CN103700604A - Test system for testing acoustic surface wave resonator and test method of test system - Google Patents
Test system for testing acoustic surface wave resonator and test method of test system Download PDFInfo
- Publication number
- CN103700604A CN103700604A CN201310721858.2A CN201310721858A CN103700604A CN 103700604 A CN103700604 A CN 103700604A CN 201310721858 A CN201310721858 A CN 201310721858A CN 103700604 A CN103700604 A CN 103700604A
- Authority
- CN
- China
- Prior art keywords
- test
- driving arrangement
- resistance
- network analyzer
- opto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The invention discloses a test system for testing an acoustic surface wave resonator and a test method of the test system. The test method comprises the steps that a level converter converts an output level of driving equipment into a level required by the work of a network analyzer when the driving equipment is started, so that the driving equipment can communicate with the network analyzer; test data are acquired when a probe is in contact with a tested object and are sent to the network analyzer; the network analyzer is used for analyzing the test data and controlling the driving equipment to execute continuous test, pause the test or stop the test according to an analysis result. According to the test system and the test method, a function of continuous and automatic test is realized; the automation degree and the working efficiency of the test system are improved at the same time; furthermore, the full test can be finished by one-key operation during the test; unmanned operation on the test system can be basically realized, and the labor cost is reduced.
Description
Technical field
The present invention relates to device for testing and analyzing technical field, particularly a kind of for testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator.
Background technology
Surface Acoustic Wave Filter/SAW SAW (Surface Acoustic Wave) resonator (surface-acoustic-wave) is the piezoelectric property of utilizing piezoelectric, utilize input and output transducer (Transducer) to convert the input signal of electric wave to mechanical energy, after treatment, again mechanical energy is converted to electric signal, to reach, filter unnecessary signal and noise, promote the object of reception quality.Surface Acoustic Wave Filter is widely used on various wireless telecommunication systems, television set, Video Recorder and GPS receiver.
The manufacturing process of SAW surface acoustic wave device comprises: the correlation step such as wafer (being wafer) test, wafer cleaning, metal-coated membrane, upper photoresistance, development, etching, removing photoresistance, cutting, encapsulation, therefore wafer sort is also an important operation, its direct relation Surface Acoustic Wave Filter quality.
Existing test macro is when brilliant on-chip testing sound surface resonance device index, after generally first the probe on driving arrangement being connected with network analyzer by p-wire, the position of mobile wafer makes probe contact with wafer, press after the feeler switch on driving arrangement, send out network analyzer and send test instruction, on network analyzer, show test results.But above-mentioned test macro, after testing a wafer, need press the test that feeler switch carries out next wafer again, can not realize test continuously and automatically, its automaticity is low, working effect is low, and waste of manpower cost.
Summary of the invention
In view of above-mentioned the deficiencies in the prior art part, the object of the present invention is to provide a kind of for testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator, to solve the problem that prior art automaticity is low, working effect is low.
In order to achieve the above object, the present invention has taked following technical scheme:
For testing a test macro for SAW (Surface Acoustic Wave) resonator, it comprises:
Driving arrangement, has probe, for touching with measurand, obtains test data;
Impedance measuring instrument, for detection of the impedance of measurand;
Network analyzer, communicates by letter with described driving arrangement, for described test data is analyzed, and according to analysis result, controls driving arrangement and carries out follow-on test, suspends test or stop test;
Level translator, for converting the output level of driving arrangement to the required level of network analyzer work;
Described driving arrangement is connected with impedance measuring instrument with described network analyzer by described level converter.
Described for testing the test macro of SAW (Surface Acoustic Wave) resonator, described driving arrangement is also for when network analyzer output suspends test signal, mark measurand; Described network analyzer is also for after driving arrangement mark measurand, and output test signal makes driving arrangement test next measurand.
Described for testing the test macro of SAW (Surface Acoustic Wave) resonator, described level translator comprises triac device, the first opto-coupler chip, the second opto-coupler chip, the 3rd opto-coupler chip, the first resistance, the second resistance, the 3rd resistance, the 4th resistance, the 5th resistance, the 6th resistance, the 7th resistance, the 8th resistance, the 9th resistance and the tenth resistance;
The first end of described the first opto-coupler chip connects driving arrangement by the first resistance, the second end of described the first opto-coupler chip connects the second end of triac device, the 3rd end ground connection of the first opto-coupler chip, the 4th end of the first opto-coupler chip is connected the first high level feeder ear, also by the 3rd resistance, is connected the base stage of the first triode by the second resistance; The collector electrode of described the first triode connects described network analyzer, also by the 4th resistance, connects the second high level feeder ear, the grounded emitter of the first triode;
The first end of described the second opto-coupler chip connects third high level feeder ear by the 5th resistance, the second end of described the second opto-coupler chip connects described network analyzer, the 3rd end ground connection of the first opto-coupler chip, the 4th end of the second opto-coupler chip is connected the base stage of the second triode, also by the 7th resistance, is connected the 4th high level feeder ear by the 6th resistance; The collector electrode of described the second triode connects the five terminal of triac device, the grounded emitter of the second triode;
The first end of described the 3rd opto-coupler chip connects the 5th high level feeder ear by the 8th resistance, the second end of described the first opto-coupler chip connects described network analyzer, the 3rd end ground connection of the 3rd opto-coupler chip, the 4th end of the 3rd opto-coupler chip is connected the base stage of the 3rd triode, also by the tenth resistance, is connected the 6th high level feeder ear by the 9th resistance; The collector electrode of described the first triode connects the 8th end of triac device, the grounded emitter of the 3rd triode;
The first end of described triac device, the 4th end and the 7th end are connected described driving arrangement, and the 3rd end of triac device, the 6th end and the 9th end are connected described impedance measuring instrument.
Described for testing the test macro of SAW (Surface Acoustic Wave) resonator, described the first triode, the second triode and the 3rd triode are NPN triode.
Described for testing the test macro of SAW (Surface Acoustic Wave) resonator, described measurand is wafer.
Above-mentioned for testing a method of testing for the test macro of SAW (Surface Acoustic Wave) resonator, it comprises:
When A, unlatching driving arrangement, level translator converts the output level of driving arrangement to network analyzer work required level, and driving arrangement is communicated by letter with network analyzer;
B, make probe touch measurand to obtain test data, and described test data is sent to network analyzer;
C, described network analyzer are analyzed test data, and according to analysis result, control driving arrangement and carry out follow-on test, suspend test or stop test.
In described method of testing, after step C, described method of testing also comprises:
D, in the time need to detecting the impedance of measurand, by described level translator, switch described driving arrangement communicated by letter with impedance measuring instrument;
E, by the impedance of impedance measuring instrument test measurand.
In described method of testing, described step C specifically comprises:
C1, described network analyzer are analyzed the RIP value of measurand, IL value and F0 value respectively, when RIP value, IL value or FO value be not during in preset range, to described driving arrangement, send and suspend test signal;
C2, by measurand described in described driving arrangement mark;
C3, network analyzer are controlled the test data that driving arrangement continues to obtain next measurand.
In described method of testing, described step C also comprises: C4, all tested to picture has detected after, by network analyzer, to driving arrangement, send out and stop test signal, control driving arrangement quit work.
Compared to prior art, provided by the invention for testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator, when opening driving arrangement, level translator converts the output level of driving arrangement to network analyzer work required level, and driving arrangement is communicated by letter with network analyzer; At probe, touch measurand and obtain test data, and described test data is sent to after network analyzer; By described network analyzer, test data is analyzed, and according to analysis result, control driving arrangement and carry out follow-on test, suspend test or stop test, realized the function of continuous and automatic testing, when having improved the automaticity of test macro, improved operating efficiency, and when test, one key operation can complete whole tests, substantially realizes unattended test macro, has saved human cost.
Accompanying drawing explanation
Fig. 1 is that the present invention is for testing the structured flowchart of the test macro of SAW (Surface Acoustic Wave) resonator.
Fig. 2 is that the present invention is for testing the circuit diagram of the test macro of SAW (Surface Acoustic Wave) resonator.
Fig. 3 is the flow chart of the method for testing of test macro of the present invention.
Embodiment
The invention provides a kind ofly for testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator, for making object of the present invention, technical scheme and effect clearer, clear and definite, referring to accompanying drawing, developing simultaneously, the present invention is described in more detail for embodiment.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Test macro provided by the invention, is mainly used in the wafer of SAW (Surface Acoustic Wave) resonator to test, and therefore measurand of the present invention is wafer.Refer to Fig. 1, it is for the present invention is for testing the structured flowchart of the test macro of SAW (Surface Acoustic Wave) resonator.As shown in Figure 1, test macro of the present invention comprises driving arrangement 100, impedance measuring instrument 200, network analyzer 300 and level translator 400, and described driving arrangement 100 is connected with impedance measuring instrument 200 with described network analyzer 300 by described level converter.
In the present embodiment, by the program composition to network analyzer 300, make network analyzer 300 directly communicate by letter and to carry out exchanges data with driving arrangement 100, realized Automatic continuous test, and test result data can be presented on network analyzer 300 pictures automatically, can also between test characteristic and impedance, switch simultaneously.
During concrete enforcement, described level translator 400 is for converting the output level of driving arrangement 100 to the required level of network analyzer 300 work.Described driving arrangement 100 has two probe (not shown)s, and described probe and measurand touch, and for obtaining test data, and sends to network analyzer 300 by driving arrangement 100.Described network analyzer 300 is communicated by letter with described driving arrangement 100, for described test data is analyzed, and according to analysis result, control driving arrangement 100 and carry out follow-on test, suspend test or stop test, and this network analyzer 300 also can show analysis result, for operating personnel, analyze.
Wherein, described level translator 400, also in the time need to detecting the impedance of measurand, is switched described driving arrangement 100 is communicated by letter with impedance measuring instrument 200 by described level translator 400, is detected the impedance of measurand by impedance measuring instrument 200.
The model of described driving arrangement 100 is APM-5000A, on this driving arrangement 100, be provided with " beginning " button, tester, press after " beginning " button, driving arrangement 100 just starts to send " commencing signal " to network analyzer 300, makes test macro start continuous and automatic testing.
When defective products is arrived in test, network analyzer 300 sends NG(to driving arrangement 100 and suspends) signal.In the present embodiment, described driving arrangement 100 is also for when network analyzer 300 output suspends test signal, mark measurand, and for example, stain of mark on wafer, represents that this wafer is not non-defective unit, reminds operating personnel to choose this bad wafer.In order to realize Automatic continuous test, described network analyzer 300 is also for after driving arrangement 100 mark measurands, and output test signal makes driving arrangement 100 next measurand of test.
Further, in embodiment, test macro of the present invention also can arrange device for sorting, for will detect markd defective products time, directly picks out after defective products, more automatically tests next measurand, further improves the intelligent degree of test macro.
Certainly, in other embodiments, described test macro also can be provided with alarm module, when network analyzer 300 analyzes defective products, output alarm signal, remind operating personnel to pick out defective products, after defective products is chosen, network analyzer 300 is exported test signal again and is made driving arrangement 100 next measurand of test.
During concrete enforcement, described network analyzer 300 is judged respectively the RIP(amplitude of wafer according to test value and set point) value, IL(loss) value and FO(frequency) whether value in range of set value, as long as above-mentioned three values have one not meet the demands, just be judged as defective products, and by signal feedback to driving arrangement 100, it is marked on defective products, after mark completes, continue the test of next wafer, realized continuously, automatically tested.
See also Fig. 2, it is for the present invention is for testing the circuit diagram of the test macro of SAW (Surface Acoustic Wave) resonator.Described level translator 400 comprises triac device SW, the first opto-coupler chip U1, the second opto-coupler chip U2, the 3rd opto-coupler chip U3, the first resistance R 1, the second resistance R 2, the 3rd resistance R 3, the 4th resistance R 4, the 5th resistance R 5, the 6th resistance R 6, the 7th resistance R 7, the 8th resistance R 8, the 9th resistance R 9 and the tenth resistance R 10.
The first end of described the first opto-coupler chip U1 connects driving arrangement 100 by the first resistance R 1, the second end of described the first opto-coupler chip U1 connects the second end of triac device SW, the 3rd end ground connection of the first opto-coupler chip U1, the 4th end of the first opto-coupler chip U1 is by second resistance R 2 connection the first high level feeder ear J1, also by the base stage of the 3rd resistance R 3 connection the first triode Q1; The collector electrode of described the first triode Q1 connects described network analyzer 300, also by the 4th resistance R 4, connects the second high level feeder ear J2, the grounded emitter of the first triode Q1.Wherein, the supply power voltage of described the first high level feeder ear J1 and the second high level feeder ear J2 can be identical, described the second resistance R 2 and the 4th resistance R 4 are pull-up resistor, respectively the 4th end of the first opto-coupler chip U1 and the collector electrode of the first triode Q1 are pulled to high level.
The first end of described the second opto-coupler chip U2 connects third high level feeder ear J3 by the 5th resistance R 5, the second end of described the second opto-coupler chip U2 connects described network analyzer 300, the 3rd end ground connection of the first opto-coupler chip U1, the 4th end of the second opto-coupler chip U2 is connected the base stage of the second triode Q2, also by the 7th resistance R 7, is connected the 4th high level feeder ear J4 by the 6th resistance R 6; The collector electrode of described the second triode Q2 connects the five terminal of triac device SW, the grounded emitter of the second triode Q2.Wherein, the supply power voltage of described third high level feeder ear J3 and the 4th high level feeder ear J4 can be identical, described the 5th resistance R 5 and the 7th resistance R 7 are pull-up resistor, respectively the 4th end of the first end of the second opto-coupler chip U2 and the second opto-coupler chip U2 are pulled to high level.
The first end of described the 3rd opto-coupler chip U3 connects the 5th high level feeder ear J5 by the 8th resistance R 8, the second end of described the first opto-coupler chip U1 connects described network analyzer 300, the 3rd end ground connection of the 3rd opto-coupler chip U3, the 4th end of the 3rd opto-coupler chip U3 is connected the base stage of the 3rd triode Q3, also by the tenth resistance R 10, is connected the 6th high level feeder ear J6 by the 9th resistance R 9; The collector electrode of described the first triode Q1 connects the 8th end of triac device SW, the grounded emitter of the 3rd triode Q3.Wherein, the supply power voltage of described the 5th high level feeder ear J5 and the 6th high level feeder ear J6 can be identical, described the 8th resistance R 8 and the tenth resistance R 10 are pull-up resistor, respectively the 4th end of the first end of the 3rd opto-coupler chip U3 and the 3rd opto-coupler chip U3 are pulled to high level.
The first end of described triac device SW, the 4th end and the 7th end are connected respectively start end (starting end), NG end (suspending end) and the END end (finishing end) of described driving arrangement 100, and the 3rd end of triac device SW, the 6th end and the 9th end are connected described impedance measuring instrument 200.During concrete enforcement, described the first triode Q1, the second triode Q2 and the 3rd triode Q3 are NPN triode.Described triac device SW can be simulation triac device SW, by network analyzer 300, transmit control signal and switch its conduction path, when triac device SW makes progress (visual angle of Fig. 2 is for making progress) switching, driving arrangement 100 is communicated by letter with network analyzer 300, when triac device SW (visual angle of Fig. 2 is downward) switching downwards, driving arrangement 100 is communicated by letter with impedance measuring instrument 200.
When triac device SW upwards switches, the first opto-coupler chip U1 conducting output high level, makes the first triode Q1 conducting, and now driving arrangement 100 enables to communicate to network analyzer 300 and send commencing signal with network analyzer 300.When network analyzer 300 analyzes defective products, by network analyzer 300 output NG signals, make the second opto-coupler chip U2 conducting and export high level, make the second triode Q2 conducting, after 100 pairs of wafers of driving arrangement make marks, again by network analyzer 300, send commencing signal, make driving arrangement 100 continue to obtain next tested test data to picture.After all wafers has been tested, by network analyzer 300 output END signals, driving arrangement 100 is quit work.When needing the impedance of testing wafer, can triac device SW be switched downwards by network analyzer 300 output switching signals, impedance measuring instrument 200 is started working, obtain the tested resistance to picture.
Substantially above-mentioned test macro, the present invention is also corresponding to be provided a kind of and refers to Fig. 3 for testing the method for testing of the test macro of SAW (Surface Acoustic Wave) resonator, the flow chart of its method of testing that is test macro of the present invention.As shown in Figure 3, described method of testing comprises:
When S10, unlatching driving arrangement, level translator converts the output level of driving arrangement to network analyzer work required level, and driving arrangement is communicated by letter with network analyzer;
S20, make probe touch measurand to obtain test data, and described test data is sent to network analyzer;
S30, described network analyzer are analyzed test data, and according to analysis result, control driving arrangement and carry out follow-on test, suspend test or stop test.
Wherein, in the time need to detecting the impedance of measurand, by described level translator, switch described driving arrangement is communicated by letter with impedance measuring instrument; Afterwards, by impedance measuring instrument, tested the impedance of measurand.
During concrete enforcement, described step S30 specifically comprises: described network analyzer is analyzed the RIP value of measurand, IL value and F0 value respectively, when RIP value, IL value or FO value be not during in preset range, to described driving arrangement transmission time-out test signal; Afterwards, by measurand described in described driving arrangement mark; By network analyzer, control the test data that driving arrangement continues to obtain next measurand again.
And after all measurands have been tested, method of testing of the present invention also comprises: all tested to picture detected after, by network analyzer, to driving arrangement, send out and stop test signal, control driving arrangement and quit work, thereby realize full-automatic test operation.
Take measurand below as wafer is Application Example, to of the present invention, for testing the method for testing of the test macro of SAW (Surface Acoustic Wave) resonator, be elaborated:
Tester presses after " beginning " button on driving arrangement, and driving arrangement just sends commencing signal to network analyzer, and network analyzer starts continuous and automatic testing after receiving commencing signal.Network analyzer carries out analysis meter to the RIP value of measurand, IL value and F0 value respectively and calculates test value, then test value is compared with set point.If these three values are all normal, export 1 and be judged to be non-defective unit, and return to next commencing signal.If three values have one undesired, export 3, be judged as defective products, and export NG signal and driving arrangement is made get the action of mark ready, and after mark completes, to driving arrangement, turn back to the next one " commencing signal " and continue test.
For example: supposition RIP test result is 10dB or 15dB, set point requires to be greater than or equal to 12dB, when measured value and setting range are compared, if measured value is 10dB, not at setting range, be judged to be defective products, outputing test result makes driving arrangement to get the action of mark ready, then sends next commencing signal and test next wafer; If measured value is 15dB, program can down proceed to judge IL value.
Afterwards, judge IL value, suppose that measured value is 1dB or 4dB, setting range is less than or equal to 2.5dB, when measured value is compared with setting range, if measured value is 4dB, represent not at setting range, be judged to be defective products, the driving arrangement that outputs test result is made the action of getting mark ready, then sends lower certain commencing signal and test next wafer; If measured value is 1dB, program can down proceed to judge FO value.
Finally, judge FO value, network analyzer calculates out FO by signal, supposes that FO measured value is 430.05M or 430.10M, and the setting range of FO is 429.925-430.075M, measured value and setting range are compared, if measured value is 430.1M, exceed setting range, be judged to be defective products, the driving arrangement that outputs test result is made the action of getting mark ready, and sends the next next wafer of test signal test that starts; If measured value is 430.05M, above three conditions all meet the requirements, and are judged to be non-defective unit, output test result, and send next lower commencing signal and test next wafer.After all wafers has been tested, to driving arrangement, send end signal driving arrangement is quit work.
In test macro of the present invention, the program code of described network analyzer is as follows:
10 ON ERROR GOTO 1570
20 CLS
30 PRINT "Please Input what do you want"
40 print "A:AUTOPROBE"
50 PRINT "B:ADD NEW MODEL"
60 PRINT "C:CHANG THE SPEC"
70 PRINT "P:PROBE AND NEED PRINT DATA"
80 PRINT " "
90 INPUT "A/B/C/P ";Z$
100 IF Z$="A" THEN GOTO 150
110 IF Z$="B" THEN GOTO 230
120 IF Z$="C" THEN GOTO *CHANGE
130 IF Z$="P" THEN GOTO *TURE
140 GOTO 1570
150 CLS
160 PRINT "Please Input the name!"
170 INPUT "NAME=";M$
180 OPEN M$ FOR INPUT AS #FD;BINARY
190 ENTER #FD;N$,L,H,C,S,R
200 IF L=0 THEN GOTO 230
210 IF N$=M$ THEN GOTO 550
220 GOTO 190
230 CLS
240 PRINT " "
250 PRINT "It's a new model!"
270 CLOSE *
280 GOTO 1050
290 CLOSE *
300 PRINT "Please Input the new model's spec"
310 PRINT "................................."
320 INPUT "NEWNAME=";M$
330 INPUT "FL=";L
340 INPUT "FH=";H
350 INPUT "CENTER=";C
360 INPUT "SPEC=";S
370 INPUT "RIP=";R
380 CLS
390 PRINT "NAME:";M$,"FL:";L,"FH:";H
400 PRINT "CENTER:";C,"SPAN"";S,"RIP:";R
410 PRINT "................................"
420 PRINT "SAVE Y:SAVE; N:AGAIN; Q:QUIT"
430 INPUT "SAVE Y/N/Q ";G$
440 IF G$="Y" THEN
450 GOTO 510
460 ELSE IF G$="N" THEN
470 GOTO 320
480 ELSE GOTO 1050
490 GOTO 1050
500 END IF
510 OPEN M$ FOR OUTPUT AS #FD;BINARY
520 OUTPUT #FD;M$,L,H,C,S,R
530 CLOSE *
540 GOTO 1050
550 OUTPUT 31;"EDITOFF"
560 OUTPUT 31;"REFP 80 FER"
570 OUTPUT 31;"SINGLE"
580 OUTPUT 31;"CENTERF",C,"MHZ"
590 OUTPUT 31;"SPEANF",S,"MHZ"
600 OUTPUT 31;"SDIV 10 DB"
610 OUTPUT 31;"REFV 0 DB"
620 OUTPUT 31;"MKR1A",L,"MHZ"
630 OUTPUT 31;"MKR2A",H,"MHZ"
640 OUTPUT 31;"MKR3A",C,"MHZ"
650 CLS
660 OUTPUT 36;19
670 FL=L*1e+06
680 FH=H*1e+06
690 IL=-8
700 RIP=R
710 CLS
720 CURSOR 2,10
730 PRINT "START"
740 PRINT "M:";N$
750 INTEGER U
760 U=0
770 ENABLE INTR
780 ON KEY 1 GOTO 1870
790 ON KEY 2 GOTO 1910
791 ON KEY 3 GOTO *READ
792 ON KEY 4 GOTO *ZERO
793 ON KEY 5 GOTO *CLE
800 OUTPUT 34;0
810 OUTPUT 35;80
820 ENTER 34;0
830 ENABLE INTR
840 IF TRIG=0 THEN GOTO 820
860 U=U+1
870 FOR T=1 TO 350
880 NEXT T
890 OUTPUT 31;"SINGLE"
900 FOR T=0 TO 350
910 NEXT T
920 PF0=FMAX(100,1100,0)
930 PIL=MAX(100,1100,0)
940 PILL=MIN(100,1100,0)
950 DIR=PIL-PILL
960 IF O=1 THEN GOSUB *PRINT
970 IF DIR<RIP THEN GOTO 1030
980 IF PIL<IL THEN GOTO 1030
990 IF PF0<FL THEN GOTO 1030
1000 IF PF0>FH THEN GOTO 1030
1010 OUTPUT 34;1
1020 GOTO 800
1030 OUTPUT 34;3
1040 GOTO 800
1050 PRINT" #########END######### "
1060 STOP
1070 *CHANGE
1080 CLS
1090 PRINT "If you change the spec the old's w"
1100 cursor 33,4
1110 PRINT "ill be lost!"
1120 INPUT "ARE YOU SURE Y/N ";T$
1130 IF T$="Y" THEN GOTO 1150
1140 IF T$="N" THEN GOTO 1050
1150 CLS
1160 PRINT " INPUT THE NAME OF THE MODEL"
1170 CURSOR 31,4
1180 PRINT "WHICH YOU WANT"
1190 PRINT "TO CHANGE."
1200 PRINT "........................."
1210 INPUT "NAME=";M$
1220 PURGE M$
1230 INPUT "FL=";L
1240 INPUT "FH=";H
1250 INPUT "CENTER=";C
1260 INPUT "SPAN="S
1270 INPUT "RIP=";R
1280 PRINT "............."
1290 OPEN M$ FOR OUTPUT AS #FD;BINARY
1300 OUTPUT #FD;M$,L,H,C,S,R
1310 CLOSE *
1320 PRINT "SAVED!"
1330 RETURN
1340 *CLEAR
1350 L=0,H=0,C=0,S=0,R=0,N$="",M$=""
1360 RETURN
1370 *READ
1371 CLS
1390 CURSOR 0,21
1400 PRINT "NAME: ";N$
1410 PRINT "CENTER: ";C
1411 PRINT "FL: ";L
1412 PRINT "FH: ";H
1420 RETURN
1430 *TURE
1440 O=1
1450 GOTO 150
1460 RETURN
1470 *PRINT
1480 F0=PF0/1e+06
1490 IF DIR<RIP THEN
1500 PRINT U;" F0=0"
1510 ELSE IF PIL<-8 THEN
1520 PRINT U;" F0=0"
1530 ELSE
1540 PRINT U;" F0=";F0
1550 END IF
1560 RETURN
1570 *ERR
1580 CURSOR 5,9
1590 PRINT "================================"
1600 CURSOR 37,9
1610 PRINT "====="
1620 CURSOR 5,10
1630 PRINT "/ *RERROR*"
1640 CURSOR 37,10
1650 PRINT " /"
1660 CURSOR 5,11
1670 PRINT "/*MAKE SURE THR MODEL NAME IS RI"
1680 CURSOR 37,11
1690 PRINT "GHT./"
1700 CURSOR 5,12
1710 PRINT "MAKE SURE THIS DISK HAS THIS"
1720 CURSOR 37,12
1730 PRINT " /"
1740 CURSOR 5,13
1750 PRINT "/MODEL DATA;"
1760 CURSOR 37,13
1770 PRINT " /"
1780 CURSOR 5,14
1790 PRINT "/*MAKE SURE THE DISK IS OK."
1800 CURSOR 37,14
1810 PRINT " /"
1820 CURSOR 5,15
1830 PRINT "================================="
1840 CURSOR 37,15
1850 PRINT "======"
1860 STOP
1870 *AGAIN
1871 U=0
1880 PRINT "OK"
1890 GOTO 750
1900 RETURN
1910 *MEAN
1920 FOR I=1 TO 200
1930 NEXT I
1940 OUTPUT 31;"SINGLE"
1950 FOR U=1 TO 350
1960 NEXT U
1970 CLS
1980 PIL=MAX(100,1100,0)
1990 PF0=FMAX(100,1100,0)
2000 PIL=MIN(100,1100,0)
2010 DIR=PIL-PILL
2020 CURSOR 5,5
2030 PRINT "IL=",PIL
2040 GOSUB *PRINT
2050 GOTO 760
2060 RETURN
2070 *ZERO
2080 O=0
2090 RETURN
2100 *CLS
2110 CLS
2120 RETURN
In sum, the invention provides the function that has realized continuous and automatic testing, when having improved the automaticity of test macro, improved operating efficiency, and when test, one key operation can complete whole tests, substantially realizes unattended test macro, has saved human cost.
Be understandable that, for those of ordinary skills, can be equal to replacement or change according to technical scheme of the present invention and inventive concept thereof, and all these changes or replacement all should belong to the protection range of the appended claim of the present invention.
Claims (9)
1. for testing a test macro for SAW (Surface Acoustic Wave) resonator, it is characterized in that, comprising:
Driving arrangement, has probe, for touching with measurand, obtains test data;
Impedance measuring instrument, for detection of the impedance of measurand;
Network analyzer, communicates by letter with described driving arrangement, for described test data is analyzed, and according to analysis result, controls driving arrangement and carries out follow-on test, suspends test or stop test;
Level translator, for converting the output level of driving arrangement to the required level of network analyzer work;
Described driving arrangement is connected with impedance measuring instrument with described network analyzer by described level converter.
2. according to claim 1ly for testing the test macro of SAW (Surface Acoustic Wave) resonator, it is characterized in that, described driving arrangement is also for when network analyzer output suspends test signal, mark measurand; Described network analyzer is also for after driving arrangement mark measurand, and output test signal makes driving arrangement test next measurand.
3. according to claim 1 for testing the test macro of SAW (Surface Acoustic Wave) resonator, it is characterized in that, described level translator comprises triac device, the first opto-coupler chip, the second opto-coupler chip, the 3rd opto-coupler chip, the first resistance, the second resistance, the 3rd resistance, the 4th resistance, the 5th resistance, the 6th resistance, the 7th resistance, the 8th resistance, the 9th resistance and the tenth resistance;
The first end of described the first opto-coupler chip connects driving arrangement by the first resistance, the second end of described the first opto-coupler chip connects the second end of triac device, the 3rd end ground connection of the first opto-coupler chip, the 4th end of the first opto-coupler chip is connected the first high level feeder ear, also by the 3rd resistance, is connected the base stage of the first triode by the second resistance; The collector electrode of described the first triode connects described network analyzer, also by the 4th resistance, connects the second high level feeder ear, the grounded emitter of the first triode;
The first end of described the second opto-coupler chip connects third high level feeder ear by the 5th resistance, the second end of described the second opto-coupler chip connects described network analyzer, the 3rd end ground connection of the first opto-coupler chip, the 4th end of the second opto-coupler chip is connected the base stage of the second triode, also by the 7th resistance, is connected the 4th high level feeder ear by the 6th resistance; The collector electrode of described the second triode connects the five terminal of triac device, the grounded emitter of the second triode;
The first end of described the 3rd opto-coupler chip connects the 5th high level feeder ear by the 8th resistance, the second end of described the first opto-coupler chip connects described network analyzer, the 3rd end ground connection of the 3rd opto-coupler chip, the 4th end of the 3rd opto-coupler chip is connected the base stage of the 3rd triode, also by the tenth resistance, is connected the 6th high level feeder ear by the 9th resistance; The collector electrode of described the first triode connects the 8th end of triac device, the grounded emitter of the 3rd triode;
The first end of described triac device, the 4th end and the 7th end are connected described driving arrangement, and the 3rd end of triac device, the 6th end and the 9th end are connected described impedance measuring instrument.
4. according to claim 3ly for testing the test macro of SAW (Surface Acoustic Wave) resonator, it is characterized in that, described the first triode, the second triode and the 3rd triode are NPN triode.
5. according to claim 1ly for testing the test macro of SAW (Surface Acoustic Wave) resonator, it is characterized in that, described measurand is wafer.
6. as claimed in claim 1 for testing a method of testing for the test macro of SAW (Surface Acoustic Wave) resonator, it is characterized in that, comprising:
When A, unlatching driving arrangement, level translator converts the output level of driving arrangement to network analyzer work required level, and driving arrangement is communicated by letter with network analyzer;
B, make probe touch measurand to obtain test data, and described test data is sent to network analyzer;
C, described network analyzer are analyzed test data, and according to analysis result, control driving arrangement and carry out follow-on test, suspend test or stop test.
7. method of testing according to claim 6, is characterized in that, after step C, described method of testing also comprises:
D, in the time need to detecting the impedance of measurand, by described level translator, switch described driving arrangement communicated by letter with impedance measuring instrument;
E, by the impedance of impedance measuring instrument test measurand.
8. method of testing according to claim 6, is characterized in that, described step C specifically comprises:
C1, described network analyzer are analyzed the RIP value of measurand, IL value and F0 value respectively, when RIP value, IL value or FO value be not during in preset range, to described driving arrangement, send and suspend test signal;
C2, by measurand described in described driving arrangement mark;
C3, network analyzer are controlled the test data that driving arrangement continues to obtain next measurand.
9. method of testing according to claim 8, is characterized in that, described step C also comprises: C4, all tested to picture has detected after, by network analyzer, to driving arrangement, send out and stop test signal, control driving arrangement quit work.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310721858.2A CN103700604B (en) | 2013-12-24 | 2013-12-24 | For testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310721858.2A CN103700604B (en) | 2013-12-24 | 2013-12-24 | For testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103700604A true CN103700604A (en) | 2014-04-02 |
| CN103700604B CN103700604B (en) | 2016-04-13 |
Family
ID=50362094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310721858.2A Active CN103700604B (en) | 2013-12-24 | 2013-12-24 | For testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103700604B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002040002A (en) * | 2000-07-26 | 2002-02-06 | Mitsubishi Electric Corp | Abnormal spot detection device |
| CN101105515A (en) * | 2006-07-11 | 2008-01-16 | 北海银河高科技产业股份有限公司 | Device for detecting crystal oscillator |
| CN101782612A (en) * | 2009-11-26 | 2010-07-21 | 中国电子科技集团公司第二十六研究所 | Automatic test system for surface acoustic wave (SAW) filter |
-
2013
- 2013-12-24 CN CN201310721858.2A patent/CN103700604B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002040002A (en) * | 2000-07-26 | 2002-02-06 | Mitsubishi Electric Corp | Abnormal spot detection device |
| CN101105515A (en) * | 2006-07-11 | 2008-01-16 | 北海银河高科技产业股份有限公司 | Device for detecting crystal oscillator |
| CN101782612A (en) * | 2009-11-26 | 2010-07-21 | 中国电子科技集团公司第二十六研究所 | Automatic test system for surface acoustic wave (SAW) filter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103700604B (en) | 2016-04-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101360254B (en) | Test system for CMOS image sensor electrical performance | |
| CN109613906B (en) | Third-generation intelligent substation measurement and control submachine test system and application method thereof | |
| CN103067550B (en) | Mobile phone test tool detection method | |
| CN102096001B (en) | Overcurrent and short circuit tester for battery pack protective board | |
| CN202013271U (en) | Service life testing system for electromagnetic valve | |
| CN105846263A (en) | USB adapter cable, charging testing method and charging testing system of mobile terminal | |
| CN106603338A (en) | Method, device and system for testing response time of intelligent terminal | |
| CN103700604A (en) | Test system for testing acoustic surface wave resonator and test method of test system | |
| CN103135051B (en) | Test fixture for power source restarting | |
| CN210038004U (en) | 450MHz electrical performance index automatic test unit | |
| CN201910882U (en) | Set-top box testing device | |
| CN209690897U (en) | A kind of interrupt response test device | |
| CN210954251U (en) | Equipment for automatically testing television or audio-visual mainboard | |
| CN207281251U (en) | A kind of detecting system of circuit board | |
| CN105631615A (en) | Detection system and detection method | |
| CN101420634A (en) | Automatic test system and method for switching module and routing | |
| CN110514983A (en) | A method of the printer interface circuit plate based on Labview is tested automatically | |
| CN205404750U (en) | Thick film hybrid integrated circuit test system | |
| CN203811700U (en) | Integrated production test device | |
| CN110285847A (en) | A kind of measurement auxiliary device and metering method of test macro | |
| CN218633960U (en) | WiFi module test system and device | |
| CN221008120U (en) | Signal switching device applied to controller in-loop test | |
| CN215768892U (en) | Measuring device for radio frequency switch device | |
| WO2022134130A1 (en) | Self-adaptive electrical parameter test system and method for quality and safety monitoring | |
| CN216900808U (en) | Sampling plate test platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 101, 201, 301, 401, building 2, phase I, intelligent manufacturing industrial park, high tech Zone, Wuxing District, Huzhou City, Zhejiang Province, 313000 Patentee after: Zhejiang Huayuan Micro Electronics Technology Co.,Ltd. Address before: 518125 No.5, Zhuangcun Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN HUAYUAN MICRO ELECTRONIC TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address |