CN103722460A - 一种磨削碳化硅晶体端面的方法及装置 - Google Patents
一种磨削碳化硅晶体端面的方法及装置 Download PDFInfo
- Publication number
- CN103722460A CN103722460A CN201410036092.9A CN201410036092A CN103722460A CN 103722460 A CN103722460 A CN 103722460A CN 201410036092 A CN201410036092 A CN 201410036092A CN 103722460 A CN103722460 A CN 103722460A
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- CN
- China
- Prior art keywords
- crystal
- grinding
- positional cylinder
- pedestal
- crushing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/162—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for mass articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410036092.9A CN103722460B (zh) | 2014-01-24 | 2014-01-24 | 一种磨削碳化硅晶体端面的方法及装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410036092.9A CN103722460B (zh) | 2014-01-24 | 2014-01-24 | 一种磨削碳化硅晶体端面的方法及装置 |
Publications (2)
Publication Number | Publication Date |
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CN103722460A true CN103722460A (zh) | 2014-04-16 |
CN103722460B CN103722460B (zh) | 2016-04-06 |
Family
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CN201410036092.9A Active CN103722460B (zh) | 2014-01-24 | 2014-01-24 | 一种磨削碳化硅晶体端面的方法及装置 |
Country Status (1)
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CN (1) | CN103722460B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109531344A (zh) * | 2018-12-04 | 2019-03-29 | 北京雷生强式科技有限责任公司 | Yag系列晶体的光学加工方法 |
CN110509132A (zh) * | 2019-09-19 | 2019-11-29 | 福建北电新材料科技有限公司 | 晶棒治具及晶棒研磨方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3031806A (en) * | 1960-04-12 | 1962-05-01 | Crane Packing Co | Automatic lap plate contour control |
EP0421350A1 (en) * | 1989-10-04 | 1991-04-10 | Asahi Glass Company Ltd. | Method of and apparatus for electropolishing and grinding |
CN1484567A (zh) * | 2001-01-04 | 2004-03-24 | 科林研发公司 | 使用表面面积减少的抛光片使半导体晶片抛光和平坦化的***和方法 |
CN201609867U (zh) * | 2010-03-31 | 2010-10-20 | 南京白鹿科技有限公司 | 多工位自动磨抛机 |
CN102267072A (zh) * | 2011-07-22 | 2011-12-07 | 天津市中马骏腾精密机械制造有限公司 | 磁性定位夹紧夹具 |
CN102310359A (zh) * | 2010-07-01 | 2012-01-11 | 本田技研工业株式会社 | 金属环研磨装置以及金属环研磨方法 |
CN102626890A (zh) * | 2012-04-24 | 2012-08-08 | 安徽合一电气科技有限公司 | 双面自动磨光机 |
CN203650165U (zh) * | 2014-01-24 | 2014-06-18 | 山东天岳先进材料科技有限公司 | 一种磨削碳化硅晶体端面的装置 |
-
2014
- 2014-01-24 CN CN201410036092.9A patent/CN103722460B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3031806A (en) * | 1960-04-12 | 1962-05-01 | Crane Packing Co | Automatic lap plate contour control |
EP0421350A1 (en) * | 1989-10-04 | 1991-04-10 | Asahi Glass Company Ltd. | Method of and apparatus for electropolishing and grinding |
CN1484567A (zh) * | 2001-01-04 | 2004-03-24 | 科林研发公司 | 使用表面面积减少的抛光片使半导体晶片抛光和平坦化的***和方法 |
CN201609867U (zh) * | 2010-03-31 | 2010-10-20 | 南京白鹿科技有限公司 | 多工位自动磨抛机 |
CN102310359A (zh) * | 2010-07-01 | 2012-01-11 | 本田技研工业株式会社 | 金属环研磨装置以及金属环研磨方法 |
CN102267072A (zh) * | 2011-07-22 | 2011-12-07 | 天津市中马骏腾精密机械制造有限公司 | 磁性定位夹紧夹具 |
CN102626890A (zh) * | 2012-04-24 | 2012-08-08 | 安徽合一电气科技有限公司 | 双面自动磨光机 |
CN203650165U (zh) * | 2014-01-24 | 2014-06-18 | 山东天岳先进材料科技有限公司 | 一种磨削碳化硅晶体端面的装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109531344A (zh) * | 2018-12-04 | 2019-03-29 | 北京雷生强式科技有限责任公司 | Yag系列晶体的光学加工方法 |
CN109531344B (zh) * | 2018-12-04 | 2020-05-12 | 北京雷生强式科技有限责任公司 | Yag系列晶体的光学加工方法 |
CN110509132A (zh) * | 2019-09-19 | 2019-11-29 | 福建北电新材料科技有限公司 | 晶棒治具及晶棒研磨方法 |
Also Published As
Publication number | Publication date |
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CN103722460B (zh) | 2016-04-06 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Method and device for grinding end face of silicon carbide crystal Effective date of registration: 20200622 Granted publication date: 20160406 Pledgee: China Co. truction Bank Corp Ji'nan hi tech sub branch Pledgor: SICC Co.,Ltd. Registration number: Y2020980003315 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201119 Granted publication date: 20160406 Pledgee: China Co. truction Bank Corp Ji'nan hi tech sub branch Pledgor: Shandong Tianyue Advanced Materials Technology Co.,Ltd. Registration number: Y2020980003315 |
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Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co., Ltd Address before: 250000 Shandong Province, Lixia District of Ji'nan city high tech Zone Xinluo Avenue No. 2008 building 3-409 silver bearing Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd. |