CN103727389A - Pipeline system capable of automatically supplying chemicals in producing and using process - Google Patents
Pipeline system capable of automatically supplying chemicals in producing and using process Download PDFInfo
- Publication number
- CN103727389A CN103727389A CN201210393826.XA CN201210393826A CN103727389A CN 103727389 A CN103727389 A CN 103727389A CN 201210393826 A CN201210393826 A CN 201210393826A CN 103727389 A CN103727389 A CN 103727389A
- Authority
- CN
- China
- Prior art keywords
- supply tank
- control valve
- valve body
- gas
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The invention relates to the field of supply systems of chemicals in the producing and using process, in particular to a pipeline system capable of automatically supplying the chemicals in the producing and using process. The pipeline system comprises a control system, a liquid infusion bucket, a liquid supply tank, control valve bodies, a magnetic valve, a pipeline system body capable of generating negative pressure, an upper level hydraulic sensor and a lower level hydraulic sensor. The liquid supply tank is provided with a liquid inlet, a liquid outlet, a gas inlet and a gas outlet, opening and closing of the liquid inlet, the liquid outlet, the gas inlet and the gas outlet are controlled by the corresponding control valve body respectively, and the control valve bodies are connected with the magnetic valve respectively. The liquid infusion bucket is connected with the liquid inlet in the liquid supply tank through a liquid pipeline. The pipeline system body capable of generating negative pressure is connected with the gas outlet in the liquid supply tank through a gas pipeline. The upper level hydraulic sensor and the lower level hydraulic sensor are arranged on the upper portion and the lower portion of the liquid supply tank respectively. The upper level hydraulic sensor, the level hydraulic sensor and the magnetic valve are connected with the control system. According to the pipeline system, production continuity of equipment and safety of non-manual automatic supply of the dangerous chemicals can be guaranteed.
Description
Technical field
The invention belongs to liquid-supplying system field in the process of production and application, the pipe-line system that specifically in a kind of production and application process, chemical product is supplied with automatically.
Background technique
At present, most semiconductor equipments, in liquid supply process except factory automation supply, also need a lot of manual supply liquid, and these supply liquid to have be much poisonous or volatile liquid, some liquid can frequently be supplied with, and will bring a lot of unnecessary troubles to operator like this.
Summary of the invention
For the problems referred to above, the object of the present invention is to provide the pipe-line system that in a kind of production and application process, chemical product is supplied with automatically.This pipe-line system guarantees the continuity of device fabrication and the Security of the unartificial automatic supply of hazardous chemical.
To achieve these goals, the present invention is by the following technical solutions:
The pipe-line system that in production and application process, chemical product is supplied with automatically, comprises the pipe-line system of control system, fluid infusion bucket H, supply tank G, control valve body, solenoid valve, generation negative pressure, upper hydrostatic sensor C
1and the next hydrostatic sensor C
2wherein supply tank G is provided with liquid inlet/outlet and gas inlet/outlet, described liquid inlet/outlet and gas inlet/outlet be respectively by independently described its open and close of control valve body control, and described each control valve body is connected and is controlled respectively by each solenoid valve with described solenoid valve independently respectively; Liquid-inlet on described supply tank G and liquid outlet are respectively by liquid line and fluid infusion bucket H and equipment connection, gas inlet on described supply tank G is connected with the pipe-line system of source nitrogen and generation negative pressure by gas piping respectively with gas outlet, described upper hydrostatic sensor C
1with the next hydrostatic sensor C
2be arranged at respectively the upper and lower of supply tank G, described upper hydrostatic sensor C
1, the next hydrostatic sensor C
2and each solenoid valve is all connected with described control system.
The pipe-line system of described generation negative pressure comprises control valve body Y
4, control valve body Y
5and negative-pressure vacuum generator Z, wherein the end suction port of negative-pressure vacuum generator Z is connected with compressed gas source by gas piping, the sidewall of described negative-pressure vacuum generator Z is connected with the gas outlet of supply tank G by gas piping, between the end suction port of described negative-pressure vacuum generator Z and compressed gas source and the sidewall of negative-pressure vacuum generator Z and the gas outlet of supply tank G, is respectively equipped with control valve body Y
4with control valve body Y
5, described control valve body Y
4with control valve body Y
5respectively with solenoid valve D
4with solenoid valve D
5connect, and respectively by solenoid valve D
4with solenoid valve D
5control.
When the pressurized gas that described compressed gas source is supplied with is discharged by negative-pressure vacuum generator Z, make the gas in supply tank G pass through control valve body Y
5be discharged from the tank body outside of supply tank G.
The gas exhaust piping of described supply tank G is provided with by solenoid valve D
6the control valve body Y controlling
6, described control valve body Y
6be arranged in parallel with the pipe-line system that produces negative pressure.The gas inlet/outlet of described supply tank G is arranged in parallel, and described gas inlet/outlet is communicated with supply tank G by common gas piping.
Described control valve body is pneumatic control valve body, and the described solenoid valve being connected with pneumatic control valve body is connected with source of the gas.Between described solenoid valve and source of the gas, be provided with compressed air pressure regulating valve T and pressure display table.Described supply tank G is seal container.
Advantage of the present invention and beneficial effect are:
1. the inner not outer portion of the negative pressure vacuum line producing of supply tank of the present invention provides, but the negative pressure producing by the gas flow of self has been saved vacuum supply energy source.
2. the present invention automatically supplies with, the danger of avoiding personnel to operate bringing.
3. the present invention is simple to operate, and avoiding people is misoperation, and the continuous operation of support equipment is saved manpower.
Accompanying drawing explanation
Fig. 1 is pipeline schematic diagram of the present invention;
Fig. 2 is the local pipeline schematic diagram that the present invention produces negative pressure;
Wherein: 1 is solenoid valve D
1, 2 is solenoid valve D
2, 3 is solenoid valve D
3, 4 is solenoid valve D
6, 5 is solenoid valve D
5, 6 is solenoid valve D
4, 7 is control valve body Y
6, 8 is control valve body Y
5, 9 is control valve body Y
4, 10 is control valve body Y
3, 11 is control valve body Y
2, 12 is control valve body Y
1, 13 is compressed air pressure regulating valve T, and 14 is pressure display table A, and 15 is negative-pressure vacuum generator Z, and 16 is supply tank G, 17 is upper hydrostatic sensor C
1, 18 is the next hydrostatic sensor C
2, 19 is medicinal liquor barrel H.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1, the present invention includes pipe-line system, source of the gas, the upper hydrostatic sensor C of control system, fluid infusion bucket H19, supply tank G16, control valve body, solenoid valve, generation negative pressure
117 and the next hydrostatic sensor C
218, wherein supply tank G16 is airtight container, and supply tank G16 is provided with liquid inlet/outlet and gas inlet/outlet, and the gas inlet on supply tank G16 is arranged in parallel with gas outlet, also by common gas piping, is connected with supply tank G16.Described liquid inlet/outlet and gas inlet/outlet are respectively by independent described its open and close of control valve body control, and described each control valve body is connected with described solenoid valve respectively and is controlled respectively by each solenoid valve.The liquid outlet of supply tank G16 is by liquid line and equipment connection, and the liquid line between supply tank G16 and equipment is provided with by solenoid valve D
2the 2 control valve body Y that control
211, the liquid-inlet of supply tank G16 is connected with medicinal liquor barrel H19 by liquid line, and the liquid line between supply tank G16 and medicinal liquor barrel H19 is provided with by solenoid valve D
1the 1 control valve body Y controlling
112.The gas inlet of supply tank G16 is connected with source nitrogen, and the gas piping between gas inlet and the source nitrogen of supply tank G16 is provided with by solenoid valve D
3the 3 control valve body Y that control
310.The pipe-line system of described generation negative pressure is connected with the gas outlet on compressed gas source II and supply tank G16 by gas piping.Described in the present embodiment, each control valve body all adopts bi-bit bi-pass pneumatic control valve body, and each solenoid valve is two-position three way magnetic valve, is also all connected with compressed gas source I, and the gas outlet of compressed gas source I is provided with compressed air pressure regulating valve T13 and pressure display table 14; Upper hydrostatic sensor C
117 and the next hydrostatic sensor C
218 are arranged at respectively the upper and lower of supply tank G16, upper hydrostatic sensor C
117, the next hydrostatic sensor C
218 and each solenoid valve be all connected with described control system, described control system is prior art.
The pipe-line system of described generation negative pressure with comprise control valve body Y
49 and control valve body Y
58 and negative-pressure vacuum generator Z15, wherein the end suction port of negative-pressure vacuum generator Z15 is connected with compressed gas source II by gas piping, the sidewall of described negative-pressure vacuum generator Z15 is connected with the gas outlet of supply tank G16 by gas piping, between the end suction port of described negative-pressure vacuum generator Z15 and compressed gas source II and the sidewall of negative-pressure vacuum generator Z15 and the gas outlet of supply tank G16, is respectively equipped with control valve body Y
49 and control valve body Y
58, described control valve body Y
49 and control valve body Y
58 respectively with solenoid valve D
46 and solenoid valve D
55 connect, and respectively by solenoid valve D
46 and solenoid valve D
55 control, control valve body Y
58 with control valve body Y
310 are arranged in parallel.On the gas exhaust piping of supply tank G16, be also provided with and control valve body Y
58 be arranged in parallel by solenoid valve D
6the 4 control valve body Y that control
67.Control valve body Y
67 always close, and only before the sealing cover of opening supply tank G16, just open, and lay down supply tank G16 internal pressure and reach internal and external pressure balance.
Working principle of the present invention is:
Supply tank G16 is during to equipment feed flow, control valve body Y
112 is closed condition, control valve body Y
211 is open state.When the liquid in supply tank G16 arrives the next hydrostatic sensor C less
218 the next time, the next hydrostatic sensor C
218 send signal, and control system acknowledge(ment) signal also sends instruction, solenoid valve D
22 control connected control valve body Y
211 close, solenoid valve D
11 controls connected control valve body Y
112 open, solenoid valve D
33 control connected control valve body Y
310 close, solenoid valve D
64 control connected control valve body Y
67 close (Y
67 always close, and only just open opening before supply tank G16 sealing cover, lay down supply tank G16 internal pressure and reach internal and external pressure balance).Meanwhile, solenoid valve D
46 control connected control valve body Y
49 open, solenoid valve D
55 control connected control valve body Y
58 open, and a large amount of like this pressurized gass, by negative-pressure vacuum generator Z15, makes the gas in supply tank G16 pass through control valve body Y
58 are discharged to the tank body outside of supply tank G16, as shown in Figure 2.Thereby make the inside of supply tank G16 form negative pressure, in order to reach pressure balance, force the liquid in the medicinal liquor barrel H19 of supply liquid to be inhaled in supply tank G16.When the liquid in supply tank G16 rises to upper hydrostatic sensor C
117 upper time, upper hydrostatic sensor C
117 send signal, and control system receives signal and sends instruction, solenoid valve D
11 controls connected control valve body Y
112 close, solenoid valve D
22 control connected control valve body Y
211 open, solenoid valve D
33 control connected control valve body Y
310 open, solenoid valve D
55 control connected control valve body Y
58 close, thereby the liquid that reaches supply tank G16 continues the process of supplying with to equipment.
Claims (8)
1. the pipe-line system that in a production and application process, chemical product is supplied with automatically, comprise control system, it is characterized in that: also comprise the pipe-line system of fluid infusion bucket H (19), supply tank G (16), control valve body, solenoid valve, generation negative pressure, upper hydrostatic sensor C
1and the next hydrostatic sensor C (17)
2(18), wherein supply tank G (16) is provided with liquid inlet/outlet and gas inlet/outlet, described liquid inlet/outlet and gas inlet/outlet be respectively by independently described its open and close of control valve body control, and described each control valve body is connected and is controlled respectively by each solenoid valve with described solenoid valve independently respectively; Liquid-inlet on described supply tank G (16) and liquid outlet are respectively by liquid line and fluid infusion bucket H (19) and equipment connection, gas inlet on described supply tank G (16) is connected with the pipe-line system of source nitrogen and generation negative pressure by gas piping respectively with gas outlet, described upper hydrostatic sensor C
1and the next hydrostatic sensor C (17)
2(18) be arranged at respectively the upper and lower of supply tank G (16), described upper hydrostatic sensor C
1(17), the next hydrostatic sensor C
2(18) and each solenoid valve be all connected with described control system.
2. by the pipe-line system that in production and application process described in claim 1, chemical product is supplied with automatically, it is characterized in that: the pipe-line system of described generation negative pressure comprises control valve body Y
4(9), control valve body Y
5and negative-pressure vacuum generator Z (15) (8), wherein the end suction port of negative-pressure vacuum generator Z (15) is connected with compressed gas source by gas piping, the sidewall of described negative-pressure vacuum generator Z (15) is connected with the gas outlet of supply tank G (16) by gas piping, between the sidewall of the end suction port of described negative-pressure vacuum generator Z (15) and compressed gas source and negative-pressure vacuum generator Z (15) and the gas outlet of supply tank G (16), is respectively equipped with control valve body Y
4and control valve body Y (9)
5(8), described control valve body Y
4and control valve body Y (9)
5(8) respectively with solenoid valve D
4and solenoid valve D (6)
5(5) connect, and respectively by solenoid valve D
4and solenoid valve D (6)
5(5) control.
3. by the pipe-line system of supply automatically of chemical product in production and application process described in claim 1, it is characterized in that: when the pressurized gas that described compressed gas source is supplied with is discharged by negative-pressure vacuum generator Z (15), make the gas in supply tank G (16) pass through control valve body Y
5(8) be discharged from the tank body outside of supply tank G (16).
4. by the pipe-line system that in production and application process described in claim 1, chemical product is supplied with automatically, it is characterized in that: the gas exhaust piping of described supply tank G (16) is provided with by solenoid valve D
6(4) the control valve body Y controlling
6(7), described control valve body Y
6(7) be arranged in parallel with the pipe-line system that produces negative pressure.
5. by the pipe-line system of supply automatically of chemical product in production and application process described in claim 1, it is characterized in that: the gas inlet/outlet of described supply tank G (16) is arranged in parallel, described gas inlet/outlet is communicated with supply tank G (16) by common gas piping.
6. by the pipe-line system that in production and application process described in claim 1, chemical product is supplied with automatically, it is characterized in that: described control valve body is pneumatic control valve body, the described solenoid valve being connected with pneumatic control valve body is connected with source of the gas.
7. by the pipe-line system that in production and application process described in claim 6, chemical product is supplied with automatically, it is characterized in that: between described solenoid valve and source of the gas, be provided with compressed air pressure regulating valve T (13) and pressure display table (14).
8. by the pipe-line system that in production and application process described in claim 1, chemical product is supplied with automatically, it is characterized in that: described supply tank G (16) is seal container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210393826.XA CN103727389B (en) | 2012-10-16 | 2012-10-16 | The pipe-line system that in a kind of production and application process, chemicals is supplied with automatically |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210393826.XA CN103727389B (en) | 2012-10-16 | 2012-10-16 | The pipe-line system that in a kind of production and application process, chemicals is supplied with automatically |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103727389A true CN103727389A (en) | 2014-04-16 |
| CN103727389B CN103727389B (en) | 2016-05-25 |
Family
ID=50451600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210393826.XA Active CN103727389B (en) | 2012-10-16 | 2012-10-16 | The pipe-line system that in a kind of production and application process, chemicals is supplied with automatically |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103727389B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106111376A (en) * | 2016-07-06 | 2016-11-16 | 南京利德东方橡塑科技有限公司 | A kind of spray ethanol device and control method thereof automatically |
| CN109422227A (en) * | 2017-08-25 | 2019-03-05 | ***科技公司 | Automatic chemical diluting and mixing equipment |
| CN110005954A (en) * | 2018-01-05 | 2019-07-12 | 上海弗川自动化技术有限公司 | A kind of working media supply system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5383574A (en) * | 1993-07-19 | 1995-01-24 | Microbar Sytems, Inc. | System and method for dispensing liquid from storage containers |
| CN1256241A (en) * | 1998-09-22 | 2000-06-14 | 液体空气乔治洛德方法利用和研究有限公司 | Method and system for distributing liquid chemicals |
| CN101358686A (en) * | 2007-08-01 | 2009-02-04 | 上海正帆超净技术有限公司 | Safety conveying method for phosphorus oxychloride |
| CN102092540A (en) * | 2010-12-08 | 2011-06-15 | 北京七星华创电子股份有限公司 | Chemical liquid storage equipment and chemical liquid storage and distribution control method |
-
2012
- 2012-10-16 CN CN201210393826.XA patent/CN103727389B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5383574A (en) * | 1993-07-19 | 1995-01-24 | Microbar Sytems, Inc. | System and method for dispensing liquid from storage containers |
| JP2001525763A (en) * | 1993-07-19 | 2001-12-11 | マイクロバー・システムズ・インコーポレーテッド | System and method for refilling liquid from a storage container |
| CN1256241A (en) * | 1998-09-22 | 2000-06-14 | 液体空气乔治洛德方法利用和研究有限公司 | Method and system for distributing liquid chemicals |
| CN101358686A (en) * | 2007-08-01 | 2009-02-04 | 上海正帆超净技术有限公司 | Safety conveying method for phosphorus oxychloride |
| CN102092540A (en) * | 2010-12-08 | 2011-06-15 | 北京七星华创电子股份有限公司 | Chemical liquid storage equipment and chemical liquid storage and distribution control method |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106111376A (en) * | 2016-07-06 | 2016-11-16 | 南京利德东方橡塑科技有限公司 | A kind of spray ethanol device and control method thereof automatically |
| CN106111376B (en) * | 2016-07-06 | 2019-01-18 | 南京利德东方橡塑科技有限公司 | A kind of spray alcohol device and its control method automatically |
| CN109422227A (en) * | 2017-08-25 | 2019-03-05 | ***科技公司 | Automatic chemical diluting and mixing equipment |
| CN109422227B (en) * | 2017-08-25 | 2020-09-11 | ***科技公司 | Automatic chemical supply device |
| CN110005954A (en) * | 2018-01-05 | 2019-07-12 | 上海弗川自动化技术有限公司 | A kind of working media supply system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103727389B (en) | 2016-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205136951U (en) | Full automatic control low pressure air ring plugging device | |
| CN203363663U (en) | Nitrogen pressure control system for chemical storage tank | |
| CN103727389A (en) | Pipeline system capable of automatically supplying chemicals in producing and using process | |
| CN202957322U (en) | Battery liquid injection system | |
| CN103811297B (en) | A kind of chemical liquids feedway | |
| CN103727036B (en) | Precise adjustment system for vacuum degree of giant vacuum chamber | |
| CN110435982B (en) | Online spraying sealing equipment for non-woven fabric semi-finished product packaging | |
| CN207034638U (en) | Multistation welding is concentrated and supplies argon gas device | |
| CN205241224U (en) | Liquid flux is taken out from ware | |
| CN202598113U (en) | System pressure adjusting device of double-membrane gas holder | |
| CN106269366A (en) | A kind of scaling powder shower nozzle leak-proof device | |
| CN203477890U (en) | Chemical conveying connecting cabinet | |
| CN206918638U (en) | A kind of interlock control apparatus of storage tank valve | |
| CN205158158U (en) | Nitrogen seals automatic control device | |
| CN209415046U (en) | A kind of automatic acid feeding appts | |
| CN203458956U (en) | Pneumatic spray device | |
| CN208460780U (en) | Source liquid air inlet constant-voltage equipment | |
| CN203370665U (en) | Continuous wax injection device | |
| CN105617822A (en) | Device and method for eliminating hydrogen sulfide in crude oil storage tank | |
| CN202987967U (en) | Filter type liquid wax spraying barrel | |
| CN207152913U (en) | A kind of vertical bottle group extinguishing device of car | |
| CN207349790U (en) | A kind of scene supply automatic switchover back-up system device | |
| CN205388987U (en) | Sour device of concentrated confession during battery acidification | |
| CN209410824U (en) | A kind of barreled liquid air pressure liquid taking device | |
| CN206122028U (en) | Scaling powder shower nozzle leak protection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
|
| CP03 | Change of name, title or address |