CN103721967B - 一种自清洗研磨上盘结构 - Google Patents
一种自清洗研磨上盘结构 Download PDFInfo
- Publication number
- CN103721967B CN103721967B CN201310747969.0A CN201310747969A CN103721967B CN 103721967 B CN103721967 B CN 103721967B CN 201310747969 A CN201310747969 A CN 201310747969A CN 103721967 B CN103721967 B CN 103721967B
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- CN
- China
- Prior art keywords
- nozzle
- upper disc
- grinding upper
- grinding
- inlet pipe
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310747969.0A CN103721967B (zh) | 2013-12-31 | 2013-12-31 | 一种自清洗研磨上盘结构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310747969.0A CN103721967B (zh) | 2013-12-31 | 2013-12-31 | 一种自清洗研磨上盘结构 |
Publications (2)
Publication Number | Publication Date |
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CN103721967A CN103721967A (zh) | 2014-04-16 |
CN103721967B true CN103721967B (zh) | 2016-03-09 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310747969.0A Expired - Fee Related CN103721967B (zh) | 2013-12-31 | 2013-12-31 | 一种自清洗研磨上盘结构 |
Country Status (1)
Country | Link |
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CN (1) | CN103721967B (zh) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201493751U (zh) * | 2009-09-11 | 2010-06-02 | 镇江市港南电子有限公司 | 一种改进的研磨上盘结构 |
CN201543457U (zh) * | 2009-09-11 | 2010-08-11 | 镇江市港南电子有限公司 | 一种研磨机 |
CN201559124U (zh) * | 2009-10-13 | 2010-08-25 | 中芯国际集成电路制造(上海)有限公司 | 研磨头组件的清洗装置以及化学机械研磨设备 |
CN102528643A (zh) * | 2010-12-30 | 2012-07-04 | 中芯国际集成电路制造(上海)有限公司 | 化学机械研磨设备及其研磨单元 |
CN202655278U (zh) * | 2012-05-29 | 2013-01-09 | 昆山锐捷五金制品有限公司 | 一种无心磨床的清洗装置 |
CN203317219U (zh) * | 2013-06-26 | 2013-12-04 | 中芯国际集成电路制造(北京)有限公司 | 研磨垫整理器及研磨装置 |
CN103447251A (zh) * | 2013-08-14 | 2013-12-18 | 青岛田瑞牧业科技有限公司 | 笼舍地面的消毒清洗设备的制造方法 |
CN103476508A (zh) * | 2011-02-21 | 2013-12-25 | 杜尔***有限责任公司 | 用于施涂绝缘剂的喷嘴头 |
CN103624023A (zh) * | 2013-11-29 | 2014-03-12 | 重庆顺多利机车有限责任公司 | 铝铸件定位清洗装置 |
CN203695496U (zh) * | 2013-12-31 | 2014-07-09 | 镇江市港南电子有限公司 | 一种自清洗研磨上盘结构 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110056789A (ko) * | 2009-11-23 | 2011-05-31 | 엠피아이 코포레이션 | 노즐 자동 세척 장치 및 방법 |
-
2013
- 2013-12-31 CN CN201310747969.0A patent/CN103721967B/zh not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201493751U (zh) * | 2009-09-11 | 2010-06-02 | 镇江市港南电子有限公司 | 一种改进的研磨上盘结构 |
CN201543457U (zh) * | 2009-09-11 | 2010-08-11 | 镇江市港南电子有限公司 | 一种研磨机 |
CN201559124U (zh) * | 2009-10-13 | 2010-08-25 | 中芯国际集成电路制造(上海)有限公司 | 研磨头组件的清洗装置以及化学机械研磨设备 |
CN102528643A (zh) * | 2010-12-30 | 2012-07-04 | 中芯国际集成电路制造(上海)有限公司 | 化学机械研磨设备及其研磨单元 |
CN103476508A (zh) * | 2011-02-21 | 2013-12-25 | 杜尔***有限责任公司 | 用于施涂绝缘剂的喷嘴头 |
CN202655278U (zh) * | 2012-05-29 | 2013-01-09 | 昆山锐捷五金制品有限公司 | 一种无心磨床的清洗装置 |
CN203317219U (zh) * | 2013-06-26 | 2013-12-04 | 中芯国际集成电路制造(北京)有限公司 | 研磨垫整理器及研磨装置 |
CN103447251A (zh) * | 2013-08-14 | 2013-12-18 | 青岛田瑞牧业科技有限公司 | 笼舍地面的消毒清洗设备的制造方法 |
CN103624023A (zh) * | 2013-11-29 | 2014-03-12 | 重庆顺多利机车有限责任公司 | 铝铸件定位清洗装置 |
CN203695496U (zh) * | 2013-12-31 | 2014-07-09 | 镇江市港南电子有限公司 | 一种自清洗研磨上盘结构 |
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Publication number | Publication date |
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CN103721967A (zh) | 2014-04-16 |
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GR01 | Patent grant | ||
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Effective date of registration: 20160225 Address after: On the south side of the 223600 Suqian city of Jiangsu province in Shuyang County risound Road on the eastern side of Cixi Road Patentee after: ZHENJIANG GANGNAN ELECTRONICS CO., LTD. Address before: 212132 Dongfang Road, Dagang mechanical and Electrical Industrial Park, Dagang District, Zhenjiang, Jiangsu Patentee before: Zhenjiang Gangnan Electric Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160309 Termination date: 20191231 |