CN103700604B - For testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator - Google Patents
For testing test macro and the method for testing thereof of SAW (Surface Acoustic Wave) resonator Download PDFInfo
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- CN103700604B CN103700604B CN201310721858.2A CN201310721858A CN103700604B CN 103700604 B CN103700604 B CN 103700604B CN 201310721858 A CN201310721858 A CN 201310721858A CN 103700604 B CN103700604 B CN 103700604B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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Abstract
The invention discloses the test macro for testing SAW (Surface Acoustic Wave) resonator and method of testing thereof, its method of testing comprises: when opening driving arrangement, level translator converts the output level of driving arrangement to needed for network analyzer work level, and driving arrangement is communicated with network analyzer; Touch measurand at probe and obtain test data, and after described test data is sent to network analyzer; By described network analyzer, test data is analyzed, and carry out follow-on test according to analysis result control driving arrangement, suspend test or stop test.Present invention achieves the function of continuous and automatic testing, while improve the automaticity of test macro, improve operating efficiency, and a key operation can complete whole test when testing, and substantially realizes unattended test macro, saves human cost.
Description
Technical field
The present invention relates to device for testing and analyzing technical field, particularly a kind of test macro for testing SAW (Surface Acoustic Wave) resonator and method of testing thereof.
Background technology
Surface Acoustic Wave Filter/SAW SAW (Surface Acoustic Wave) resonator (surface-acoustic-wave) is the piezoelectric property utilizing piezoelectric, constrained input transducer (Transducer) is utilized to convert the input signal of electric wave to mechanical energy, after treatment, again mechanical energy is converted to the signal of electricity, filter unnecessary signal and noise to reach, promote the object of reception quality.Surface Acoustic Wave Filter is widely used on various wireless telecommunication system, television set, Video Recorder and GPS receiver.
The manufacturing process of SAW surface acoustic wave device comprises: the correlation step such as wafer (i.e. wafer) test, wafer cleaning, metal-coated membrane, upper photoresistance, development, etching, removing photoresistance, cutting, encapsulation, therefore wafer sort is also an important operation, its direct relation Surface Acoustic Wave Filter quality.
Existing test macro is when brilliant on-chip testing sound surface resonator index, after generally first the probe on driving arrangement being connected with network analyzer by p-wire, the position of mobile wafer makes probe and contact wafers, after pressing the feeler switch on driving arrangement, send out network analyzer and send test instruction, network analyzer shows test results.But above-mentioned test macro, after testing one piece of wafer, again need press the test that feeler switch carries out next wafer, can not realize testing continuously and automatically, its automaticity is low, working effect is low, and waste of manpower cost.
Summary of the invention
In view of above-mentioned the deficiencies in the prior art part, the object of the present invention is to provide a kind of test macro for testing SAW (Surface Acoustic Wave) resonator and method of testing thereof, the problem that prior art automaticity is low to solve, working effect is low.
In order to achieve the above object, this invention takes following technical scheme:
For testing a test macro for SAW (Surface Acoustic Wave) resonator, it comprises:
Driving arrangement, has probe, for touching with measurand, obtains test data;
Impedance measuring instrument, for detecting the impedance of measurand;
Network analyzer, communicates with described driving arrangement, for analyzing described test data, and carries out follow-on test according to analysis result control driving arrangement, suspends test or stop test;
Level translator, for converting the output level of driving arrangement to needed for network analyzer work level;
Described driving arrangement is connected with described network analyzer and impedance measuring instrument by described level converter.
Described for testing in the test macro of SAW (Surface Acoustic Wave) resonator, described driving arrangement also for export at network analyzer suspend test signal time, mark measurand; Described network analyzer also for after driving arrangement mark measurand, exports test signal and makes driving arrangement test next measurand.
Described for testing in the test macro of SAW (Surface Acoustic Wave) resonator, described level translator comprises triac device, the first opto-coupler chip, the second opto-coupler chip, the 3rd opto-coupler chip, the first resistance, the second resistance, the 3rd resistance, the 4th resistance, the 5th resistance, the 6th resistance, the 7th resistance, the 8th resistance, the 9th resistance and the tenth resistance;
The first end of described first opto-coupler chip connects driving arrangement by the first resistance, second end of described first opto-coupler chip connects the second end of triac device, 3rd end ground connection of the first opto-coupler chip, the 4th end of the first opto-coupler chip is connected the first high level feeder ear by the second resistance, is also connected the base stage of the first triode by the 3rd resistance; The collector electrode of described first triode connects described network analyzer, also connects the second high level feeder ear by the 4th resistance, the grounded emitter of the first triode;
The first end of described second opto-coupler chip connects third high level feeder ear by the 5th resistance, second end of described second opto-coupler chip connects described network analyzer, 3rd end ground connection of the first opto-coupler chip, the 4th end of the second opto-coupler chip by the 6th resistance connect the second triode base stage, also connect the 4th high level feeder ear by the 7th resistance; The collector electrode of described second triode connects the five terminal of triac device, the grounded emitter of the second triode;
The first end of described 3rd opto-coupler chip connects the 5th high level feeder ear by the 8th resistance, second end of described first opto-coupler chip connects described network analyzer, 3rd end ground connection of the 3rd opto-coupler chip, the 4th end of the 3rd opto-coupler chip is by the base stage of the 9th resistance connection the 3rd triode, also by the tenth resistance connection the 6th high level feeder ear; The collector electrode of described first triode connects the 8th end of triac device, the grounded emitter of the 3rd triode;
First end, the 4th end of described triac device are connected described driving arrangement with the 7th end, and the 3rd end, the 6th end of triac device are connected described impedance measuring instrument with the 9th end.
Described for testing in the test macro of SAW (Surface Acoustic Wave) resonator, described first triode, the second triode and the 3rd triode are NPN triode.
Described for testing in the test macro of SAW (Surface Acoustic Wave) resonator, described measurand is wafer.
A method of testing for the above-mentioned test macro for testing SAW (Surface Acoustic Wave) resonator, it comprises:
When A, unlatching driving arrangement, level translator converts the output level of driving arrangement to needed for network analyzer work level, and driving arrangement is communicated with network analyzer;
B, make probe touch measurand to obtain test data, and described test data is sent to network analyzer;
C, described network analyzer are analyzed test data, and carry out follow-on test according to analysis result control driving arrangement, suspend test or stop test.
In described method of testing, after step c, described method of testing also comprises:
D, when needing to detect the impedance of measurand, carrying out switching by described level translator and described driving arrangement is communicated with impedance measuring instrument;
E, test the impedance of measurand by impedance measuring instrument.
In described method of testing, described step C specifically comprises:
C1, described network analyzer are analyzed the RIP value of measurand, IL value and F0 value respectively, when RIP value, IL value or FO value be not in preset range, send suspend test signal to described driving arrangement;
C2, mark described measurand by described driving arrangement;
C3, network analyzer control the test data that driving arrangement continues to obtain next measurand.
In described method of testing, described step C also comprises: C4, all tested to picture has detected after, send out stopping test signal by network analyzer to driving arrangement, control driving arrangement quit work.
Compared to prior art, test macro for testing SAW (Surface Acoustic Wave) resonator provided by the invention and method of testing thereof, when opening driving arrangement, level translator converts the output level of driving arrangement to needed for network analyzer work level, and driving arrangement is communicated with network analyzer; Touch measurand at probe and obtain test data, and after described test data is sent to network analyzer; By described network analyzer, test data is analyzed, and carry out follow-on test according to analysis result control driving arrangement, suspend test or stop test, achieve the function of continuous and automatic testing, while improve the automaticity of test macro, improve operating efficiency, and when testing, a key operation can complete whole test, substantially realizes unattended test macro, saves human cost.
Accompanying drawing explanation
Fig. 1 is that the present invention is for testing the structured flowchart of the test macro of SAW (Surface Acoustic Wave) resonator.
Fig. 2 is that the present invention is for testing the circuit diagram of the test macro of SAW (Surface Acoustic Wave) resonator.
Fig. 3 is the flow chart of the method for testing of test macro of the present invention.
Embodiment
The invention provides a kind of test macro for testing SAW (Surface Acoustic Wave) resonator and method of testing thereof, for making object of the present invention, technical scheme and effect clearly, clearly, developing simultaneously referring to accompanying drawing, the present invention is described in more detail for embodiment.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
Test macro provided by the invention, be mainly used in testing the wafer of SAW (Surface Acoustic Wave) resonator, therefore measurand of the present invention is wafer.Refer to Fig. 1, it is that the present invention is for testing the structured flowchart of the test macro of SAW (Surface Acoustic Wave) resonator.As shown in Figure 1, test macro of the present invention comprises driving arrangement 100, impedance measuring instrument 200, network analyzer 300 and level translator 400, and described driving arrangement 100 is connected with described network analyzer 300 and impedance measuring instrument 200 by described level converter.
In the present embodiment, by the program composition to network analyzer 300, network analyzer 300 directly can be communicated with driving arrangement 100 and carry out exchanges data, achieve Automatic continuous test, and test result data can be presented on network analyzer 300 picture automatically, can also switch between test characteristic and impedance simultaneously.
During concrete enforcement, described level translator 400 to work required level for the output level of driving arrangement 100 being converted to network analyzer 300.Described driving arrangement 100 has two probe (not shown)s, and described probe and measurand touch, and for obtaining test data, and sends to network analyzer 300 by driving arrangement 100.Described network analyzer 300 communicates with described driving arrangement 100, for analyzing described test data, and carry out follow-on test according to analysis result control driving arrangement 100, suspend test or stop test, and analysis result also can show by this network analyzer 300, analyzes for operating personnel.
Wherein, described level translator 400 also for when needing the impedance detecting measurand, carrying out switching by described level translator 400 and described driving arrangement 100 is communicated with impedance measuring instrument 200, being detected the impedance of measurand by impedance measuring instrument 200.
The model of described driving arrangement 100 is APM-5000A, this driving arrangement 100 is provided with " beginning " button, after tester presses " beginning " button, driving arrangement 100 just starts to send " commencing signal " to network analyzer 300, makes test macro start continuous and automatic testing.
When testing defective products, network analyzer 300 sends NG(to driving arrangement 100 and suspends) signal.In the present embodiment, described driving arrangement 100 is also for exporting time-out test signal during at network analyzer 300, mark measurand, such as, wafer marks a stain, represents that this wafer is not non-defective unit, remind operating personnel to choose this bad wafer.In order to realize Automatic continuous test, described network analyzer 300, also for after driving arrangement 100 marks measurand, exports test signal and makes driving arrangement 100 test next measurand.
In further embodiment, test macro of the present invention also can arrange device for sorting, during for detecting markd defective products, after directly picking out defective products, more automatically tests next measurand, improves the intelligence degree of test macro further.
Certainly, in other embodiments, described test macro also can be provided with alarm module, when network analyzer 300 analyzes defective products, output alarm signal, remind operating personnel to pick out defective products, after defective products is chosen, network analyzer 300 exports test signal again makes driving arrangement 100 test next measurand.
During concrete enforcement, described network analyzer 300 judges the RIP(amplitude of wafer respectively according to test value and set point) value, IL(loss) value and FO(frequency) whether value in range of set value, as long as above-mentioned three values have one not meet the demands, just defective products is judged as, and by signal feedback to driving arrangement 100, make it mark on defective products, after having marked, continue the test of next wafer, achieve and test continuously, automatically.
See also Fig. 2, it is that the present invention is for testing the circuit diagram of the test macro of SAW (Surface Acoustic Wave) resonator.Described level translator 400 comprises triac device SW, the first opto-coupler chip U1, the second opto-coupler chip U2, the 3rd opto-coupler chip U3, the first resistance R1, the second resistance R2, the 3rd resistance R3, the 4th resistance R4, the 5th resistance R5, the 6th resistance R6, the 7th resistance R7, the 8th resistance R8, the 9th resistance R9 and the tenth resistance R10.
The first end of described first opto-coupler chip U1 connects driving arrangement 100 by the first resistance R1, second end of described first opto-coupler chip U1 connects second end of triac device SW, the 3rd end ground connection of the first opto-coupler chip U1, the 4th end of the first opto-coupler chip U1 is connected the first high level feeder ear J1 by the second resistance R2, is also connected the base stage of the first triode Q1 by the 3rd resistance R3; The collector electrode of described first triode Q1 connects described network analyzer 300, also connects the second high level feeder ear J2 by the 4th resistance R4, the grounded emitter of the first triode Q1.Wherein, described first high level feeder ear J1 can be identical with the supply power voltage of the second high level feeder ear J2, described second resistance R2 and the 4th resistance R4 is pull-up resistor, respectively the 4th end of the first opto-coupler chip U1 and the collector electrode of the first triode Q1 is pulled to high level.
The first end of described second opto-coupler chip U2 connects third high level feeder ear J3 by the 5th resistance R5, second end of described second opto-coupler chip U2 connects described network analyzer 300, the 3rd end ground connection of the first opto-coupler chip U1, the 4th end of the second opto-coupler chip U2 by the 6th resistance R6 connect the second triode Q2 base stage, also connect the 4th high level feeder ear J4 by the 7th resistance R7; The collector electrode of described second triode Q2 connects the five terminal of triac device SW, the grounded emitter of the second triode Q2.Wherein, described third high level feeder ear J3 can be identical with the supply power voltage of the 4th high level feeder ear J4, described 5th resistance R5 and the 7th resistance R7 is pull-up resistor, respectively the 4th end of the first end of the second opto-coupler chip U2 and the second opto-coupler chip U2 is pulled to high level.
The first end of described 3rd opto-coupler chip U3 connects the 5th high level feeder ear J5 by the 8th resistance R8, second end of described first opto-coupler chip U1 connects described network analyzer 300, the 3rd end ground connection of the 3rd opto-coupler chip U3, the 4th end of the 3rd opto-coupler chip U3 is by the base stage of the 9th resistance R9 connection the 3rd triode Q3, also by the tenth resistance R10 connection the 6th high level feeder ear J6; The collector electrode of described first triode Q1 connects the 8th end of triac device SW, the grounded emitter of the 3rd triode Q3.Wherein, described 5th high level feeder ear J5 can be identical with the supply power voltage of the 6th high level feeder ear J6, described 8th resistance R8 and the tenth resistance R10 is pull-up resistor, respectively the 4th end of the first end of the 3rd opto-coupler chip U3 and the 3rd opto-coupler chip U3 is pulled to high level.
Start end (starting end), NG that the first end of described triac device SW, the 4th end are connected described driving arrangement 100 respectively with the 7th end hold (suspending end) and END end (terminating to hold), and the 3rd end, the 6th end of triac device SW are connected described impedance measuring instrument 200 with the 9th end.During concrete enforcement, described first triode Q1, the second triode Q2 and the 3rd triode Q3 are NPN triode.Described triac device SW can be simulation triac device SW, transmitted control signal by network analyzer 300 and switch its conduction path, when upwards (visual angle of Fig. 2 is upwards) switches triac device SW, driving arrangement 100 is communicated with network analyzer 300, when (visual angle of Fig. 2 is downward) switches triac device SW, driving arrangement 100 is communicated downwards with impedance measuring instrument 200.
When triac device SW upwards switches, first opto-coupler chip U1 conducting export high level, make the first triode Q1 conducting, now driving arrangement 100 enable carry out communicating to network analyzer 300 with network analyzer 300 send commencing signal.When network analyzer 300 analyzes defective products, export NG signal by network analyzer 300 make the second opto-coupler chip U2 conducting and export high level, make the second triode Q2 conducting, after driving arrangement 100 pairs of wafers make marks, again send commencing signal by network analyzer 300, make driving arrangement 100 continue to obtain next tested test data to picture.After all wafers has been tested, export END signal by network analyzer 300 and driving arrangement 100 is quit work.When needing the impedance of testing wafer, triac device SW can be switched downwards by network analyzer 300 output switching signal, impedance measuring instrument 200 be started working, obtains the tested resistance to picture.
Substantially above-mentioned test macro, the present invention is the corresponding method of testing providing a kind of test macro for testing SAW (Surface Acoustic Wave) resonator also, and refer to Fig. 3, it is the flow chart of the method for testing of test macro of the present invention.As shown in Figure 3, described method of testing comprises:
When S10, unlatching driving arrangement, level translator converts the output level of driving arrangement to needed for network analyzer work level, and driving arrangement is communicated with network analyzer;
S20, make probe touch measurand to obtain test data, and described test data is sent to network analyzer;
S30, described network analyzer are analyzed test data, and carry out follow-on test according to analysis result control driving arrangement, suspend test or stop test.
Wherein, when needing the impedance detecting measurand, carrying out switching by described level translator and described driving arrangement is communicated with impedance measuring instrument; Afterwards, the impedance of measurand is tested by impedance measuring instrument.
During concrete enforcement, described step S30 specifically comprises: described network analyzer is analyzed the RIP value of measurand, IL value and F0 value respectively, when RIP value, IL value or FO value be not in preset range, send suspend test signal to described driving arrangement; Afterwards, described measurand is marked by described driving arrangement; The test data that driving arrangement continues to obtain next measurand is controlled again by network analyzer.
And after all measurands have been tested, method of testing of the present invention also comprises: all tested to picture detected after, send out stopping test signal by network analyzer to driving arrangement, control driving arrangement and quit work, thus realize full-automatic test operation.
Be wafer below with measurand be Application Example, the method for testing of the test macro for testing SAW (Surface Acoustic Wave) resonator of the present invention be described in detail:
After tester presses " beginning " button on driving arrangement, driving arrangement just sends commencing signal to network analyzer, and network analyzer starts continuous and automatic testing after receiving commencing signal.Network analyzer carries out analysis meter to the RIP value of measurand, IL value and F0 value respectively and calculates test value, then by test value compared with set point.If these three values are all normal, then export 1 and be judged to be non-defective unit, and return next commencing signal.If three values have one abnormal, then export 3, be judged as defective products, and export the action that NG signal makes driving arrangement make to get ready mark, and after mark completes, turn back to the next one " commencing signal " to driving arrangement continue test.
For example: assuming that RIP test result is 10dB or 15dB, set point requires to be greater than or equal to 12dB, when measured value is compared with setting range, if measured value is 10dB, not at setting range, be judged to be defective products, output test result and driving arrangement is made get ready the action of mark, then send next commencing signal and test next wafer; If measured value is 15dB, program can down proceed to judge IL value.
Afterwards, judge IL value, assuming that measured value is 1dB or 4dB, setting range is less than or equal to 2.5dB, during by measured value compared with setting range, if measured value is 4dB, represent not at setting range, be judged to be defective products, the driving arrangement that outputs test result makes the action getting mark ready, then sends lower certain commencing signal and test next wafer; If measured value is 1dB, program can down proceed to judge FO value.
Finally, judge FO value, network analyzer calculates out FO by signal, assuming that the setting range that FO measured value is 430.05M or 430.10M, FO is 429.925-430.075M, measured value and setting range are compared, if measured value is 430.1M, exceed setting range, be judged to be defective products, the driving arrangement that outputs test result makes the action getting mark ready, and sends the next wafer of next beginning test signal test; If measured value is 430.05M, above three conditions all meet the requirements, be then judged to be non-defective unit, output test result, and under sending next, commencing signal tests next wafer.After all wafers has been tested, send end signal to driving arrangement and driving arrangement is quit work.
In test macro of the present invention, the program code of described network analyzer is as follows:
10ONERRORGOTO1570
20CLS
30PRINT"PleaseInputwhatdoyouwant"
40print"A:AUTOPROBE"
50PRINT"B:ADDNEWMODEL"
60PRINT"C:CHANGTHESPEC"
70PRINT"P:PROBEANDNEEDPRINTDATA"
80PRINT""
90INPUT"A/B/C/P?";Z$
100IFZ$="A"THENGOTO150
110IFZ$="B"THENGOTO230
120IFZ$="C"THENGOTO*CHANGE
130IFZ$="P"THENGOTO*TURE
140GOTO1570
150CLS
160PRINT"PleaseInputthename!"
170INPUT"NAME=";M$
180OPENM$FORINPUTAS#FD;BINARY
190ENTER#FD;N$,L,H,C,S,R
200IFL=0THENGOTO230
210IFN$=M$THENGOTO550
220GOTO190
230CLS
240PRINT""
250PRINT"It'sanewmodel!"
260GOTO300
270CLOSE*
280GOTO1050
290CLOSE*
300PRINT"PleaseInputthenewmodel'sspec"
310PRINT"................................."
320INPUT"NEWNAME=";M$
330INPUT"FL=";L
340INPUT"FH=";H
350INPUT"CENTER=";C
360INPUT"SPEC=";S
370INPUT"RIP=";R
380CLS
390PRINT"NAME:";M$,"FL:";L,"FH:";H
400PRINT"CENTER:";C,"SPAN"";S,"RIP:";R
410PRINT"................................"
420PRINT"SAVE?Y:SAVE;N:AGAIN;Q:QUIT"
430INPUT"SAVE?Y/N/Q?";G$
440IFG$="Y"THEN
450GOTO510
460ELSEIFG$="N"THEN
470GOTO320
480ELSEGOTO1050
490GOTO1050
500ENDIF
510OPENM$FOROUTPUTAS#FD;BINARY
520OUTPUT#FD;M$,L,H,C,S,R
530CLOSE*
540GOTO1050
550OUTPUT31;"EDITOFF"
560OUTPUT31;"REFP80FER"
570OUTPUT31;"SINGLE"
580OUTPUT31;"CENTERF",C,"MHZ"
590OUTPUT31;"SPEANF",S,"MHZ"
600OUTPUT31;"SDIV10DB"
610OUTPUT31;"REFV0DB"
620OUTPUT31;"MKR1A",L,"MHZ"
630OUTPUT31;"MKR2A",H,"MHZ"
640OUTPUT31;"MKR3A",C,"MHZ"
650CLS
660OUTPUT36;19
670FL=L*1e+06
680FH=H*1e+06
690IL=-8
700RIP=R
710CLS
720CURSOR2,10
730PRINT"START"
740PRINT"M:";N$
750INTEGERU
760U=0
770ENABLEINTR
780ONKEY1GOTO1870
790ONKEY2GOTO1910
791ONKEY3GOTO*READ
792ONKEY4GOTO*ZERO
793ONKEY5GOTO*CLE
800OUTPUT34;0
810OUTPUT35;80
820ENTER34;0
830ENABLEINTR
840IFTRIG=0THENGOTO820
860U=U+1
870FORT=1TO350
880NEXTT
890OUTPUT31;"SINGLE"
900FORT=0TO350
910NEXTT
920PF0=FMAX(100,1100,0)
930PIL=MAX(100,1100,0)
940PILL=MIN(100,1100,0)
950DIR=PIL-PILL
960IFO=1THENGOSUB*PRINT
970IFDIR<RIPTHENGOTO1030
980IFPIL<ILTHENGOTO1030
990IFPF0<FLTHENGOTO1030
1000IFPF0>FHTHENGOTO1030
1010OUTPUT34;1
1020GOTO800
1030OUTPUT34;3
1040GOTO800
1050PRINT"#########END#########"
1060STOP
1070*CHANGE
1080CLS
1090PRINT"Ifyouchangethespectheold'sw"
1100cursor33,4
1110PRINT"illbelost!"
1120INPUT"AREYOUSURE?Y/N?";T$
1130IFT$="Y"THENGOTO1150
1140IFT$="N"THENGOTO1050
1150CLS
1160PRINT"INPUTTHENAMEOFTHEMODEL"
1170CURSOR31,4
1180PRINT"WHICHYOUWANT"
1190PRINT"TOCHANGE."
1200PRINT"........................."
1210INPUT"NAME=";M$
1220PURGEM$
1230INPUT"FL=";L
1240INPUT"FH=";H
1250INPUT"CENTER=";C
1260INPUT"SPAN="S
1270INPUT"RIP=";R
1280PRINT"............."
1290OPENM$FOROUTPUTAS#FD;BINARY
1300OUTPUT#FD;M$,L,H,C,S,R
1310CLOSE*
1320PRINT"SAVED!"
1330RETURN
1340*CLEAR
1350L=0,H=0,C=0,S=0,R=0,N$="",M$=""
1360RETURN
1370*READ
1371CLS
1390CURSOR0,21
1400PRINT"NAME:";N$
1410PRINT"CENTER:";C
1411PRINT"FL:";L
1412PRINT"FH:";H
1420RETURN
1430*TURE
1440O=1
1450GOTO150
1460RETURN
1470*PRINT
1480F0=PF0/1e+06
1490IFDIR<RIPTHEN
1500PRINTU;"F0=0"
1510ELSEIFPIL<-8THEN
1520PRINTU;"F0=0"
1530ELSE
1540PRINTU;"F0=";F0
1550ENDIF
1560RETURN
1570*ERR
1580CURSOR5,9
1590PRINT"================================"
1600CURSOR37,9
1610PRINT"====="
1620CURSOR5,10
1630PRINT"/*RERROR*"
1640CURSOR37,10
1650PRINT"/"
1660CURSOR5,11
1670PRINT"/*MAKESURETHRMODELNAMEISRI"
1680CURSOR37,11
1690PRINT"GHT./"
1700CURSOR5,12
1710PRINT"MAKESURETHISDISKHASTHIS"
1720CURSOR37,12
1730PRINT"/"
1740CURSOR5,13
1750PRINT"/MODELDATA;"
1760CURSOR37,13
1770PRINT"/"
1780CURSOR5,14
1790PRINT"/*MAKESURETHEDISKISOK."
1800CURSOR37,14
1810PRINT"/"
1820CURSOR5,15
1830PRINT"================================="
1840CURSOR37,15
1850PRINT"======"
1860STOP
1870*AGAIN
1871U=0
1880PRINT"OK"
1890GOTO750
1900RETURN
1910*MEAN
1920FORI=1TO200
1930NEXTI
1940OUTPUT31;"SINGLE"
1950FORU=1TO350
1960NEXTU
1970CLS
1980PIL=MAX(100,1100,0)
1990PF0=FMAX(100,1100,0)
2000PIL=MIN(100,1100,0)
2010DIR=PIL-PILL
2020CURSOR5,5
2030PRINT"IL=",PIL
2040GOSUB*PRINT
2050GOTO760
2060RETURN
2070*ZERO
2080O=0
2090RETURN
2100*CLS
2110CLS
2120RETURN
In sum, the invention provides the function achieving continuous and automatic testing, while improve the automaticity of test macro, improve operating efficiency, and when testing, a key operation can complete whole test, substantially realizes unattended test macro, saves human cost.
Be understandable that, for those of ordinary skills, can be equal to according to technical scheme of the present invention and inventive concept thereof and replace or change, and all these change or replace the protection range that all should belong to the claim appended by the present invention.
Claims (8)
1. for testing a test macro for SAW (Surface Acoustic Wave) resonator, it is characterized in that, comprising:
Driving arrangement, has probe, for touching with measurand, obtains test data;
Impedance measuring instrument, for detecting the impedance of measurand;
Network analyzer, communicates with described driving arrangement, for analyzing described test data, and carries out follow-on test according to analysis result control driving arrangement, suspends test or stop test;
Level translator, for converting the output level of driving arrangement to needed for network analyzer work level;
Described driving arrangement is connected with described network analyzer and impedance measuring instrument by described level converter;
Described level translator comprises triac device, the first opto-coupler chip, the second opto-coupler chip, the 3rd opto-coupler chip, the first resistance, the second resistance, the 3rd resistance, the 4th resistance, the 5th resistance, the 6th resistance, the 7th resistance, the 8th resistance, the 9th resistance and the tenth resistance;
The first end of described first opto-coupler chip connects driving arrangement by the first resistance, second end of described first opto-coupler chip connects the second end of triac device, 3rd end ground connection of the first opto-coupler chip, the 4th end of the first opto-coupler chip is connected the first high level feeder ear by the second resistance, is also connected the base stage of the first triode by the 3rd resistance; The collector electrode of described first triode connects described network analyzer, also connects the second high level feeder ear by the 4th resistance, the grounded emitter of the first triode;
The first end of described second opto-coupler chip connects third high level feeder ear by the 5th resistance, second end of described second opto-coupler chip connects described network analyzer, 3rd end ground connection of the first opto-coupler chip, the 4th end of the second opto-coupler chip by the 6th resistance connect the second triode base stage, also connect the 4th high level feeder ear by the 7th resistance; The collector electrode of described second triode connects the five terminal of triac device, the grounded emitter of the second triode;
The first end of described 3rd opto-coupler chip connects the 5th high level feeder ear by the 8th resistance, second end of described first opto-coupler chip connects described network analyzer, 3rd end ground connection of the 3rd opto-coupler chip, the 4th end of the 3rd opto-coupler chip is by the base stage of the 9th resistance connection the 3rd triode, also by the tenth resistance connection the 6th high level feeder ear; The collector electrode of described first triode connects the 8th end of triac device, the grounded emitter of the 3rd triode;
First end, the 4th end of described triac device are connected described driving arrangement with the 7th end, and the 3rd end, the 6th end of triac device are connected described impedance measuring instrument with the 9th end.
2. the test macro for testing SAW (Surface Acoustic Wave) resonator according to claim 1, is characterized in that, described driving arrangement is also for exporting time-out test signal during at network analyzer, and mark measurand; Described network analyzer also for after driving arrangement mark measurand, exports test signal and makes driving arrangement test next measurand.
3. the test macro for testing SAW (Surface Acoustic Wave) resonator according to claim 1, is characterized in that, described first triode, the second triode and the 3rd triode are NPN triode.
4. the test macro for testing SAW (Surface Acoustic Wave) resonator according to claim 1, is characterized in that, described measurand is wafer.
5., as claimed in claim 1 for testing a method of testing for the test macro of SAW (Surface Acoustic Wave) resonator, it is characterized in that, comprise:
When A, unlatching driving arrangement, level translator converts the output level of driving arrangement to needed for network analyzer work level, and driving arrangement is communicated with network analyzer;
B, make probe touch measurand to obtain test data, and described test data is sent to network analyzer;
C, described network analyzer are analyzed test data, and carry out follow-on test according to analysis result control driving arrangement, suspend test or stop test.
6. method of testing according to claim 5, is characterized in that, after step c, described method of testing also comprises:
D, when needing to detect the impedance of measurand, carrying out switching by described level translator and described driving arrangement is communicated with impedance measuring instrument;
E, test the impedance of measurand by impedance measuring instrument.
7. method of testing according to claim 5, is characterized in that, described step C specifically comprises:
C1, described network analyzer are analyzed the RIP value of measurand, IL value and F0 value respectively, when RIP value, IL value or FO value be not in preset range, send suspend test signal to described driving arrangement;
C2, mark described measurand by described driving arrangement;
C3, network analyzer control the test data that driving arrangement continues to obtain next measurand.
8. method of testing according to claim 7, is characterized in that, described step C also comprises: C4, all tested to picture has detected after, send out stopping test signal by network analyzer to driving arrangement, control driving arrangement quit work.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101105515A (en) * | 2006-07-11 | 2008-01-16 | 北海银河高科技产业股份有限公司 | Device for detecting crystal oscillator |
| CN101782612A (en) * | 2009-11-26 | 2010-07-21 | 中国电子科技集团公司第二十六研究所 | Automatic test system for surface acoustic wave (SAW) filter |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105515A (en) * | 2006-07-11 | 2008-01-16 | 北海银河高科技产业股份有限公司 | Device for detecting crystal oscillator |
| CN101782612A (en) * | 2009-11-26 | 2010-07-21 | 中国电子科技集团公司第二十六研究所 | Automatic test system for surface acoustic wave (SAW) filter |
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