CN203715720U - Test device used for reaction source bottle - Google Patents
Test device used for reaction source bottle Download PDFInfo
- Publication number
- CN203715720U CN203715720U CN201420012217.XU CN201420012217U CN203715720U CN 203715720 U CN203715720 U CN 203715720U CN 201420012217 U CN201420012217 U CN 201420012217U CN 203715720 U CN203715720 U CN 203715720U
- Authority
- CN
- China
- Prior art keywords
- bottle
- testing apparatus
- pipe
- housed
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 79
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 49
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 238000007789 sealing Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 239000007789 gas Substances 0.000 description 11
- 239000000126 substance Substances 0.000 description 11
- 239000012159 carrier gas Substances 0.000 description 9
- 239000002243 precursor Substances 0.000 description 8
- 238000000231 atomic layer deposition Methods 0.000 description 6
- 229920006395 saturated elastomer Polymers 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- 238000003877 atomic layer epitaxy Methods 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a test device used for a reaction source bottle. The test device comprises a source bottle body, a gas inlet tube, a gas outlet tube and a thermocouple, wherein the gas inlet tube, the gas outlet tube and the thermocouple are arranged on a bottle cover of the bottle cover; the test device is characterized by further comprising a balance, wherein the bottle body is placed on the balance; one end of the gas inlet tube extends into the bottle body, and the other end of the gas inlet tube is connected with a gas supply device; one end of the gas outlet tube is communicated with the bottle body, and the other end of the gas outlet tube is connected with a tail gas collecting device; a first pressure meter and a liquid level sensor are arranged on the bottle cover; a second pressure meter is arranged on the gas outlet tube, and a flow rate meter is arranged on the gas inlet tube; and a valve is arranged on at least one of the gas inlet tube and the gas outlet tube. The test device disclosed by the utility model can accurately obtain a relationship among air inflow, liquid surface height, liquor temperature, in-bottle pressure and a liquid source carrying volume of the reaction source bottle under a room temperature condition by testing and calculating; and moreover, the test device is simple in structure, easy to operate, accurate and reliable in test result, and suitable for being popularized and applied in a factory.
Description
Technical field
The utility model relates to a kind of reaction source bottle for atomic layer deposition apparatus, more specifically, relates to a kind of off-line type testing apparatus and test method for reaction source bottle.
Background technology
Technique for atomic layer deposition (Atomic Layer Deposition, ALD), is called as atomic layer epitaxy technology (Atomic Layer Epitaxy, ALE) the earliest, is a kind of semiconductor film membrane preparation technology being proposed by Finland scholar Tuomo Suntola.
The principal reaction method of technique for atomic layer deposition is: at a certain temperature, in the reaction chamber of atomic layer deposition apparatus, pass into the first pre-reaction material, precursor molecules is adsorbed on and on substrate surface, forms promoting agent; In the time that the absorption of precursor reaches capacity state, remove the first precursor and by product; Then, pass into the second pre-reaction material, the second precursor be adsorbed on the promoting agent of substrate surface, i.e. the first precursor generation chemical reaction, generate the unimolecular layer of film to be prepared at substrate surface, and discharge the by product of gaseous state; Then, remove the second precursor and by product in reaction chamber, the like.Like this, by two or more gaseous state precursor is alternately injected to reaction chamber, form and replace saturated surface reaction layer at processed substrate surface, thereby realize ald.Can be by selecting the growth cycle of different numbers, to prepare the film of different thickness.
The preparation of above-mentioned vapor reaction precursor, is in reaction process process, by pass into carrier gas (being generally nitrogen) in reaction source bottle, and carries reaction soln (being generally trimethyl aluminium or water) by carrier gas, periodically to passing into realization in reaction chamber.This is because the saturated vapor pressure in common liquid source (reaction soln) is lower, rely on the quantity of steam producing that self volatilizees can not meet technique needs, therefore, need to be by pass into carrier gas in reaction source bottle, rely on carrier gas to come transport fluid source, periodically in reaction chamber, provide pre-reaction material.
Therefore, in order scientifically to design and develop reaction source bottle, to accurately carry out measure control in reaction process process, effectively improve the carrying capacity of carrier gas, first need some the main technical details research experiment in reaction process process, comprise the relation between source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying etc., to determine the reasonableness of design.
At present, the ordinary method of the designing technique parameter of existing definite source bottle realizes by on-line sampling, by in the actual procedure of reaction process, the parameters such as source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle are sampled, then pass through series of computation, obtain the mutual relationship between these parameters and the liquid source amount of carrying.The defect of this method is the more difficult assurance of the precision of image data in the actual procedure of reaction process, and the accuracy of impact research Relationship between Parameters, often needs just can complete by data gathering repeatedly; And image data in the actual procedure of reaction process, also can bring certain impact to productive temp.
Utility model content
The purpose of this utility model is to overcome the above-mentioned defect that prior art exists, provide one to test by off-line, and can accurately gather the reaction source bottle test device of required technical parameter, by designing a kind of simulation reaction technique actual procedure, there is the reaction source bottle test device of weighing structure, realize required technical parameter is accurately gathered, can accurately calculate the relation between reaction source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying under room temperature condition.
For achieving the above object, the technical solution of the utility model is as follows:
For a testing apparatus for reaction source bottle, comprise source bottle bottle, be arranged on inlet pipe, escape pipe, thermocouple on the bottle cap of bottle, it is characterized in that, also comprise a balance, described bottle is placed on balance; Described inlet pipe one end extend in bottle, and the other end connects air feeder; Described escape pipe one end is communicated with bottle, and the other end connects tail gas collecting device; The first tensimeter and liquid level sensor are housed on described bottle cap, the second tensimeter is housed on described escape pipe, described inlet pipe is equipped with under meter; Wherein, on described inlet pipe and escape pipe, have one at least valve is housed.
Further, the bottleneck of described bottle is flange shape, and described bottle cap is fixedly connected with the upper surface of described bottleneck flange.
Further, the upper surface of described bottleneck flange has annular seal groove, in described sealing groove, is provided with sealing-ring.
Further, described bottle cap is provided with two interfaces that are communicated with bottle, and described inlet pipe, thermocouple are connected with described interface by joint respectively.
Further, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively.
Further, the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe.
Further, described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively.
Further, the pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
Further, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively, and the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe; Described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively; The pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
Further, described escape pipe one end and bottle cap are welded to connect, and are communicated with bottle, and the other end is connected to tail gas collecting device, and the second tensimeter is housed.
Can find out from technique scheme, the utility model is by a kind of simulation reaction technique actual procedure of design, there is the reaction source bottle test device of weighing structure, realization is carried out off-line to required critical technical parameter and is accurately gathered, can accurately calculate the relation between reaction source bottle air input, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying under room temperature condition, there is testing apparatus easy to operate, the test-results simple in structure feature such as accurately and reliably, avoided online detection to the disadvantageous effect of producing, applicable factory promotes the use of.
Brief description of the drawings
Fig. 1 is the contour structures schematic diagram of a kind of testing apparatus for reaction source bottle of the utility model;
Fig. 2 is the structure sectional view of a kind of testing apparatus for reaction source bottle of the utility model.
1. balances in figure, 2. bottle, 3. bottle cap, 4. the first tensimeter, 5. the second escape pipe flexible tube section, 6. the second inlet pipe flexible tube section, 7. the 3rd air inlet pipeline section, 8. under meter, 9. thermocouple, 10. thermocouple joint, 11. first air inlet pipeline sections, 12. sealing-rings, 13. air outlet valves, 14. second tensimeters, 15. inlet mouth valves, 16. first pipeline sections of giving vent to anger, 17. bolts, 18. inlet pipe joints, 19. liquid level sensors.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail.
In the present embodiment, refer to Fig. 1, Fig. 1 is the contour structures schematic diagram of a kind of testing apparatus for reaction source bottle of the utility model.As shown in the figure, testing apparatus comprises a balance 1, and the bottle 2 of reaction source bottle lies in a horizontal plane on balance 1, and balance is for the variation of reaction source bottle quality before and after weighing test.The bottleneck of bottle 2 is flange shape, and bottle cap 3 is connected with flange bottleneck by bolt 17.Described bottle is transparent material, is convenient to Real Time Observation bubble situation and liquid level changing conditions in process of the test.Concrete material and the trade mark of the described each parts of testing apparatus, select according to the character of the working temperature of testing apparatus, operating pressure, working medium and accuracy requirement.
Refer to Fig. 1, bottle cap is provided with the thermocouple interface that is communicated with bottle, and thermocouple 9 is connected with the interface of bottle cap by thermocouple joint 10, and the measuring junction of thermocouple 9 is inserted in the testing liquid in bottle, for measuring the temperature of testing liquid.Bottle cap is also provided with the inlet pipe interface that is communicated with bottle, and the first air inlet pipeline section 11 is connected with inlet pipe interface thread by inlet pipe joint 18, and is inserted in the testing liquid in bottle, for passing into carrier gas.The first tensimeter 4 is arranged on bottle cap 3, for detection of the pressure in bottle.Liquid level sensor 19 is arranged on bottle cap 3, and extend in the testing liquid of bottle 2, for measuring liquid level height.
Refer to Fig. 1, the other end of the first air inlet pipeline section 11 is connected with inlet mouth valve 15; Inlet port valve door is connected with the air outlet of under meter 8 by the second inlet pipe flexible tube section 6, and the inlet mouth of under meter is connected with air feeder (not shown) by the 3rd air inlet pipeline section 7.In process of the test, inlet mouth valve closes for controlling the logical of carrier gas; Under meter is for controlling and detect the flow of carrier gas.
Refer to Fig. 1, first pipeline section 16 of giving vent to anger is welded on bottle cap 3, the first pipeline section the other end of giving vent to anger is connected with air outlet valve 13, and air outlet valve is connected with tail gas collecting device (not shown) by the second escape pipe flexible tube section 5, and the second tensimeter 14 is arranged on the second escape pipe flexible tube section.In process of the test, air outlet valve carries the logical of testing liquid mixing steam and closes for controlling; The second tensimeter is for detection of the pressure in escape pipe.Described the second inlet pipe flexible tube section and the second escape pipe flexible tube section are flexible pipe, can avoid extraneous gravity factor to exert an influence to the mass measurement before and after test.Inlet mouth valve, air outlet valve are selected a use, can play control action kou.
Refer to Fig. 2, Fig. 2 is the structure sectional view of a kind of testing apparatus for reaction source bottle of the utility model.As shown in the figure, the upper surface of bottleneck flange has annular seal groove, and sealing-ring 12 is arranged in the sealing groove of bottle 2, in the time that bottle cap is connected with flange bottleneck by bolt 17, can play good sealing effectiveness.
Introduce the using method of the utility model testing apparatus below by specific examples.
Before test, test is filled in bottle with testing liquid, closes inlet mouth valve and air outlet valve, measure the now quality of testing apparatus.Open inlet mouth valve and air outlet valve and start test, adopt stopwatch (not shown) to record test period simultaneously, and in process of the test, observe the pressure in air flow and the reaction source bottle of under meter.After test period arrives, close inlet mouth valve and air outlet valve, now quality change or the employing liquid level sensor measuring liquid level of testing apparatus change to adopt balance measurement.Calculate the relation between reaction source bottle air input and the liquid source amount of carrying.
Using water as test testing liquid, introduce the method for calculation of the amount of substance concentration of water in mixing steam below:
By the relation between quality and amount of substance, can obtain the amount of substance formula one of water:
Wherein, Δ m is the quality change of water in the test front and back bottle recording by balance, or records liquid level change h according to liquid level sensor, tries to achieve according to formula Δ m=ρ × s × h, and wherein ρ is liquid source density, and S is source bottle section area.
By the Ideal-Gas Equation, can obtain formula two:
Wherein, n
vfor the amount of substance of mixing steam producing, p
vfor mixing steam pressure, T is test temperature, and V is mixing steam volume, and R is perfect gas case constant.
By the relation between mixing steam flow and pressure, can obtain formula three:
Wherein, Q
vfor mixing steam flow, Q
n2for carrier gas flux, q
vfor the saturated vapour pressure in liquid source, P
hSfor the bottle internal pressure recording by tensimeter.
Formula three is updated to formula two, can obtains formula four:
Wherein, t is test period.
By formula one and formula four, the amount of substance concentration formula that can obtain water in mixing steam is:
For example, before test, test water is filled in bottle, closes inlet mouth valve and air outlet valve, measuring the now quality of testing apparatus is 4359.0g.Open inlet mouth valve and air outlet valve, start test, adopt stopwatch (not shown) to record test period simultaneously, and in process of the test, to observe and adjust the air flow of under meter be 2L/min, and pressure in reaction source bottle.After for some time, stop stopwatch and close inlet mouth valve and air outlet valve, the now stopwatch time of reading is 1400.5min, and measuring the now quality of testing apparatus is 4280.5g.The changing value that can try to achieve the amount of substance of source water in bottle according to formula one is:
Checking in the saturated vapor pressure of water in the time of 20 DEG C is 2338.8Pa, and recording bottle internal pressure by tensimeter is 13332Pa, obtains mixing steam flow be according to the formula three ways of calculating:
The mixing steam volume that calculates duration of test is
Vv＝Q
v×t＝0.4255L/min×1400.5min＝595.91L
The amount of substance that calculates duration of test mixing steam according to formula two is:
Wherein R is perfect gas case constant, 8.31; T is test temperature 293K.
So the amount of substance concentration of water is in mixing steam:
Utilize this testing apparatus, can also adopt by the liquid level of test water in the bottle of measurement source and change, calculate and obtain required critical technical parameter.
Before experiment, test water is filled in bottle, closes inlet mouth valve and air outlet valve, measuring the now interior liquid level of source bottle is 152.3mm.Open inlet mouth valve and air outlet valve and start test, adopt stopwatch (not shown) to record test period simultaneously, and in process of the test, to observe and adjust the air flow of under meter be 2L/min, and pressure in reaction source bottle.After for some time, stop stopwatch and close inlet mouth valve and air outlet valve, the now stopwatch time of reading is 1400.5min, and measuring the now interior liquid level of source bottle is 147.2mm.So trying to achieve the quality change of source water in bottle according to formula Δ m=ρ × s × h is 78.5g, wherein bottle internal diameter in source is 140mm.
The changing value that can try to achieve the amount of substance of source water in bottle according to formula one is:
Checking in the saturated vapor pressure of water in the time of 20 DEG C is 2338.8Pa, and recording bottle internal pressure by tensimeter is 13332Pa, obtains mixing steam flow be according to the formula three ways of calculating:
The mixing steam volume that calculates duration of test is
Vv＝Q
v×t＝0.4255L/min×1400.5min＝595.91L
The amount of substance that calculates duration of test mixing steam according to formula two is:
Wherein R is perfect gas case constant, 8.31; T is test temperature 293K.
So the amount of substance concentration of water is in mixing steam:
Can find out from above-mentioned two kinds of test methods, adopt the method for weighing or metering liquid level change, can accurately obtain required critical technical parameter, can select according to practical situation.
Test by testing apparatus of the present utility model, can measure exactly the relation between reaction source bottle air input under room temperature condition, liquid level, solution temperature, pressure of the inside of a bottle and the liquid source amount of carrying.Therefore,, in the time that reaction source bottle is designed and developed, can well determine the reasonableness of design.
Above-described is only preferred embodiment of the present utility model; described embodiment is not in order to limit scope of patent protection of the present utility model; therefore the equivalent structure that every utilization specification sheets of the present utility model and accompanying drawing content are done changes, and in like manner all should be included in protection domain of the present utility model.
Claims (10)
1. for a testing apparatus for reaction source bottle, comprise source bottle bottle, be arranged on inlet pipe, escape pipe, thermocouple on the bottle cap of bottle, it is characterized in that, also comprise a balance, described bottle is placed on balance; Described inlet pipe one end extend in bottle, and the other end connects air feeder; Described escape pipe one end is communicated with bottle, and the other end connects tail gas collecting device; The first tensimeter and liquid level sensor are housed on described bottle cap, the second tensimeter is housed on described escape pipe, in described inlet pipe, under meter is housed; Wherein, on described inlet pipe and escape pipe, have one at least valve is housed.
2. testing apparatus as claimed in claim 1, is characterized in that, the bottleneck of described bottle is flange shape, and described bottle cap is fixedly connected with the upper surface of described bottleneck flange.
3. testing apparatus as claimed in claim 2, is characterized in that, the upper surface of described bottleneck flange has annular seal groove, in described sealing groove, is provided with sealing-ring.
4. the testing apparatus as described in claim 1～3 any one, is characterized in that, described bottle cap is provided with two interfaces that are communicated with bottle, and described inlet pipe, thermocouple are connected with described interface by joint respectively.
5. testing apparatus as claimed in claim 1, is characterized in that, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively.
6. testing apparatus as claimed in claim 5, is characterized in that, the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe.
7. testing apparatus as claimed in claim 1, is characterized in that, described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively.
8. testing apparatus as claimed in claim 7, is characterized in that, the pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
9. testing apparatus as claimed in claim 1, is characterized in that, described inlet pipe one end extend in bottle, and the other end connects inlet mouth valve, under meter, air feeder successively, and the air inlet pipeline section between inlet mouth valve and under meter is flexible pipe; Described escape pipe one end is communicated with bottle, and the other end connects air outlet valve, tail gas collecting device successively; The pipeline section of giving vent to anger between air outlet valve and tail gas collecting device is flexible pipe, and the second tensimeter is housed on described flexible pipe.
10. testing apparatus as claimed in claim 1, is characterized in that, described escape pipe one end and bottle cap are welded to connect, and is communicated with bottle, and the other end is connected to tail gas collecting device, and the second tensimeter is housed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420012217.XU CN203715720U (en) | 2014-01-09 | 2014-01-09 | Test device used for reaction source bottle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420012217.XU CN203715720U (en) | 2014-01-09 | 2014-01-09 | Test device used for reaction source bottle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203715720U true CN203715720U (en) | 2014-07-16 |
Family
ID=51154889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420012217.XU Expired - Lifetime CN203715720U (en) | 2014-01-09 | 2014-01-09 | Test device used for reaction source bottle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203715720U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103710681A (en) * | 2014-01-09 | 2014-04-09 | 北京七星华创电子股份有限公司 | Testing apparatus and testing method for reaction source bottle |
-
2014
- 2014-01-09 CN CN201420012217.XU patent/CN203715720U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103710681A (en) * | 2014-01-09 | 2014-04-09 | 北京七星华创电子股份有限公司 | Testing apparatus and testing method for reaction source bottle |
| CN103710681B (en) * | 2014-01-09 | 2016-03-02 | 北京七星华创电子股份有限公司 | A kind of test method for reaction source bottle |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103710681B (en) | A kind of test method for reaction source bottle | |
| CN102252720B (en) | Mass flow meter based on weighing method | |
| CN104007239B (en) | A kind of high concentration ion automatic on-line detecting system and method | |
| CN104931208B (en) | A kind of leakage mechanism for testing and its method of testing for built-in product | |
| CN104897514A (en) | Device for measuring danks surface gas adsorption and danks desorption curves | |
| CN109580454B (en) | Method for testing fluid sensitivity of tight reservoir by using pressure oscillation method | |
| CN108801860B (en) | Method for measuring diffusion coefficient of carbon dioxide in crude oil | |
| CN108104796A (en) | Has channeling simulating test device and test method | |
| CN104007041A (en) | Device for determining content of hydrogen sulfide in coal bed | |
| CN203715720U (en) | Test device used for reaction source bottle | |
| CN208476874U (en) | A kind of buret accurately calculating titer | |
| CN103439220A (en) | Jacket-type Z-shaped ubbelohde viscometer applicable to miniature full-automatic viscometer | |
| CN102608272B (en) | Method for determining element dissolved-out quantity of mineral product | |
| CN201772916U (en) | Calibration equipment for mass flow meter | |
| CN108507648A (en) | Continuous weighing metering device | |
| CN208206716U (en) | Utilize the device of The Ideal-Gas Equation indirect determination alusil alloy aluminium content | |
| CN203929719U (en) | Coal seam hydrogen sulfide content determinator | |
| CN110423680A (en) | Biogas and biological methane survey the device and its measurement method of gas in real time in a kind of anaerobic fermentation | |
| CN108956370A (en) | A kind of hydrolysis rate detection device and its detection method | |
| CN102620962B (en) | Multi-passage mineral lixiviating device | |
| CN109163777A (en) | It is a kind of to monitor the small system and method for producing air volume and flow | |
| CN209102465U (en) | A kind of experiment fermentation gas collection and measuring device | |
| CN203732328U (en) | Sampling device capable of extracting gas sample from negative pressure pipeline | |
| CN206648917U (en) | A kind of device of quick measure sampling observation double contrast radiograph gas generating agent gas production | |
| CN105784561A (en) | Porous material multi-field coupling permeability measurement device and measurement method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180105 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140716 |