CN103868453A - Automatic detection device for direct driving grating ruler - Google Patents
Automatic detection device for direct driving grating ruler Download PDFInfo
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- CN103868453A CN103868453A CN201410035866.6A CN201410035866A CN103868453A CN 103868453 A CN103868453 A CN 103868453A CN 201410035866 A CN201410035866 A CN 201410035866A CN 103868453 A CN103868453 A CN 103868453A
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Abstract
An automatic detection device for a direct driving grating ruler belongs to the technical field of grating ruler detection and mainly comprises a damping platform, a driving platform and a clamp; the damping platform eliminates the vibration disturbance of the environment; a linear motor is used as a power source for the driving platform and provides an experiment speed with a wider range and an acceleration for a reading head of the detected grating ruler; a high-precision displacement sensor detects the precise displacement information of the reading head of the detected grating ruler in real time and provides more accurate comparison and identification for the displacement information detected by the reading head of the detected grating ruler; the clamp is used for clamping detected grating ruler belts with different length levels. The device is used for detecting the detected grating rulers with different length levels, and the cost of the grating ruler detection device is reduced. The linear motor fast responds, is high in automation level, and wide in experiment speed and acceleration range, so the detection efficiency of the grating ruler is improved.
Description
Technical field
The invention belongs to grating scale detection technique field, be specifically related to the grating scale automatic detection device that a kind of linear electric motors drive.
Background technology
Grating scale is that optical system and scientific instrument are as the core optical element in the engineering systems such as large-scale astronomical telescope, inertial confinement fusion Laser Ignition System, etching system.The accuracy when resolution of grating scale, repeatable accuracy and Gao Jia acceleration and deceleration is the Key Performance Indicator of grating scale.For detecting the grating scale product percent of pass index of batch production, must adopt equipment for customizing to detect one by one the performance index of grating scale.
CN102865816A discloses a kind of automatic detection device of grating scale overall measurement precision, adopts the measured grating ruler reading head of screw mandrel control along guide rail movement.Leading screw is for being converted to the rectilinear motion of guide rail by rotatablely moving, therefore transmission efficiency is lower.Because leading screw exists sideshake, unavoidably can disturb the measurement of grating scale repeatable accuracy.CN202994097U discloses a kind of grating scale instrument for testing precision, adopts equally screw mandrel regulating device as driving mechanism, regulates mobile platform motion by trimming hand wheel.Owing to adopting hand drive, drive efficiency is low, and actuating speed is little, the performance of tested grating scale cannot detect high acceleration and deceleration time.
Summary of the invention
For the deficiency of technique scheme, the invention provides a kind of grating scale automatic detection device that adopts linear electric motors to drive, for the performance index such as resolution, repeatable accuracy and the operating rate scope of efficient detection grating scale provide a kind of feasible solution.
The scheme that the present invention adopts is as follows:
One is directly driven grating scale automatic detection device, it comprises vibration reduction platform, drives platform, fixture 10 and tested grating scale, vibration reduction platform contains granite base 1 and is arranged in four vibration damping feets 12 of granite base 1 bottom, drives platform to comprise linear electric motors I 3, linear electric motors II 14, slide block 5, guide rail 6, high-precision displacement transducer 8, driving protection 18 and worktable 7; Tested grating scale comprises tested grating ruler reading head 13 and tested grating scale band 11, the stator of linear electric motors I 3, the stator of linear electric motors II 14, guide rail 6 fixed and arranged are in granite base 1, and linear electric motors I 3, linear electric motors II 14 are positioned at the both sides of guide rail 6 and be arranged in parallel; The mover of linear electric motors I 3 is connected with web member I 4, the mover of linear electric motors II 14 is connected with web member II 15, and web member I 4, web member II 15 and slide block 5 are all firmly connected with worktable 7, and described slide block 5 is two, be connected on guide rail 6, slide along guide rail 6; A side at pedestal 1 is connected with guide rail II 16, and guide rail II 16 be arranged in parallel with guide rail 6; In guide rail II 16, be connected with two fixtures 10; Tested grating ruler reading head 13 connects as one by read head web member 17 and worktable 7, tested grating scale band 11 is connected with two fixtures 10, the mover of the mover of linear electric motors I 3 and linear electric motors II 14 drives worktable 7 along guide rail 6 to-and-fro movements, and tested grating ruler reading head 13 is along with worktable 7 to-and-fro movements.
High-precision displacement transducer 8 adopts the precise displacement information of high precision grating scale or the real-time testing platform 7 of laser interferometer and tested grating ruler reading head 13, and the displacement information detecting for tested grating ruler reading head 13 provides contrast and qualification.
The present invention can obtain following beneficial effect:
Linear electric motors I 3 and linear electric motors II 14, for driving platform that power source is provided, and have higher speed and acceleration capabilities, for tested grating scale provides large-scale test speed and acceleration condition.Linear electric motors drive efficiency is high, has improved the detection efficiency of tested grating scale.By adjusting the stroke range of linear electric motors I 3 and linear electric motors II 14, can detect the local performance Index of tested grating scale band 11.
High-precision displacement transducer 8 forms displacement close-loop feedback with linear electric motors I 3, linear electric motors II 14, detects in real time the precise position information of tested grating ruler reading head 13, compares accurately and qualification for the performance index of tested grating scale provide.
The tested grating scale band 11 of fixture 10 different length grade easy to setup, therefore this device sensing range is wide, is applicable to the tested grating scale band 11 of the interior random length grade of length range that detects guide rail II 16.
Brief description of the drawings:
Fig. 1 directly drives grating scale automatic detection device front view
Fig. 2 directly drives grating scale automatic detection device M-M cut-open view
Fig. 3 directly drives grating scale automatic detection device oblique view
In figure, 1. granite base; 2. main drag chain; 3. linear electric motors I; 4. web member I; 5. slide block; 6. guide rail; 7. worktable; 8. high-precision displacement transducer; 9. auxiliary drag chain; 10. fixture; 11. tested grating scale bands; 12. vibration damping feets; 13. tested grating ruler reading heads; 14. linear electric motors II; 15. web member II; 16. guide rail II; 17. read head web members; 18. driving protections.
Specific embodiments
Below in conjunction with accompanying drawing, specific embodiments of the invention are described.
Four vibration damping feets 12 can be adjusted the level of this device, and vibration damping feet 12 also plays the effect of the vibration noise interference of isolated environment.
Linear electric motors I 3, linear electric motors II 14 are as power source, for driving platform and tested grating ruler reading head 13 that test speed and the acceleration of relative broad range are provided.Main drag chain 2 plays traction and protective effect to the power cable of linear electric motors I 3, linear electric motors II 14.
Linear electric motors I 3, linear electric motors II 14 drive worktable 7 to move along guide rail 6, and worktable 7 drives tested grating ruler reading head 13 to-and-fro movements, when the relatively tested grating scale band 11 of tested grating ruler reading head 13 moves, detect in real time the positional information of self.
High-precision displacement transducer 8 forms displacement close-loop feedback with linear electric motors I 3, linear electric motors II 14, the in real time precise displacement information of testing platform 7 and tested grating ruler reading head 13, the displacement information detecting for tested grating ruler reading head 13 provides accurately relatively and qualification.
Auxiliary drag chain 9 plays traction and protective effect to the cable of tested grating ruler reading head 13.Driving protection 18, for limiting the range of movement of worktable 7, is avoided driving.
Claims (3)
1. one kind is directly driven grating scale automatic detection device, it is characterized in that: it comprises vibration reduction platform, drives platform, fixture (10) and tested grating scale, vibration reduction platform contains granite base (1) and is arranged in four vibration damping feets (12) of granite base (1) bottom, drives platform to comprise linear electric motors I (3), linear electric motors II (14), slide block (5), guide rail (6), high-precision displacement transducer (8), driving protection (18) and worktable (7); Tested grating scale comprises tested grating ruler reading head (13) and tested grating scale band (11), in granite base (1) above, linear electric motors I (3), linear electric motors II (14) are positioned at the both sides of guide rail (6) and be arranged in parallel for the stator of linear electric motors I (3), the stator of linear electric motors II (14), guide rail (6) fixed and arranged; The mover of linear electric motors I (3) is connected with web member I (4), the mover of linear electric motors II (14) is connected with web member II (15), web member I (4), web member II (15) and slide block (5) are all firmly connected with worktable (7), described slide block (5) is two, be connected to guide rail (6) upper, slide along guide rail (6); Be connected with guide rail II (16) in a side of pedestal (1), guide rail II (16) be arranged in parallel with guide rail (6); In guide rail II (16), be connected with two fixtures (10); Tested grating ruler reading head (13) connects as one by read head web member (17) and worktable (7), tested grating scale band (11) is connected with two fixtures (10), the mover of the mover of linear electric motors I (3) and linear electric motors II (14) drives worktable (7) along guide rail (6) to-and-fro movement, and tested grating ruler reading head (13) is along with worktable (7) to-and-fro movement.
2. one according to claim 1 is directly driven grating scale automatic detection device, it is characterized in that: high-precision displacement transducer (8) adopts the precise displacement information of high precision grating scale or the real-time testing platform of laser interferometer (7) and tested grating ruler reading head (13), the displacement information detecting for tested grating ruler reading head (13) provides contrast and qualification.
3. one according to claim 1 is directly driven grating scale automatic detection device, it is characterized in that: fixture (10) can be along guide rail II (16) adjusting position, and fixture (10) can the optional position of strong fix in guide rail II (16), and fixture (10) is applicable to the tested grating scale band (11) of clamping random length grade in guide rail II (16) length range.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410035866.6A CN103868453B (en) | 2014-01-24 | 2014-01-24 | One directly drives grating scale automatic detection device |
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| CN201410035866.6A CN103868453B (en) | 2014-01-24 | 2014-01-24 | One directly drives grating scale automatic detection device |
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| CN103868453A true CN103868453A (en) | 2014-06-18 |
| CN103868453B CN103868453B (en) | 2016-10-05 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106546201A (en) * | 2015-09-18 | 2017-03-29 | 罗伯特·博世有限公司 | Location detecting apparatus |
| CN106989723A (en) * | 2017-05-09 | 2017-07-28 | 中国地震局地震研究所 | Superhigh precision inclining test platform |
| CN107907057A (en) * | 2017-12-28 | 2018-04-13 | 吉林大学 | A kind of grating scale reliability test bench and the reliability test method based on loading spectrum |
| CN108000172A (en) * | 2017-11-06 | 2018-05-08 | 东莞市恒鼎自动化设备有限公司 | A kind of lathe of linear motor driving |
| CN108050940A (en) * | 2017-12-11 | 2018-05-18 | 西京学院 | A kind of reading head monitor station for grating sensor |
| CN108406442A (en) * | 2018-03-13 | 2018-08-17 | 上海铼钠克数控科技股份有限公司 | Grating scale method for testing performance and system |
| CN109877651A (en) * | 2019-01-28 | 2019-06-14 | 苏州凯雷特精密机械有限公司 | A kind of space flight fastener numerical control turning measurement feedback device |
| CN114952023A (en) * | 2022-06-24 | 2022-08-30 | 长沙麓邦光电科技有限公司 | Clamp for preparing grating ruler and joint control method thereof |
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| CN101414185A (en) * | 2008-11-21 | 2009-04-22 | 广东工业大学 | Device and method for testing accurate servo linear drive system performance |
| CN202994097U (en) * | 2012-12-31 | 2013-06-12 | 东莞市宏诚光学制品有限公司 | A grating ruler precision detector |
| CN203364769U (en) * | 2013-08-05 | 2013-12-25 | 申莉云 | Enclosed grating scale |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106546201A (en) * | 2015-09-18 | 2017-03-29 | 罗伯特·博世有限公司 | Location detecting apparatus |
| CN106989723A (en) * | 2017-05-09 | 2017-07-28 | 中国地震局地震研究所 | Superhigh precision inclining test platform |
| CN108000172A (en) * | 2017-11-06 | 2018-05-08 | 东莞市恒鼎自动化设备有限公司 | A kind of lathe of linear motor driving |
| CN108050940A (en) * | 2017-12-11 | 2018-05-18 | 西京学院 | A kind of reading head monitor station for grating sensor |
| CN107907057A (en) * | 2017-12-28 | 2018-04-13 | 吉林大学 | A kind of grating scale reliability test bench and the reliability test method based on loading spectrum |
| CN107907057B (en) * | 2017-12-28 | 2019-11-08 | 吉林大学 | A kind of grating scale reliability test bench and the reliability test method based on loading spectrum |
| CN108406442A (en) * | 2018-03-13 | 2018-08-17 | 上海铼钠克数控科技股份有限公司 | Grating scale method for testing performance and system |
| CN109877651A (en) * | 2019-01-28 | 2019-06-14 | 苏州凯雷特精密机械有限公司 | A kind of space flight fastener numerical control turning measurement feedback device |
| CN114952023A (en) * | 2022-06-24 | 2022-08-30 | 长沙麓邦光电科技有限公司 | Clamp for preparing grating ruler and joint control method thereof |
| CN114952023B (en) * | 2022-06-24 | 2024-01-30 | 长沙麓邦光电科技有限公司 | Clamp for preparing grating ruler and joint control method thereof |
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|---|---|
| CN103868453B (en) | 2016-10-05 |
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Denomination of invention: Automatic detection device for direct driving grating ruler Effective date of registration: 20180906 Granted publication date: 20161005 Pledgee: Agricultural Bank of China Limited by Share Ltd Jiaxing science and Technology Branch Pledgor: Jiaxing Hualing Mechatronics Co., Ltd. Registration number: 2018330000262 |
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Address after: 314000 No. 959, Kexing Road, Daqiao Town, Nanhu District, Jiaxing City, Zhejiang Province Patentee after: Hualingjing machine (Zhejiang) Co.,Ltd. Address before: 314006 floor 1, building 6, No. 3339, linggongtang Road, Jiaxing City, Zhejiang Province Patentee before: JIAXING HUALING MECHATRONICS Co.,Ltd. |
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