CN105158892B - It is a kind of to realize the method that interferometry is quickly focused on - Google Patents
It is a kind of to realize the method that interferometry is quickly focused on Download PDFInfo
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- CN105158892B CN105158892B CN201510535897.2A CN201510535897A CN105158892B CN 105158892 B CN105158892 B CN 105158892B CN 201510535897 A CN201510535897 A CN 201510535897A CN 105158892 B CN105158892 B CN 105158892B
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- 238000011156 evaluation Methods 0.000 claims abstract description 33
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
- G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
- G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals
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Abstract
The method that interferometry is quickly focused on is realized the invention discloses a kind of.In focusing, sample is scanned in z-direction using interference microscopic system and obtains image, with the focus function method of the present invention, gray scale difference and that maximum width image is found, the corresponding position of the image is exactly focus point.The focus method of the present invention is for conventional method, and operation time is reduced at double, and the operating process of interference microscope system is also simplified.And new autofocus evaluation function need not consider area coherence, in data processing, it can be calculated using interlacing, while reducing amount of calculation, not influence the validity of evaluation of estimate also.
Description
Technical field
This invents the automatic focus area for being related to interferometry, specifically a kind of base being applied to during interferometry
In the interference microscope quick focusing method of Digital Image Processing.
Background technology
In modernization detection method, there is a kind of optical interference of high-precision Non-Destructive Testing to be measured microscopically and (include
Michelson types, Mirau types, Linnik types etc.) technology.Such a technology is used to detect micron, the microcosmic shape of nanoscale object surface
Looks, the depth of field is very small during high magnification interference micro-imaging, and manual focusing is actually inconvenient.In order to realize the automation of system
Run, one of key technology is exactly to realize Techniques of Automatic Focusing.It is generally at present to be based on applied to the microscopical automatic type of focusing
The focusing depth method of Digital Image Processing.Depth method of focusing is by building evaluation function, to the definition of obstructed location drawing picture
Evaluated, and the acquisition focusing surface at the maximum of evaluation function.The correctness that autofocus evaluation function is chosen, is directly affected
To the precision and focusing speed of focusing.
The autofocus evaluation function of the prior art proposed both at home and abroad is broadly divided into：
1st, frequency-domain function.Such as entropy function, wavelet transformation, Fourier transformation.
2nd, gradient function.In image procossing, gradient function is often used to extract marginal information.Good image is focused on,
There are the image at more sharp edge, gradient function value big Ying Yougeng.Conventional gradient function has variance operator, grey scale difference
Absolute value sum operator, energy gradient operator, Brenner functions, the Tenengrad functions based on Sobel gradient operators,
Roberts gradient operators, Laplace operator etc..
3rd, mathematic(al) function is counted.Such as Range functions, Enmay functions, Masgrn functions, AC power function, dc power letter
Number etc..
The value of shade of gray evaluation function is calculated using the gray scale difference (difference) between image adjacent pixel, this approximate micro-
Partite transport, which is calculated, can eliminate the influence of ambient noise, can effectively suppress entire effect of the external condition to image, and meet unimodality,
Unbiasedness and sensitivity feature, therefore this class evaluation function is most widely used.Assuming that the gray value at certain in image point (x, y) place is
G (x, y), the scale of image is M × N (M row, N rows) individual pixel, then shade of gray evaluation function has following several definition：
(1) average degree of grey scale change is variance to weigh.The gray variance operator definitions of image are as follows：
Wherein, g0It is the average value of gradation of image,
It is expressed as
(2) grey scale difference absolute value sum operator (SMD).Power and evolution are replaced with difference absolute value.I.e. to point (x, y)
And its gray scale of neighbor point makees calculus of differences, extract the change size of the gray value, draw gradation of image difference absolute value it
And operator：
(3) energy gradient operator：
(4) Brenner functions, also known as gradient filter method, it be when adjacent picture elements gray scale difference be more than certain threshold value when,
A square summation is carried out to the pixel gray scale difference of adjoining (at intervals of k).Its expression formula is as follows：
When | g (x+1, y)-g (x, y) |>Gthreshold
In above formula, GthresholdIt is threshold condition, g (x, y) is the gray value of picture dot (x, y), similarly hereinafter.
(5) image is estimated using Sobel operators in the horizontal direction based on the Tenengrad functions of Sobel gradient operators
With the gradient of vertical direction, to amplify the gradient of image border, square operation is carried out to gradient, its expression formula is：
Wherein：Gx(x, y) and Gy(x, y) is respectively the Sobel on X and Y-direction
The difference value that operator is calculated.The Sobel operator expression formulas of X-direction and Y-direction are as follows：
Tenengrad functions are first weighted average and then difference again, respectively to both horizontally and vertically carrying out template computing,
There is certain rejection ability to noise.With the amplification of window, noise inhibiting ability is more obvious.
(6) Roberts gradients and function be actually centered on certain point on continuous gradient it is approximate, theoretically
Analysis, its processing to local edge is better than Brenner function.
(7) Laplace operator is a sharpening template, obscuring in image is reduced by strengthening high fdrequency component, also known as
For high-pass filtering.Common Laplace operator template have three kinds (it is left, in be 4 neighborhoods, the right side is 8 neighborhoods)：
Laplce's gradient function is improved to add variable step size step to calculate second differnce.
ML (x, y)=| 2g (x, y)-g (x-step, y)-g (x+step, y) |+| 2g (x, y)-g (x, y-step)-g (x, y
+step)|
Wherein ML (x, y) >=T
T is a threshold value, and the Laplacian values more than threshold value just participate in collecting.
In above shade of gray evaluation function, fastest is to use gray variance operator.
And correspondence foregoing description, the problem of prior art is present and shortcoming have：
Automatic focusing is needed to gather hundreds and thousands of width images, and shade of gray function is carried out to every piece image again
Evaluate, the higher camera of pixel, the data volume of processing is even more to be doubled and redoubled.So, in practical application, use shade of gray function
Focusing still slowly, sophisticated equipment can not be met and fast and efficiently required.
Therefore, it is necessary to a kind of new technical scheme is to solve the above problems.
The content of the invention
The purpose of the present invention is in view of the deficienciess of the prior art, offer is a kind of to realize the side that interferometry is quickly focused on
Method, high with precision, sensitivity is good, it is possible to reduce the searching times of focusing, accelerates the advantage of focusing speed.
For achieving the above object, the present invention can be adopted the following technical scheme that：
It is a kind of to realize method that interferometry quickly focuses on there is provided optical interference microscope；Measured surface image is set
Lateral coordinates are x, y-coordinate, optical interference microscope close to or away from the coordinate of measured surface image be z coordinate；
Interference microscope scans acquisition image in z-direction；
Gray scale difference and that maximum width image are found, the corresponding position of the image is exactly focal position, and it is poly- by following formula
Burnt evaluation function calculates gray scale difference and F (k),
Wherein, if the gray value at certain point (x, y) place is g in kth width image(k)(x, y), image is M × N number of pixel；Evaluate
The maximum figure position of value is exactly the focal position found during this image scanning.
Compared with background technology, because interference image is richer than common focusedimage in the high-frequency component information of focal position
Richness, so the autofocus evaluation function used in the present invention has stronger robustness and sensitivity.Meanwhile, autofocus evaluation function fortune
Calculation process is simplified to single plus and minus calculation by original square operation and multiple plus and minus calculation, and operation time is reduced at double, and
Simplify the microscopical operating process of optical interference.And new autofocus evaluation function need not consider area coherence.Therefore, locate
Manage in data procedures, can be calculated using interlacing, while reducing amount of calculation, not influence the validity of evaluation of estimate also.
Brief description of the drawings
Fig. 1 is using optical interference microscope to carry out the flow chart that interferometry is quickly focused in the present invention.
Fig. 2 is the functional image of the autofocus evaluation function used in the present invention.
Embodiment
With reference to the accompanying drawings and detailed description, the present invention is furture elucidated, it should be understood that these embodiments are only used for
Illustrate the present invention rather than limitation the scope of the present invention, after the present invention has been read, those skilled in the art are to the present invention
The modifications of the various equivalent form of values fall within the application appended claims limited range.
According to interference microscope characteristic, the information content being distributed on a pixel is：
I (z, x, y)=I0(z,x,y)+g(z(x,y)-z0)cos(kc(z(x,y)-z0)(1+cosθ0)+α) (1)
Wherein, θ0N.A.=sin θ related to the numerical aperture of object lens0, it is constant；Z be measuring surface z to scanning survey position
Put；z0It is focal position；α is phase shift angle, is fixed constant；kcIt is ripple number (depending on light source center wavelength).Any pixel
On background light intensity I0(z, x, y) can with z to the change of scan position and it is slowly varying.g(z(x,y)-z0) only one of which peak
Value is in z (x, y)=z0Place, and with bigger with focal length, be worth smaller.
Equation (1) to z derivations by that can draw：
Wherein k=kc(1+cosθ0),
Because above formula eliminates slowly varying background light intensity, so as to retain modulated signal.So change function of image
It can be defined as：
Due near focal positionCos (Φ (z, x, y)) changes are faster than g (z, x, y)
Speed, so equation (3) has unimodality, and works as z closest to z0, i.e., focal position when, Q (z) obtain maximum.
According to above interference microscope characteristic, it is as follows that the present invention proposes a kind of new focus method：
Optical interference microscope is provided；The lateral coordinates for setting measured surface image are x, y-coordinate, optical interference microscope
Close or away from measured surface image coordinate is z coordinate；
Interference microscope scans acquisition image in z-direction；
Gray scale difference and that maximum width image are found, the corresponding position of the image is exactly focal position, and it is poly- by following formula
Burnt evaluation function calculates gray scale difference and F (k),
Wherein, if the gray value at certain point (x, y) place is g in kth width image(k)(x, y), image is M × N number of pixel；Evaluate
The maximum figure position of value is exactly the focal position found during this image scanning.
Because interference image is more more rich than common focusedimage in the high-frequency component information of focal position, so this evaluates letter
Number has stronger robustness and sensitivity.Meanwhile, functional operation process is by original square operation and multiple plus and minus calculation, letter
Single plus and minus calculation is melted into, operation time is reduced at double.And new autofocus evaluation function need not consider area coherence.Cause
This, during processing data, can be calculated using interlacing, while reducing amount of calculation, not influence the validity of evaluation of estimate also.By
Actual test, evaluates the digital picture of a width 1280x960, gray variance operator used time 70ms, and new autofocus evaluation function is only
With 12ms, when being calculated using interlacing, it is even more to shorten half to take.Image processing time greatly reduces, whole focusing speed
Degree is accelerated, and the stand-by period of user is reduced, and operating efficiency is improved.The new autofocus evaluation function is in high-precision sample and height
Quick, high efficiency can be more embodied in the application of pixel camera, so applicability is stronger.
Incorporated by reference to shown in Fig. 1 and Fig. 2, above-mentioned quick focusing method is concretely comprised the following steps：
(1), the motor of initialized optical interference microscope, makes motor be moved to system default position O1；
(2), set and shoot step-length S1, motor is moved down apart from L1, and gathers storage image in motor moving process；
(3), using autofocus evaluation function calculate per piece image evaluation of estimate, evaluation function as shown in Fig. 2 evaluation of estimate most
Big figure position is exactly first time focal position O2；
(4), motor is moved to first time focal position O2, and modification shoots step-length S2, makes S2<S1, motor move down away from
From L2, make L2<L1, and gather storage image in motor moving process；
(5) evaluation of estimate of the process per piece image in displacement L2, is calculated using autofocus evaluation function, is judged second
Focal position O3；
(6), motor is moved to O3, and focusing terminates.
Claims (2)
1. a kind of realize the method that interferometry is quickly focused on, it is characterised in that：
Optical interference microscope is provided；The lateral coordinates for setting measured surface image are x, and y-coordinate, optical interference microscope is close
Or the coordinate away from measured surface image is z coordinate；
Interference microscope scans acquisition image in z-direction；
Gray scale difference and that maximum width image are found, the corresponding position of the image is exactly focal position, and commented by following formula focusing
Valency function calculates gray scale difference and F (k),
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Wherein, if the gray value at certain point (x, y) place is g in kth width image(k)(x, y), image is M × N number of pixel；Evaluation of estimate is most
Big figure position is exactly the focal position found during the image scanning.
2. realize the method that interferometry is quickly focused on as claimed in claim 1, it is characterised in that：Focused on twice including finding
Position, is concretely comprised the following steps：
(1), the motor of initialized optical interference microscope, makes motor be moved to system default position O1；
(2), set and shoot step-length S1, motor is moved down apart from L1, and gathers storage image in motor moving process；
(3) evaluation of estimate per piece image, is calculated using autofocus evaluation function, the maximum figure position of evaluation of estimate is exactly first
Secondary focal position O2；
(4), motor is moved to first time focal position O2, and modification shoots step-length S2, makes S2<S1, motor is moved down apart from L2,
Make L2<L1, and gather storage image in motor moving process；
(5) evaluation of estimate of the process per piece image in displacement L2, is calculated using autofocus evaluation function, judges to focus on for second
Position O3；
(6), motor is moved to O3, and focusing terminates.
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| CN105652429B (en) * | 2016-03-22 | 2018-07-17 | 哈尔滨理工大学 | A kind of microscopic cell glass slide scanning auto focusing method based on machine learning |
| EP3351992B1 (en) * | 2017-01-24 | 2019-10-23 | Horiba France SAS | Micro-spectrometry measurement method and system |
| CN106990518A (en) * | 2017-04-17 | 2017-07-28 | 深圳大学 | A kind of blood film self-focusing micro imaging method |
| CN107767418A (en) * | 2017-10-25 | 2018-03-06 | 梧州学院 | A kind of low power microcobjective identification and localization method |
| CN109061621B (en) * | 2018-05-03 | 2023-02-03 | 中国船舶重工集团公司第七一三研究所 | Novel photoelectric detection method and detection system for foreign objects on airfield runway |
| CN110530291A (en) * | 2019-08-26 | 2019-12-03 | 珠海博明视觉科技有限公司 | A kind of auto-focusing algorithm that grating project height is rebuild |
| CN110519514B (en) * | 2019-08-28 | 2020-06-26 | 中国科学院长春光学精密机械与物理研究所 | Automatic focusing algorithm for astronomical telescope |
| CN111505793A (en) * | 2020-04-15 | 2020-08-07 | 于兴虎 | Microscopic operation automatic focusing method and system based on variance and global search strategy |
| CN112637506A (en) * | 2020-12-29 | 2021-04-09 | 上海小零网络科技有限公司 | Method for accelerating focusing of mobile phone |
| CN115170557A (en) * | 2022-08-08 | 2022-10-11 | 中山大学中山眼科中心 | Image fusion method and device for conjunctival goblet cell imaging |
| CN116753860A (en) * | 2023-05-24 | 2023-09-15 | 成都飞机工业（集团）有限责任公司 | Method for acquiring three-dimensional point cloud of airplane appearance |
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| US7227113B2 (en) * | 2003-11-21 | 2007-06-05 | Olympus Corporation | Confocal laser scanning microscope |
| US8174761B2 (en) * | 2009-06-10 | 2012-05-08 | Universitat Heidelberg | Total internal reflection interferometer with laterally structured illumination |
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| CN103697832A (en) * | 2013-12-30 | 2014-04-02 | 镇江超纳仪器有限公司（中外合资） | Method of vertical white light scanning interference open-loop control |
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