CN103591888B - The measuring method of large-caliber off-axis non-spherical optical element geometric parameter - Google Patents
The measuring method of large-caliber off-axis non-spherical optical element geometric parameter Download PDFInfo
- Publication number
- CN103591888B CN103591888B CN201310517036.2A CN201310517036A CN103591888B CN 103591888 B CN103591888 B CN 103591888B CN 201310517036 A CN201310517036 A CN 201310517036A CN 103591888 B CN103591888 B CN 103591888B
- Authority
- CN
- China
- Prior art keywords
- optical element
- checked
- spherical
- geometric parameter
- aspherical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The measuring method of large-caliber off-axis non-spherical optical element geometric parameter, relates to field of optical detection, solves the problem that existing large-caliber off-axis non-spherical optical element geometric parameter is difficult to Measurement accuracy; Adjustment compensator, interferometer and non-spherical element three to be checked are coaxial.Use the laser tracker coordinate of measuring compensator outer surface and the coordinate at aspheric mirror place to be checked respectively.The coordinate data that using compensation device cylinder place records, the optical axis direction of fitting aspherical element.According to the optical axis direction of matching, the measurement of coordinates point at aspheric surface place to be checked under surving coordinate system is rotated, make optical axis that postrotational measurement point is corresponding parallel with surving coordinate system Z axis.To the corner cube reflector centre of sphere measurement point coordinate of postrotational aspheric mirror contact position, carry out nonlinear least square fitting according to surface equation, obtain the geometric parameter of aspherical optical element to be checked.This method measuring process is simple, is applicable to the measuring and calculating of large-caliber off-axis non-spherical element geometric parameter.
Description
Technical field
The present invention relates to field of optical detection, be specifically related to the measuring method of large-caliber off-axis non-spherical optical element geometric parameter.
Background technology
Along with developing rapidly of space optics and astronomical optics, the demand of large-caliber off-axis non-spherical optical element is increasing.Non-spherical element is used in optical design, can than aspherical elements more effectively aberration correction.Off-axis aspheric surface element can also avoid central obscuration, ensures compact conformation, improves transport function, realizes Large visual angle.So the optical system being core with large-caliber off-axis non-spherical element gains great popularity in fields such as space remote sensing, astronomical sight, surveies of deep space.
The processing of non-spherical element and detection difficulty are far above aspherical elements.Each point radius-of-curvature in aspheric surface beyond summit and the radius-of-curvature at summit place different, make again empty vertex position be difficult to measure from axle characteristic, cause the geometric parameter (vertex curvature radius, circular cone coefficient, higher-order coefficients etc.) of off-axis aspheric surface element to be difficult to Measurement accuracy.In optical system, the detection accuracy of non-spherical element geometric parameter guarantees the prerequisite of whole system performance, therefore for large-caliber off-axis non-spherical mirror, needs to seek a kind ofly to have high precision, high reliability and the good geometric parameter measurement method of versatility.
The measuring method of current non-spherical element geometric parameter is divided into non-cpntact measurement and contact measurement two kinds.Non-contact measurement method is mainly based on the interferometry that light wave face compensates, and aspheric geometric parameter is obtained by face graphic data matching, and the slight error in surface shape measurement may cause larger geometric parameter measurement error, and measuring system is usually more complicated.Contact measurement uses three coordinate machine or laser tracker to realize, and its accuracy of measurement is relevant with measuring process and data processing method.The method that the use interferometer proposed in the patent of the people such as Wang Xiaokun and laser tracker measure radius-of-curvature jointly is only suitable for the detection with optical spherical surface element.And the employing laser tracker proposed in the patent of the people such as Li Ruigang is measured in the method for aspheric surface vertex radius, need the locus of calculating aspheric surface summit, no longer applicable for off-axis aspheric surface element.
Summary of the invention
The present invention is the problem that the existing large-caliber off-axis non-spherical optical element geometric parameter of solution is difficult to Measurement accuracy, provides a kind of measuring method of large-caliber off-axis non-spherical optical element geometric parameter.
The measuring method of large-caliber off-axis non-spherical optical element geometric parameter, the method is realized by following steps:
Step one, adjustment compensator, interferometer are coaxial with aspherical optical element to be checked;
Step 2, employing laser tracker and spherical corner cube reflector be the coordinate data of measuring compensator cylinder and the coordinate data at aspherical optical element minute surface place to be checked respectively;
Step 3, the coordinate data of compensator cylinder utilizing step 2 to obtain, the optical axis direction of matching aspherical optical element to be checked; Being specially: to the coordinate data of compensator cylinder, by minimizing the standard deviation of measurement point to optical axis distance, calculating the aspherical optical element optical axis direction to be checked under acquisition surving coordinate system;
The measurement of coordinates point of aspherical optical element to be checked under surving coordinate system rotates by the optical axis direction of step 4, foundation matching, makes the optical axis that postrotational measurement point is corresponding parallel with the Z axis under surving coordinate system;
Step 5, spherical corner cube reflector centre of sphere measurement point coordinate to postrotational aspherical optical element to be checked, carry out nonlinear least square fitting, obtain the geometric parameter of aspherical optical element to be checked.
Beneficial effect of the present invention:
One, the present invention adopts the high precision option surving coordinate data of laser tracker, and ensures that the rotary angle encoder that laser is followed the tracks of moves less in the measurements, thus improves the measuring accuracy of coordinate to a certain extent.Utilize compensator and aspheric coaxial relation to be checked, the measurement of coordinates point at aspheric surface place to be checked is rotated to the optical axis position parallel with Z axis, thus can the mathematical model of Accurate Analysis measurement point, and utilize computing machine to carry out geometric parameter that surface fitting obtains aspherical optical element.Its data handling procedure comprises following three core procedure: a, matching optical axis: to the coordinate data at compensator face of cylinder place, by minimizing the standard deviation of measurement point to optical axis distance, calculates the optical axis direction under surving coordinate system.B, rotate aspheric mirror place to be checked measurement point coordinate: according to the rotation matrix rotated by the optical axis under surving coordinate system to Z-direction, rotate the measurement of coordinates point at aspheric mirror place to be checked to new position.C, matching corner cube reflector centre of sphere place curved surface are when contact measurement off-axis aspheric surface element, and meet fixing geometric relationship between the centre of sphere of spherical corner cube reflector and non-spherical element to be measured, centre of sphere measurement point forms an envelope surface.Use computer-aided derivation, the surface equation of this centre of sphere envelope surface can be obtained.To the measurement point at postrotational aspheric mirror place, carry out matching with the centre of sphere place surface equation of deriving, use confidence region algorithm to carry out the geometric parameter solving aspheric mirror.From given initial solution, calculate in progressive alternate and sound out step-length, correct confidence region, thus update until obtain approximate optimal solution.
Two, the present invention is by ensureing that the rotary angle encoder of laser tracker moves less as far as possible, and use the high accuracy option of laser tracker, and adopt curved surface fitting model accurately to calculate the geometric parameter of aspheric mirror, effectively improve estimation precision, and measure simple and efficient, reproducible.The present invention can be applicable to the polishing stage of large-caliber off-axis non-spherical mirror or the geometric parameter measurement of final detection-phase.
Accompanying drawing explanation
Fig. 1 is the pick-up unit figure of the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
Fig. 2 is the cylinder instrumentation plan of compensator in the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
Fig. 3 is the instrumentation plan of aspherical optical element to be checked in the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
Fig. 4 is the calculating schematic diagram of optical axis in the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
Fig. 5 is the spherical curved surface at corner cube reflector centre of sphere place and the geometric relationship schematic diagram of aspherical optical element in the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
Fig. 6 is the process flow diagram adopting confidence region Algorithm for Solving non-linear least square problem in the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
Fig. 7 is the coordinate data of compensator and the aspherical optical element to be checked adopting the measuring method measurement of large-caliber off-axis non-spherical optical element geometric parameter of the present invention to obtain;
Fig. 8 is the optical axis schematic diagram adopting the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention to calculate;
Fig. 9 is the schematic diagram rotated surving coordinate according to optical axis direction in the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
Figure 10, the schematic diagram of the curved surface at the centre of sphere place of spherical corner cube reflector obtained for matching in the measuring method of large-caliber off-axis non-spherical optical element geometric parameter of the present invention;
In figure: 1, interferometer, 2, compensator, 3, laser tracker, 4, aspherical optical element to be checked, 5, spherical corner cube reflector, 6, interferometer position control, 7, compensator position control, 8, aspherical optical element position control to be checked, a, compensator cylinder place measurement point coordinate, b, aspherical optical element measurement point coordinate to be checked, c, optical axis, d, the postrotational point coordinate of aspherical optical element measurement point to be checked, e, normal.
Embodiment
Embodiment one, composition graphs 1 to Fig. 6 illustrate this enforcement, the measuring method of large-caliber off-axis non-spherical optical element geometric parameter described in present embodiment, the measurement devices such as using compensation device, laser interferometer, laser tracker and regulator also calculate the geometric parameter of off-axis aspheric surface element.The method flow process is as follows:
Step one, to be adjusted the relative position relation of interferometer 1, compensator 2 and aspherical optical element 4 to be checked by interferometer position control 6, compensator position control 7 and aspherical optical element position control 8 to be checked, export reach zero striped and face shape error is minimum by observing and measure interferometer 1, thus guarantee that three is coaxial.
The regulator invariant position of step 2, fixing interferometer 1, compensator 2 and aspherical optical element to be checked 4 correspondence, uses laser tracker 3 and spherical corner cube reflector 5 to measure the coordinate data at one group of compensator cylinder place and the coordinate at one group of aspherical optical element 4 place to be checked respectively.Its contact measurement track respectively as shown in Figure 2 and Figure 3; The coordinate data of compensator 2 cylinder recorded is designated as [col_x
1, col_y
1, col_z
1; Col_x
2, col_y
2, col_z
2; Col_x
m, col_y
m, col_z
m; ], the coordinate data at aspherical optical element 4 place to be checked is designated as [x
1, y
1, z
1; x
2, y
2, z
2; X
n, y
n, z
n].
The coordinate data that step 3, using compensation device 2 cylinder record, the optical axis direction of fitting aspherical element.Coordinate data [the col_x of compensator 2 cylinder
1, col_y
1, col_z
1; Col_x
2, col_y
2, col_z
2; Col_x
m, col_y
m, col_z
m] with the relativeness of optical axis as shown in Figure 4, namely this group volume coordinate is to the distance D of optical axis
iall equal.If optical axis equation under surving coordinate system is
Be [col_x to a sphere centre coordinate
i, col_y
i, col_z
i] measurement point, it to the space length of optical axis is
To each measurement point [col_x in compensator cylinder place
1, col_y
1, col_z
1; Col_x
2, col_y
2, col_z
2; Col_x
m, col_y
m, col_z
m], the standard deviation of minimized distance D:
[a
x,a
y,a
z,b
x,b
y]＝argmin{std(D
1,D
2,...,D
m)}，(3)
The vector of unit length obtaining optical axis direction is:
Step 4, by rotation matrix T ∈ R
3 × 3by vector
rotate to direction [0,0,1], namely
Wherein T is calculated by formula (6):
By rotation matrix T, the coordinate points of the aspherical optical element under surving coordinate system can be rotated equally.Because rotational transform belongs to rigid transformation, do not change the relative position relation between measurement point, therefore do not affect the geometric parameter fitting result of aspherical optical element with postrotational surving coordinate.
Step 5, measurement point to postrotational aspherical optical element place, its optical axis is parallel to vector [0,0,1], and namely optical axis is parallel with the Z axis of surving coordinate system.The centre of sphere point coordinate remembering postrotational aspherical optical element place is [r_x
1, r_y
1, r_z
1; r_x
2, r_y
2, r_z
2; R_x
n, r_y
n, r_z
n], meet centre of sphere envelope surface equation:
Wherein [d
1, d
2, d
3] representing empty apex coordinate, c is the radius-of-curvature of aspheric surface optical element peak, and k is circular cone coefficient, A
1, A
2, A
3, A
4deng being higher-order coefficients.
for the parameter vector (namely needing the value solved in least square method) be made up of the geometric parameter of empty apex coordinate and aspherical optical element.As shown in Figure 5, there is fixing geometric relationship in the curved surface at the centre of sphere place of spherical corner cube reflector and aspherical optical element,
Wherein
for contact point [x in aspheric surface
0, y
0, z
0] place unit in normal direction, e is the radius length of spherical corner cube reflector, and this length is known and fixing in the measurements.If the equation of aspherical optical element is
z＝g(x,y；c,k,A
1,A
2,A
3,A
4,...)，(9)
Partial derivative is asked to it:
Then contact point [x
0, y
0, z
0] place unit in normal direction
for
The surface equation at centre of sphere place when aspherical optical element is measured can be obtained, i.e. the concrete form of formula (7) by formula (8) and formula (9).To surface equation formula (7) and the measurement point [r_x thereof at centre of sphere place
1, r_y
1, r_z
1; r_x
2, r_y
2, r_z
2; R_x
n, r_y
n, r_z
n], its Fitting is constructed as follows non-linear least square problem
Figure 6 shows that the step using the non-linear least square problem shown in confidence region Algorithm for Solving formula (12).Wherein,
the gradient of objective function,
ui: Hai Sen (Hessian) matrix of objective function; ε: threshold value, for judging the graded size degree of objective function; ▽: gradient operator; η
1: threshold value, makes confidence region reduce or constant critical value, η
2: threshold value, makes the critical value that confidence region is constant or expand; ξ
1: scaling factor, makes the scaling factor that confidence region reduces; ξ
2: scaling factor, makes the scaling factor that confidence region expands;
eventually through the parameter vector that Algorithm for Solving obtains
value; Confidence region algorithm obtains souning out step-length by model solution
till progressive alternate guidance obtains satisfactory approximate optimal solution.It has very strong convergence, effectively can solve the non-linear least square problem shown in formula (11).First need to specify initial point
and the upper bound Δ of confidence region Δ
up, time initial, confidence region is Δ
0∈ (0, Δ
up).Algorithm provides Δ in i-th iteration cycle
i+1affiliated confidence region, new confidence region size depends on exploration step-length
quality, if it is better to sound out step-length, then confidence region amplifies or constant, otherwise confidence region reduces.For evaluating exploration step-length
whether acceptable evaluation function ρ
ifor:
Wherein
secondary model function for structure:
If ρ
i>=η
1, then accept this exploration step-length, namely have
In formula,
for in solution procedure, parameter vector during i-th iteration
value, evaluation function ρ
isimultaneously also for correcting confidence region scope, it has weighed secondary model
with objective function
approximation ratio.ρ
ivalue more more approach objective function close to 1, now can increase Δ
ito expand confidence region; If ρ
ibe greater than 0 but depart from 1, confidence region is constant; If ρ
iclose to 0, then reduce Δ
ito reduce confidence region.
Embodiment two, composition graphs 7 to Figure 10 illustrate present embodiment, and present embodiment is for adopting the embodiment of the measuring method of the large-caliber off-axis non-spherical optical element geometric parameter described in embodiment one:
The relative position relation of steps A, adjustment compensator, interferometer and non-spherical element to be checked, reaches zero striped and face shape error is minimum by observing and measure interferometer output, thus guarantees that three is coaxial.
Step B, fixing interferometer, compensator and non-spherical element relative position to be checked are constant, use laser tracker to measure the coordinate at one group of compensator cylinder place and the coordinate at one group of aspheric mirror place to be checked respectively.
Implementation step A and step B, obtains [col_x
1, col_y
1, col_z
1; Col_x
2, col_y
2, col_z
2; Col_x
m, col_y
m, col_z
m] and [x
1, y
1, z
1; x
2, y
2, z
2; X
n, y
n, z
n] to be presented in three-dimensional system of coordinate as shown in Figure 7 respectively.
Step C, the coordinate data adopting compensator cylinder place to record, the optical axis direction of fitting aspherical element, obtaining optical axis direction is
its position as Fig. 8 identify.
Step D, according to the optical axis direction of matching, the measurement of coordinates point at aspheric surface place to be checked under surving coordinate system to be rotated, make optical axis that postrotational measurement point is corresponding parallel with surving coordinate system Z axis.Be specially:
Utilize the result of calculation of optical axis direction
obtain rotation matrix
Coordinate under surving coordinate system is rotated, its postrotational coordinate [r_x
1, r_y
1, r_z
1; r_x
2, r_y
2, r_z
2; R_x
n, r_y
n, r_z
n], as shown in Figure 9.
Step e, corner cube reflector centre of sphere measurement point coordinate to postrotational aspheric mirror contact position, carry out nonlinear least square fitting according to its actual surface equation met, obtain the geometric parameter of aspherical optical element to be checked.Be specially: surface fitting is carried out to postrotational coordinate data, obtain unknown parameter vector
fitting result, parameter vector
in namely contain aspheric geometric parameter c, k, A
1, A
2, A
3, A
4deng.The wherein curved surface at corner cube reflector place that obtains of matching, as shown in Figure 10.
Repetition steps A causes step e and takes multiple measurements, and carries out precision and consistency analysis.
Claims (4)
1. the measuring method of large-caliber off-axis non-spherical optical element geometric parameter, is characterized in that, the method is realized by following steps:
Step one, adjustment compensator (2), interferometer (1) is coaxial with aspherical optical element to be checked (4);
Step 2, employing laser tracker (3) and spherical corner cube reflector (5) coordinate data of measuring compensator cylinder and the coordinate data at aspherical optical element to be checked (4) minute surface place respectively;
Step 3, the coordinate data of compensator cylinder utilizing step 2 to obtain, the optical axis direction of matching aspherical optical element to be checked (4); Being specially: to the coordinate data of compensator cylinder, by minimizing the standard deviation of measurement point to optical axis distance, calculating aspherical optical element to be checked (4) optical axis direction under acquisition surving coordinate system;
The measurement of coordinates point of aspherical optical element (4) to be checked under surving coordinate system rotates by the optical axis direction of step 4, foundation matching, makes the optical axis that postrotational measurement point is corresponding parallel with the Z axis under surving coordinate system;
Step 5, spherical corner cube reflector (5) centre of sphere measurement point coordinate to postrotational aspherical optical element to be checked (4), carry out nonlinear least square fitting, obtain the geometric parameter of aspherical optical element to be checked (4).
2. the measuring method of large-caliber off-axis non-spherical optical element geometric parameter according to claim 1, it is characterized in that, the measurement of coordinates point of aspherical optical element (4) to be checked under surving coordinate system rotates by the optical axis direction according to matching described in step 4, concrete spinning solution is: according to the rotation matrix rotated by the optical axis under surving coordinate system to Z-direction, rotate the measurement of coordinates point of aspherical optical element to be checked (4) to new position.
3. the measuring method of large-caliber off-axis non-spherical optical element geometric parameter according to claim 1, it is characterized in that, spherical corner cube reflector (5) centre of sphere measurement point coordinate to postrotational aspherical optical element to be checked (4) described in step 5, the concrete grammar carrying out nonlinear least square fitting is: utilize the geometric relationship met between the centre of sphere of spherical corner cube reflector (5) and aspherical optical element to be checked (4), calculate the envelope surface equation at spherical corner cube reflector (5) centre of sphere place at aspherical optical element to be checked (4) place, to the measurement point at postrotational aspherical optical element to be checked (4) place, matching is carried out with the surface equation at the centre of sphere place of deriving spherical corner cube reflector (5), confidence region algorithm is used to carry out the geometric parameter solving aspherical optical element to be measured (4).
4. the measuring method of large-caliber off-axis non-spherical optical element geometric parameter according to claim 1, it is characterized in that, by compensator position control (7) adjustment compensator (2), interferometer position control (6) adjustment interferometer (1) in step one, aspherical optical element position control (8) to be checked adjusts aspherical optical element to be checked (4), makes interferometer (1), compensator (2) and aspherical optical element to be checked (4) coaxial.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310517036.2A CN103591888B (en) | 2013-10-28 | 2013-10-28 | The measuring method of large-caliber off-axis non-spherical optical element geometric parameter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310517036.2A CN103591888B (en) | 2013-10-28 | 2013-10-28 | The measuring method of large-caliber off-axis non-spherical optical element geometric parameter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103591888A CN103591888A (en) | 2014-02-19 |
| CN103591888B true CN103591888B (en) | 2016-04-27 |
Family
ID=50082122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310517036.2A Expired - Fee Related CN103591888B (en) | 2013-10-28 | 2013-10-28 | The measuring method of large-caliber off-axis non-spherical optical element geometric parameter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103591888B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103926058B (en) * | 2014-03-27 | 2016-08-17 | 中国科学院长春光学精密机械与物理研究所 | The method using autocollimatic plane mirror measurement optical axis in Aspherical-surface testing |
| CN104070418B (en) * | 2014-06-30 | 2016-08-24 | 中国科学院长春光学精密机械与物理研究所 | Axial symmetry surface shape of optical aspheric surface On-line Measuring Method |
| CN106154762B (en) * | 2015-04-15 | 2019-08-23 | 上海微电子装备（集团）股份有限公司 | A kind of interferometric error calibrating installation and calibration method |
| CN105352453B (en) * | 2015-11-12 | 2017-12-15 | 浙江大学 | Aspherical mirror vertex curvature radius measuring method in nonzero digit interference detecting system |
| CN105627945B (en) * | 2015-12-21 | 2017-12-26 | 中国科学院长春光学精密机械与物理研究所 | Non-spherical element center and the measurement apparatus and measuring method of cylindrical center shift amount |
| CN106197311B (en) * | 2016-07-01 | 2018-11-27 | 苏州大学 | A kind of detection method and device of cylinder and cylinder converging lenses |
| CN106840023B (en) * | 2016-07-25 | 2018-02-16 | 中国科学院长春光学精密机械与物理研究所 | The complex-curved optical parametric of heavy caliber is accurately tested and caliberating device and method |
| CN106813594B (en) * | 2017-01-03 | 2019-02-01 | 中国科学院上海光学精密机械研究所 | Heavy caliber glancing incidence reflects focus lamp high-precision surface shape detection method |
| CN106907991B (en) * | 2017-02-24 | 2019-06-07 | 湖北航天技术研究院总体设计所 | A kind of off-axis aspheric mirror zero testing alignment methods based on compensator |
| CN108287968B (en) * | 2018-01-29 | 2021-09-10 | 广东曼克维通信科技有限公司 | Method, device and system for measuring and calculating parallelism of antenna aperture and scanning frame |
| CN111664803B (en) * | 2020-06-04 | 2021-05-18 | 中国科学院西安光学精密机械研究所 | Rapid detection method and device for off-axis parabolic reflector |
| CN112985301B (en) * | 2021-02-25 | 2022-11-11 | 北京空间机电研究所 | Method for measuring off-axis aspheric surface by using non-contact aspheric surface contourgraph |
| CN117664021A (en) * | 2023-03-06 | 2024-03-08 | 中国科学院长春光学精密机械与物理研究所 | Aspherical surface shape error fitting method and apparatus |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101949691A (en) * | 2010-09-07 | 2011-01-19 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile |
| CN102128599A (en) * | 2010-12-27 | 2011-07-20 | 中国科学院长春光学精密机械与物理研究所 | Contact aspheric surface shape test device |
| CN102168955A (en) * | 2011-05-18 | 2011-08-31 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting curvature radius of optical spherical surface |
| CN102288132A (en) * | 2011-05-18 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument |
| CN102879182A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring off-axis aspheric surface eccentricity by laser tracker |
-
2013
- 2013-10-28 CN CN201310517036.2A patent/CN103591888B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101949691A (en) * | 2010-09-07 | 2011-01-19 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile |
| CN102128599A (en) * | 2010-12-27 | 2011-07-20 | 中国科学院长春光学精密机械与物理研究所 | Contact aspheric surface shape test device |
| CN102168955A (en) * | 2011-05-18 | 2011-08-31 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting curvature radius of optical spherical surface |
| CN102288132A (en) * | 2011-05-18 | 2011-12-21 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument |
| CN102879182A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院长春光学精密机械与物理研究所 | Method for measuring off-axis aspheric surface eccentricity by laser tracker |
Non-Patent Citations (1)
| Title |
|---|
| 激光跟踪仪测量二次离轴非球面曲率半径的方法;郭玲玲 等;《激光与光电子学进展》;20130930;091202-1至091202-6 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103591888A (en) | 2014-02-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103591888B (en) | The measuring method of large-caliber off-axis non-spherical optical element geometric parameter | |
| CN102997863B (en) | Direct detection system for surface-shape errors in full-aperture optical aspheric surfaces | |
| CN103926058B (en) | The method using autocollimatic plane mirror measurement optical axis in Aspherical-surface testing | |
| CN106052556B (en) | A kind of three coordinate measuring machine spatial domain coordinates compensation method | |
| CN102997864B (en) | Detection system of large-aperture optical aspherical mirror | |
| CN105423948A (en) | Splicing-interference-detection aspheric surface shape apparatus using distorting lens and method thereof | |
| CN103134660B (en) | Method acquiring telescope primary and secondary mirror alignment error based on astigmatism decomposition | |
| CN102620683B (en) | Sub-aperture stitching detects the compensation method of aspheric surface alignment error | |
| CN105547179B (en) | A kind of measuring method of aspherical equation | |
| CN101539397B (en) | Method for measuring three-dimensional attitude of object on precision-optical basis | |
| CN101949691A (en) | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile | |
| CN109724532B (en) | Accurate testing device and method for geometric parameters of complex optical curved surface | |
| CN103292738A (en) | Absolute detection method for surface shape error of spherical surface | |
| CN106404354A (en) | Device and method for measurement of aspheric compensator transmission wavefront equation | |
| CN103234480A (en) | Rapid surface shape detection method for circular convex aspheric surfaces | |
| CN103557791B (en) | A kind of large-caliber aspheric surface primary mirror secondry constants measurement mechanism and method | |
| CN105444693A (en) | Surface form error measurement method for shallow aspheric surface | |
| CN107063161A (en) | The surface shape detection apparatus and detection method of a kind of freeform optics element | |
| CN106643613A (en) | Position error calibration method for on-line measurement of aspheric surface | |
| CN104075668A (en) | High-accuracy geographic sense measuring method in convex hyperboloid Hindle detection | |
| CN103499310B (en) | A kind of laser tracker measures the device and method of hyperbolic mirror parameter | |
| Zhang et al. | Novel method of positioning optical freeform surfaces based on fringe deflectometry | |
| CN102506761B (en) | Method using laser tracker to measure aspherical surface peak curvature radius | |
| CN103134443B (en) | A kind of large-caliber large-caliber-thicknreflector reflector surface shape auto-collimation detection device and method | |
| CN105352453A (en) | Aspheric vertex curvature radius measurement method in nonzero digit interference detection system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160427 Termination date: 20171028 |