CN103697832B - A kind of method of white light interference vertical scanning open loop control - Google Patents
A kind of method of white light interference vertical scanning open loop control Download PDFInfo
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Abstract
The present invention discloses a kind of white light vertical scanning and interferes open loop control to realize the method for surface profile measurement, the optical path difference drive unit of the integrated linearity without closed-loop control or rotary encoder and its output signal (encoded radio), it is integrated into a white light vertical scanning interferometer (WLSI) and produces the required a series of orderly interference illustration of gauging surface difference in height. The optical path difference drive unit using, be applicable to any can integrated linear or rotary encoder and its output signal (encoded radio) treatment technology for example, as micro-mobile device of sweep time (highly), the structure of white light vertical scanning interferometer (WLSI) Mirau interferometer and Michelson interferometer. In order to overcome open-loop control system non-linearity and instability, the treatment technology that the invention has proposed a linearity without closed-loop control or rotary encoder and its output signal is realized vertical scanning and is interfered required optical path difference to drive.
Description
Technical field
The present invention relates to the optical interferometer techniques of surface profile measurement, especially a kind of white light vertical scanning is interferedThe method of open loop control is carried out optical path difference and is driven to realize high-precision surface profile measurement.
Background technology
White light vertical scanning interference technique and device are a kind of interferometer techniques that carries out surface profile measurement, are calledWhite light vertical scanning is interfered contourgraph (WLSI). White light vertical scanning interference technique is the same tone that uses white lightThe Surface Interference that poor characteristic realizes finite interval carries out apparent height difference measurements, is generally acknowledge in the world fastSpeed is three-dimensional micro-morphology detection means flexibly. It is at the semiconductor nano of advanced manufacturing industry forefront, the world todayMaking technology, microelectromechanical systems, nano composite material, biotechnology, the communication technology, green energyAeronautics and Astronautics, automobile, optical element in solar energy in source and LED technology, ultraprecise machiningEtc., have a wide range of applications.
Optical interference contourgraph is to be entered by optical interference phase place (PSI) and white light interference vertical scanning (WLSI)The interference image sampling and analysing of line correlation calculates technology and the device of surface profile. Optical phase method is interferedInstrument (PSI) is proved to be a very effective high-precision surface topography measurement method. Optical phase interferometerTo obtain relevant by the phase analysis of the interference of light collection of illustrative plates (interference fringe) directly related to testeeApparent height is measured. Although the certainty of measurement of optical phase difference interferometer (PSI) can reach 1 nanometer withUnder, its major defect causes the phase place variation of interfering can not exceed 1/4 of wavelength while being its measurement. This lacksThe sunken optical phase variation interferometer (PSI) that just limited can only be measured surface topography height change at several micronsWithin. White light interference scanning profile instrument (WLSI), the vertical scanning interferometer that is otherwise known as, is a kind of use in vainThe Surface Interference that the poor characteristic of same tone of light realizes finite interval carries out the technology of apparent height difference measurements.White light vertical scanning principle of interference has overcome the restriction that optical phase method interferometer (PSI) is measured surface height difference.First white light vertical scanning interference technique was developed by Davisdon in nineteen ninety. With phase difference interference technique(PSI) obtain apparent height difference by interferometric phase calculating, white light vertical scanning interferometer (WLSI) isOnly occur in limited interval feature by dry for corresponding device white light interference in vertical scanning processThe feature that relates to Strength Changes and time is measured surface height difference.
In order to find out the intensity of same surface location interference illustration when different vertical sweep time (highly) and to askGo out wherein peak-peak (Peakvalue), white light vertical scanning interferometer (WLSI) changes by vertical scanningThe optical path difference (OPD) becoming between measured surface and the reference plane of interferometer obtains a series of corresponding interference patternsSpectral intensity. Use wide frequency light source or white light source, white light interference only occurs in the close part of optical path difference and dryRelate to strength signal obvious. Its light intensity of the interference illustration maximum in optical path difference OPD=0 producing, and along withThe increase of OPD and rapidly reduce. Corresponding interference illustration is complete in the time that optical path difference OPD is greater than optical interference lengthEntirely disappear.
A time dependent light intensity signal is distributed in optical interference microscopic system image recording structure anyA bit all can be expressed by formula below,
Wherein z is the distance (be distance from focus to pip) of measured surface light intensity signal point from focus point,H is the distance (be distance from focus to speculum) of interferometer reference plane to focus point, and k is light wave number, θ0The numerical aperture relevant with Objective Lens for Interferometer or (be the statement of numerical aperture of objective or be expressed as)N.A.＝sinθ0, α (k, θ) is the phase shift result of measuring surface reflection phase and spectral modulation phase, and F (k) isModulated amplitude, F (k) can be expressed as
F(k)＝R(k)Rg(k)＝Rf(k),(2)
In formula: Rg (k) is the spectral intensity of lighting source, and R (k) measures surperficial reverberation lightSpectral intensity.
At white light vertical scanning interferometer (WLSI), formula (1) can be simplified to,
I(z)＝a(z)+b(z)cos(φ(z)),(3)
Wherein a is corresponding background light intensity, and b is the modulated amplitude of interference illustration, and φ is the phase of interference illustrationPosition. A series of vertical scanning lengths 1,2 in vertical scanning process ..., N, formula (3) is write and is become again,
Or
Fig. 1 is a bit to hang down in the surface that white light interference scanning means produces the record after interference fringe in optical path differenceA series of light intensity signals of (apparent height) in time in straight scanning process. Interference illustration is in the modulation of every bitAmplitude can calculate from formula below,
The maximum of b and corresponding sweep time (highly) can be from modulated amplitude formula (5) in the time of maximumIn be less than a vertical scanning length precision obtain. Although accurately obtain interference illustration modulated amplitude verticallyWhen maximum in scanning process, be very important corresponding sweep time (highly), by this of (height sweep timeDegree) be converted to real apparent height and there is same importance.
The device of any one white light vertical scanning interferometer has one to change measured surface and interferometer referenceThe drive unit of optical path difference OPD between face. This drive unit comprises the micro-mobile platform of PZT, or anyA kind of by motor (for example stepper motor, department take motor, magneto etc.) drive, with or do not becomeSpeed gear structure, can integrated linear or the micro-mobile dress of rotary encoder and its output signal (encoded radio)Put. In view of drive unit intrinsic characteristic, the drive unit in white light vertical scanning interferometer changes optical path difference OPDSpeed be not constant, also do not determine. This just means that sweep time (highly) can not be straight exactlyConnect and reflect real apparent height. In order to overcome this problem, the driving dress in white light vertical scanning interferometerPut closed-loop control system integrated and control the variation of optical path difference OPD.
Mirau interferometer and Michelson interferometer are the allusion quotations that realizes white light vertical scanning interferometric method (WLSI)Type device. Its optical path difference changes can be passed through optical path difference drive unit (in Fig. 2 80, in Fig. 3 80 ') and realize.
As shown in Figure 2, the device of a Mirau interference system comprises: imaging len 20, interference image is takenInstall for example digital camera 12, with the computer 60 of IMAQ and image processing system, interference image phaseThe drive unit 80 of potential difference/optical path difference, interferes light source 40, makes light source become the collimating mirror 24 of source of parallel light, dividesLight microscopic 22, Mirau object lens 30 (by object lens 36, spectroscope 32, reference plane 24 compositions such as grade), testee100。
As shown in Figure 3, the device of a Michelson interference system comprises: imaging len 20 ', interference patternFor example digital camera 12 ' of picture filming apparatus, with the computer 60 ' of IMAQ and image processing system, dryRelate to image phase poor/drive unit 80 ' of optical path difference, interfere light source 40 ', make light source become the standard of source of parallel lightStraight mirror 24 ', spectroscope 22 ', Michelson object lens 50 ' (by object lens 54 ', spectroscope 52 ', reference plane58 ', the compositions such as lens 56 '), testee 100 '.
Problem and shortcoming that prior art exists
White light vertical scanning interferometer (WLSI), relates to and produces the drive unit of optical path difference with one and reachA series of interference illustrations have continuous variation. Current method is to produce the drive unit of optical path difference, for example piezoelectricity potteryPorcelain (PZT) micro-displacement platform, integrated with an accurate closed-loop control system. Such closed-loop control isSystem shortcoming be,
The closed control circuit complexity of optical path difference drive unit, cost are high;
Closed control circuit system produces feedback noise, directly affects the precision that apparent height is measured;
The feedback of closed control circuit system and stable need the regular hour, directly affects that apparent height measuresSpeed
The linearity of piezoelectric ceramics micro-displacement platform closed-loop control system is limited in scope, and has limited apparent height measurementScope.
Therefore, need a kind of new technical scheme to address the above problem.
Summary of the invention
The object of the invention is the deficiency existing for prior art, provide one can reduce white light interference profileInstrument cost, and can improve certainty of measurement, accelerate measuring speed and increase the white light interference of measurement category verticalThe method and apparatus of the open loop control of the optical path difference drive unit in scanner.
For achieving the above object, opening of the optical path difference drive unit in white light interference vertical scanning instrument of the present inventionThe method and apparatus that ring is controlled can adopt following technical scheme:
White light vertical scanning is interfered a method for open loop control,
Be applicable to the interference contourgraph of white light vertical scanning interference technique, white light vertical scanning interference technique is providedWith the method and apparatus of open loop control of the optical path difference drive unit in device, realize finite interval white light interference;
White light vertical scanning interferometer carries out apparent height difference measurements to be realized by step below:
(1), by optical path difference drive unit, obtain orderly interference illustration corresponding in the time of different optical path differences,
Simultaneously synchronous recording be integrated into the linearity of optical path difference drive unit or the output signal of rotary encoder orEncoded radio is as corresponding sweep time or height;
P(tm)＝Pmform＝1,2,…,M；
(2), by PmData fitting becomes a level and smooth curve P (t);
(3), calculate modulated amplitude b by a series of interference illustration intensity belown，
(4), from modulated amplitude bnIn data with vertical scanning interval distribution, ask for its maximum and correspondenceVertical scanning interval or position ta. Please note corresponding vertical scanning interval or position taCan be directly by aboveSerial interference illustration intensity calculate, do not need to calculate corresponding modulated amplitude bnValue;
(5), find corresponding P (t by the curve P (t) in above-mentioned step (2)a)；
(6), by the output signal of linearity or rotary encoder or encoded radio P (ta) to be associated with measured surface highDegree.
Compared with background technology, in the present invention, will produce the drive unit of optical path difference from the more complicated closed loop control of structureSystem processed is changed into open-loop control system, thereby can reduce the one-tenth of the white light interference contourgraph that uses this methodThis, for the output signal (encoded radio) that changes the optical path difference drive unit bringing after open-loop control system into beThe problem of non-linear and instability, has proposed a linearity without closed-loop control or rotary coding in the present inventionThe processing of device and its output signal (encoded radio) is as solution and the technology of corresponding sweep time (highly)Realize the driving of optical path difference, to address this problem. Thereby make to use open ring control device can reach equallyThe effect of high-acruracy survey, and open-loop control system is without feedback noise, and the driving of optical path difference is very level and smooth, carriesHigh certainty of measurement, open-loop control system, without feedback time, has been accelerated the speed of measuring, and there is no closed loop simultaneouslyThe linearity scope restriction of control system, increases measurement category.
Brief description of the drawings
Fig. 1 is the surface that in prior art, white light interference scanning means produces the record after interference fringe in optical path differenceCertain is a series of light intensity signals of (apparent height) in time in vertical scanning process a bit
Fig. 2 is the structural representation of a kind of Mirau interferometer in prior art.
Fig. 3 is the structural representation of a kind of Michelson interferometer in prior art.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, further illustrate the present invention, only should understand these embodimentsBe used for the present invention is described and be not used in limiting the scope of the invention, after having read the present invention, art technologyPersonnel all fall within the application's claims limited range to the amendment of the various equivalent form of values of the present invention.
The invention is used a kind of integrated drive without the linearity of closed-loop control or the optical path difference of rotary encoderMoving device, it is integrated into a white light vertical scanning interferometer (WLSI) and produces gauging surface difference in height instituteThe a series of orderly interference illustration needing. The optical path difference drive unit that the invention is used, is applicable to any oneKind for example, driven by motor (stepper motor, department take motor, magneto etc.), with or there is no a speed changeGear structure, can integrated linear or rotary encoder and the corresponding scanning of its output signal (encoded radio) conductMicro-mobile device of time (highly), as be applicable to for example Mirau of white light vertical scanning interferometer (WLSI)The structure of interferometer and Michelson interferometer.
It is nonlinear and inconstant that the device of open-loop control system drives the variation of optical path difference. In order to overcome itNon-linearity and instability, the invention has proposed a linearity without closed-loop control or rotary encoderRealize the driving of optical path difference with the treatment technology of its output signal (encoded radio).
A kind of method that the invention discloses white light interference vertical scanning open loop control, provides and is applicable to optical interferenceThe interference contourgraph of phase method, provides optical phase difference interference system and uses open-loop control system drive unitRealize interference phase difference;
White light vertical scanning interferometer carries out apparent height difference measurements to be realized by step below:
(1), by optical path difference drive unit, obtain orderly interference illustration corresponding in the time of different optical path differences,
Synchronous recording is integrated into the linearity of optical path difference drive unit or the output signal of rotary encoder (volume simultaneouslyCode value) as corresponding sweep time (highly)
P(tm)＝Pmform＝1,2,…,M；
(2), by PmData fitting becomes a level and smooth curve P (t);
(3), calculate modulated amplitude b by a series of interference illustration intensity belown，
(4), from modulated amplitude bnIn data with vertical scanning interval distribution, ask for its maximum and correspondenceVertical scanning interval or position ta. Please note corresponding vertical scanning interval or position taCan be directly by aboveSerial interference illustration intensity calculate, do not need to calculate corresponding modulated amplitude bnValue;
(5), find corresponding P (t by the curve P (t) in above-mentioned step (2)a)；
(6), by encoded radio output signal (encoded radio) P (t of linearity or rotary encodera) be associated with bySurvey apparent height.
In the present invention, the drive unit that produces optical path difference is changed into out from the more complicated closed-loop control system of structureEncircle control system, thereby can reduce the cost of the white light interference contourgraph that uses this method, for changing open loop intoThe linearity that the optical path difference drive unit that brings after control system is integrated or the output signal of rotary encoder (are compiledCode value) be non-linear and problem instability, in the present invention, proposed one without the linear of closed-loop control orThe processing of rotary encoder and its output signal (encoded radio) is as the solution party of corresponding sweep time (highly)Method and technology realize the driving of optical path difference, to address this problem. Thereby make to use open ring control device sameCan reach the effect of high-acruracy survey, and open-loop control system is without feedback noise, the driving of optical path difference verySmoothly, improved certainty of measurement, open-loop control system, without feedback time, has improved the speed of measuring, simultaneouslyThere is no the linearity scope restriction of closed-loop control system, increase measurement category.
Concrete beneficial effect comprises:
1, without the optical path difference drive unit of closed-loop control, simple and reduce costs;
2, solve the feedback noise that closed control circuit system is brought, optical path difference drives level and smooth, improves surface and surveysThe precision of amount height;
3,, owing to there is no the required time of feedback procedure of closed-loop control system, improved the speed of measuring.
4, can be integrated into very easily any light path without linearity or the rotary encoder of closed-loop controlOn micro-mobile platform of poor drive unit. It has overcome PZT drive unit of being furnished with closed-loop control etc. and has been subject to linearityThe driving little defect of measurement category causing that is limited in scope, and then greatly expanded white light vertical scanning and interfered skillThe surface height difference measurement category of art.
Claims (3)
1. a method for white light interference vertical scanning open loop control, is characterized in that:
Provide and be applicable to the interference contourgraph that optical scanner is interfered, the optical path difference of optical scanner interference system is providedAnd realize interference by method and the technology of open-loop control system drive unit;
White light vertical scanning interferometer carries out apparent height difference measurements to be realized by step below:
(1), by optical path difference drive unit, obtain orderly interference illustration corresponding in the time of different optical path differences,
And be reduced toItsIn, N is the orderly interference illustration scanning length number obtaining;
Simultaneously synchronous recording is integrated into the output signal of encoder of optical path difference drive unit or encoded radio as rightAnswer sweep time or height, encoder packet vinculum or rotary encoder,
P(tm)＝Pm, m=1,2 ..., M, wherein, M is the number of times of record;
(2), by PmData fitting becomes a level and smooth curve P (t);
(3), carried out the modulated amplitude b of calculation interferogram spectrum by a series of interference illustration intensity belown，
(4), from modulated amplitude bnIn data with vertical scanning interval distribution, ask for its maximum and correspondenceVertical scanning interval or position ta; Please note corresponding vertical scanning interval or position taCan be directly by aboveSerial interference illustration intensity calculate, do not need to calculate corresponding modulated amplitude bnValue;
(5), find corresponding P (t by the curve P (t) in above-mentioned step (2)a)；
(6), by the output signal of linearity or rotary encoder or encoded radio P (ta) to be associated with measured surface highDegree.
2. the method for white light interference vertical scanning open loop control as claimed in claim 1, is characterized in that:Be applicable to anyly be driven by power or motor, with or there is no change-speed gearing structure, can integratedly compileThe processing method of code device encoded radio is as micro-mobile device of corresponding sweep time or scanning height, and encoder comprisesLinearity or rotary encoder.
3. the method for white light interference vertical scanning open loop control as claimed in claim 2, is characterized in that:Be suitable for the construction and device of Mirau interferometer and Michelson interferometer.
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| CN105158892B (en) * | 2015-08-27 | 2017-09-12 | 镇江超纳仪器有限公司（中外合资） | It is a kind of to realize the method that interferometry is quickly focused on |
| CN105783771B (en) * | 2016-03-04 | 2018-09-28 | 镇江超纳仪器有限公司（中外合资） | The method of white light interference vertical scanning method non-linear open-loop scanning |
| CN108981606B (en) * | 2018-09-17 | 2020-10-09 | 苏州大学 | Snapshot type full-field white light interference microscopic measurement method and device thereof |
| CN110285771A (en) * | 2019-05-15 | 2019-09-27 | 淮阴师范学院 | Built-in three-dimension topography measurement module based on white light interference |
| CN111238371B (en) * | 2020-02-24 | 2021-06-22 | 广州大学 | Object shape measuring system, method and storage medium |
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| CN101625231A (en) * | 2009-04-14 | 2010-01-13 | 华中科技大学 | White light interference profile meter |
| CN201476761U (en) * | 2009-08-24 | 2010-05-19 | 苏州海兹思纳米科技有限公司 | White light interference three-dimensional outline measuring instrument |
| CN102305601A (en) * | 2011-05-18 | 2012-01-04 | 天津大学 | High-precision non-contact measurement method and device for three-dimensional profile of optical freeform curved surface |
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