CN104075652B - Capacitance displacement sensor caliberating device - Google Patents
Capacitance displacement sensor caliberating device Download PDFInfo
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- CN104075652B CN104075652B CN201410314100.1A CN201410314100A CN104075652B CN 104075652 B CN104075652 B CN 104075652B CN 201410314100 A CN201410314100 A CN 201410314100A CN 104075652 B CN104075652 B CN 104075652B
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Abstract
The invention discloses a kind of capacitance displacement sensor caliberating device, belong to transducer calibration technical field.Solve the technical problem that in prior art, capacitance displacement sensor caliberating device stated accuracy is low.This caliberating device includes capacitive displacement mechanism and interferometer mechanism；Described capacitive displacement mechanism include calibrating table pedestal, calibrating table bracing frame, sensor support frame, driver, calibrating table silent flatform, hinge, calibrating table moving platform, measure corner reflector, seat fixed by light-guide device bracing frame, light-guide device, reference angle reflecting mirror, spectroscope, sensor fix seat, capacitance sensor, tested panel and driver push rod；Described interferometer mechanism includes one-axis laser interferometer, interferometer adjusting base, interferometer bracing frame and interferometer base.Assembly of the invention improves parallelism precision when existing capacitance displacement sensor caliberating device installs sensor between sensitive face and tested surface, reduces the measurement error debuging introducing, improves transducer calibration precision.
Description
Technical field
The present invention relates to a kind of capacitance displacement sensor caliberating device, belong to capacitance displacement sensor calibration technique field.
Background technology
Photoetching projection objective lens is the key equipment in super large/great scale integrated circuit manufacturing process, recently as collection
Becoming circuit line width constantly to reduce, the resolution of photoetching projection objective lens gradually steps up.But, due to Optical element manufacturing in object lens,
There is error time integrated in detection and system assembling, needs to be adjusted the position of optical element by regulating structure for micro displacement, to assembling
After projection objective system wave aberration compensate.A kind of accurate position that capacitive displacement transducer is conventional when being micrometric displacement regulation
Move detection equipment, have without friction, the advantage such as highly sensitive and easy to operate.During micrometric displacement detects, along with detection time
Increasing of number, capacitance sensor can cause loss of significance, and detection error is gradually increased, and affects the compensation effect of projection objective.Right
In the sensor newly dispatched from the factory, through long-distance transport, use environment and transportation environment inconsistent, it is desirable to before loading projection objective in addition
Capacitance displacement sensor must be re-scaled.But, when the caliberating device of existing capacitance displacement sensor is owing to installing not
Can guarantee that the depth of parallelism between the sensitive face of sensor and tested surface, within stated accuracy is typically not capable of 10nm, it is impossible to be used for
In projection objective, Capacitive Displacement Sensor With High Accuracy is demarcated.
Summary of the invention
The invention aims to solve the stated accuracy of capacitance displacement sensor caliberating device in prior art low
Technical problem, it is provided that a kind of capacitance displacement sensor caliberating device.
In order to achieve the above object, the present invention uses techniques below scheme to realize:
The capacitance displacement sensor caliberating device of the present invention, including capacitive displacement mechanism and interferometer mechanism；
Described capacitive displacement mechanism includes calibrating table pedestal, calibrating table bracing frame, sensor support frame, driver, demarcation
Platform silent flatform, hinge, calibrating table moving platform, measuring unit, sensor fix seat, capacitance sensor, tested panel and driver
Push rod；
Described calibrating table bracing frame is at least three, and the bottom of all calibrating table bracing frames is each attached to calibrating table pedestal
On；
The bottom of described sensor support frame is fixed on calibrating table pedestal；
Described sensor is fixed seat and is fixed on sensor support frame；
Described capacitance sensor is fixed on sensor and fixes on seat, and capacitance sensor measures capacitance sensor and tested panel
Between displacement variable；
Described calibrating table silent flatform is fixed on the top of all calibrating table bracing frames and by sensor support frame pilot hole
It is sleeved on outside sensor support frame；
Described hinge is at least three, and the bottom of all hinges is each attached on the end face of calibrating table silent flatform, and institute is hinged
The top of chain is each attached on the bottom surface of calibrating table moving platform；
Described calibrating table moving platform is sleeved on outside capacitance sensor by sensor pilot hole；
Described driver, driver push rod and hinge three's one_to_one corresponding, it is quiet that the top of driver is each attached to calibrating table
On the bottom surface of platform, driver push rod is fixed on the top of driver, and quiet through calibrating table by driver push rod pilot hole
Platform, driver promotes hinge to move by driver push rod, and hinge drives calibrating table moving platform to move；
Described tested panel is fixed on the end face of calibrating table moving platform, and is positioned at the top of capacitance sensor, tested surface
Plate place plane is parallel with the sensitive face of capacitance sensor；
Described measuring unit is at least three, and each measuring unit includes measuring corner reflector, light-guide device bracing frame, leading
Optical element fixes seat, reference angle reflecting mirror and spectroscope, and described measurement corner reflector is fixed on the end face of calibrating table moving platform,
The bottom of described light-guide device bracing frame is fixed on the end face of calibrating table silent flatform, and one end that seat fixed by described light-guide device is solid
Being scheduled on light-guide device bracing frame, described reference angle reflecting mirror and spectroscope are sequentially fixed at light-guide device and fix another of seat
Hold, and spectroscope is positioned at the top measuring corner reflector, spectroscope and the measurement same optical axis of corner reflector, and this optical axis direction is vertical
Sensitive face in capacitance sensor；
Described interferometer mechanism includes interferometer base and interferometer unit；
Described interferometer unit be at least three and with measuring unit one_to_one corresponding, each interferometer unit include single shaft swash
Optical interferometer, interferometer adjusting base and interferometer bracing frame；
The bottom of described interferometer bracing frame is fixed on interferometer base；
Described interferometer adjusting base is fixed on the top of interferometer bracing frame；
Described one-axis laser interferometer is fixed on interferometer adjusting base, one-axis laser interferometer, spectroscope and reference
The same optical axis of corner reflector, the laser that one-axis laser interferometer sends is divided into orthogonal reference light through spectroscope and measures light,
Reference light is reflected back spectroscope through reference angle reflecting mirror, and through spectroscope transmission receipt axle laser interferometer, measures light through measuring
Corner reflector is reflected back spectroscope, and through dichroic mirror receipt axle laser interferometer.
Further, described capacitance sensor is column capacitance sensor or flat capacitance sensor.
Further, described sensor support frame is L-type structure, and seat fixed by described sensor is boss structure, sensor
The short end of bracing frame is fixed on calibrating table pedestal, and sensor is fixed the base of seat and is fixed on the long end of sensor support frame, sensing
Device is fixed the boss of seat and is provided with sensor holders hole and sensor locking hole, and capacitance sensor is sleeved on sensor holders hole
In, and be locked by sensor locking hole.
Further, described sensor support frame and sensor are fixed seat and are multidiameter structure, sensor support frame
Chassis is fixed on calibrating table pedestal, and sensor is fixed the chassis of seat and is fixed on the top of sensor support frame, capacitance sensor
It is fixed on sensor and fixes the top of seat.
Further, described hinge is symmetrical parallel quadrilateral structure, guides shell fragment, phase including three fixing seats and four
Fixing two between two adjacent fixing seats and guide shell fragment, the bottom of the fixing seat at two ends is each attached to the end face of calibrating table fixed platform
On, the top of middle fixing seat is fixed on the bottom surface of calibrating table moving platform.
Further, described guiding shell fragment is round leaf spring or circular arc flexible hinge.
Further, described calibrating table moving platform end face is provided with trough.
Further, described calibrating table moving platform is disc structure, and the symmetrical centre axle of calibrating table moving platform passes with electric capacity
The sensing shaft conllinear of sensor.
Further, described measuring unit is the most uniform centered by capacitance sensor.
Further, described all hinges is the most uniform on calibrating table moving platform.
Compared with prior art, the invention has the beneficial effects as follows:
(1) the capacitance sensor displacement calibrating device of the present invention is the most easy and simple to handle, and debugs precision height, Abbe error
Little with cosine error so that calibration result precision is high, within 10nm；
(2) the capacitance sensor displacement calibrating device of the present invention has TIP-TILT-PISTON regulatory function, can perform
Z-direction translation regulation, around X-axis and Y-axis rotation regulate, and regulation stroke can reach 1mm, it is ensured that the sensitive face of sensor and quilt
The depth of parallelism surveyed between the tested surface of panel debugs precision；
(3) the capacitance sensor displacement calibrating device of the present invention is by changing sensor support frame and the sensing of different structure
Seat fixed by device, can be strong to different types of capacitance sensor calibration, versatility and interchangeability.
Accompanying drawing explanation
Fig. 1 is the sectional view of capacitance displacement sensor caliberating device of the present invention；
Fig. 2 is the top view of capacitance displacement sensor caliberating device of the present invention；
Fig. 3 is the structural representation of the calibrating table pedestal of capacitance displacement sensor caliberating device of the present invention；
Fig. 4 is the structural representation of the sensor support frame of capacitance displacement sensor caliberating device of the present invention；
Fig. 5 is the structural representation that seat fixed by the sensor of capacitance displacement sensor caliberating device of the present invention；
Fig. 6 is the structural representation of the sensor support frame of capacitance displacement sensor caliberating device of the present invention；
Fig. 7 is the structural representation that seat fixed by the sensor of capacitance displacement sensor caliberating device of the present invention；
Fig. 8 is the structural representation of the calibrating table silent flatform of capacitance displacement sensor caliberating device of the present invention；
Fig. 9 is the structural representation of the hinge of capacitance displacement sensor caliberating device of the present invention, and wherein, (a) is upward view,
B () is front view, (c) is top view；
Figure 10 is the structural representation of the calibrating table moving platform of capacitance displacement sensor caliberating device of the present invention；
Figure 11 is the structural representation of the tested panel of capacitance displacement sensor caliberating device of the present invention；
Figure 12 is the structural representation that seat fixed by the light-guide device of capacitance displacement sensor caliberating device of the present invention；
Figure 13 is the schematic diagram of the optical interference circuit of capacitance displacement sensor caliberating device of the present invention；
In figure: 1, calibrating table pedestal, 1-1, cable hole, 1-2, calibrating table bracing frame connecting hole, 1-3, sensor support frame
Connecting hole, 2, calibrating table bracing frame, 3, sensor support frame, seat connecting hole fixed by 3-1, sensor, and 4, driver, 5, calibrating table
Silent flatform, 5-1, calibrating table bracing frame connecting hole, 5-2, sensor support frame pilot hole, 5-3 driver connecting hole, 5-4, driving
Device push rod pilot hole, 5-5, light-guide device bracing frame connecting hole, 5-6, chain connection hole, 6, hinge, 6-1, fixing seat, 6-2, lead
To shell fragment, 7, calibrating table moving platform, 7-1, sensor pilot hole, 7-2, trough, 8, measure corner reflector, 9, light-guide device props up
Support, 10, light-guide device fix seat, 10-1, light-guide device bracing frame clamping hole, 10-2, light-guide device bracing frame locking hole,
11, reference angle reflecting mirror, 12, spectroscope, 13, sensor fix seat, 13-1, base, 13-2, boss, 13-2-1, sensor press from both sides
Hold hole, 13-2-2, sensor locking hole, 13-3, sensor connecting hole, 14, capacitance sensor, 15, tested panel, 16, drive
Device push rod, 17, one-axis laser interferometer, 18, interferometer adjusting base, 19, interferometer bracing frame, 20, interferometer base.
Detailed description of the invention
In order to further appreciate that the present invention, it is described below in conjunction with-13 pairs of the preferred embodiments of the invention of Fig. 1, but
Should be appreciated that these describe simply as further illustrating the features and advantages of the present invention rather than to the claims in the present invention
Limit.
As shown in figs. 1-12, capacitance displacement sensor caliberating device, including capacitive displacement mechanism and interferometer mechanism；Its
In, capacitive displacement mechanism includes that calibrating table pedestal 1, calibrating table bracing frame 2, sensor support frame 3, driver 4, calibrating table are quiet flat
Platform 5, hinge 6, calibrating table moving platform 7, measuring unit, sensor are fixed seat 13, capacitance sensor 14, tested panel 15 and drive
Device push rod 16；Interferometer mechanism includes interferometer unit and interferometer base 20.
In present embodiment, calibrating table pedestal 1 is disc structure, and calibrating table pedestal 1 is provided with calibrating table bracing frame and connects
Hole 1-2 and sensor support frame connecting hole 1-3, for ease of installing the sensor support frame 3 of different structure, sensor support frame is even
Meet hole 1-3 and can be arranged to many groups；Cable hole 1-1 it is also provided with, for the cable of capacitance sensor 14 on calibrating table pedestal 1
Connect control chamber.
In present embodiment, calibrating table bracing frame 2 is column structure, the most identical, and calibrating table bracing frame 2 is three
Above, preferably three, the bottom of all calibrating table bracing frames 2 is all fixed on demarcation by calibrating table bracing frame connecting hole 1-2
On sewing platform base 1 and the most uniform on calibrating table pedestal 1.
In present embodiment, the bottom of sensor support frame 3 is fixed on calibrating table pedestal 1, and it is solid that seat 13 fixed by sensor
Being scheduled on sensor support frame 3, capacitance sensor 14 is fixed on sensor and fixes on seat 13, and capacitance sensor 14 is used for measuring electricity
Hold the displacement variable between sensor 14 and tested panel 15, according to the difference of capacitance sensor 14 type, select coupling
Seat 13 fixed by sensor support frame 3 and sensor.
As demarcated column capacitance displacement sensor, sensor support frame 3 is L-type structure, and sensor fixes seat 13 for boss
Structure, the short end of sensor support frame 3 is fixed on calibrating table pedestal 1 by sensor support frame connecting hole 1-3, and sensor is solid
The base 13-1 of reservation 13 fixes seat connecting hole 3-1 by sensor and is fixed on the long end of sensor support frame 3, for convenience of peace
Filling the column capacitance sensor of multiple different model, seat connecting hole 3-1 fixed by sensor can be provided with many groups, and seat fixed by sensor
The boss 13-2 of 13 is provided with sensor holders hole 13-2-1 and sensor locking hole 13-2-2, and capacitance sensor 14 is positioned over biography
In sensor clamping hole 13-2-1, and it is locked by sensor locking hole 13-2-2；
As demarcated capacity plate antenna displacement transducer, sensor support frame 3 and sensor are fixed seat 13 and are multidiameter structure,
The chassis of sensor support frame 3 is fixed on calibrating table pedestal 1 by sensor support frame connecting hole 1-3, and seat fixed by sensor
The chassis of 13 is fixed on the top of sensor support frame 3, and capacitance sensor 14 is fixed on by capacitance sensor connecting hole 13-3
The top of seat 13 fixed by sensor, installs the flat capacitance sensor of multiple different model, capacitance sensor connecting hole for convenience
13-3 can be provided with many groups.
In present embodiment, calibrating table silent flatform 5 is disc structure, and calibrating table silent flatform 5 is provided with multiple calibrating table and props up
Support connecting hole 5-1, a sensor support frame pilot hole 5-2, multiple driver connecting hole 5-3, multiple driver push rods are led
To hole 5-4, multiple light-guide device bracing frame connecting hole 5-5 and multiple chain connection hole 5-6, calibrating table silent flatform 5 is by demarcating
Platform bracing frame connecting hole 5-1 is fixed on the top of all calibrating table bracing frames 2, and is overlapped by sensor support frame pilot hole 5-2
It is contained in outside sensor support frame 3.The preferably symmetrical centre axle of calibrating table silent flatform 5 and the sensing shaft conllinear of capacitance sensor 14.
In present embodiment, hinge 6 is more than three, and the most identical, preferably three, and is circumferentially distributed on calibrating table
On silent flatform 5 and calibrating table moving platform 7, all hinges 6 all uses the symmetrical parallel quadrilateral structure of Planar Mechanisms, each hinge 6
Guiding shell fragment 6-2, three fixing seat 6-1 including three fixing seat 6-1 and four to be sequentially distributed in the same direction, each two is adjacent
Fixing seat 6-1 connect by two parallel guiding shell fragment 6-2 are fixing, the bottom of the fixing seat 6-1 at two ends is by hinge even
Meeting hole 5-6 to be fixed on the end face of calibrating table silent flatform 5, the top of middle fixing seat 6-1 is fixed on calibrating table moving platform 7
Bottom surface；Guiding shell fragment 6-2 can be round leaf spring or circular arc flexible hinge；Use symmetrical parallel tetragon guide frame
The hunt effect error in other directions introduced when can be greatly reduced regulation, guides steadily.The dimensional parameters of hinge 6 is permissible
For: width 1.1mm, length 70mm, thickness 10mm, radius of corner 0.1mm, material is invar.
In present embodiment, driver 4 is more than three, preferably three, and the top of All Drives 4 is all by driving
Device connecting hole 5-3 is fixed on the bottom surface of calibrating table silent flatform 5, the most uniform.
In present embodiment, driver push rod 16 is more than three, preferably three, driver 4, driver push rod 16 and
Hinge 6 three's one_to_one corresponding, driver push rod 16 is fixed on the top of driver 4, and is worn by driver push rod pilot hole 5-4
Cross the lower section of fixing seat 6-1 in the middle of calibrating table silent flatform 5 to hinge 6；Driver 4 promotes hinge 6 to move by driver push rod 16
Dynamic, hinge 6 drives calibrating table moving platform 7 and tested panel thereon 15 and measurement corner reflector 8 to move.
In present embodiment, calibrating table moving platform 7 is disc structure, and its diameter is less than calibrating table silent flatform 5, and calibrating table moves
Platform 7 is sleeved on outside capacitance sensor 14 by being located at capacitance sensor pilot hole 7-1 thereon, and capacitance sensor 14 does not passes through
Logical capacitance sensor pilot hole 7-1；The radial direction of calibrating table moving platform 7 end face can be provided with trough 7-2, trough 7-2
Cable for capacitance sensor 14 connects control chamber.The preferably symmetrical centre axle of calibrating table moving platform 7 and capacitance sensor 14
Sensing shaft conllinear.
In present embodiment, tested panel 15 is circular configuration, and tested panel 15 is fixed on the end face of calibrating table moving platform 7
On, covering capacitance sensor pilot hole 7-1, and it is arranged at the top of capacitance sensor 14, tested panel 15 place plane and electricity
The sensitive face holding sensor 14 is parallel, the symmetrical centre axle of the most tested panel 15 and the sensing shaft conllinear of capacitance sensor 14.
Measuring unit is more than three, preferably centered by capacitance sensor 14, the most uniform, generally three, often
Individual measuring unit all includes that measurement corner reflector 8, light-guide device bracing frame 9, light-guide device fix seat 10, reference angle reflecting mirror 11
With spectroscope 12, measuring corner reflector 8 and reference angle reflecting mirror 11 is corner reflector, spectroscope 12 is 50% spectroscope.Survey
Angulation reflecting mirror 8 is fixed on the end face of calibrating table moving platform 7, and light-guide device bracing frame 9 is column structure, and bottom is by leading
Optical element bracing frame connecting hole 5-5 is fixed in the top edge of calibrating table silent flatform 5, and light-guide device is fixed seat 10 and tied for L-type
Structure, short end is provided with light-guide device bracing frame clamping hole 10-1 and light-guide device bracing frame locking hole 10-2, light-guide device bracing frame 9
Top be sleeved on correspondence light-guide device bracing frame clamping hole 10-1 in, and by light-guide device bracing frame locking hole 10-2 lock
Fastening, reference angle reflecting mirror 11 and spectroscope 12 are sequentially fixed at light-guide device and fix the long end of seat 10, and spectroscope 12 is positioned at
Measure the top of corner reflector 8, spectroscope 12 in orthogonal both direction respectively with to measure corner reflector 8, reference angle anti-
Penetrate the same optical axis of mirror 11, and be perpendicular to the sensitive face of capacitance sensor 14 with the optical axis measuring corner reflector 8.
Interferometer unit is more than three, and with measuring unit one_to_one corresponding, each interferometer unit all include single shaft swash
Optical interferometer 17, interferometer adjusting base 18 and interferometer bracing frame 19.The bottom of interferometer bracing frame 19 is fixed on interferometer
On base 20, interferometer adjusting base 18 is fixed on the top of interferometer bracing frame 19, and one-axis laser interferometer 17 is fixed on dry
On interferometer adjusting base 18, spectroscope 12 that one-axis laser interferometer 17 is corresponding and the same optical axis of reference angle reflecting mirror 11.Dry
Interferometer adjusting base 18 can regulate five degree of freedom in addition to Z-direction height, it may be assumed that X to translation, Y-direction translation, around X Y
The rotation of Z, and then the angle of the one-axis laser interferometer 17 of regulation correspondence, it is ensured that through measuring corner reflector 8 and reference angle reflection
The light beam of mirror 11 reflection can be accepted after spectroscope 12 smoothly.
In present embodiment, for convenience of detection, calibrating table pedestal 1 horizontal positioned, calibrating table moving platform 5, mark can be used
Determine platform silent flatform 6, capacitance sensor 14 and tested panel 15 to be all horizontally disposed with, spectroscope 12, reference angle reflecting mirror 11 and single shaft
The most same optical axis of laser interferometer 17, spectroscope 12 and measurement corner reflector 8 are at the same optical axis of vertical direction.
As shown in figure 13, the laser that one-axis laser interferometer 17 sends through spectroscope 12 be divided into orthogonal measurement light and
Reference light, measure light through measure corner reflector 8 twice 90 degree turn back and be reflected back spectroscope 12, then be reflected back single shaft through spectroscope 12
Laser interferometer 17, constitutes optical path, reference light through reference angle reflecting mirror 11 twice 90 degree turn back and be reflected back spectroscope 12, warp
Spectroscope 12 transmission receipt axle laser interferometer 17, constitutes reference path.
Before demarcation, on three coordinate measuring machine, first detect sensitive face and the three-dimensional coordinates measurement machine platform of capacitance sensor 14
Between the depth of parallelism, this form and position tolerance is fixed seat 10 ensure by being trimmed sensor.When tested panel 15 is installed, detect tested surface
The depth of parallelism between plate 15 upper surface and three-dimensional coordinates measurement machine platform, this form and position tolerance is ensured by regulation driver 4.So,
In the range of the indirect depth of parallelism measured between guarantee sensor senses face and tested surface to allowable value.Timing signal, with initially
Position is the leading zero's demarcated, and by capacitance displacement sensor 14 power supply opening, waits for a period of time, treats capacitance displacement sensor
After 14 display numerical stabilities, starting to record sensor reading, then, All Drives 4 increases with the increment of 1 μm, and driver 4 is led to
Device push rod 16 of overdriving promotes hinge 6 to move, and hinge 6 drives calibrating table moving platform 7 and tested panel 15 thereon, to measure angle anti-
Penetrate mirror 8 to move, it is achieved Z-direction fine adjustment, on the one hand, capacitance sensor 14 is measured between capacitance sensor 14 and tested panel 15
Displacement variable；On the other hand, by one-axis laser interferometer 17, corner reflector 8, spectroscope 12, reference angle reflecting mirror 11 are measured
Composition interferometry light path.The incident illumination that one-axis laser interferometer 17 sends, the laser that one-axis laser interferometer 17 sends is through dividing
Light microscopic 12 is divided into orthogonal measurement light and reference light, measures light and is reflected back spectroscope 12 through measuring corner reflector 8, then through dividing
Light microscopic 12 is reflected back one-axis laser interferometer 17, and reference light is through reference angle reflecting mirror 11 reflection beam splitting mirror 12, saturating through spectroscope 12
Being emitted back towards one-axis laser interferometer 17, the reading of reading and one-axis laser interferometer 17 by analyzing capacitance sensor 14 can be marked
Determine capacitor.Several groups of data that continuous several times is recorded be averaging after as final calibration result.
Obviously, the explanation of embodiment of above is only intended to help to understand method and the core concept thereof of the present invention.Should
Point out, for the those of ordinary skill of described technical field, under the premise without departing from the principles of the invention, it is also possible to this
Invention carries out some improvement and modification, and these improve and modify in the protection domain also falling into the claims in the present invention.
Claims (10)
1. capacitance displacement sensor caliberating device, it is characterised in that include capacitive displacement mechanism and interferometer mechanism；
Described capacitive displacement mechanism includes calibrating table pedestal (1), calibrating table bracing frame (2), sensor support frame (3), driver
(4), calibrating table silent flatform (5), hinge (6), calibrating table moving platform (7), measuring unit, sensor fix seat (13), electric capacity biography
Sensor (14), tested panel (15) and driver push rod (16)；
Described calibrating table bracing frame (2) at least three, the bottom of all calibrating table bracing frames (2) is each attached to calibrating table pedestal
(1) on；
The bottom of described sensor support frame (3) is fixed on calibrating table pedestal (1)；
Described sensor is fixed seat (13) and is fixed on sensor support frame (3)；
Described capacitance sensor (14) is fixed on sensor and fixes on seat (13), and capacitance sensor measured by capacitance sensor (14)
(14) displacement variable and between tested panel (15)；
Described calibrating table silent flatform (5) is fixed on the top of all calibrating table bracing frames (2) and is guided by sensor support frame
Hole (5-2) is sleeved on sensor support frame (3) outward；
At least three, described hinge (6), the bottom of all hinges (6) is each attached on the end face of calibrating table silent flatform (5), institute
The top having hinge (6) is each attached on the bottom surface of calibrating table moving platform (7)；
Described calibrating table moving platform (7) is sleeved on capacitance sensor (14) outward by sensor pilot hole (7-1)；
Described driver (4), driver push rod (16) and hinge (6) three's one_to_one corresponding, the top of driver (4) is each attached to
On the bottom surface of calibrating table silent flatform (5), driver push rod (16) is fixed on the top of driver (4), and by driver push rod
Pilot hole (5-4) passes calibrating table silent flatform (5), and driver (4) promotes hinge (6) mobile by driver push rod (16), hinge
Chain (6) drives calibrating table moving platform (7) mobile；
Described tested panel (15) is fixed on the end face of calibrating table moving platform (7), and is positioned at the top of capacitance sensor (14),
Tested panel (15) place plane is parallel with the sensitive face of capacitance sensor (14)；
Described measuring unit is at least three, each measuring unit include measure corner reflector (8), light-guide device bracing frame (9),
Light-guide device fixes seat (10), reference angle reflecting mirror (11) and spectroscope (12), and described measurement corner reflector (8) is fixed on demarcation
On the end face of platform moving platform (7), the bottom of described light-guide device bracing frame (9) is fixed on the end face of calibrating table silent flatform (5),
Described light-guide device is fixed one end of seat (10) and is fixed on light-guide device bracing frame (9), described reference angle reflecting mirror (11) and
Spectroscope (12) is sequentially fixed at light-guide device and fixes the other end of seat (10), and spectroscope (12) is positioned at measurement corner reflector
(8) top, spectroscope (12) with measure corner reflector (8) same to optical axis, and this optical axis direction is perpendicular to capacitance sensor (14)
Sensitive face；
Described interferometer mechanism includes interferometer base (20) and interferometer unit；
Described interferometer unit be at least three and with measuring unit one_to_one corresponding, each interferometer unit include one-axis laser do
Interferometer (17), interferometer adjusting base (18) and interferometer bracing frame (19)；
The bottom of described interferometer bracing frame (19) is fixed on interferometer base (20)；
Described interferometer adjusting base (18) is fixed on the top of interferometer bracing frame (19)；
Described one-axis laser interferometer (17) is fixed on interferometer adjusting base (18), one-axis laser interferometer (17), light splitting
Mirror (12) and reference angle reflecting mirror (11) same to optical axis, and this optical axis direction is parallel to the sensitive face of capacitance sensor (14), single shaft
The laser that laser interferometer (17) sends is divided into orthogonal reference light through spectroscope (12) and measures light, and reference light is through reference
Corner reflector (11) is reflected back spectroscope (12), and through spectroscope (12) transmission receipt axle laser interferometer (17), measures light warp
Measure corner reflector (8) and be reflected back spectroscope (12), and be reflected back one-axis laser interferometer (17) through spectroscope (12).
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described capacitance sensor (14)
For column capacitance sensor or flat capacitance sensor.
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described sensor support frame
(3) being L-type structure, seat (13) fixed by described sensor is boss structure, and the short end of sensor support frame (3) is fixed on calibrating table
On pedestal (1), sensor is fixed the base (13-1) of seat (13) and is fixed on sensor support frame (3) long end, and sensor is fixed
The boss (13-2) of seat (13) is provided with sensor holders hole (13-2-1) and sensor locking hole (13-2-2), capacitance sensor
(14) it is sleeved in sensor holders hole (13-2-1), and is locked by sensor locking hole (13-2-2).
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described sensor support frame
(3) fixing seat (13) be multidiameter structure with sensor, the chassis of sensor support frame (3) is fixed on calibrating table pedestal (1)
On, sensor is fixed the chassis of seat (13) and is fixed on the top of sensor support frame (3), and capacitance sensor (14) is fixed on sensing
The top of seat (13) fixed by device.
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described hinge (6) is symmetrical
Parallelogram sturcutre, guides shell fragment (6-2), between two adjacent fixing seats (6-1) including three fixing seats (6-1) and four
Fixing two and guide shell fragment (6-2), the bottom of the fixing seat (6-1) at two ends is each attached on the end face of calibrating table silent flatform (5),
The top of middle fixing seat (6-1) is fixed on the bottom surface of calibrating table moving platform (7).
Capacitance displacement sensor caliberating device the most according to claim 5, it is characterised in that described guiding shell fragment (6-2)
For round leaf spring or circular arc flexible hinge.
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described calibrating table moving platform
(7) end face is provided with trough (7-2).
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described calibrating table moving platform
(7) it is disc structure, the symmetrical centre axle of calibrating table moving platform (7) and the sensing shaft conllinear of capacitance sensor (14).
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described measuring unit is with electric capacity
Centered by sensor (14) the most uniform.
Capacitance displacement sensor caliberating device the most according to claim 1, it is characterised in that described all hinges (6) exists
On calibrating table moving platform (7) the most uniform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410314100.1A CN104075652B (en) | 2014-07-02 | 2014-07-02 | Capacitance displacement sensor caliberating device |
Applications Claiming Priority (1)
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| CN104654997B (en) * | 2015-02-14 | 2018-03-13 | 中国科学院测量与地球物理研究所 | A kind of multiple degrees of freedom differential capacitance calibration device for displacement sensor |
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| CN109855520B (en) * | 2019-01-02 | 2020-09-11 | 广州大学 | Micro-nano precision measurement displacement sensor, system and preparation method |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202255263U (en) * | 2011-07-28 | 2012-05-30 | 南昌航空大学 | Visual calibration device for displacement sensor |
| CN102538652A (en) * | 2012-01-13 | 2012-07-04 | 西安交通大学 | Calibrating device for eddy sensor |
| CN103630076A (en) * | 2012-08-30 | 2014-03-12 | 长春理工大学 | Method and device for calibrating laser displacement sensor |
| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10227603A (en) * | 1997-02-13 | 1998-08-25 | Toshiba Corp | Method for adjusting eddy current type distance measuring device and eddy current type distance measuring device |
| KR20090052075A (en) * | 2007-11-20 | 2009-05-25 | 한국항공우주연구원 | Calibration apparatus for displacement sensor and system thereof |
-
2014
- 2014-07-02 CN CN201410314100.1A patent/CN104075652B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202255263U (en) * | 2011-07-28 | 2012-05-30 | 南昌航空大学 | Visual calibration device for displacement sensor |
| CN102538652A (en) * | 2012-01-13 | 2012-07-04 | 西安交通大学 | Calibrating device for eddy sensor |
| CN103630076A (en) * | 2012-08-30 | 2014-03-12 | 长春理工大学 | Method and device for calibrating laser displacement sensor |
| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
Non-Patent Citations (2)
| Title |
|---|
| Design and Mechanical Evaluation of a Capacitive Sensor-Based Indexed Platform for Verification of Portable Coordinate Measuring Instruments;Agustín Brau Avila等;《Sensors》;20140102;第14卷;第606-633页 * |
| 激光干涉法微位移测量技术综述;段小艳;《计测技术》;20121231;第32卷(第6期);第1-5、13页 * |
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Effective date of registration: 20190910 Address after: Room 601-10, 6th floor, 52 Block 2, Jingyuan North Street, Beijing Economic and Technological Development Zone, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |