CN103710681B - A kind of test method for reaction source bottle - Google Patents
A kind of test method for reaction source bottle Download PDFInfo
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- CN103710681B CN103710681B CN201410010548.4A CN201410010548A CN103710681B CN 103710681 B CN103710681 B CN 103710681B CN 201410010548 A CN201410010548 A CN 201410010548A CN 103710681 B CN103710681 B CN 103710681B
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Abstract
The invention discloses a kind of test method for reaction source bottle, by using a kind of simulation reaction technique actual procedure, there is the reaction source bottle test device of weighing structure, realize the quality change value to liquid source, pressure in the bottle of source, carrier gas flux, test period, the required critical technical parameter such as test temperature carries out off-line precise acquisition, the reaction source bottle air input under room temperature condition accurately can be drawn by experiment calculation, liquid level, solution temperature, relation between pressure of the inside of a bottle and liquid source carrying amount, testing apparatus structure is simple to operation, test method accurately and reliably, applicable factory promotes the use of.
Description
Technical field
The present invention relates to a kind of reaction source bottle for atomic layer deposition apparatus, more specifically, relate to a kind of test method for reaction source bottle.
Background technology
Technique for atomic layer deposition (AtomicLayerDeposition, ALD), being called as atomic layer epitaxy technology (AtomicLayerEpitaxy, ALE) the earliest, is a kind of semiconductor film membrane preparation technology proposed by Finland scholar TuomoSuntola.
The principal reaction method of technique for atomic layer deposition is: at a certain temperature, in the reaction chamber of atomic layer deposition apparatus, pass into the first pre-reaction material, precursor molecules is adsorbed and forms promoting agent on the surface of a substrate; When the absorption of precursor reaches capacity state, remove the first precursor and by product; Then, pass into the second pre-reaction material, the second precursor and promoting agent, i.e. the first precursor generation chemical reaction of being adsorbed on substrate surface, generate the unimolecular layer of film to be prepared, and discharge the by product of gaseous state at substrate surface; Then, remove the second precursor in reaction chamber and by product, the like.Like this, by by two or more gaseous precursors alter least-squares reaction chamber, form alternately saturated reaction layer at processed substrate surface, thus realize ald.By selecting the growth cycle of different number, to prepare the film of different thickness.
The preparation of above-mentioned vapor reaction precursor, in reaction process process, by passing into carrier gas (being generally nitrogen) in reaction source bottle, and carrying reaction soln (being generally trimethyl aluminium or water) by carrier gas, in reaction chamber, periodically passing into realization.This is because the saturated vapor pressure of usual liquid source (reaction soln) is lower, the quantity of steam relying on self volatilization to produce can not meet technique needs, therefore, need by passing into carrier gas in reaction source bottle, rely on carrier gas to come transport fluid source, periodically in reaction chamber, provide pre-reaction material.
Therefore, in order to scientifically design and develop reaction source bottle, accurately to carry out measure control in reaction process process, the carrying capacity of effective raising carrier gas, first need some the main technical details research experiment in reaction process process, comprise the relation between source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle and liquid source carrying amount etc., to determine the reasonableness designed.
At present, existingly determine that the ordinary method of the design technical parameter of source bottle is realized by on-line sampling, namely by the actual procedure of reaction process, the parameters such as source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle are sampled, then through series of computation, the mutual relationship between these parameters and liquid source carrying amount is obtained.The defect of this method is the more difficult assurance of precision of image data in the actual procedure of reaction process, and the accuracy of influence research Relationship between Parameters often needs just can be completed by data gathering repeatedly; And image data in the actual procedure of reaction process, also can bring certain impact to productive temp.
Summary of the invention
The object of the invention is to the above-mentioned defect overcoming prior art existence, one is provided to test by off-line, and can the test method for reaction source bottle of technical parameter needed for precise acquisition, by designing a kind of simulation reaction technique actual procedure, there is the reaction source bottle test device of weighing structure, realize carrying out precise acquisition to required technical parameter, accurately can calculate the reaction source bottle air input under room temperature condition, liquid level, solution temperature, relation between pressure of the inside of a bottle and liquid source carrying amount.
For achieving the above object, technical scheme of the present invention is as follows:
A kind of test method for reaction source bottle, it is characterized in that, a testing apparatus is used to test, described testing apparatus comprises source bottle bottle, be arranged on the inlet pipe on the bottle cap of bottle, escape pipe, thermocouple, also comprise a balance, described bottle is placed on balance, described inlet pipe one end extend in bottle, the other end connects air feeder, described escape pipe one end is communicated with bottle, the other end connects tail gas collecting device, the first tensimeter and liquid level sensor described bottle cap be equipped with, the second tensimeter described escape pipe is equipped with, described inlet pipe is equipped with under meter, described inlet pipe and escape pipe have at least one valve is housed, described test method comprises the following steps successively:
Step S01: first, is filled in the bottle of reaction source bottle by test liquid source, closes inlet pipe, valve on escape pipe, uses the balance measurement now quality of reaction source bottle on balance;
Step S02: then, the valve opened on inlet pipe, escape pipe starts test, simultaneously, by stopwatch record test period, the temperature in liquid source in bottle is measured with thermocouple, and the escape pipe top hole pressure of pressure in the reaction source bottle of the carrier gas flux of recording flowmeter, the first tensimeter display in process of the test and the display of the second tensimeter;
Step S03: when the test period set arrives, closes inlet pipe, valve on escape pipe, uses the balance measurement now quality of reaction source bottle on balance, obtains before and after test, the quality change value in liquid source in bottle;
Step S04: according to the quality change value measuring the liquid source obtained in above-mentioned steps, calculates the amount of substance difference in liquid source in process of the test; According to pressure, test temperature in carrier gas flux, test period, source bottle, calculate the amount of substance of the mixing steam produced in process of the test; According to the amount of substance difference in liquid source in process of the test and the amount of substance of the mixing steam of generation in test, calculate the substance withdrawl syndrome formula in liquid source in mixing steam, thus obtain the corresponding relation between pressure in the quality change value in the substance withdrawl syndrome in liquid source in mixing steam and liquid source, source bottle, carrier gas flux, test period.
Further, in step S01, test liquid source is filled in the bottle of reaction source bottle, closes the valve on inlet pipe, escape pipe, and measure the height of liquid source in bottle; In step S03, when the test period set arrives, close the valve on inlet pipe, escape pipe, measure the height of residual solution source in bottle, obtain the height difference of liquid source in bottle before and after test; In step S04, pressure, carrier gas flux, test period before and after the test obtained in the height difference of liquid source in bottle, source bottle, again according to the cross-sectional area of bottle, by calculating, draw the substance withdrawl syndrome formula in liquid source in mixing steam, thus obtain the corresponding relation between the substance withdrawl syndrome in liquid source in mixing steam and carrier gas flux.
As can be seen from technique scheme, the present invention is by using a kind of simulation reaction technique actual procedure, there is the reaction source bottle test device of weighing structure, realize the quality change value to liquid source, pressure in the bottle of source, carrier gas flux, test period, the required critical technical parameter such as test temperature carries out off-line precise acquisition, accurately can calculate the reaction source bottle air input under room temperature condition, liquid level, solution temperature, relation between pressure of the inside of a bottle and liquid source carrying amount, there is testing apparatus structure simple to operation, the test method feature such as accurately and reliably, avoid on-line checkingi to the disadvantageous effect of producing, applicable factory promotes the use of.
Accompanying drawing explanation
Fig. 1 is the contour structures schematic diagram of the testing apparatus used in a kind of test method for reaction source bottle of the present invention;
Fig. 2 is the structure sectional view of the testing apparatus used in a kind of test method for reaction source bottle of the present invention.
1. balances, 2. bottle, 3. bottle cap in figure, 4. the first tensimeter, 5. the second escape pipe flexible tube section, 6. the second inlet pipe flexible tube section, 7. the 3rd air inlet pipeline section, 8. under meter, 9. thermocouple, 10. thermocouple joint, 11. first air inlet pipeline sections, 12. sealing-rings, 13. air outlet valves, 14. second tensimeters, 15. inlet mouth valves, 16. first give vent to anger pipeline section, 17. bolts, 18. inlet pipe joints, 19. liquid level sensors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Embodiment one
In the present embodiment, the concrete structure of the testing apparatus that the present invention uses first is introduced.Refer to Fig. 1, Fig. 1 is the contour structures schematic diagram of the testing apparatus used in a kind of test method for reaction source bottle of the present invention.As shown in the figure, testing apparatus comprises a balance 1, and the bottle 2 of reaction source bottle lies in a horizontal plane on balance 1, and balance is used for the change of reaction source bottle quality before and after weighing test.The bottleneck of bottle 2 is flange shape, and bottle cap 3 is connected with flange bottleneck by bolt 17.Described bottle is transparent material, is convenient to Real Time Observation bubble situation and liquid level changing conditions in process of the test.The concrete material of each parts of described testing apparatus and the trade mark, will select according to the character of the working temperature of testing apparatus, operating pressure, working medium and accuracy requirement.
Refer to Fig. 1, bottle cap is provided with the thermocouple interface being communicated with bottle, and thermocouple 9 is connected with the interface of bottle cap by thermocouple joint 10, and the measuring junction of thermocouple 9 is inserted in the testing liquid in bottle, for measuring the temperature of testing liquid.Bottle cap is also provided with the inlet pipe interface being communicated with bottle, and the first air inlet pipeline section 11 is connected with inlet pipe interface thread by inlet pipe joint 18, and is inserted in the testing liquid in bottle, for passing into carrier gas.First tensimeter 4 is arranged on bottle cap 3, for detecting the pressure in bottle.Liquid level sensor 19 is arranged on bottle cap 3, and extend in the testing liquid of bottle 2, for measuring liquid level height.
Refer to Fig. 1, the other end of the first air inlet pipeline section 11 is connected with inlet mouth valve 15; Inlet port valve door is connected with the air outlet of under meter 8 by the second inlet pipe flexible tube section 6, and the inlet mouth of under meter is connected with air feeder (not shown) by the 3rd air inlet pipeline section 7.In process of the test, inlet mouth valve closes for controlling the logical of carrier gas; Under meter is for controlling and detect the flow of carrier gas.
Refer to Fig. 1, first pipeline section 16 of giving vent to anger is welded on bottle cap 3, the first pipeline section the other end of giving vent to anger is connected with air outlet valve 13, air outlet valve is connected with tail gas collecting device (not shown) by the second escape pipe flexible tube section 5, and the second tensimeter 14 is arranged on the second escape pipe flexible tube section.In process of the test, air outlet valve closes for controlling to carry the logical of testing liquid mixing steam; Second tensimeter is used for detecting endotracheal pressure.The second described inlet pipe flexible tube section and the second escape pipe flexible tube section are flexible pipe, and extraneous gravity factor can be avoided to have an impact to the mass measurement before and after test.Inlet mouth valve, air outlet valve select a use, can play control action kou.
Refer to Fig. 2, Fig. 2 is the structure sectional view of the testing apparatus used in a kind of test method for reaction source bottle of the present invention.As shown in the figure, the upper surface of bottleneck flange has annular seal groove, and sealing-ring 12 is arranged in the sealing groove of bottle 2, when bottle cap is connected with flange bottleneck by bolt 17, can play good sealing effectiveness.
A kind of test method for reaction source bottle of the present invention is introduced below by specific examples.
Before test, test testing liquid is filled in bottle, closes inlet mouth valve and air outlet valve, measure the quality of now testing apparatus.Open inlet mouth valve and air outlet valve and start test, adopt stopwatch (not shown) record test period simultaneously, and in process of the test, observe the pressure in the air flow of under meter and reaction source bottle.After test period arrives, close inlet mouth valve and air outlet valve, adopt balance measurement now testing apparatus quality change or adopt the change of liquid level sensor measuring liquid level.Calculate the relation between reaction source bottle air input and liquid source carrying amount.
Below using water as test testing liquid, introduce the method for calculation of the substance withdrawl syndrome of water in mixing steam:
By the relation between quality and amount of substance, the amount of substance formula one of water can be obtained:
Wherein, Δ m is the quality change of water in bottle before and after the test that recorded by balance, or records liquid level change h according to liquid level sensor, and try to achieve according to formula Δ m=ρ × s × h, wherein ρ is liquid source density, and S is source bottle section area.
By the Ideal-Gas Equation, formula two can be obtained:
Wherein, n
vfor the amount of substance of the mixing steam of generation, P
vfor mixing steam pressure, T is test temperature, and V is mixing steam volume, and R is ideal gas behavior constant.
By the relation between mixing steam flow and pressure, formula three can be obtained:
Wherein, Q
vfor mixing steam flow, Q
n2for carrier gas flux, P
vfor the saturated vapour pressure in liquid source, P
hSfor the bottle internal pressure recorded by tensimeter.
Formula three is updated to formula two, formula four can be obtained:
Wherein, t is test period.
By formula one and formula four, the substance withdrawl syndrome formula that can obtain water in mixing steam is:
Such as, before test, test water be filled in bottle, close inlet mouth valve and air outlet valve, the quality measuring now testing apparatus is 4359.0g.Open inlet mouth valve and air outlet valve, start test, adopt stopwatch (not shown) record test period simultaneously, and the air flow observing and adjust under meter in process of the test is 2L/min, and the pressure in reaction source bottle.After for some time, stop stopwatch and close inlet mouth valve and air outlet valve, reading now stopwatch times is 1400.5min, and the quality measuring now testing apparatus is 4280.5g.The changing value can trying to achieve the amount of substance of source water in bottle according to formula one is:
Checking in the saturated vapor pressure of water 20 DEG C time is 2338.8Pa, and recording bottle internal pressure by tensimeter is 13332Pa, obtains mixing steam flow be according to the formula three ways of calculating:
The mixing steam volume calculating duration of test is
V
v＝Q
v×t＝0.4255L/min×1400.5min＝595.91L
The amount of substance calculating duration of test mixing steam according to formula two is:
Wherein R is ideal gas behavior constant, 8.31; T is test temperature 293K.
So the substance withdrawl syndrome of water is in mixing steam:
By test method of the present invention, reaction source bottle air input under room temperature condition, liquid level, solution temperature, relation between pressure of the inside of a bottle and liquid source carrying amount can be measured exactly.Therefore, when reaction source bottle is designed and developed, the reasonableness designed can well be determined.
Embodiment two
In the present embodiment, testing apparatus is identical with embodiment one, and test method adopts the liquid level change by measuring test water in the bottle of source, calculates the critical technical parameter needed for acquisition.
Before experiment, test water is filled in bottle, closes inlet mouth valve and air outlet valve, measure now in the bottle of source liquid level be 152.3mm.Open inlet mouth valve and air outlet valve and start test, adopt stopwatch (not shown) record test period simultaneously, and to observe in process of the test and the air flow of adjustment under meter is 2L/min, and the pressure in reaction source bottle.After for some time, stop stopwatch also to close inlet mouth valve and air outlet valve, reading now stopwatch times is 1400.5min, measure now in the bottle of source liquid level be 147.2mm.So the quality change of trying to achieve source water in bottle according to formula Δ m=ρ × s × h is 78.5g, wherein bottle internal diameter in source is 140mm.
The changing value can trying to achieve the amount of substance of source water in bottle according to formula one is:
Checking in the saturated vapor pressure of water 20 DEG C time is 2338.8Pa, and recording bottle internal pressure by tensimeter is 13332Pa, obtains mixing steam flow be according to the formula three ways of calculating:
The mixing steam volume calculating duration of test is
V
v＝Q
v×t＝0.4255L/min×1400.5min＝595.91L
The amount of substance calculating duration of test mixing steam according to formula two is:
Wherein R is ideal gas behavior constant, 8.31; T is test temperature 293K.
So the substance withdrawl syndrome of water is in mixing steam:
Can be found out by above-mentioned two embodiments, adopt the method for weighing or gauging level change, can accurately obtain required critical technical parameter, can select according to practical situation.
Above-describedly be only the preferred embodiments of the present invention; described embodiment is also not used to limit scope of patent protection of the present invention; therefore the equivalent structure that every utilization specification sheets of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.
Claims (2)
1. the test method for reaction source bottle, it is characterized in that, a testing apparatus is used to test, described testing apparatus comprises source bottle bottle, be arranged on the inlet pipe on the bottle cap of bottle, escape pipe, thermocouple, also comprise a balance, described bottle is placed on balance, described inlet pipe one end extend in bottle, the other end connects air feeder, described escape pipe one end is communicated with bottle, the other end connects tail gas collecting device, the first tensimeter and liquid level sensor described bottle cap be equipped with, the second tensimeter described escape pipe is equipped with, described inlet pipe is equipped with under meter, described inlet pipe and escape pipe have at least one valve is housed, described test method comprises the following steps successively:
Step S01: first, is filled in the bottle of reaction source bottle by test liquid source, closes inlet pipe, valve on escape pipe, uses the balance measurement now quality of reaction source bottle on balance;
Step S02: then, the valve opened on inlet pipe, escape pipe starts test, simultaneously, by stopwatch record test period, the temperature in liquid source in bottle is measured with thermocouple, and the escape pipe top hole pressure of pressure in the reaction source bottle of the carrier gas flux of recording flowmeter, the first tensimeter display in process of the test and the display of the second tensimeter;
Step S03: when the test period set arrives, closes inlet pipe, valve on escape pipe, uses the balance measurement now quality of reaction source bottle on balance, obtains before and after test, the quality change value in liquid source in bottle;
Step S04: according to the quality change value measuring the liquid source obtained in above-mentioned steps, calculates the amount of substance difference in liquid source in process of the test; According to pressure, test temperature in carrier gas flux, test period, source bottle, calculate the amount of substance of the mixing steam produced in process of the test; According to the amount of substance difference in liquid source in process of the test and the amount of substance of the mixing steam of generation in test, calculate the substance withdrawl syndrome formula in liquid source in mixing steam, thus obtain the corresponding relation between pressure in the quality change value in the substance withdrawl syndrome in liquid source in mixing steam and liquid source, source bottle, carrier gas flux, test period.
2. test method as claimed in claim 1, is characterized in that, in step S01, be filled in the bottle of reaction source bottle by test liquid source, closes the valve on inlet pipe, escape pipe, and measures the height of liquid source in bottle; In step S03, when the test period set arrives, close the valve on inlet pipe, escape pipe, measure the height of residual solution source in bottle, obtain the height difference of liquid source in bottle before and after test; In step S04, pressure, carrier gas flux, test period before and after the test obtained in the height difference of liquid source in bottle, source bottle, again according to the cross-sectional area of bottle, by calculating, draw the substance withdrawl syndrome formula in liquid source in mixing steam, thus obtain the corresponding relation between the substance withdrawl syndrome in liquid source in mixing steam and carrier gas flux.
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| CN106435517B (en) * | 2016-12-11 | 2018-07-17 | 重庆工业职业技术学院 | A kind of dedicated unit and its application method that vapor is provided for vacuum coating equipment |
| CN109029635A (en) * | 2017-06-12 | 2018-12-18 | 北京北方华创微电子装备有限公司 | A kind of detection device and its detection method of Solid Source |
| CN112729620A (en) * | 2020-12-30 | 2021-04-30 | 杭州堃博生物科技有限公司 | Automatic steam energy monitoring devices of moisturizing |
| CN114911282A (en) * | 2022-05-31 | 2022-08-16 | 北京北方华创微电子装备有限公司 | Temperature control system and method for source bottle |
| CN115323360B (en) * | 2022-10-17 | 2023-03-24 | 上海星原驰半导体有限公司 | Precursor output system and precursor output method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1242248A (en) * | 1998-02-27 | 2000-01-26 | 液体空气乔治洛德方法利用和研究有限公司 | Continuous gas saturation system and method |
| CN202974331U (en) * | 2012-11-27 | 2013-06-05 | 凯迈（洛阳）气源有限公司 | Multifunctional gas source testing apparatus |
| CN103185771A (en) * | 2011-12-27 | 2013-07-03 | 株式会社堀场Stec | Liquid sample vaporizing system, diagnosis system and diagnosis program |
| CN203715720U (en) * | 2014-01-09 | 2014-07-16 | 北京七星华创电子股份有限公司 | Test device used for reaction source bottle |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273619A (en) * | 1985-09-26 | 1987-04-04 | Matsushita Electric Ind Co Ltd | Vaporization device for volatile matter |
| KR101372488B1 (en) * | 2009-04-24 | 2014-03-11 | 어플라이드 머티어리얼스, 인코포레이티드 | Ampoule with integrated hybrid valve |
-
2014
- 2014-01-09 CN CN201410010548.4A patent/CN103710681B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1242248A (en) * | 1998-02-27 | 2000-01-26 | 液体空气乔治洛德方法利用和研究有限公司 | Continuous gas saturation system and method |
| CN103185771A (en) * | 2011-12-27 | 2013-07-03 | 株式会社堀场Stec | Liquid sample vaporizing system, diagnosis system and diagnosis program |
| CN202974331U (en) * | 2012-11-27 | 2013-06-05 | 凯迈（洛阳）气源有限公司 | Multifunctional gas source testing apparatus |
| CN203715720U (en) * | 2014-01-09 | 2014-07-16 | 北京七星华创电子股份有限公司 | Test device used for reaction source bottle |
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