CN114911282A

CN114911282A - Temperature control system and method for source bottle

Info

Publication number: CN114911282A
Application number: CN202210607326.5A
Authority: CN
Inventors: 张利军; 张芳
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2022-05-31
Filing date: 2022-05-31
Publication date: 2022-08-16

Abstract

The application discloses source bottle's temperature control system and method, the system includes: a source bottle body; the liquid level meter and the pressure gauge are arranged in the source bottle body, the liquid level meter is used for detecting the liquid level value of the process source borne in the source bottle body, and the pressure gauge is used for detecting the pressure value in the source bottle body; the first thermocouple is arranged on the outer bottle wall of the source bottle body, the second thermocouple and the carrier gas flowmeter are arranged at the airflow outlet of the source bottle body, and the third thermocouple is arranged in the source bottle body; the heating belt is arranged on the side wall of the source bottle body and used for heating the source bottle body; and the temperature controller is used for controlling the output power of the heating belt according to a first temperature value measured by the first thermocouple, a second temperature value measured by the second thermocouple, a third temperature value measured by the third thermocouple, a liquid level value detected by the liquid level meter, a pressure value detected by the pressure gauge and a carrier gas flow value detected by the carrier gas flow meter.

Description

Temperature control system and method for source bottle

Technical Field

The application belongs to the technical field of semiconductor process equipment, and particularly relates to a temperature control system and method for a source bottle.

Background

In semiconductor equipment, more coating processes in related equipment of an atomic layer deposition system (ALD)/Chemical Vapor Deposition (CVD) involve a solid source or a liquid source, the solid source or the liquid source is stored in a source bottle, the source bottle needs to be heated to a specified temperature to meet process requirements, the source flows to a process reaction cavity through carrier gas to complete the coating process, and the temperature control precision of the source bottle is crucial to the process result. The conditions of the liquid source or the solid source in the source bottle are constantly changed in the using process, and the temperature control requirement of the source bottle in the equipment cannot be met through simple temperature control.

Disclosure of Invention

The embodiment of the application provides a temperature control system and method of a source bottle, so that the temperature of a process source bottle can be quickly and accurately controlled.

In a first aspect, an embodiment of the present application provides a temperature control system for a source bottle, including:

a source bottle body for carrying a process source;

the liquid level meter and the pressure gauge are arranged in the source bottle body, the liquid level meter is used for detecting the liquid level value of the process source borne in the source bottle body, and the pressure gauge is used for detecting the pressure value in the source bottle body;

the first thermocouple is arranged on the outer bottle wall of the source bottle body, the second thermocouple and the carrier gas flowmeter are arranged at the airflow outlet of the source bottle body, and the third thermocouple is arranged in the source bottle body;

the heating belt is arranged on the inner bottle wall of the source bottle body and is used for heating the source;

and the temperature controller is used for controlling the heating belt to output target power according to a first temperature value measured by the first thermocouple, a second temperature value measured by the second thermocouple, a third temperature value measured by the third thermocouple, the liquid level value detected by the liquid level meter, the pressure value detected by the pressure gauge and the carrier gas flow value detected by the carrier gas flow meter so as to control the temperature of the source bottle body to reach a preset target temperature value.

In a second aspect, an embodiment of the present application further provides a source bottle temperature control method, which is applied to the source bottle temperature control system of the first aspect, and the temperature control method includes:

acquiring the liquid level value detected by the liquid level meter, the pressure value detected by the pressure gauge, the carrier gas flow value detected by the carrier gas flow meter, the first temperature value measured by the first thermocouple, the second temperature value measured by the second thermocouple and the third temperature value measured by the third thermocouple;

coupling the first temperature value, the second temperature value and the third temperature value to obtain a first coupling temperature value;

and controlling the heating belt to output a first target power according to the temperature difference value between the first coupling temperature value and a preset target temperature value, the liquid level value, the pressure value and the carrier gas flow value so as to control the first coupling temperature value to reach the target temperature value.

The temperature control system of source bottle in the embodiment of this application includes: a source bottle body; the liquid level meter and the pressure gauge are arranged in the source bottle body, the liquid level meter is used for detecting the liquid level value of the process source borne in the source bottle body, and the pressure gauge is used for detecting the pressure value in the source bottle body; the first thermocouple is arranged on the outer bottle wall of the source bottle body, the second thermocouple and the carrier gas flowmeter are arranged at the airflow outlet of the source bottle body, and the third thermocouple is arranged in the source bottle body; the heating belt is arranged on the inner bottle wall of the source bottle body and is used for heating the source; the temperature controller is used for controlling the heating belt to output target power according to a first temperature value measured by the first thermocouple, a second temperature value measured by the second thermocouple, a third temperature value measured by the third thermocouple, the liquid level value detected by the liquid level meter, the pressure value detected by the pressure gauge and the carrier gas flow value detected by the carrier gas flow meter so as to control the temperature of the source bottle body to reach a preset target temperature value; the output control of the heating belt can be determined according to a plurality of dimensional parameters such as the pressure value, the liquid level value, the carrier gas flow value, the source bottle internal temperature, the outer wall temperature and the outlet gas temperature of the source bottle, so that the set target temperature can be stabilized according to the rapid and prepared control of the condition of the source bottle, the heating state of the source bottle can be analyzed flexibly and accurately, the influence of temperature difference on the process is reduced, and the accurate detection and the rapid response of the source bottle temperature are realized.

Drawings

FIG. 1 is a schematic diagram of a source vial of the prior art;

FIG. 2 is a schematic diagram of the structure of a source bottle in an embodiment of the present application;

FIG. 3 is a schematic flow chart of a method for controlling the temperature of a source bottle in an embodiment of the present application;

FIG. 4 is a schematic diagram illustrating a method for controlling the temperature of a source bottle in accordance with an embodiment of the present application;

FIG. 5 is a schematic algorithm diagram of a temperature control method of a source bottle in the embodiment of the present application;

fig. 6 is a schematic structural diagram of an electronic device provided in an embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one. In addition, "and/or" in the specification and claims means at least one of connected objects, a character "/" generally means that a preceding and succeeding related objects are in an "or" relationship.

Specifically, as shown in fig. 1, a heating belt is disposed on a side wall of a source bottle body, and a carrier gas flow meter MFC is disposed at an airflow outlet. At the moment, the temperature control system monitors the temperature of the outer wall thermocouple TC1 of the source bottle body and feeds the temperature back to the temperature controller, then the temperature controller PID adjusts the power output of the heating belt, if the difference (TC1-TC2) between the temperature measured by the inner thermocouple TC2 of the source bottle and the temperature measured by the outer wall thermocouple TC1 is large, the PID output of the temperature control parameter is adjusted, and the purpose of controlling the temperature of the source bottle is achieved.

The temperature control system of the existing source bottle controls the temperature of the source bottle by monitoring the feedback of a thermocouple outside the source bottle and comparing an outer wall thermocouple with an inner thermocouple to adjust the power of a heating band, but the system does not consider the influence of factors such as the liquid level, the pressure of the source bottle, the flow of carrier gas and the like, the heating rate of the source bottle can be influenced by the difference and the change of the liquid level and the pressure, the temperature difference inside and outside the source bottle can be directly influenced by the flow of the carrier gas, and the problems of temperature increase or long heating period and the like can occur in the temperature control process. Therefore, the existing temperature control system cannot adjust the power output of the heating belt in real time according to the changes of the liquid level, the pressure and the carrier gas of the source bottle, and quickly and accurately control the temperature of the source bottle.

In order to solve the problems, the application provides a temperature control system and method for a process source bottle. The temperature control system and method for the process source bottle provided by the embodiment of the present application are described in detail through specific embodiments and application scenarios thereof with reference to the accompanying drawings.

Fig. 1 shows a temperature control system of a process source bottle according to an embodiment of the present invention, which includes:

a source bottle body for carrying a process source;

the heating belt is arranged on the side wall of the source bottle body and used for heating the source bottle body;

and the temperature controller is used for controlling the heating belt to output target power according to a first temperature value measured by the first thermocouple, a second temperature value measured by the second thermocouple, a third temperature value measured by the third thermocouple, a liquid level value detected by the liquid level meter, a pressure value detected by the pressure gauge and a carrier gas flow value detected by the carrier gas flow meter so as to control the temperature of the source bottle body to reach a preset target temperature value.

In particular, the process source may be a solid source or a liquid source.

Specifically, as shown in fig. 2, the source bottle body 21 is provided with an airflow inlet for feeding carrier gas, an airflow outlet for discharging carrier gas, a liquid level meter 22 and a pressure meter 23 are both arranged in the source bottle body, and a carrier gas flow meter 26 is arranged at the airflow outlet of the source bottle body; the liquid level meter 22 is used for detecting a liquid level value of the process source carried in the source bottle body, and certainly, if the process source is a solid source, the liquid level value is a height value occupied by the solid source in the source bottle body, the pressure meter is used for detecting a pressure value in the source bottle body, and the carrier gas flowmeter 26 is used for detecting a carrier gas flow value flowing through the source bottle body 21.

The first thermocouple TC1 is arranged on the outer bottle wall of the source bottle body and is used for detecting the external temperature of the source bottle body; the second thermocouple TC2 is arranged at the airflow outlet of the source bottle body 21 and is used for detecting the temperature at the airflow outlet; the third thermocouple TC3 is disposed within the source vial body for detecting the internal temperature of the source vial body.

Further, optionally, heating belts are provided on the side walls of the source bottle body, and may include a main heating belt 24 and an auxiliary heating belt 25. Alternatively, of course, heating belts may be provided at the bottom and top of the source bottle body 21, which is not particularly limited herein.

In addition, the temperature control system of the source bottle further comprises a temperature controller, the temperature controller can be in communication connection with the first thermocouple TC1, the second thermocouple TC2, the third thermocouple TC3, the liquid level meter 22, the pressure gauge 23 and the carrier gas flow meter 26, and is used for obtaining a first temperature value measured by the first thermocouple TC1, a second temperature value measured by the second thermocouple TC2, a third temperature value measured by the third thermocouple TC3, the liquid level value detected by the liquid level meter 22, the pressure value detected by the pressure gauge 23 and the carrier gas flow value detected by the carrier gas flow meter 26, and controlling the heating belt to output target power according to the parameters such as the first temperature value, the second temperature value, the third temperature value, the liquid level value, the pressure value and the carrier gas flow value, so as to control the temperature of the source bottle body to reach a preset target temperature value, wherein the target temperature value is a set temperature that the source bottle body 21 needs to reach.

Compared with the existing temperature control system, the pressure gauge and the liquid level meter are added in the embodiment, the second thermocouple TC2 and the carrier gas flowmeter 26 are added at the airflow outlet, the temperature control process of the source bottle is realized, the pressure change, the carrier gas flow change, the liquid level change of the source bottle, the internal temperature, the external wall temperature and the airflow outlet temperature of the source bottle are considered, the output power of the heating belt is controlled by the parameters of multiple dimensions, and the accurate detection and control of the temperature of the source bottle body are realized.

In one implementation, the heating belt includes a primary heating belt and a secondary heating belt; wherein,

the temperature controller is used for determining PID control parameters for controlling the output power of the main heating belt and the auxiliary heating belt according to a first coupling temperature value, adjusting the PID control parameters according to the liquid level value, the pressure value and the carrier gas flow value, and controlling the main heating belt to output first power according to the adjusted PID control parameters; when the liquid level value is detected to be larger than a preset height value, the carrier gas flow value is detected to be larger than a preset flow value or the temperature difference value is detected to be larger than a preset temperature value, the auxiliary heating belt is controlled to be started, and the auxiliary heating belt is controlled to output second power according to the adjusted PID control parameter;

the temperature difference value is a difference value between the first coupling temperature value and the target temperature value, and the first coupling temperature value is a temperature value obtained by coupling the first temperature value, the second temperature value and the third temperature value;

the first power is used for controlling the first coupling temperature value to reach the target temperature value under the condition that the auxiliary heating belt is not started; and under the condition that the auxiliary heating belt is started, the first power and the second power are jointly used for controlling the first coupling temperature value to reach the target temperature value.

As shown in fig. 2, the heating belt includes a main heating belt 24 and an auxiliary heating belt 25. Specifically, the heating band is divided into a main heating band 24 and an auxiliary heating band 25, the first reason is that the difference of the required heating power is large when the liquid level in the source bottle body is low and the liquid level is high, the auxiliary heating band does not need to be started when the liquid level in the source bottle body is low, the heating process is prevented from being excessively overshot, the main heating band and the auxiliary heating band are started simultaneously when the liquid level is high, the heating time is shortened, and the temperature control flexibility of the source bottle body is enhanced; the second reason is that the internal heat is little when the gas carrying amount flowing through the source bottle is small or no gas flows, the auxiliary heating belt is not needed to be started, and the internal heat is great when the gas carrying amount is large, and the auxiliary heating belt is needed to be started to compensate the heat; the third reason is that when the temperature difference between the target temperature and the source bottle body is different, the auxiliary heating belt can increase the power adjustment range of the temperature control system, and the heating effect is optimized.

In addition, specifically, the temperature difference may be a difference between the first coupled temperature value and the target temperature value or a difference between the first temperature value and the target temperature value. The first coupling temperature value or the first temperature value represents the real temperature of the source bottle body; the temperature difference value represents the temperature difference between the current real temperature of the source bottle body and the set target temperature value of the source bottle body.

Therefore, through parameters such as the first coupling temperature value, the liquid level value, the pressure value and the carrier gas flow value, a proper PID control parameter is determined to output the power of the heating belt, the first coupling temperature value is finally made to reach the target temperature value through cyclic judgment, and therefore the real temperature value of the source bottle body reaches the set target temperature value required by the source bottle body, and therefore accurate detection of the temperature of the source bottle body and quick response control of the temperature are achieved.

In addition, optionally, the temperature controller is further configured to control the auxiliary heating belt to be closed when the liquid level value is smaller than the preset height value, the carrier gas flow value is smaller than the preset flow value, and the temperature difference value is smaller than the preset temperature value.

The following describes the examples of the present application with reference to a method of controlling the temperature of a source bottle.

As shown in fig. 3, a method for controlling the temperature of the source bottle in the embodiment of the present application is applied to the temperature control system of the source bottle in the above embodiment, and the method for controlling the temperature includes:

step 301: and acquiring a liquid level value detected by the liquid level meter, a pressure value detected by the pressure gauge, a carrier gas flow value detected by the carrier gas flow meter, a first temperature value measured by the first thermocouple, a second temperature value measured by the second thermocouple and a third temperature value measured by the third thermocouple.

Specifically, in this step, the liquid level value detected by the liquid level meter, the pressure value detected by the pressure gauge, the carrier gas flow value detected by the carrier gas flow meter, the first temperature value measured by the first thermocouple, the second temperature value measured by the second thermocouple, and the third temperature value measured by the third thermocouple may be obtained in real time by the temperature controller.

Step 302: and coupling the first temperature value, the second temperature value and the third temperature value to obtain a first coupling temperature value.

Specifically, when the first temperature value, the second temperature value and the third temperature value are coupled, the first temperature value, the second temperature value and the third temperature value can be coupled through a preset coupling weight coefficient to obtain a first coupling temperature value, and the first coupling temperature value represents the real temperature of the source bottle body.

For example, assuming that the first temperature value is T1, the second temperature value is T2, the third temperature value is T3, the coupling weight coefficient of the first temperature value is a, the coupling weight coefficient of the second temperature value is b, and the coupling weight coefficient of the third temperature value is c, the first coupling temperature value is a × T1+ b × T2+ c × T3.

Step 303: and controlling the heating belt to output a first target power according to a temperature difference value between the first coupling temperature value and a preset target temperature value, a liquid level value, a pressure value and a carrier gas flow value so as to control the first coupling temperature value to reach the target temperature value.

Specifically, the temperature controller may calculate a temperature difference between the first coupling temperature value and a preset target temperature value of the source bottle body, and then control the heating belt to output the first target power according to the temperature difference between the first coupling temperature value and the preset target temperature value, the liquid level value, the pressure value, and the carrier gas flow rate value, so as to control the first coupling temperature value to reach the target temperature value.

Like this, this embodiment is through the temperature difference value and the liquid level value between first coupling temperature value and the preset target temperature value, the pressure value, parameters such as carrier gas flow value, control heating band output first target power, realized in source bottle accuse temperature process, the pressure variation of having considered the source bottle, the liquid level change, carrier gas flow change, and parameters such as source bottle inside temperature, outer wall temperature and exit temperature, make first coupling temperature value reach the target temperature value, thereby accomplish the true temperature value of source bottle body and reach the target temperature value that the source bottle body that sets for needs reached, thereby realized the temperature of accurate detection source bottle body and the quick response control of temperature.

In one implementation, when the source bottle body does not input carrier gas flow, the temperature control method further comprises:

coupling the first temperature value and the second temperature value to obtain a second coupled temperature value; and controlling the heating belt to output a second target power according to the temperature difference between the second coupling temperature value and the target temperature value so as to enable the second coupling temperature value to reach the target temperature value.

Specifically, when the carrier gas flow is not input into the source bottle body, only the first temperature value and the second temperature value may be coupled to obtain a second coupling temperature value, where the second coupling temperature value represents the real temperature of the source bottle body at that time, and then the heating band is controlled to output a second target power according to a temperature difference between the second coupling temperature value and the target temperature value, so that the second coupling temperature value reaches the target temperature value.

In one implementation manner, when the heating tape is controlled to output a first target power according to the temperature difference value between the first coupling temperature value and a preset target temperature value, and the level value, the pressure value, and the carrier gas flow value, the method may include the following steps:

determining a PID control parameter for controlling the output power of the heating belt according to the first coupling temperature value, and adjusting the PID control parameter according to the liquid level value, the pressure value and the carrier gas flow value;

controlling the main heating belt to output a first power according to the adjusted PID control parameter;

judging whether to control to start an auxiliary heating belt or not according to the liquid level value, the pressure value, the temperature difference value and the carrier gas flow value, and controlling the auxiliary heating belt to output a second power according to the adjusted PID control parameter after controlling to start the auxiliary heating belt;

wherein the first power is used to control the first coupled temperature value to reach the target temperature value without the auxiliary heating zone being turned on; and under the condition that the auxiliary heating belt is started, the first power and the second power are jointly used for controlling the first coupling temperature value to reach the target temperature value.

Specifically, the first target power output by the heating belt comprises a first power output by the main heating belt, or comprises the first power output by the main heating belt and a second power output by the auxiliary heating belt.

Optionally, when determining whether to control to start the auxiliary heating belt according to the level value, the pressure value, the temperature difference value, and the carrier gas flow value, the auxiliary heating belt may be controlled to start when the level value is greater than a preset height value, the carrier gas flow value is greater than a preset flow value, the pressure value is greater than a preset pressure value, or the temperature difference value is greater than a preset temperature value; and when the liquid level value is smaller than a preset height value, the carrier gas flow value is smaller than a preset flow value, the pressure value is smaller than a preset pressure value and the temperature difference value is smaller than a preset temperature value, controlling the auxiliary heating belt not to be started.

In addition, in an implementation manner, when whether to control to open the auxiliary heating belt is judged according to the liquid level value, the pressure value, the temperature difference value and the carrier gas flow value, whether to control to open the auxiliary heating belt may be determined according to the carrier gas flow value when the temperature difference value is within a first preset temperature range; and under the condition that the temperature difference value is within the first preset temperature range and the pressure value is within the first preset pressure range, determining whether to control to open the auxiliary heating belt or not according to the liquid level value.

Optionally, when determining whether to control to start the auxiliary heating belt according to the carrier gas flow value when the temperature difference is within a first preset temperature range, in a case where the first preset temperature range is 0 ℃ to 3 ℃:

if the carrier gas flow value is more than or equal to 0 and less than 5SLM, determining not to start the auxiliary heating belt; if the carrier gas flow value is larger than 5SLM and smaller than 10SLM, determining to control to open the auxiliary heating belt; and under the condition that the first preset temperature range is greater than 3 ℃, determining to control to start the auxiliary heating belt.

In addition, optionally, when determining whether to control to open the auxiliary heating belt according to the level value under the condition that the temperature difference value is within the first preset temperature range and the pressure value is within the first preset pressure range,

when the first preset temperature range is 0 ℃ to 3 ℃ and the pressure value is greater than 0 and less than 100 torr: if the liquid level value is greater than or equal to 0 and less than 50%, determining not to start the auxiliary heating belt; if the liquid level value is more than 50% and less than 100%, determining to control to start the auxiliary heating belt;

and under the condition that the first preset temperature range is larger than 3 ℃, and the pressure value is larger than 0 and smaller than 100torr, determining to control to start the auxiliary heating belt.

Therefore, whether the auxiliary heating belt is controlled to be started or not is determined by setting various conditions required to be met by the liquid level value, the pressure value, the temperature difference value and the carrier gas flow value, convenience is provided for determining whether the auxiliary heating belt is controlled to be started or not, and the judgment efficiency is improved.

Specifically, as shown in fig. 4, which is a schematic diagram of a method for controlling the temperature of a source bottle in one embodiment, referring to the schematic diagram, the method for controlling the temperature in one embodiment comprises the following steps:

step 1, monitoring and collecting a liquid level value, a pressure value and a carrier gas flow value of a source bottle body in real time.

Step 2: the temperature controller obtains a first temperature value measured by a thermocouple TC1, a second temperature value measured by the thermocouple TC2 and a third temperature value measured by the thermocouple TC3 through a thermocouple TC1 arranged on a heating belt on the outer wall of the source bottle, a thermocouple TC2 at an airflow outlet and a thermocouple TC3 in the source bottle body, and couples the first temperature value, the second temperature value and the third temperature value to obtain a first coupling temperature value, namely the real temperature of the source bottle body; when the carrier gas flowmeter measures that no carrier gas flow exists, the temperature controller obtains a second coupling temperature value through coupling of a first temperature value and a third temperature value fed back by a thermocouple TC1 and a thermocouple TC3, PID control parameters are determined according to the second coupling temperature value to control the heating belt to output target power, and in addition, the control system also needs to judge whether to start the auxiliary heating belt or not through a temperature difference value, a liquid level value, a pressure value and a carrier gas flow value, so that the temperature of the heating source bottle is raised to a set target temperature.

And step 3: when the machine process is started, carrier gas flows into the source bottle body through the airflow inlet of the source bottle body, meanwhile, the carrier gas flowmeter at the airflow outlet detects and feeds back the carrier gas flow value, and the pressure gauge and the liquid level gauge also feed back the measured pressure value and the measured liquid level value to the temperature controller through analog quantity input signals.

And 4, step 4: because the temperature difference exists between the carrier gas entering the source bottle body and the temperature of the process source (the temperature of the carrier gas is lower than that of the process source in general), the temperature change PV in the source bottle body and the set target temperature SV inevitably generate a temperature difference value Delta T, and the larger the carrier gas flow is, the larger the Delta T value is.

And 5: at the moment, the temperature controller still uses temperature values fed back by the thermocouple TC1 and the thermocouple TC3 to perform temperature control, the power increasing response of the heating belt is slow, at the moment, a second temperature value at the airflow outlet of the source bottle body needs to be increased, the first temperature value, the second temperature value and the third temperature value are coupled into a first coupling temperature value and perform PID temperature difference compensation with the set target temperature SV, and therefore PID control parameters are determined. In addition, the thermometer adjusts the output power of the heating belt by switching the first coupling temperature value into a new feedback temperature and calibrating the determined PID control parameter through values measured by the pressure gauge, the liquid level meter and the carrier gas flow meter; if the liquid level is higher, the flow of the carrier gas at the outlet is larger or the temperature difference value is large, the auxiliary heating belt is triggered to be opened, and the auxiliary heating belt is controlled to be closed after the liquid level in the source bottle body is low, the flow of the carrier gas at the outlet is small and the temperature difference value is reduced, so that the heating time and the steady-state period are reduced.

In addition, specifically, the temperature control system debugs the output power of the heating band according to the acquired parameters, and executes PID control parameters in different situations, as shown in table 1 below:

the source bottle temperature control system has more influence factors, and the smaller influence factor only needs to compensate and adjust PID control parameter output, and optimize the temperature control curve and the temperature control precision; the larger influence factor causes the auxiliary heating belt to be opened or closed, and determines the temperature control time and effect of the temperature control system.

Wherein the major factors influencing the source bottle temperature control system comprise a temperature difference value delta T, a liquid level indicator and a carrier gas flow value; in one example, therefore, the conditions for turning on the auxiliary heating belt are set as follows: delta T is more than 3 ℃, the liquid level value of the source bottle is more than 50 percent, and the flow value of the carrier gas (MFC) is more than 5 SLM.

TABLE 1

Wherein SV represents a preset target temperature value; PV represents the real temperature value of the source bottle body, and the value measured by the outer wall TC1 can be taken; MFC represents the value measured by the carrier gas flowmeter at the airflow outlet of the source bottle body; TC' represents a coupled source bottle feedback temperature value; PID1, PID2, PID3 and PID4 represent PID control parameters output by a control system, and each PID control parameter corresponds to the output control of a heating zone; a0, a1, a2 represent coupling weight coefficients of thermocouple TC 1; b0, b1, b2 represent coupling weight coefficients of thermocouple TC 3; c0, c1, c2 represent coupling weight coefficients of thermocouple TC 2; p1, p2 and p3 represent calibration coefficients of pressure influence of the source bottle body on PID control parameters; k1, K2, K3 and K4 represent calibration coefficients of the liquid level influence of the source bottle body on PID control parameters.

Specifically, an algorithm schematic diagram of the source bottle temperature control method is shown in fig. 5, wherein a judgment formula algorithm is as follows:

condition 1:

if 0< DELTAT <1 deg.C,

MFC ═ 0SLM, feedback TC' ═ (a0 × TC1+ b0 × TC2+ c0 × TC3)/3, and c0 ═ 0, the temperature controller (may be simply referred to as a thermostat) determines that the auxiliary heating zone does not output power, that is, controls not to turn on the auxiliary heating zone;

0< MFC <5SLM, feedback TC' (a1 × TC1+ b1 × TC3+ c1 × TC2)/3, determining that the auxiliary heating band is not output, i.e. controlling not to start the auxiliary heating band;

5< MFC <10SLM, feedback TC' (a2 × TC1+ b2 × TC3+ c2 × TC2)/3, determining the auxiliary heating belt output power, i.e. controlling to start the auxiliary heating belt;

1) pressure value not less than 0 and less than 25torr

1.1)0< liquid level < 25%, then the PID correction coefficient F of the temperature controller is P1K 1, the PID control parameter P1K 1 PID1 output by the temperature controller is obtained, the output power of the main heating belt is controlled, and the auxiliary heating belt does not output power;

1.2) 25% < liquid level < 50%, then the PID correction coefficient F of the temperature controller is P1K 2, the PID control parameter P1K 2 PID1 output by the temperature controller is obtained, the output power of the main heating belt is controlled, and the auxiliary heating belt does not output power;

1.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P1K 3, obtaining the PID control parameter P1K 3 PID1 of the temperature controller output, controlling the output power of the main heating belt and the auxiliary heating belt;

1.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P1K 4, obtaining the PID control parameter P1K 4 PID1 of the temperature controller output, controlling the output power of the main heating belt and the auxiliary heating belt;

2) pressure value not less than 25 and less than 50torr

2.1)0< liquid level < 25%, obtaining a PID correction coefficient F of the temperature controller P2K 1 to obtain an output PID control parameter P2K 1 PID1 of the temperature controller, controlling the output power of the main heating belt, and not outputting the power of the auxiliary heating belt;

2.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P2K 2, obtaining the PID control parameter P2K 2 PID1 of the temperature controller output, controlling the output power of the main heating belt, and the auxiliary heating belt does not output power;

2.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P2K 3, obtaining the PID control parameter P2K 3 PID1 of the temperature controller output, controlling the output power of the main heating belt and the output power of the auxiliary heating belt;

2.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P2K 4, obtaining the PID control parameter P2K 4 PID1 of the temperature controller output, controlling the output power of the main heating belt and the auxiliary heating belt;

3) pressure of 50-75 torr

3.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller P3K 1 to obtain the PID control parameter P3K 1 PID1 of the temperature controller output, controlling the output power of the main heating belt, and the auxiliary heating belt does not output power;

3.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P3K 2, obtaining the PID control parameter P3K 2 PID1 of the temperature controller output, controlling the output power of the main heating belt, and the auxiliary heating belt does not output power;

3.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P3K 3, obtaining the PID control parameter P3K 3 PID1 of the temperature controller output, controlling the output power of the main heating belt and the output power of the auxiliary heating belt;

3.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P3K 4, obtaining the PID control parameter P3K 4 PID1 of the temperature controller output, controlling the output power of the main heating belt and the auxiliary heating belt;

4) pressure of 75-100 torr

4.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller P4K 1 to obtain the PID control parameter P4K 1 PID1 of the temperature controller output, controlling the output power of the main heating belt, and the auxiliary heating belt does not output power;

4.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P4K 2, obtaining the PID control parameter P4K 2 PID1 of the temperature controller output, controlling the output power of the main heating belt, and the auxiliary heating belt does not output power;

4.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P4K 3, obtaining the PID control parameter P4K 3 PID1 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.4) 75% < liquid level < 100%, then PID correction coefficient F of temperature controller is P4K 4, and output of temperature controller is obtained

PID1 with P4K 4 to control the output of the main heating belt and the output of the auxiliary heating belt;

condition 2:

if the temperature is 1 ℃ and < delta T <3 ℃,

MFC ═ 0SLM, feedback TC ═ (a0 ═ TC1+ b0 ═ TC2+ c0 ═ TC3)/3, c0 ═ 0, control the auxiliary heating zone not to output;

0< MFC <5SLM, feedback TC' (a1 × TC1+ b1 × TC3+ c1 × TC2)/3, controlling the auxiliary heating band not to output;

5< MFC <10SLM, feedback TC ═ (a2 × TC1+ b2 × TC3+ c2 × TC2)/3, control assist heating tape output;

1) pressure value not less than 0 and less than 25torr

1.1)0< liquid level < 25%, obtaining a PID correction coefficient F of the temperature controller equal to P1 equal to K1, obtaining a PID control parameter P1 equal to K1 equal to PID2 of the output of the temperature controller, controlling the output of the main heating band, and not outputting the auxiliary heating band;

1.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P1K 2, obtaining the PID control parameter P1K 2 PID2 of the output of the temperature controller, controlling the output of the main heating belt, and not outputting the auxiliary heating belt;

1.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P1K 3, obtaining the PID control parameter P1K 3 PID2 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

1.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P1K 4, obtaining the PID control parameter P1K 4 PID2 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2) pressure value not less than 25 and less than 50torr

2.1)0< liquid level < 25%, obtaining a PID correction coefficient F of the temperature controller equal to P2 equal to K1, obtaining a PID control parameter P2 equal to K1 equal to PID2 of the output of the temperature controller, controlling the output of the main heating band, and not outputting the auxiliary heating band;

2.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F-P2-K2 of the temperature controller, obtaining the PID control parameter P2-K2-PID 2 of the temperature controller output, controlling the output of the main heating belt, and the auxiliary heating belt does not output;

2.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P2K 3, obtaining the PID control parameter P2K 3 PID2 of the temperature controller output, outputting the heating belt, and outputting the auxiliary heating belt;

2.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P2K 4, obtaining the PID control parameter P2K 4 PID2 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3) pressure of 50-75 torr

3.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P3 equal to K1, obtaining the PID control parameter P3 equal to K1 equal to PID2 of the output of the temperature controller, controlling the output of the main heating band, and not outputting the auxiliary heating band;

3.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P3K 2, obtaining the PID control parameter P3K 2 PID2 of the output of the temperature controller, controlling the output of the main heating belt, and not outputting the auxiliary heating belt;

3.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P3K 3, obtaining the PID control parameter P3K 3 PID2 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P3K 4, obtaining the PID control parameter P3K 4 PID2 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4) pressure of 75-100 torr

4.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P4 equal to K1, obtaining the PID control parameter P4 equal to K1 equal to PID2 of the output of the temperature controller, controlling the output of the main heating band, and not outputting the auxiliary heating band;

4.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P4K 2, obtaining the PID control parameter P4K 2 PID2 of the output of the temperature controller, controlling the output of the main heating belt, and not outputting the auxiliary heating belt;

4.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P4K 3, obtaining the PID control parameter P4K 3 PID2 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P4K 4, obtaining the PID control parameter P4K 4 PID1 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

condition 3:

if 3 ℃ < DeltaT <5 ℃,

MFC ═ 0SLM, feedback TC ═ (a0 ═ TC1+ b0 ═ TC2+ c0 ═ TC3)/3, c0 ═ 0, control the auxiliary heating zone output;

0< MFC <5SLM, feedback TC' ═ (a1 × TC1+ b1 × TC3+ c1 × TC2)/3, control auxiliary heating zone output;

5< MFC <10SLM, feedback TC' ═ (a2 × TC1+ b2 × TC3+ c2 × TC2)/3, control auxiliary heating band output;

1) pressure value not less than 0 and less than 25torr

1.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P1 equal to K1, obtaining the PID control parameter P1 equal to K1 equal to PID3 of the output of the temperature controller, controlling the output of the main heating band and the output of the auxiliary heating band;

1.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P1K 2, obtaining the PID control parameter P1K 2 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

1.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P1K 3, obtaining the PID control parameter P1K 3 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

1.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P1K 4, obtaining the PID control parameter P1K 4 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2) pressure value not less than 25 and less than 50torr

2.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P2 equal to K1, obtaining the PID control parameter P2 equal to K1 equal to PID3 of the output of the temperature controller, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P2K 2, obtaining the PID control parameter P2K 2 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P2K 3, obtaining the PID control parameter P2K 3 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P2K 4, obtaining the PID control parameter P2K 4 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3) pressure of 50-75 torr

3.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P3 equal to K1, obtaining the PID control parameter P3 equal to K1 equal to PID3 of the output of the temperature controller, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P3K 2, obtaining the PID control parameter P3K 2 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P3K 3, obtaining the PID control parameter P3K 3 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P3K 4, obtaining the PID control parameter P3K 4 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4) pressure of 75-100 torr

4.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P4 equal to K1, obtaining the PID control parameter P4 equal to K1 equal to PID3 of the output of the temperature controller, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P4K 2, obtaining the PID control parameter P4K 2 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P4K 3, obtaining the PID control parameter P4K 3 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P4K 4, obtaining the PID control parameter P4K 4 PID3 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

condition 4:

if the temperature is 5 ℃ less than delta T,

1) pressure value not less than 0 and less than 25torr

1.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P1 equal to K1, obtaining the PID control parameter P1 equal to K1 equal to PID4 of the output of the temperature controller, controlling the output of the main heating band and the output of the auxiliary heating band;

1.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P1K 2, obtaining the PID control parameter P1K 2 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

1.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P1K 3, obtaining the PID control parameter P1K 3 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

1.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P1K 4, obtaining the PID control parameter P1K 4 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2) pressure value not less than 25 and less than 50torr

2.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P2 equal to K1, obtaining the PID control parameter P2 equal to K1 equal to PID4 of the output of the temperature controller, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P2K 2, obtaining the PID control parameter P2K 2 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P2K 3, obtaining the PID control parameter P2K 3 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

2.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P2K 4, obtaining the PID control parameter P2K 4 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3) pressure of 50-75 torr

3.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P3 equal to K1, obtaining the PID control parameter P3 equal to K1 equal to PID4 of the output of the temperature controller, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P3K 2, obtaining the PID control parameter P3K 2 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P3K 3, obtaining the PID control parameter P3K 3 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

3.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P3K 4, obtaining the PID control parameter P3K 4 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4) pressure of 75-100 torr

4.1)0< liquid level < 25%, obtaining the PID correction coefficient F of the temperature controller equal to P4 equal to K1, obtaining the PID control parameter P4 equal to K1 equal to PID4 of the output of the temperature controller, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.2) 25% < liquid level < 50%, obtaining the PID correction coefficient F of the temperature controller P4K 2, obtaining the PID control parameter P4K 2 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.3) 50% < liquid level < 75%, obtaining the PID correction coefficient F of the temperature controller P4K 3, obtaining the PID control parameter P4K 3 PID4 of the temperature controller output, controlling the output of the main heating belt and the output of the auxiliary heating belt;

4.4) 75% < liquid level < 100%, obtaining the PID correction coefficient F of the temperature controller P4K 4, obtaining the PID control parameter P4K 4 PID4 of the temperature controller output, controlling the output of the main heating band and the output of the auxiliary heating band.

In this way, in this embodiment, a first coupling temperature value is obtained by obtaining a level value detected by a level meter, a pressure value detected by a pressure gauge, a carrier gas flow value detected by a carrier gas flow meter, a first temperature value measured by a first thermocouple, a second temperature value measured by a second thermocouple, and a third temperature value measured by a third thermocouple, and coupling the first temperature value, the second temperature value, and the third temperature value; according to the temperature difference value between the first coupling temperature value and the preset target temperature value, the liquid level value, the pressure value and the carrier gas flow value, the heating belt is controlled to output first target power so as to control the first coupling temperature value to reach the target temperature value, and parameters such as pressure change of a source bottle, carrier gas flow change, temperature of the inner portion of the source bottle, temperature of the outer wall of the source bottle and temperature of the air outlet are considered in the temperature control process of the source bottle, so that accurate detection and quick response of the temperature are realized.

Based on the same technical concept, the embodiment of the present application further provides an electronic device, which is configured to execute the method for controlling the temperature of the source bottle, and fig. 6 is a schematic structural diagram of an electronic device implementing various embodiments of the present application. Electronic devices may have a large difference due to different configurations or performances, and may include a processor (processor)610, a communication Interface (Communications Interface)620, a memory (memory)630, and a communication bus 640, where the processor 610, the communication Interface 620, and the memory 630 complete communication with each other through the communication bus 640. The processor 610 may invoke a computer program stored on the memory 630 and executable on the processor 610 to perform the steps of:

acquiring the liquid level value detected by the liquid level meter, the pressure value detected by the pressure gauge, the carrier gas flow rate value detected by the carrier gas flow meter, the first temperature value measured by the first thermocouple, the second temperature value measured by the second thermocouple and the third temperature value measured by the third thermocouple;

The specific implementation steps can refer to the steps in the embodiment of the temperature control method for the source bottle, and the same technical effects can be achieved, and are not described herein again to avoid repetition.

It should be noted that the electronic device in the embodiment of the present application includes: a server, a terminal, or other device besides a terminal.

The above electronic device structure does not constitute a limitation of the electronic device, the electronic device may include more or less components than those shown, or some components may be combined, or different component arrangements, for example, the input Unit may include a Graphics Processing Unit (GPU) and a microphone, and the display Unit may configure the display panel in the form of a liquid crystal display, an organic light emitting diode, or the like. The user input unit includes at least one of a touch panel and other input devices. The touch panel is also referred to as a touch screen. Other input devices may include, but are not limited to, a physical keyboard, function keys (e.g., volume control keys, switch keys, etc.), a trackball, a mouse, and a joystick, which are not described in detail herein.

The memory may be used to store software programs as well as various data. The memory may mainly include a first storage area storing a program or an instruction and a second storage area storing data, wherein the first storage area may store an operating system, an application program or an instruction (such as a sound playing function, an image playing function, etc.) required for at least one function, and the like. Further, the memory may include volatile memory or nonvolatile memory, or the memory may include both volatile and nonvolatile memory. The non-volatile Memory may be a Read-Only Memory (ROM), a Programmable ROM (PROM), an Erasable PROM (EPROM), an Electrically Erasable PROM (EEPROM), or a flash Memory. The volatile Memory may be a Random Access Memory (RAM), a Static Random Access Memory (Static RAM, SRAM), a Dynamic Random Access Memory (Dynamic RAM, DRAM), a Synchronous Dynamic Random Access Memory (Synchronous DRAM, SDRAM), a Double Data Rate Synchronous Dynamic Random Access Memory (Double Data Rate SDRAM, ddr SDRAM), an Enhanced Synchronous SDRAM (ESDRAM), a Synchronous Link DRAM (SLDRAM), and a Direct Memory bus RAM (DRRAM).

A processor may include one or more processing units; optionally, the processor integrates an application processor and a modem processor, wherein the application processor mainly processes operations related to an operating system, a user interface, an application program, and the like, and the modem processor mainly processes a wireless communication signal, such as a baseband processor. It will be appreciated that the modem processor described above may not be integrated into the processor.

The embodiment of the present application further provides a readable storage medium, where a program or an instruction is stored on the readable storage medium, and when the program or the instruction is executed by a processor, the processes of the embodiment of the temperature control method for a source bottle are implemented, and the same technical effects can be achieved, and in order to avoid repetition, details are not repeated here.

The processor is the processor in the electronic device described in the above embodiment. The readable storage medium includes a computer readable storage medium, such as a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and so on.

The embodiment of the present application further provides a chip, where the chip includes a processor and a communication interface, the communication interface is coupled to the processor, and the processor is configured to execute a program or an instruction to implement each process of the foregoing method embodiments, and can achieve the same technical effect, and in order to avoid repetition, the details are not repeated here.

It should be understood that the chips mentioned in the embodiments of the present application may also be referred to as system-on-chip, system-on-chip or system-on-chip, etc.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. Further, it should be noted that the scope of the methods and apparatus of the embodiments of the present application is not limited to performing the functions in the order illustrated or discussed, but may include performing the functions in a substantially simultaneous manner or in a reverse order based on the functions involved, e.g., the methods described may be performed in an order different than that described, and various steps may be added, omitted, or combined. In addition, features described with reference to certain examples may be combined in other examples.

Through the above description of the embodiments, those skilled in the art will clearly understand that the method of the above embodiments can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware, but in many cases, the former is a better implementation manner. Based on such understanding, the technical solutions of the present application may be embodied in the form of a software product, which is stored in a storage medium (such as ROM/RAM, magnetic disk, optical disk) and includes instructions for enabling a terminal (such as a mobile phone, a computer, a server, an air conditioner, or a network device) to execute the method according to the embodiments of the present application.

While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims

1. A temperature control system for a source vial, comprising:

a source bottle body for carrying a process source;

the heating belt is arranged on the side wall of the source bottle body and is used for heating the source bottle body;

2. The temperature control system of claim 1, wherein the heating zone comprises a primary heating zone and a secondary heating zone; wherein,

3. The temperature control system of claim 2, wherein the temperature controller is further configured to control the auxiliary heating belt to close when the level value is less than the preset height value, the carrier gas flow value is less than the preset flow value, and the temperature difference value is less than the preset temperature value.

4. A temperature control method of a source bottle, applied to the temperature control system of the source bottle according to any one of claims 1 to 3, the temperature control method comprising:

5. The temperature control method according to claim 4, wherein when no carrier gas flow is input to the source bottle body, the temperature control method further comprises:

coupling the first temperature value and the second temperature value to obtain a second coupled temperature value;

and controlling the heating belt to output a second target power according to the temperature difference between the second coupling temperature value and the target temperature value so as to enable the second coupling temperature value to reach the target temperature value.

6. The temperature control method of claim 4, wherein the controlling the heating belt to output a first target power according to the temperature difference between the first coupled temperature value and a preset target temperature value and the level value, the pressure value and the carrier gas flow value comprises:

7. The temperature control method according to claim 6, wherein the determining whether to control to open the auxiliary heating belt according to the level value, the pressure value, the temperature difference value and the carrier gas flow value comprises:

when the liquid level value is greater than a preset height value, the carrier gas flow value is greater than a preset flow value, the pressure value is greater than a preset pressure value or the temperature difference value is greater than a preset temperature value, controlling the auxiliary heating belt to be started;

and when the liquid level value is smaller than a preset height value, the carrier gas flow value is smaller than a preset flow value, the pressure value is smaller than a preset pressure value and the temperature difference value is smaller than a preset temperature value, controlling the auxiliary heating belt not to be started.

8. The temperature control method according to claim 6, wherein the determining whether to control to turn on the auxiliary heating belt according to the level value, the pressure value, the temperature difference value and the carrier gas flow value comprises:

under the condition that the temperature difference value is within a first preset temperature range, determining whether to control to open the auxiliary heating belt or not according to the carrier gas flow value;

and under the condition that the temperature difference value is within the first preset temperature range and the pressure value is within the first preset pressure range, determining whether to control to open the auxiliary heating belt or not according to the liquid level value.

9. The temperature control method according to claim 8, wherein the determining whether to control the auxiliary heating belt to be turned on according to the carrier gas flow rate value in the case where the temperature difference value is within a first preset temperature range includes:

in the case where the first preset temperature range is 0 ℃ to 3 ℃: if the carrier gas flow value is more than or equal to 0 and less than 5SLM, determining not to start the auxiliary heating belt; if the carrier gas flow value is larger than 5SLM and smaller than 10SLM, determining to control to open the auxiliary heating belt;

and under the condition that the first preset temperature range is more than 3 ℃, determining to control to start the auxiliary heating belt.

10. The method according to claim 8, wherein the determining whether to control to turn on the auxiliary heating belt according to the level value in the case that the temperature difference value is within the first preset temperature range and the pressure value is within a first preset pressure range comprises: