CN103697819B - A kind of calibration device of micro-displacement sensor - Google Patents
A kind of calibration device of micro-displacement sensor Download PDFInfo
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- CN103697819B CN103697819B CN201310675883.1A CN201310675883A CN103697819B CN 103697819 B CN103697819 B CN 103697819B CN 201310675883 A CN201310675883 A CN 201310675883A CN 103697819 B CN103697819 B CN 103697819B
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- displacement sensor
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- adjustment frame
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Abstract
A kind of calibration device of micro-displacement sensor belongs to precise jiggle and adjusts and detection field, it is therefore intended that solve repetitive positioning accuracy difference and the problem of long-time stability difference of the measurement that prior art exists.The present invention includes adjusting frame, piezoelectric actuator and reference-calibrating assembly；Described piezoelectric actuator is fixed on described adjustment frame, described piezoelectric actuator drives the moving lever motion adjusting frame, described reference-calibrating assembly is fixed on described adjustment frame, and described reference-calibrating components and micro-displacement sensor to be calibrated measure the output shift quantity of described moving lever simultaneously.The invention provides a kind of telecontrol equipment that micrometric displacement can be provided and a kind of precision higher sensor grating scale as detection benchmark, measured the output displacement of moving lever, it is achieved the demarcation to micro-displacement sensor to be calibrated by grating scale and micro-displacement sensor to be calibrated simultaneously.This caliberating device has simple in construction, there is not friction and hysterisis error in motion process, and repetitive positioning accuracy is high and long-time stability are good.
Description
Technical field
The invention belongs to precise jiggle adjust and detection field, be specifically related to a kind of micro-displacement sensor and demarcate dress
Put.
Background technology
Micro-displacement sensor directly determines as the detection device of precise jiggle guiding mechanism, its performance indications
The closed-loop control precision of guiding mechanism, it is therefore desirable to it is demarcated.
The Chinese patent of Publication No. CN202501835U discloses an entitled vertical straight line displacement sensing
The technical scheme of device demarcation/calibrating installation, this device uses linear electric motors as driving, uses precise guide rail seat
As guiding, employing grating scale is as reference-calibrating, but owing to have employed linear electric motors and guide rail, moves
During there is the shortcomings such as friction, hysterisis error, repetitive positioning accuracy that impact is measured and long-time stability.
The Chinese patent of Publication No. CN102374846A discloses a closed displacement of invention entitled one and passes
The technical scheme of sensor caliberating device, tested sensor rotating ring is arranged on moving axis, and moving axis uses power motor
As driving, angular contact bearing is used to be led by differential head as support, the standard transducer of opposite side
To, bearing is as guiding, but owing to have employed power motor and bearing, equally exists and rub in motion process
The shortcomings such as wiping, hysterisis error, and required parts are many, and the difficulty process, debug strengthens.
Summary of the invention
It is an object of the invention to propose a kind of calibration device of micro-displacement sensor, solve what prior art existed
The repetitive positioning accuracy difference measured and the problem of long-time stability difference.
For achieving the above object, a kind of calibration device of micro-displacement sensor of the present invention includes adjusting frame, piezoelectricity
Driver and reference-calibrating assembly；
Described piezoelectric actuator is fixed on described adjustment frame, and described piezoelectric actuator drives the motion adjusting frame
Bar realize motion, described reference-calibrating assembly is fixed on described adjustment frame, described reference-calibrating assembly with treat
Demarcate micro-displacement sensor and measure the output shift quantity of described moving lever simultaneously.
Described adjustment frame includes adjusting frame housing, outer link, inboard Sinks, upper connecting rod, lower link and fortune
Lever；Described adjustment frame housing is connected with upper connecting rod and lower link by two outer link respectively, described fortune
Lever is connected with upper connecting rod and lower link by two inboard Sinks respectively, described outer link and upper connecting rod,
Lower link and adjustment frame housing are connected by flexible hinge, described inboard Sinks and upper connecting rod, lower link and fortune
Lever is connected by flexible hinge.
Described adjustment frame is integral type structure, and overall about the long axial symmetry of moving lever, described adjustment frame is by slow
Wire-moving cutting or electrochemical corrosion processing.
Piezoelectric actuator is fixed on adjustment frame housing, drives moving lever motion, and described reference-calibrating assembly is solid
Being scheduled on described adjustment frame housing, described reference-calibrating assembly is marked with being arranged on treating on described adjustment frame housing
Determine micro-displacement sensor and measure the output shift quantity of described moving lever simultaneously.
Described reference-calibrating assembly includes grating scale, grating ruler reading head and read head support, described grating scale
Being adhesively fixed on moving lever, described grating ruler reading head is fixed by a pin on read head support, described
Read head support is fixed by screws on adjustment frame housing, described read head and the motion side of described moving lever
To vertically, the data that described grating ruler reading head obtains by measuring grating scale motion are as output shift quantity
Reference data.
The invention have the benefit that a kind of calibration device of micro-displacement sensor of the present invention is at micro-displacement sensing
In device calibration process, it is provided that a kind of telecontrol equipment that micrometric displacement can be provided and a kind of as detection benchmark
Precision higher sensor grating scale, measures moving lever by grating scale and micro-displacement sensor to be calibrated simultaneously
Output displacement, it is achieved the demarcation to micro-displacement sensor to be calibrated.Present configuration is simple, in motion process
The shortcoming that there is not friction and hysterisis error, repetitive positioning accuracy is high, long-time stability are good.
Accompanying drawing explanation
Fig. 1 is a kind of calibration device of micro-displacement sensor overall structure front view of the present invention；
Fig. 2 is a kind of calibration device of micro-displacement sensor overall structure schematic diagram of the present invention；
Fig. 3 is the adjustment shelf structure schematic diagram in a kind of calibration device of micro-displacement sensor of the present invention；
Wherein: 1, adjust frame, 101, adjust frame housing, 102, outer link, 103, inboard Sinks,
104, upper connecting rod, 105, lower link, 106, moving lever, 107, flexible hinge, 2, piezoelectric actuator,
3, micro-displacement sensor to be calibrated, 4, reference-calibrating assembly, 401, grating scale, 402, grating scale reading
Head, 403, read head support.
Detailed description of the invention
Below in conjunction with the accompanying drawings embodiments of the present invention are described further.
See accompanying drawing 1, accompanying drawing 2 and accompanying drawing 3, a kind of calibration device of micro-displacement sensor bag of the present invention
Include adjustment frame 1, piezoelectric actuator 2 and reference-calibrating assembly 4；
Described piezoelectric actuator 2 is fixed on described adjustment frame 1, and input displacement acts on adjustment frame 1
Moving lever 106, drive the moving lever 106 adjusting frame 1 to move, described micro-displacement sensor to be calibrated 3 is solid
It is scheduled on the opposite side adjusting frame 1, for measuring the output shift quantity of moving lever 106, described reference-calibrating group
Part 4 is fixed on described adjustment frame 1, and described reference-calibrating assembly 4 is same with micro-displacement sensor 3 to be calibrated
Time measure the output shift quantity of described moving lever 106, and then realize the mark to micro-displacement sensor 3 to be calibrated
Fixed.
Described adjustment frame 1 includes adjusting frame housing 101, outer link 102, inboard Sinks 103, upper connecting rod
104, lower link 105 and moving lever 106；Described adjustment frame housing 101 is respectively by two outer link 102
Being connected with upper connecting rod 104 and lower link 105, described moving lever 106 is respectively by two inboard Sinks 103
Being connected with upper connecting rod 104 and lower link 105, described piezoelectric actuator 2 is fixed on adjustment frame housing 101,
Moving lever 106 is driven to move, outside described outer link 102 is with upper connecting rod 104, lower link 105 and adjustment frame
Frame 101 is connected by flexible hinge 107, described inboard Sinks 103 and upper connecting rod 104, lower link 105 and
Moving lever 106 is connected by flexible hinge 107, and described moving lever 106 is near micro-displacement sensor 3 to be calibrated
The end of side should meet following condition in the horizontal direction with described micro-displacement sensor 3 measuring surface to be calibrated:
The movement travel of moving lever 106 is more than the range of micro-displacement sensor 3 to be calibrated, and at moving lever 106
In motion process, the measuring surface of micro-displacement sensor 3 to be calibrated will not be touched.
Described adjustment frame 1 is the axial symmetry integral structure with moving lever 106 as symmetry axis, described adjustment frame 1
Processed by low-speed WEDM or electrochemical corrosion.
Described reference-calibrating assembly 4 includes grating scale 401, grating ruler reading head 402 and read head support 403,
Described grating scale 401 is adhesively fixed on moving lever 106, and described grating ruler reading head 402 is solid by pin
Being scheduled on read head support 403, described read head support 403 is fixed by screws in adjustment frame housing 101
On, described grating ruler reading head 402 is vertical with the direction of motion of described moving lever 106, and described grating scale is read
Several 402 by measuring grating scale 401 data that obtain of the motion reference data as output shift quantity.
Adjust the moving lever 106 of frame 1 and adjust between frame housing 101 by multiple inboard Sinks 103, outside
Connecting rod 102, flexible hinge 107 and upper connecting rod 104 and lower link 105 are attached, it is possible to utilize flexibility
The elastic deformation transmission of hinge 107 is along the displacement in moving lever 106 direction.Therefore, when being fixed on outside adjustment frame
When piezoelectric actuator 2 on frame 101 moves, it is possible to promote moving lever 106 along its axially-movable.Now solid
The micro-displacement sensor to be calibrated 3 being scheduled on adjustment frame housing 101 opposite side is able to detect that moving lever 106
Displacement data.It is fixed on the grating ruler reading head 402 adjusted on frame housing 101 by read head support 403 simultaneously
Also the displacement data of moving lever 106 can be obtained by measuring the motion of grating scale 401.Due to high accuracy grating
The certainty of measurement of chi 401, higher than the certainty of measurement of micro-displacement sensor 3 to be calibrated, therefore can pass through grating
The data of micro-displacement sensor 3 to be calibrated are modified by the measurement data of chi 401, thus complete to be calibrated
The demarcation of micro-displacement sensor 3.
Claims (4)
1. a calibration device of micro-displacement sensor, it is characterised in that include adjusting frame (1), Piezoelectric Driving
Device (2) and reference-calibrating assembly (4)；
Described piezoelectric actuator (2) is fixed on described adjustment frame (1), and described piezoelectric actuator (2) drives
Dynamic moving lever (106) motion adjusting frame (1), described reference-calibrating assembly (4) is fixed on described adjustment
On frame (1), described reference-calibrating assembly (4) and micro-displacement sensor to be calibrated (3) are measured described simultaneously
The output shift quantity of moving lever (106)；
Described adjustment frame (1) include adjust frame housing (101), outer link (102), inboard Sinks (103),
Upper connecting rod (104), lower link (105) and moving lever (106)；Described adjustment frame housing (101) is respectively
It is connected with upper connecting rod (104) and lower link (105) by two outer link (102), described moving lever
(106) it is connected with upper connecting rod (104) and lower link (105) by two inboard Sinks (103) respectively,
Described outer link (102) leads to upper connecting rod (104), lower link (105) and adjustment frame housing (101)
Cross flexible hinge (107) to connect, described inboard Sinks (103) and upper connecting rod (104), lower link (105)
Connected by flexible hinge (107) with moving lever (106).
A kind of calibration device of micro-displacement sensor the most according to claim 1, it is characterised in that described
Adjusting frame (1) is integral type structure, overall moving lever (106) the long axial symmetry about adjustment frame (1),
Described adjustment frame (1) is processed by low-speed WEDM or electrochemical corrosion.
A kind of calibration device of micro-displacement sensor the most according to claim 1, it is characterised in that piezoelectricity
Driver (2) is fixed in adjustment frame housing (101), drives moving lever (106) motion, described demarcation
Fiducial (4) is fixed on described adjustment frame housing (101), described reference-calibrating assembly (4) and peace
The micro-displacement sensor to be calibrated (3) being contained on described adjustment frame housing (101) measures described motion simultaneously
The output shift quantity of bar (106).
A kind of calibration device of micro-displacement sensor the most according to claim 1, it is characterised in that described
Reference-calibrating assembly (4) includes grating scale (401), grating ruler reading head (402) and read head support (403),
Described grating scale (401) is adhesively fixed on moving lever (106), and described grating ruler reading head (402) leads to
Crossing pin to be fixed on read head support (403), described read head support (403) is fixed by screws in
Adjust on frame housing (101), described grating ruler reading head (402) and the motion of described moving lever (106)
Direction is vertical, the data that described grating ruler reading head (402) obtains by measuring grating scale (401) to move
Reference data as output shift quantity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310675883.1A CN103697819B (en) | 2013-12-12 | 2013-12-12 | A kind of calibration device of micro-displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310675883.1A CN103697819B (en) | 2013-12-12 | 2013-12-12 | A kind of calibration device of micro-displacement sensor |
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| Publication Number | Publication Date |
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| CN103697819A CN103697819A (en) | 2014-04-02 |
| CN103697819B true CN103697819B (en) | 2016-08-17 |
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| CN201310675883.1A Expired - Fee Related CN103697819B (en) | 2013-12-12 | 2013-12-12 | A kind of calibration device of micro-displacement sensor |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048588B (en) * | 2014-06-25 | 2017-07-14 | 中国科学院长春光学精密机械与物理研究所 | Capacity plate antenna calibration device for displacement sensor |
| CN104075652B (en) * | 2014-07-02 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | Capacitance displacement sensor caliberating device |
| CN105180872B (en) * | 2015-09-07 | 2018-08-17 | 中国科学院长春光学精密机械与物理研究所 | The measurement method and device of high-precision mirror interval adjustment ring |
| CN105606052B (en) * | 2016-01-20 | 2018-10-26 | 天津大学 | Calibration device of micro-displacement sensor based on high-precision rectilinear translation platform |
| CN105763097B (en) * | 2016-04-29 | 2017-07-25 | 西安交通大学 | The step piezoelectric actuator and method of function are measured containing magnetic railings ruler output displacement |
| CN107990859B (en) * | 2016-10-27 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | Micro-displacement sensor calibration device and application thereof |
| CN106705877B (en) * | 2017-01-20 | 2019-05-24 | 武汉理工大学 | A kind of highly sensitive fiber Bragg grating strain sensor based on flexible hinge |
| CN107883910A (en) * | 2017-11-09 | 2018-04-06 | 中国航发湖南动力机械研究所 | Portable gap sensor checkout and diagnosis instrument |
| CN114111669B (en) * | 2021-12-08 | 2024-01-30 | 四川金通工程试验检测有限公司 | Calibration device and method for sensor |
| CN114485519B (en) * | 2022-01-10 | 2023-08-29 | 同济大学 | Calibration device and calibration method for flexible rod type bidirectional horizontal displacement sensor |
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| JP4251346B2 (en) * | 2001-04-10 | 2009-04-08 | 久 安藤 | Displacement sensor with calibration function |
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