-28 | 南京理工大学 | Magnetization field distribution measuring device based on ellipsoid unexploded bomb |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20121121 |
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| CX01 | Expiry of patent term |