CN103644967A - High-energy laser homogenizing cavity attenuator - Google Patents
High-energy laser homogenizing cavity attenuator Download PDFInfo
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- CN103644967A CN103644967A CN201310633652.4A CN201310633652A CN103644967A CN 103644967 A CN103644967 A CN 103644967A CN 201310633652 A CN201310633652 A CN 201310633652A CN 103644967 A CN103644967 A CN 103644967A
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Abstract
The invention discloses a high-energy laser homogenizing cavity attenuator which comprises a front panel, a small-hole sample plate, an attenuation plate, an output panel and a plurality of scattering attenuation units. Each attenuation unit includes a large-angle sampling taper hole arranged on the small-hole sample plate, a homogenizing cavity and a light transmission channel which are arranged on the attenuation plate, and a homogenizing cavity and a laser output hole which are arranged on the output panel, wherein the light transmission channel is of a circular symmetric structure, which enables the angle characteristic of the attenuator to have circular symmetry. The attenuator has a multi-layer plate structure, which can effectively reduce the influence of high temperature generated due to long-time irradiation of high-energy laser on the front panel to a subsequent measurement unit. According to the attenuator of the invention, laser is output from the output hole after being homogenized for multiple times, substantial attenuation of the laser power density is achieved, and the attenuator has better attenuation angle characteristics.
Description
Technical field
The present invention relates to a kind of attenuator of High energy laser beam, especially a kind of array attenuator of measuring for High energy laser beam.
Background technology
In superlaser parameter measurement, need to obtain the light intensity spatial and temporal distributions of laser, because the laser power density at test position place is generally all higher, need to rationally decay, could become the photodetector array of face battle array to survey with cloth.
At present conventional optical attenuator method mainly contains optical filter damped method and integrating sphere damped method, before every detector, increases an optical attenuator, by the power attenuation of laser to the detectable range of detector.Because optical filter its attenuation coefficient when large multiple is decayed is difficult to accurate calibration, the power meter of demarcating is had relatively high expectations, and when the incident angle of laser changes, attenuation coefficient is inconsistent, has increased demarcation difficulty, therefore apply less in superlaser is measured.
In China Engineering Physics Research Institute's master thesis in 2000 " theoretical analysis and experiment that strong fast target is measured ", disclose a kind of graphite integrating sphere array that utilizes and realized the method to the large multiple decay of large area superlaser power density, its ultimate principle is that laser beam is entered in an integrating sphere through entering perforation, through perforation hole outgoing, wherein swash the both sides that incident light hole and perforation hole are distributed in integrating sphere again.In granted patent ZL201110231864.0, also reported a kind of high-energy laser semi-integrating-sphere array attenuator, employing wide-angle sampling taper hole is realized laser attenuation in conjunction with the method for semi-integral ball, laser is penetrated by laser emitting hole after the absorption of semi-integral ball chamber and diffuse reflection, has realized the significantly decay of laser power density.The weak point of above-mentioned integrating sphere structural damping device is, because integrating sphere attenuator is unsymmetric structure, enter perforation and perforation hole and be positioned at integrating sphere both sides, when laser oblique incidence, only have the attenuator of working as and laser direction could realize wide-angle laser decay in specific position angle, and the laser incident angle that can decay is limited; In addition in order to realize the light intensity attenuation of larger multiple, integrating sphere is difficult to accomplish less size, has limited the application of array attenuator in high-space resolution laser beam parameter measuring.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of superlaser homogenize chamber attenuator of compact conformation, can realize the large multiple decay of superlaser power density, and when laser is within the scope of certain incident angle during oblique incidence, insensitive to the putting position of attenuator and angle.
Technical scheme of the present invention is as follows:
A superlaser homogenize chamber attenuator, comprises the front panel, aperture sampling plate, attenuating plate and the output slab that along incident laser direction, set gradually;
On front panel and aperture sampling plate, be processed with wide-angle sampling taper hole, the openend of wide-angle sampling taper hole is arranged on front panel, and in face of laser incident direction, the tail end of wide-angle taper hole arranges the inside of aperture sampling plate, and communicate with the logical light straight hole of the coaxial setting in aperture sampling plate rear end;
The front end of attenuating plate is provided with homogenize chamber, between homogenize chamber and the rear end face of attenuating plate, is provided with light transmission passage, and light transmission passage is parallel to the axis of wide-angle sampling taper hole, and take its for axis of symmetry be justify symmetrical;
The front end of output slab is provided with homogenize chamber, between homogenize chamber and rear end face, is provided with delivery outlet, and described delivery outlet and wide-angle sampling taper hole coaxially arrange; Homogenize chamber is that inside surface is the cavity of diffuse surface.
In the attenuator of above-mentioned superlaser homogenize chamber, the circular hole that the xsect of light transmission passage is some symmetry arrangement.
In the attenuator of above-mentioned superlaser homogenize chamber, the crescent hole that the xsect of light transmission passage is some symmetry arrangement.
In the attenuator of above-mentioned superlaser homogenize chamber, be also included in the diffuse transmission sheet that insert at wide-angle sampling taper hole middle part, diffuse transmission sheet is vertical with the axis of wide-angle sampling taper hole.
In the attenuator of above-mentioned superlaser homogenize chamber, diffuse transmission sheet material is quartz, silicon or alundum (Al2O3).
In the attenuator of above-mentioned superlaser homogenize chamber, the rear end of output slab is provided with detector spacing hole, and delivery outlet is over against the photosurface of detector.
In the attenuator of above-mentioned superlaser homogenize chamber, in homogenize chamber, be provided with diffuse transmission sheet.
In the attenuator of above-mentioned superlaser homogenize chamber, diffuse transmission sheet material is quartz, silicon or alundum (Al2O3).
In the attenuator of above-mentioned superlaser homogenize chamber, the material of front panel, aperture sampling plate, attenuating plate and output slab is graphite, aluminium, copper or copper aluminum composite material.
In the attenuator of above-mentioned superlaser homogenize chamber, the side to light of front panel is diffuse surface or mirror reflection surface.
The beneficial effect that the present invention has has:
1, in attenuator of the present invention, laser is coupled into composite design homogenize chamber and light hole through wide-angle sampling taper hole, make light beam output detector after diffuse reflection repeatedly and scattering, therefore can realize the light intensity attenuation of large multiple, in homogenize chamber, increased diffuse transmission sheet simultaneously, to the further homogenize of light beam, and improved the angle incident characteristic of attenuator.
2, in attenuator of the present invention, at wide-angle sampling taper hole middle part, be provided with diffuse transmission optical window, effective homogenize incident laser, improves the angular characteristics of attenuator.
3, in attenuator of the present invention, each unit adopts symmetrical structure design, can make attenuator insensitive to the direction of laser oblique incidence and putting position, reduced request for utilization, only need to demarcate the different incidence angles at a direction place and the relation of attenuation coefficient simultaneously, just can apply all incident directions, effectively reduce the demarcation difficulty of attenuator.
4, attenuator of the present invention adopts sandwich construction lamination to make, and has larger thermal contact resistance between each layer, during laser irradiation, can effectively reduce front panel temperature rise to the heat affecting of measuring system below.
5, attenuator of the present invention, by changing the parameter of differential declines unit, effectively regulates attenuation coefficient, has met different testing requirements.
Accompanying drawing explanation
Fig. 1 is homogenize of the present invention chamber attenuator unit structural representation;
Fig. 2 is light transmission passage structural representation on attenuation of the first kind plate of the present invention (the A-A section in Fig. 1);
Fig. 3 is light transmission passage structural representation on attenuation of the second kind plate of the present invention (the A-A section in Fig. 1);
Fig. 4 is light transmission passage structural representation on the third attenuating plate of the present invention (the A-A section in Fig. 1);
Fig. 5 is that attenuator attenuation coefficient of the present invention is with angle variation characteristic curve.
Fig. 6 is the schematic diagram that attenuator cloth of the present invention becomes array structure;
Reference numeral is as follows: 1-front panel; 2-diffuse transmission sheet; 3-aperture sampling plate; 4,6-homogenize chamber; 5-attenuating plate; 7-output slab; 8-logical light straight hole; 9-wide-angle sampling taper hole; 10-light transmission passage; 11-delivery outlet; 12-detector spacing hole.
Embodiment
As shown in Figure 1, superlaser homogenize chamber attenuator comprises front panel 1, aperture sampling plate 3, attenuating plate 5 and the output slab 7 setting gradually along incident laser direction.Front panel 1 and aperture sampling plate 3 laminations after, on it, be processed with wide-angle sampling taper hole 9, the openend of wide-angle sampling taper hole 9 is arranged on front panel 2, and in face of laser incident direction, tail end arranges the inside of aperture sampling plate 3, and communicates with the logical light straight hole 8 of the coaxial setting in aperture sampling plate 3 rear ends; The front end of attenuating plate 5 arranges homogenize chamber 4, the about 1mm of cavity thickness, and diameter 5mm, is processed as diffuse surface in the cavity in homogenize chamber; Between homogenize chamber 4 and the rear end face of attenuating plate, be provided with light transmission passage 10, described light transmission passage 10 is parallel to the axis of wide-angle sampling taper hole 9, and take its for axis of symmetry be justify symmetrical; The front end of output slab 7 is provided with homogenize chamber 6, is provided with delivery outlet 11 between homogenize chamber 6 and rear end face, and described delivery outlet 11 coaxially arranges with wide-angle sampling taper hole 9.In order to guarantee the consistent shape of attenuator and reliability, can be in each deck panels Design Orientation pin, its relative position is fixed, keep parameter constant.
The principle of work of superlaser homogenize chamber attenuator is, input laser is successively through homogenize chamber 6 and delivery outlet 11 on the homogenize chamber 4 on wide-angle sampling taper hole 9, logical light straight hole 8, attenuating plate 5, output board, finally be coupled on detector, because laser is after diffuse reflection repeatedly in two homogenize chambeies 4,6, diffuse transmission and absorbing, finally only has fraction light through delivery outlet 11 outputs, finally realize the large multiple decay of light laser, and arrange in pairs or groups by different designs, meet the attenuation requirement of different multiples.
In order further to improve the incident angle characteristic of attenuator, at wide-angle sampling taper hole 9 middle parts, be provided with diffuse transmission optical device 2, make laser through diffuse transmission device 2 to multiple directions scattering, weakened the space directivity of incident laser; The interior placement diffuse transmission optical device 2 in homogenize chamber 4,6, carries out repeatedly diffuse transmission to the laser of cavity wall reflection simultaneously, plays homogenize laser action.Diffuse transmission device 2 is selected and is made as pure quartz, alundum (Al2O3) etc. measuring the high saturating material of wavelength laser, and diffuse transmission optical device 2 all surfaces all carry out plucking processing, to the laser of all processes, all can realize diffuse scattering.This mode can effectively be improved the incident angle characteristic of attenuator, that is to say that working as incident laser is no longer the axis normal incidence along wide-angle sampling taper hole, but while thering is certain angle with axis, the attenuation coefficient of attenuator can remain unchanged or change less in a larger scope, thereby within the scope of wide-angle variations, still can keep basically identical attenuation coefficient, for the decay of different attitude laser powers.
As shown in Fig. 2-4, on attenuating plate 5, be processed with round symmetric figure light transmission passage 10, light transmission passage 10 can have multiple version, circumference array round straight hole for example, symmetrical crescent hole or other are drawn together other shapes, owing to adopting the symmetrical light transmission passage design of circle, make the attenuation characteristic of attenuator also there is circular symmetry, namely when incident laser is during with inclination angle incident, initial position regardless of attenuator and laser, only need to demarcate the different incidence angles at a direction place and the relation of attenuation coefficient, just can apply all incident directions, effectively reduce the demarcation difficulty of attenuator, increased the design freedom in attenuator application.
In addition in order to be applied to the Long-Duration Exposure of high energy and high power laser light, increase the anti-laser irradiation ability of front panel 1, the laser incidence surface of front panel 1 has been carried out to mirror-reflection processing or high diffuse reflection processing, adopt the mode of this plurality of plates stack simultaneously, between each layer, there is larger thermal contact resistance, during laser irradiation, can effectively reduce front panel temperature rise to the heat affecting of measuring system below.
The application of succeeding in superlaser power density spatial and temporal distributions measurement mechanism of above-mentioned homogenize chamber attenuator, Fig. 5 is that this attenuator attenuation coefficient is with angle variation characteristic curve, can find out, in oblique incidence angle, be within the scope of 40 °, its attenuation coefficient amplitude of variation is little, proof is when incident laser carries out angle variation within the scope of this, its power all can effectively be decayed, and because attenuator is for circle symmetrical structure, therefore be extended to other positions after can demarcating by the attenuation coefficient incident angle characteristic to some positions.
Fig. 6 has provided array attenuator and for light laser, has measured the structural representation of target spot instrument, on a target spot instrument panel, be evenly equipped with attenuator and the sensor of some arrays, attenuator adopts duralumin 7075 materials to make, can be for the measurement of the High energy laser beam distribution parameter of different wave length by changing different types of detector.Because the attenuator of this structure has compact conformation, breadth wise dimension is little, angular range is wide and insensitive to position, can realize the laser parameter measurement of high spatial resolution.
Claims (10)
1. a superlaser homogenize chamber attenuator, is characterized in that: comprise the front panel (1), aperture sampling plate (3), attenuating plate (5) and the output slab (7) that along incident laser direction, set gradually;
On described front panel (1) and aperture sampling plate (3), be processed with wide-angle sampling taper hole (9), the openend of described wide-angle sampling taper hole (9) is arranged on front panel (2), and in face of laser incident direction, the tail end of wide-angle taper hole (9) arranges the inside of aperture sampling plate (3), and communicates with the logical light straight hole (8) of the coaxial setting in aperture sampling plate (3) rear end;
The front end of described attenuating plate (5) is provided with homogenize chamber (4), between described homogenize chamber (4) and the rear end face of attenuating plate, be provided with light transmission passage (10), described light transmission passage (10) is parallel to the axis of wide-angle sampling taper hole () 9, and take its for axis of symmetry be justify symmetrical;
The front end of described output slab 7 is provided with homogenize chamber (6), is provided with delivery outlet (11) between homogenize chamber (6) and rear end face, and described delivery outlet (11) coaxially arranges with wide-angle sampling taper hole (9);
The cavity that described homogenize chamber (4,6) is diffuse surface for inside surface.
2. superlaser homogenize according to claim 1 chamber attenuator, is characterized in that: the circular hole that the xsect of described light transmission passage (10) is some symmetry arrangement.
3. superlaser homogenize according to claim 1 chamber attenuator, is characterized in that: the crescent hole that the xsect of described light transmission passage (10) is some symmetry arrangement.
4. according to one of any described superlaser homogenize chamber attenuator of claim 1-3, it is characterized in that: be also included in the diffuse transmission sheet (2) that insert at wide-angle sampling taper hole (9) middle part, described diffuse transmission sheet (2) is vertical with the axis of wide-angle sampling taper hole (9).
5. superlaser homogenize according to claim 4 chamber attenuator, is characterized in that: described diffuse transmission sheet (2) material is quartz, silicon or alundum (Al2O3).
6. according to one of any described superlaser homogenize chamber attenuator of claim 1-3, it is characterized in that: the rear end of described output slab (7) is provided with detector spacing hole (12), described delivery outlet (11) is over against the photosurface of detector.
7. according to one of any described superlaser homogenize chamber attenuator of claim 1-3, it is characterized in that: described homogenize chamber is provided with diffuse transmission sheet in (4,6).
8. superlaser homogenize according to claim 7 chamber attenuator, is characterized in that: described diffuse transmission sheet material is quartz, silicon or alundum (Al2O3).
9. according to one of any described superlaser homogenize chamber attenuator of claim 1-3, it is characterized in that: the material of described front panel (1), aperture sampling plate (3), attenuating plate (5) and output slab (7) is graphite, aluminium, copper or copper aluminum composite material.
10. according to one of any described superlaser homogenize chamber attenuator of claim 1-3, it is characterized in that: the side to light of described front panel (1) is diffuse surface or mirror reflection surface.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104019891A (en) * | 2014-06-20 | 2014-09-03 | 西北核技术研究所 | Attenuation sampling device used for large-angle high-energy laser incidence |
| CN104133302A (en) * | 2014-07-24 | 2014-11-05 | 中国工程物理研究院应用电子学研究所 | Intense laser sampling attenuator |
| CN104655408A (en) * | 2015-01-29 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Laser power monitoring device |
| CN106768310A (en) * | 2017-01-22 | 2017-05-31 | 中国工程物理研究院应用电子学研究所 | A kind of superlaser detector array sampling attenuating device |
| CN109579983A (en) * | 2018-12-27 | 2019-04-05 | 西北核技术研究所 | Beam sampling device for superlaser light distribution parameter measurement |
| CN109579984A (en) * | 2018-12-27 | 2019-04-05 | 西北核技术研究所 | A kind of laser beam homogenizes attenuator |
| CN113295274A (en) * | 2021-05-11 | 2021-08-24 | 中国科学院合肥物质科学研究院 | Detector array target sampling attenuation device for laser distribution measurement |
| CN114674425A (en) * | 2022-03-25 | 2022-06-28 | 西北核技术研究所 | Cascade attenuation structure based on light pipe sampling, installation method and detection array |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104019891A (en) * | 2014-06-20 | 2014-09-03 | 西北核技术研究所 | Attenuation sampling device used for large-angle high-energy laser incidence |
| CN104019891B (en) * | 2014-06-20 | 2016-04-06 | 西北核技术研究所 | For the decay sampler of large angle incidence superlaser |
| CN104133302A (en) * | 2014-07-24 | 2014-11-05 | 中国工程物理研究院应用电子学研究所 | Intense laser sampling attenuator |
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| CN104655408A (en) * | 2015-01-29 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Laser power monitoring device |
| CN106768310A (en) * | 2017-01-22 | 2017-05-31 | 中国工程物理研究院应用电子学研究所 | A kind of superlaser detector array sampling attenuating device |
| CN106768310B (en) * | 2017-01-22 | 2018-04-10 | 中国工程物理研究院应用电子学研究所 | A kind of superlaser detector array sampling attenuating device |
| CN109579983A (en) * | 2018-12-27 | 2019-04-05 | 西北核技术研究所 | Beam sampling device for superlaser light distribution parameter measurement |
| CN109579984A (en) * | 2018-12-27 | 2019-04-05 | 西北核技术研究所 | A kind of laser beam homogenizes attenuator |
| CN113295274A (en) * | 2021-05-11 | 2021-08-24 | 中国科学院合肥物质科学研究院 | Detector array target sampling attenuation device for laser distribution measurement |
| CN113295274B (en) * | 2021-05-11 | 2022-12-16 | 中国科学院合肥物质科学研究院 | Detector array target sampling attenuation device for laser distribution measurement |
| CN114674425A (en) * | 2022-03-25 | 2022-06-28 | 西北核技术研究所 | Cascade attenuation structure based on light pipe sampling, installation method and detection array |
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