CN103741211B - 长晶炉及长晶炉均匀散热的控制方法 - Google Patents
长晶炉及长晶炉均匀散热的控制方法 Download PDFInfo
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- CN103741211B CN103741211B CN201310702144.7A CN201310702144A CN103741211B CN 103741211 B CN103741211 B CN 103741211B CN 201310702144 A CN201310702144 A CN 201310702144A CN 103741211 B CN103741211 B CN 103741211B
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- warming plate
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- crystal furnace
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- 239000013078 crystal Substances 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title abstract description 14
- 238000009413 insulation Methods 0.000 claims abstract description 43
- 238000010792 warming Methods 0.000 claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 19
- 229910052710 silicon Inorganic materials 0.000 abstract description 19
- 239000010703 silicon Substances 0.000 abstract description 19
- 239000004575 stone Substances 0.000 abstract description 19
- 230000005855 radiation Effects 0.000 abstract description 16
- 230000007547 defect Effects 0.000 abstract description 5
- 230000008859 change Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 4
- 230000009466 transformation Effects 0.000 abstract description 4
- 230000008569 process Effects 0.000 description 3
- 238000005266 casting Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 235000014347 soups Nutrition 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
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Application Number | Priority Date | Filing Date | Title |
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CN201310702144.7A CN103741211B (zh) | 2013-12-19 | 2013-12-19 | 长晶炉及长晶炉均匀散热的控制方法 |
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CN201310702144.7A CN103741211B (zh) | 2013-12-19 | 2013-12-19 | 长晶炉及长晶炉均匀散热的控制方法 |
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CN103741211A CN103741211A (zh) | 2014-04-23 |
CN103741211B true CN103741211B (zh) | 2016-08-31 |
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CN (1) | CN103741211B (zh) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102011173A (zh) * | 2009-09-08 | 2011-04-13 | 国立大学法人信州大学 | 蓝宝石单晶生长设备 |
CN102162125A (zh) * | 2011-05-12 | 2011-08-24 | 石金精密科技(深圳)有限公司 | 多晶硅铸锭炉热场结构 |
CN203653752U (zh) * | 2013-12-19 | 2014-06-18 | 镇江环太硅科技有限公司 | 长晶炉 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09183690A (ja) * | 1995-12-28 | 1997-07-15 | Sumitomo Metal Ind Ltd | 熱遮蔽体及びその脱着用治具 |
JP4777880B2 (ja) * | 2004-03-29 | 2011-09-21 | 京セラ株式会社 | シリコン鋳造装置およびシリコンインゴットの製造方法 |
WO2007108338A1 (ja) * | 2006-03-23 | 2007-09-27 | Ngk Insulators, Ltd. | 窒化物単結晶の製造方法および装置 |
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2013
- 2013-12-19 CN CN201310702144.7A patent/CN103741211B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102011173A (zh) * | 2009-09-08 | 2011-04-13 | 国立大学法人信州大学 | 蓝宝石单晶生长设备 |
CN102162125A (zh) * | 2011-05-12 | 2011-08-24 | 石金精密科技(深圳)有限公司 | 多晶硅铸锭炉热场结构 |
CN203653752U (zh) * | 2013-12-19 | 2014-06-18 | 镇江环太硅科技有限公司 | 长晶炉 |
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Effective date of registration: 20190312 Address after: 212200 Ganglong Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Silicon Energy Co., Ltd. Address before: 212216 Yangzhong Chemical Industry Park, Zhenjiang City, Jiangsu Province Patentee before: Zhenjiang Huantai Silicon Technology Co., Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
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Denomination of invention: Crystal growth furnace and control method for uniform heat dissipation of crystal growth furnace Effective date of registration: 20191113 Granted publication date: 20160831 Pledgee: China Everbright Bank, Limited by Share Ltd, Nanjing branch Pledgor: Jiangsu Meike Silicon Energy Co., Ltd. Registration number: Y2019320000280 |
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Date of cancellation: 20210127 Granted publication date: 20160831 Pledgee: China Everbright Bank Limited by Share Ltd. Nanjing branch Pledgor: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. Registration number: Y2019320000280 |
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Effective date of registration: 20210202 Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: 212200 Ganglong Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee before: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. |
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Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co., Ltd Address before: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee before: Jiangsu Meike Solar Energy Technology Co., Ltd |