CN107015074B - A kind of measuring system of rear-earth-doped ferroelectric material piezoelectric modulus - Google Patents
A kind of measuring system of rear-earth-doped ferroelectric material piezoelectric modulus Download PDFInfo
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- CN107015074B CN107015074B CN201710201911.4A CN201710201911A CN107015074B CN 107015074 B CN107015074 B CN 107015074B CN 201710201911 A CN201710201911 A CN 201710201911A CN 107015074 B CN107015074 B CN 107015074B
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- 239000000463 material Substances 0.000 title claims abstract description 56
- 239000000835 fiber Substances 0.000 claims abstract description 52
- 239000013307 optical fiber Substances 0.000 claims abstract description 41
- 238000001228 spectrum Methods 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 239000002305 electric material Substances 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 26
- 238000005259 measurement Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 11
- 230000003595 spectral effect Effects 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 230000005684 electric field Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005621 ferroelectricity Effects 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 101100460147 Sarcophaga bullata NEMS gene Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 230000000747 cardiac effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003331 infrared imaging Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/22—Measuring piezoelectric properties
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Abstract
The present invention relates to a kind of measuring system of rear-earth-doped ferroelectric material piezoelectric modulus, mainly solve the problems, such as spatial resolution low technical existing in the prior art, the present invention is by using including light source (101), the fiber coupler (102) being connected with light source (101), the first optical fiber GRIN Lens (103) and fibre delay line (105) being connected with fiber coupler；Rear-earth-doped ferroelectric material (104) to be measured sequentially connected with the first optical fiber GRIN Lens (103), the second optical fiber GRIN Lens (106), the rear-earth-doped ferroelectric material (104) to be measured are electrically connected with electrode (109)；The second optical fiber GRIN Lens (106) and fibre delay line (105) are connected to the second single-mode optical-fibre coupler (107), the technical solution that the single-mode optical-fibre coupler (107) is connected with spectrometer (108), the problem is preferably resolved, in the test available for rear-earth-doped ferroelectric material piezoelectric modulus.
Description
Technical field
The present invention relates to piezoelectric modulus fields of measurement, is related specifically to a kind of survey of rear-earth-doped ferroelectric material piezoelectric modulus
Amount system.
Background technology
Rear-earth-doped ferroelectric material due to without toxic component PbO, have excellent ferroelectricity and optical property and adjustable
Humorous laser, low-intensity infrared imaging device, colored display, optic temperature sensor etc. have important application.It is rear-earth-doped
There is ferroelectric material excellent piezoelectric property it is prepared various piezo-electric type devices, as high frequency and microwave PZT (piezoelectric transducer),
Piezoelectric oscillator, piezoelectric filter, piezoelectric transducer, piezoelectricity SAW device and nonlinear device.Piezoelectric effect refers to
Piezoelectric produces bound charge under the action of outer plus-pressure, and bound charge is proportional to the size of impressed pressure, i.e. positive pressure
Electrical effect；Mechanical deformation, i.e. inverse piezoelectric effect are produced under the action of extra electric field.Piezoelectric modulus is reaction material piezoelectricity effect
Energy.
At present measurement piezoelectric piezoelectric modulus method have direct piezoelectric effect mensuration, inverse piezoelectric effect mensuration,
The methods of laser interferometer piezoelectricity test system, scanning near-field microwave microscopy system.Existing measuring method or system are very
Difficulty realizes the accurate test of the piezoelectric property of nanoscale micro-displacement.The piezoelectricity of nano-scale is largely used in MEMS, NEMS device
Material, the size of these piezoelectrics only have hundreds of nanometers.The piezoelectric property that material is measured under nanoscale be and its it is necessary and
Urgent, therefore it provides a kind of test method of spatial resolution higher is with regard to necessary.
The content of the invention
The technical problems to be solved by the invention are the low technical problems of spatial resolution existing in the prior art.There is provided
A kind of new piezoelectric modulus measuring system, it is fast which possesses measuring speed, high certainty of measurement, and from environment
The characteristics of influence of factor.
In order to solve the above technical problems, the technical solution used is as follows：
A kind of piezoelectric modulus measuring system, including light source 101, the first fiber coupler being connected with wide spectrum light source 101
102, the first optical fiber GRIN Lens 103 and electronic fibre delay line 105 being connected with the first fiber coupler；With described first
The sequentially connected rear-earth-doped ferroelectric material 104 to be measured of optical fiber GRIN Lens 103, the second optical fiber GRIN Lens 106, it is described
Rear-earth-doped ferroelectric material 104 to be measured is electrically connected with electrode 109；The second optical fiber GRIN Lens 106 and fibre delay line
105 are connected to the second fiber coupler 107, and second fiber coupler 107 is connected with spectrometer 108；First optical fiber
GRIN Lens 103 is used to the output light of the first fiber coupler being converted into flat pattern light beam, the second optical fiber GRIN Lens 106
For focusing on the output light of rear-earth-doped ferroelectric material 104 to be measured；The electrode 109 is used to provide direct current, including positive electrode
And negative electrode, rear-earth-doped 104 both ends of ferroelectric material to be measured connect positive electrode and negative electrode respectively.
In above-mentioned technical proposal, for optimization, further, the light source 101 is wide spectrum light source.
Further, 102 and second fiber coupler of the first fiber coupler, 107 coupling ratio is 1:1.
Further, 102 and second fiber coupler 107 of the first fiber coupler is single-mode optical-fibre coupler.
Further, the fibre delay line 105 is electronic fibre delay line.
Further, the piezoelectric modulus measuring system is used for the piezoelectric modulus for measuring rear-earth-doped ferroelectric material.
The present invention also provides a kind of application method of piezoelectric modulus measuring system, including：
(1) start the measuring system, determine proportionality coefficient k；
(2) centre wavelength and spectral width of light source are measured；
(3) moving fiber delay line 105 so that the interference fringe that spectrometer 108 exports includes two interference peaks, records
λpeak1 and λpeak2, the first peak wavelength and the second peak wavelength, first peak wavelength correspond to the optical source wavelength of first peak,
Second peak wavelength corresponds to the optical source wavelength at the second peak；
(4) direct current is applied in rear-earth-doped ferroelectric material both ends by electrode 109, records the 3rd peak wavelength and the 4th
Peak wavelength；3rd peak wavelength corresponds to the optical source wavelength of new first peak, and the 4th peak wavelength corresponds to the second new peak
Optical source wavelength, according to the first peak wavelength and the second peak wavelength in step (3), the 3rd peak wavelength and in step (4)
Four peak wavelengths, calculate Δ λ 1 and Δ λ 2；
(5) according to Δ λ1, Δ λ/λo=(λo-λpeak)/λoProportionality coefficient k in=k Δs x and step (1) calculates Δ x,
According to Δ x and U, the piezoelectric modulus of rear-earth-doped ferroelectric material to be measured is calculated；
Wherein, Δ λ=Δ λ 1, λpeak=λpeak1, Δ λ 1 are the wavelength amount of movement of first peak, and Δ λ 2 is the wavelength at the second peak
Amount of movement Δ λ 2, λoFor light source center wavelength, λpeak1 is the first peak strength, λpeak2 be the second peak strength, and U is to be applied to
The voltage at rear-earth-doped ferroelectric material both ends.
Further, moving fiber delay line 105 in the step (2), the interference fringe that spectrometer 108 exports include two
A interference peak intensity is equal.
Further, the step (1) includes：
(A) rear-earth-doped ferroelectric material both ends to be measured do not apply voltage, moving fiber delay line 105 so that spectrometer 108
The interference fringe of output includes the equal interference peaks of two intensity；
(B) moving fiber delay line 105, the amount of movement of the peak wavelength of interference peaks and corresponding electricity in recording step (1)
The displacement of dynamic fibre delay line, measures N group data；
(C) centre wavelength of light source is measured；
(D) linear fit step (B) obtain N groups data and (C) in light source centre wavelength, calculate k；Wherein, N is
>=6 positive integer.
Further, the Δ λ=Δ λ 2, λpeak=λpeak2。
Measuring method proposed by the present invention based on spectral interference, the interference fringe peak wavelength obtained by spectrometer
Move the measurement of the piezoelectric modulus of the rear-earth-doped piezoelectric to realize the micro- deformation of nanoscale.
By building a Mach-Zehnder optical fiber interferometer, rear-earth-doped ferroelectricity is measured by the method for spectral interference
The piezoelectric modulus of material.In measuring system, the light that light source 101 is sent is divided into two-way after single-mode optical-fibre coupler 102, all the way light
By fibre delay line 105, another way light is incided after GRIN Lens 103 in rear-earth-doped ferroelectric material 104 to be measured,
Pass through from the light of material output in 106 coupled into optical fibres of GRIN Lens.Two-way light is formed in single-mode optical-fibre coupler 107
Interference, the interference fringe are received by spectrometer 108.Electrode 109 is installed at rear-earth-doped ferroelectric material both ends, is treated by the way that electrode is past
Rear-earth-doped ferroelectric material both ends are surveyed to apply DC voltage and produce piezoelectric effect.
The measuring principle of the piezoelectric modulus of rear-earth-doped ferroelectric material proposed by the present invention：Rear-earth-doped ferroelectric material by
Under being acted on to external electrical field, material can all deform upon in parallel and vertical electric field direction, and which results in the one of optical interferometer
The light path of arm is changed, so as to cause spectral interference striped to be moved, passes through the shifting of spectral interference striped peak wavelength
Momentum can be obtained by the deformation quantity of rear-earth-doped ferroelectric material.When applying voltage U to rear-earth-doped ferroelectric material, rare earth is mixed
In miscellaneous ferroelectric material charge polarity produce change therewith caused by displacement be Δ x, then rear-earth-doped ferroelectric material to be measured
Piezoelectric coefficient d is represented by d=Δs x/U.
The spectral intensity that spectrometer obtains is to be expressed as：
IM(z, Δ d, ω)=I (z, ω)+Ix(ω)γxy(0,Δd,ω)+Iy(ω)γxy(0,Δd,ω)
+[Ix(ω)Iy(ω)]1/2Re[γxy(z,Δd,ω)+γxy(-z,Δd,ω)]
Wherein, Δ d is optical interferometer two-arm optical path difference, γxy(z, Δ d, ω) is the complex degree of coherence of interference fringe.Light source light
Spectrum density G (ω) is the Gaussian function that a spectrum halfwidth is Δ ω, then G (ω) is expressed as：
Wherein, Δ ω is spectrum halfwidth, and the spectral interference striped that thus spectrometer receives is：
Wherein, Δ ωRFor the halfwidth of spectrometer receptance function.
When interferometer two-arm optical path difference is the integral multiple of π, it may appear that the equal bimodal interference fringe of two peak strengths.
At the optical path difference, the spectral interference striped of interferometer output is with the change of interferometer two-arm optical path difference with the sensitive of maximum
Degree, the nanoscale change of interferometer two-arm optical path difference will all cause the movement of two peak wavelength of interference spectrum striped.Pass through spectrum
Instrument measurement obtains the amount of movement of peak wavelength, it is possible to obtains the piezoelectric modulus of rear-earth-doped ferroelectric material to be measured.
Fig. 2, when changing 80nm for interferometer two-arm optical path difference, the change of interferometer output spectrum striped.Peak wavelength moves
12nm has been moved, and the wavelength resolution of spectrometer can reach 0.1nm.So complete can realize of test system proposed by the present invention is received
The test of the piezoelectric property of meter level micro-displacement.
Any peak wavelength is Δ x in displacement caused by rear-earth-doped ferroelectric material generation piezoelectric effect, according to formula 3
Understand in the change of interferometer two-arm optical path difference in the range of micron dimension, the amount of movement Δ λ of peak wavelength and the middle cardiac wave of light source
The displacement x that the ratio of long λ o and the piezoelectric effect of rear-earth-doped ferroelectric material produce is linear, i.e.,
Δλ/λo=(λo-λpeak)/λo=k Δs x
Wherein, k is proportionality coefficient.
Therefore, calculate rare earth by proportionality coefficient k, the amount of movement Δ λ of peak wavelength and the central wavelength lambda o of light source and mix
The displacement bimorph amount Δ x of miscellaneous ferroelectric material, so as to obtain the piezoelectric modulus of rear-earth-doped ferroelectric material to be measured.Compared to existing pressure
The measuring method of electrostrictive coefficient, it is fast that this method possesses measuring speed, high certainty of measurement, and the spy such as influence from environmental factor
Point.
Beneficial effects of the present invention,
Effect one, improves measurement accuracy, meets nano level piezoelectric modulus measurement request；
Effect two, improves measurement sensitivity.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1, piezoelectric modulus measuring system schematic diagram.
Fig. 2, normalization light spectral intensity schematic diagram.
In attached drawing, 101- light sources；102：First fiber coupler；103- the first optical fiber GRIN Lens；104- is to be measured dilute
Soil doping ferroelectric material；105- fibre delay lines；106- the second optical fiber GRIN Lens；The second fiber couplers of 107-；108-
Spectrometer；109- electrodes；1- first peaks；The second peaks of 2-；The 3rd peaks of 3-, the 4th peaks of 4-.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to embodiments, to the present invention
It is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to
Limit the present invention.
Embodiment 1
The present embodiment provides a kind of piezoelectric modulus measuring system, including light source 101, the fiber coupling being connected with light source 101
Device 102, the first optical fiber GRIN Lens 103 and fibre delay line 105 being connected with fiber coupler；With first optical fiber certainly
The sequentially connected rear-earth-doped ferroelectric material 104 to be measured of condenser lens 103, the second optical fiber GRIN Lens 106 are described to be measured dilute
Soil doping ferroelectric material 104 is electrically connected with electrode 109；The second optical fiber GRIN Lens 106 and fibre delay line 105 connect
To the second single-mode optical-fibre coupler 107, the single-mode optical-fibre coupler 107 is connected with spectrometer 108；The first optical fiber autohemagglutination
Focus lens 103 are used to the output light of fiber coupler being converted into flat pattern light beam, and the second optical fiber GRIN Lens 106 is used to focus on
The output light of rear-earth-doped ferroelectric material 104 to be measured；The electrode 109 is used to provide direct current, including positive electrode and negative electrode,
Rear-earth-doped 104 both ends of ferroelectric material to be measured connect positive electrode and negative electrode respectively.
Preferably, the light source 101 is wide spectrum light source.Wide spectrum light source is capable of providing that frequency is wider, the more light of species, rich
The function of rich measuring system.
Preferably, the first fiber coupler 102 and 107 coupling ratio of the second fiber coupler are 1:1.At this time, measurement system
The first fiber coupler 102 and the second fiber coupler 107 of system are single-mode optical-fibre coupler.Single-mode optical-fibre coupler is opposite
Multi-module optical fiber coupler making is simple, cost is low.
The fibre delay line 105 is electronic fibre delay line, and optical fiber can be automatically controlled using electronic fibre delay line
Degree of delay, can simplify the use of test system.
Piezoelectric modulus measuring system in the present embodiment is used for the piezoelectric modulus for measuring rear-earth-doped ferroelectric material.
The test method based on measuring system of the present embodiment, including：
(1) start the measuring system, determine proportionality coefficient k；
(A) rear-earth-doped ferroelectric material both ends to be measured do not apply voltage, moving fiber delay line 105 so that spectrometer 108
The interference fringe of output includes the equal interference peaks of two intensity；
(B) moving fiber delay line 105, the amount of movement of the peak wavelength of interference peaks and corresponding electricity in recording step (1)
The displacement of dynamic fibre delay line, measures N group data；
(C) centre wavelength of light source is measured；
(D) linear fit step (B) obtain N groups data and (C) in light source centre wavelength, calculate k；Wherein, N is
>=6 positive integer.
(2) centre wavelength and spectral width of light source are measured；
(3) moving fiber delay line 105 so that the interference fringe that spectrometer 108 exports includes two interference peaks, records
λpeak1 and λpeak2, the first peak wavelength and the second peak wavelength, first peak wavelength correspond to the optical source wavelength of first peak,
Second peak wavelength corresponds to the optical source wavelength at the second peak；
(4) direct current is applied in rear-earth-doped ferroelectric material both ends by electrode 109, records the 3rd peak wavelength and the 4th
Peak wavelength；3rd peak wavelength corresponds to the optical source wavelength of new first peak, and the 4th peak wavelength corresponds to the second new peak
Optical source wavelength, according to the first peak wavelength and the second peak wavelength in step (3), the 3rd peak wavelength and in step (4)
Four peak wavelengths, calculate Δ λ 1 and Δ λ 2；
(5) according to Δ λ1, Δ λ/λo=(λo-λpeak)/λoProportionality coefficient k in=k Δs x and step (1) calculates Δ x,
According to Δ x and U, the piezoelectric modulus of rear-earth-doped ferroelectric material to be measured is calculated；
Wherein, Δ λ=Δ λ 1, λpeak=λpeak1, Δ λ 1 are the wavelength amount of movement of first peak, and Δ λ 2 is the wavelength at the second peak
Amount of movement Δ λ 2, λoFor light source center wavelength, λpeak1 is the first peak strength, λpeak2 be the second peak strength, and U is to be applied to
The voltage at rear-earth-doped ferroelectric material both ends.
The nanoscale change of optical interferometer two-arm optical path difference will all cause the movement of two peak wavelength of interference spectrum striped.It is logical
Cross spectrometer measurement and obtain the amount of movement of peak wavelength, it is possible to obtain the piezoelectric modulus of rear-earth-doped ferroelectric material to be measured, become
Law such as Fig. 2, when changing 80nm for interferometer two-arm optical path difference, the change of interferometer output spectrum striped.Peak wavelength moves
12nm is moved, the wavelength resolution of spectrometer can reach 0.1nm.So test system proposed by the present invention is complete to realize nanometer
The test of the piezoelectric property of level micro-displacement.
Embodiment 2
The present embodiment is on the basis of embodiment 1, to improve measurement sensitivity, proposes another improved measuring method.
Specifically, moving fiber delay line (105) in the step (2), the interference fringe of spectrometer (108) output include
Two interference peak intensities are equal.When interferometer two-arm optical path difference is the integral multiple of π, it may appear that equal pair of two peak strengths
Peak interference fringe.At the optical path difference, the spectral interference striped of interferometer output and the change of interferometer two-arm optical path difference have
Maximum sensitivity, the nanoscale change of interferometer two-arm optical path difference will all cause the shifting of two peak wavelength of interference spectrum striped
It is dynamic.The amount of movement of peak wavelength is obtained by spectrometer measurement, it is possible to obtain the piezoelectricity system of rear-earth-doped ferroelectric material to be measured
Number.
Embodiment 3
The present embodiment calculates piezoelectric modulus on the basis of embodiment 1, using the relevant parameter at the second peak.Specifically include：
Step (5)：According to Δ λ 2, Δ λ/λo=(λo-λpeak)/λoProportionality coefficient k in=k Δs x and step (1) is calculated
Go out Δ x, according to Δ x and U, the piezoelectric coefficient d for calculating rear-earth-doped ferroelectric material to be measured is represented by d=Δs x/U.
Wherein, Δ λ=Δ λ 2, λpeak=λpeak2, Δ λ 1 are the wavelength amount of movement of first peak, and Δ λ 2 is the wavelength at the second peak
Amount of movement Δ λ 2, λoFor light source center wavelength, λpeak1 is the first peak strength, λpeak2 be the second peak strength, and U is to be applied to
The voltage at rear-earth-doped ferroelectric material both ends.
Although the illustrative embodiment of the present invention is described above, in order to the technology of the art
Personnel are it will be appreciated that the present invention, but the present invention is not limited only to the scope of embodiment, to the common skill of the art
For art personnel, as long as long as various change appended claim limit and definite spirit and scope of the invention in, one
The innovation and creation using present inventive concept are cut in the row of protection.
Claims (5)
- A kind of 1. piezoelectric modulus measuring system of rear-earth-doped ferroelectric material, it is characterised in that：The system comprises light source (101), the fiber coupler (102) being connected with light source (101), the first optical fiber GRIN Lens being connected with fiber coupler (103) and fibre delay line (105)；With the sequentially connected rear-earth-doped iron to be measured of the first optical fiber GRIN Lens (103) Electric material (104), the second optical fiber GRIN Lens (106), the rear-earth-doped ferroelectric material (104) to be measured and electrode (109) It is electrically connected；The second optical fiber GRIN Lens (106) and fibre delay line (105) are connected to the second single-mode optical-fibre coupler (107), second single-mode optical-fibre coupler (107) is connected with spectrometer (108)；The first optical fiber GRIN Lens (103) it is used to the output light of fiber coupler being converted into collimated light beam, the second optical fiber GRIN Lens (106) is treated for focusing Survey the output light of rear-earth-doped ferroelectric material (104)；The electrode (109) is used to provide direct current, including positive electrode and negative electricity Pole, rear-earth-doped ferroelectric material (104) both ends to be measured connect positive electrode and negative electrode respectively.
- 2. piezoelectric modulus measuring system according to claim 1, it is characterised in that：The light source (101) is wide spectrum light source.
- 3. piezoelectric modulus measuring system according to claim 1, it is characterised in that：The fiber coupler (102) and Two single-mode optical-fibre couplers (107) coupling ratio is 1:1.
- 4. piezoelectric modulus measuring system according to claim 3, it is characterised in that：The fiber coupler (102) and Two single-mode optical-fibre couplers (107) are single-mode optical-fibre coupler.
- 5. piezoelectric modulus measuring system according to claim 1, it is characterised in that：The fibre delay line (105) is electricity Dynamic fibre delay line.
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| CN107462529A (en) * | 2017-06-27 | 2017-12-12 | 无锡贺邦汽车配件有限公司 | A kind of component measurement system applied to automotive casting part |
| CN109740468B (en) * | 2018-12-24 | 2021-01-05 | 核工业北京地质研究院 | Self-adaptive Gaussian low-pass filtering method for extracting black soil organic matter information |
| CN114674875B (en) * | 2022-03-14 | 2023-04-18 | 电子科技大学 | Method for measuring longitudinal effective piezoelectric coefficient of piezoelectric film |
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Denomination of invention: A Measuring System for Piezoelectric Coefficients of Rare Earth Doped Ferroelectric Materials Effective date of registration: 20221206 Granted publication date: 20180508 Pledgee: Ganzhou Bank Co.,Ltd. Xinfeng Sub branch Pledgor: XINFENG BAOGANG XINLI RARE EARTH Co.,Ltd. Registration number: Y2022980025196 |