CN106813594B - Heavy caliber glancing incidence reflects focus lamp high-precision surface shape detection method - Google Patents
Heavy caliber glancing incidence reflects focus lamp high-precision surface shape detection method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
A kind of heavy caliber glancing incidence reflection focus lamp high-precision surface shape detection method, measuring tool includes laser plane interferometer, beam-expanding collimation system, plane transmission standard mirror, precision rotation platform and computer processing system.This method obtains heavy caliber parallel detection beam by carrying out beam-expanding collimation to laser plane interferometer, and rim of the mouth diameter splicing detection system is formed with precision rotation platform, realize that heavy caliber glancing incidence reflects focus lamp three dimension profile measurement, reduce mechanical system difficulty, rim of the mouth diameter positioning accuracy is improved, to ensure that face shape splices detection accuracy.
Description
Technical field
The present invention relates to heavy caliber glancing incidence Aspherical-surface testing, especially a kind of heavy caliber glancing incidence reflection focus lamp is (such as
Kirpatrick-Baez mirror) high-precision surface shape detection method.
Background technique
Heavy caliber glancing incidence, which reflects focus lamp (such as KB mirror), realizes the 2 of keV energy section X-ray using glancing incidence total reflection principle
Focal imaging is tieed up, it can be achieved that X-ray aerial image diagnoses.KB curvature radius generally has several hundred rice, has biggish collection three-dimensional
Angle, and multiple tracks easy to accomplish is imaged, and has become aerial image diagnostic tool important in ICF research.In order to obtain high photon
Flux and high-resolution, the requirement for reflecting focus lamp surface quality and pattern to heavy caliber glancing incidence are also higher and higher.It is non-contact
Heavy caliber glancing incidence reflection focus lamp measurement method mainly has sequential scan method and interferometry.
The basic principle of the contourgraph of aspheric surface contour measurement based on sequential scan realization are as follows: two beam directional lights are along to be measured
The principal direction in face is scanned, after reflection interference fringe through lens imaging on the detector, during the scanning process, face shape be become
Change, the position by recording each striped obtains the angle value of corresponding tested point.Run-down obtains one group of angle change
Curve, and altitude curve, then can be obtained by the integral of angle curve.However, long-range profile instrument is line scan pattern, it can only
Two-dimensional surface shape information is measured, whole 3 d shape distribution cannot be obtained, therefore long-range profile instrument is only used for KB mirror element angle
Error final inspection can not provide the process of 3 d shape information guiding element.
The available 3 d shape distribution of interferometry, can instruct KB mirror element to process, generally be swashed using small-bore
Optical plane interferometer zygote bore joining method measures, and the bore of small-bore laser plane interferometer is φ 100mm, leads to
It crosses translation interferometer and realizes unified measurement.In the measurement of rim of the mouth diameter, it is too many to will appear striped for interference image after interferometer translation
So that camera is difficult to the case where differentiating, need to be adjusted interferometer angle, so that interference fringe is minimum, can be interfered
Instrument precise measurement.Rim of the mouth diameter stitching algorithm is recorded by mechanical system motion realizes the positioning of rim of the mouth diameter, and is counted by overlapping region
The inclination factor and translation coefficient between adjacent rim of the mouth diameter are calculated, to realize that rim of the mouth diametric plane shape is spliced.This interferometric method
Have the disadvantages that small-bore laser plane interferometer needs while carrying out position translation and angle adjustment, mechanical system is put down
Shift error and the superposition of angle alignment error will increase rim of the mouth diameter positioning accuracy；The corresponding reference mirror region in rim of the mouth diameter overlapping region is not
Together, it which increases error is calculated to inclination factor and translation coefficient in the splicing calculating of rim of the mouth diameter, influences unified face shape and spells
Connect precision.
Summary of the invention
The invention proposes a kind of heavy caliber glancing incidence reflect focus lamp high-precision surface shape detection method, this method by pair
Laser plane interferometer carries out beam-expanding collimation and obtains heavy caliber parallel detection beam, and spells with precision rotation platform composition rim of the mouth diameter
Detection system is connect, realizes that heavy caliber glancing incidence reflects focus lamp three dimension profile measurement, and reduce mechanical system difficulty, improves
Rim of the mouth diameter positioning accuracy, to ensure that face shape splices detection accuracy.
Technical solution of the invention is as follows:
A kind of heavy caliber glancing incidence reflection focus lamp high-precision surface shape detection method, measuring tool include laser plane interference
Instrument, beam-expanding collimation system, plane transmission standard mirror, precision rotation platform and computer processing system；The precision rotation platform
For placing heavy caliber glancing incidence reflection focus lamp to be measured；
The positional relationship of said elements is as follows: the relevant light direction issued along the laser plane interferometer is successively described
Beam-expanding collimation system, the plane transmission standard mirror and the heavy caliber glancing incidence to be measured reflect focus lamp, it is described
Precision rotation tabletop of platform is horizontal positioned, and the computer processing system is flat with laser plane interferometer and precision rotation respectively
The control terminal of platform is connected, it is characterized in that, this method includes the following steps:
1) heavy caliber glancing incidence to be measured reflection focus lamp is placed on the table top of the precision rotation platform, it is to be measured big
The longitudinal direction that bore glancing incidence reflects focus lamp is parallel with precision rotation tabletop of platform, and heavy caliber glancing incidence to be measured reflects
The tested surface of focus lamp is facing to the directional light through the plane transmission standard mirror；
2) directional light that the laser plane interferometer described in issues is irradiated to heavy caliber transmission mark after beam-expanding collimation system
On quasi- mirror, a part of directional light is reflected back interferometer through the plane of reference of transmission criteria mirror, forms reference light, another part directional light
It is anti-through the tested surface through being irradiated on the tested surface of heavy caliber glancing incidence reflection focus lamp to be measured for the transmission criteria mirror
The laser plane interferometer is returned after penetrating, forms detection light, which interferes with the reference light, generates dry
Relate to striped；By adjusting the posture of heavy caliber glancing incidence reflection focus lamp, keep the corresponding interference fringe in its central area most sparse；
3) maximum of measurement result is calculated according to the manuscript paper shape distribution that heavy caliber glancing incidence to be measured reflects focus lamp
Gradient value Gmax and edge sail angle α max, the calculation method of gradient are as follows: using longitudinal direction as x-axis, short side direction y
Axis, detection beam direction are z-axis, and major and minor axis central point is coordinate origin o on tested surface, and the gradient distribution of measurement result is processing
Drawing face shape be distributed z value along the growth rate of oxy in-plane twice namely z value to twice of x, y local derviation sum；The meter of drift angle
Calculation method are as follows: tangent, as drift angle are negated to gradient value；
4) it calculates and chooses sub-aperture edge greatest gradient Gsub and corresponding angle [alpha] sub, sub-aperture greatest gradient is by 1/ (6
Pixel/period × interferometer resolution ratio) it determines, corresponding angle [alpha] sub is obtained by negating tangent to sub-aperture greatest gradient Gsub
?；
5) the area size's conduct for selecting manuscript paper shape distribution gradient value to be less than sub-aperture edge greatest gradient Gsub
The size of sub-aperture selects relative rotation angle α adj of the α sub/3 as adjacent sub-aperture, the number n of sub-aperture to pass through α
Max/ α adj and rounding up is calculated；
6) distinguished by precision rotation platform courses heavy caliber heavy caliber glancing incidence reflection focus lamp to be measured counterclockwise and suitable
Hour hands rotate, and are divided into α adj between the angle of rotation, and every rotation one-shot measurement is primary, pendulous frequency n, obtain n sub- aperture planes
Shape distributed data；
7) by existing rim of the mouth diameter stitching algorithm, (stitching algorithm is shown in that the sub-aperture stitching of large plano-optics interference detection is ground
Study carefully, imperial court is warm and sunny, Institutes Of Technology Of Nanjing's master's thesis, p20-p24), it is distributed by rim of the mouth diameter overlapping region face shape and calculates phase
The inclination factor and axial translation coefficient of adjacent rim of the mouth diameter realize the splicing of rim of the mouth diameter data, obtain unified KB mirror surface-shaped detection knot
Fruit.
Technical effect of the invention
The present invention is based on the rim of the mouth diameter splicing detection system that large-caliber laser flat interferometer and precision rotation platform form,
Its advantage has:
1) it can get heavy caliber KB mirror high-precision three-dimensional face shape information, can be used for instructing mirror finish；
2) the one-dimensional rotary motion for only needing to realize tested KB mirror in measurement process by precision rotation platform, overcomes biography
System sub-aperture stitching method needs the movement for multiple dimensions such as translating and rotating to bring asking for sub-aperture positioning accuracy reduction simultaneously
Topic；
3) compared with the measurement of traditional sub-aperture stitching, the corresponding reference plane position phase in this method adjacent sub-aperture overlapping region
Together, therefore the plane of reference will not bring inclination factor and axial translation system errors in splicing calculating process, improve splicing meter
Calculate precision.
Detailed description of the invention
Fig. 1 is Large diameter glancing incidence reflection focus lamp detection device schematic diagram of the present invention.
In figure, 1- laser plane interferometer, 2- beam-expanding collimation system, 3- transmission criteria mirror, 4- precision rotation platform, 5- is big
Bore glancing incidence reflects focus lamp, 6- computer processing system, 7- tested surface, the 8- plane of reference.
Measurement result gradient distribution analog result figure when Fig. 2 is the measurement of ellipse cylinder KB mirror
Fig. 3 is the interference fringe picture of ellipse cylinder KB mirror measurement
Fig. 4 is the sub-aperture diametric plane shape distribution map of ellipse cylinder KB mirror measurement
Fig. 5 is the unified face shape distribution map that ellipse cylinder KB mirror splices
Specific embodiment
Embodiment 1.
Heavy caliber glancing incidence reflection focus lamp high-precision surface shape light path is as shown in Figure 1, measuring tool includes that laser is flat
Face interferometer 1, beam-expanding collimation system 2, plane transmission standard mirror 3, precision rotation platform 4 and computer processing system 6；The essence
Close rotating platform 4 is for placing heavy caliber glancing incidence reflection focus lamp 5 to be measured.Laser plane interferometer 1 selects ZYGO company
100mm bore MST interferometer, test wavelength 632.8nm, it is 610mm, plane that beam-expanding collimation system 2, which will test beam spread,
The bore of transmission criteria mirror 3 is 610mm.Heavy caliber glancing incidence reflection focus lamp 5 to be measured is the ellipse cylinder KB mirror of heavy caliber, tested surface
Having a size of 300mm × 40mm, radius of curvature 569m.
The relevant light direction issued along the laser plane interferometer 1 is successively that the beam-expanding collimation system 2, plane are saturating
Standard mirror 3 and the heavy caliber glancing incidence reflection focus lamp 5 to be measured are penetrated, 4 table-surface level of precision rotation platform is placed, institute
The heavy caliber glancing incidence to be measured reflection focus lamp 5 stated is placed on the table top of the precision rotation platform 4, the big mouth to be measured
The longitudinal direction that diameter glancing incidence reflects focus lamp 5 is parallel with 4 table top of precision rotation platform, and heavy caliber glancing incidence to be measured
The tested surface 7 of reflection focus lamp 5 meets coherent light；The computer processing system 6 and laser plane interferometer 1 and precision rotation are flat
The control terminal of platform 4 is connected.
Measuring process is as follows:
1) heavy caliber glancing incidence to be measured reflection focus lamp 5 is placed on 4 table top of precision rotation platform, heavy caliber to be measured is plunderred
The longitudinal direction of incidence reflection focus lamp 5 is parallel with 4 table top of precision rotation platform, and heavy caliber glancing incidence to be measured reflection focuses
The tested surface 7 of mirror 5 meets coherent light；
2) directional light issued by laser plane interferometer 1 is irradiated to heavy caliber transmission criteria after beam-expanding collimation system 2
On mirror 3, a part of directional light is reflected back interferometer through the plane of reference 8 of transmission criteria mirror 3, forms reference light, a part of directional light
It is irradiated on the tested surface 7 of heavy caliber glancing incidence reflection focus lamp 5 to be measured, the return laser light plane interference after the reflection of tested surface 7
Instrument 1 forms detection light.The detection light is interfered with reference light, generates interference fringe.By adjusting the reflection of heavy caliber glancing incidence
The posture of focus lamp 5 keeps the corresponding interference fringe in its central area most sparse；
3) greatest gradient value Gmax is calculated according to the manuscript paper shape distribution that heavy caliber glancing incidence to be measured reflects focus lamp 5
With edge sail angle α max, the calculation method of gradient are as follows: using longitudinal direction as x-axis, short side direction is y-axis, detects light beam
Direction is z-axis, and major and minor axis central point is coordinate origin o on tested surface, and gradient is that manuscript paper shape is distributed z value along oxy plane
Growth rate namely z value x, y seek local derviation and sum respectively；The calculation method of drift angle are as follows: tangent is negated to gradient value, as partially
Angle；Gradient distribution is as shown in Fig. 2, greatest gradient Gmax is 0.8328 period/mm (corresponding sail angle α max is 108 ")
4) it calculates and chooses sub-aperture edge greatest gradient Gsub and corresponding angle [alpha] sub, sub-aperture greatest gradient passes through 1/
(6 pixels × interferometer resolution ratio) determine, corresponding angle [alpha] sub is obtained by negating tangent to sub-aperture greatest gradient Gsub；
Sub-aperture edge maximum measurement result gradient G sub is that 0.278 period/mm (is counted by 1/ (6 pixels/period × 0.6mm/ pixel)
Obtain), corresponding measurement result drift angle α sub is 36 "；
5) the area size's conduct for selecting manuscript paper shape distribution gradient value to be less than sub-aperture edge greatest gradient Gsub
The size of sub-aperture selects relative rotation angle α adj of the α sub/3 as adjacent sub-aperture, is 12 "；The number n of sub-aperture is logical
It crosses 108 "/12 " and rounds up and be calculated, n 9；Manuscript paper shape distribution gradient value is selected to be less than sub-aperture edge most
Size of the area size of big 0.278 period of measurement result gradient/mm as sub-aperture, corresponding size of sub-aperture for 66mm ×
40mm；
6) heavy caliber heavy caliber glancing incidence is controlled by precision rotation platform 4 and reflects the counterclockwise and up time respectively of focus lamp 5
Needle rotates, and is divided into 12 between the angle of rotation ", and measure, pendulous frequency 9, interference fringe picture is as shown in Figure 3；And by step
Rapid five selections sub-aperture obtains 9 groups of sub-aperture diametric plane shape distribution maps, as shown in Figure 4；.
7) rim of the mouth diameter stitching algorithm is pressed, the inclination factor of adjacent rim of the mouth diameter is calculated by the distribution of rim of the mouth diameter overlapping region face shape
With axial translation coefficient, realize that (stitching algorithm is shown in that the sub-aperture of large plano-optics interference detection is spelled to the splicing of rim of the mouth diameter data
Research is connect, imperial court is warm and sunny, Institutes Of Technology Of Nanjing's master's thesis, p20-p24), unified KB mirror surface-shaped testing result is obtained, such as
Shown in Fig. 5.
Claims (1)
1. a kind of heavy caliber glancing incidence reflects focus lamp high-precision surface shape detection method, measuring tool includes laser plane interferometer
(1), beam-expanding collimation system (2), plane transmission standard mirror (3), precision rotation platform (4) and computer processing system (6)；It is described
Precision rotation platform (4) is for placing heavy caliber glancing incidence reflection focus lamp (5) to be measured；
The positional relationship of said elements is as follows: the relevant light direction issued along the laser plane interferometer (1) is successively described
Beam-expanding collimation system (2), the plane transmission standard mirror (3) and the heavy caliber glancing incidence to be measured reflect focus lamp
(5), precision rotation platform (4) table-surface level is placed, and the computer processing system (6) is dry with laser plane respectively
Interferometer (1) is connected with the control terminal of precision rotation platform (4), which is characterized in that this method includes the following steps:
1) heavy caliber glancing incidence to be measured reflection focus lamp (5) is placed on the table top of the precision rotation platform (4), it is to be measured
The longitudinal direction that heavy caliber glancing incidence reflects focus lamp (5) is parallel with precision rotation platform (4) table top, and heavy caliber to be measured is plunderred
The tested surface (7) of incidence reflection focus lamp (5) is facing to the directional light through the plane transmission standard mirror (3)；
2) directional light that the laser plane interferometer (1) described in issues is irradiated to plane transmission mark after beam-expanding collimation system (2)
On quasi- mirror (3), a part of directional light is reflected back interferometer through the plane of reference (8) of plane transmission standard mirror (3), forms reference light,
Another part directional light is irradiated to heavy caliber glancing incidence reflection focus lamp (5) to be measured through the plane transmission standard mirror (3)
Tested surface (7) on, return to the laser plane interferometer (1) after the tested surface (7) reflection, form detection light, the beam
Detection light is interfered with the reference light, generates interference fringe；Focus lamp is reflected by adjusting heavy caliber glancing incidence to be measured
(5) posture keeps the corresponding interference fringe in its central area most sparse；
3) the maximum ladder of measurement result is calculated according to the manuscript paper shape distribution that heavy caliber glancing incidence to be measured reflects focus lamp (5)
Angle value Gmax and edge sail angle α max, the calculation method of gradient are as follows: using longitudinal direction as x-axis, short side direction is y-axis,
Detection beam direction is z-axis, and major and minor axis central point is coordinate origin o on tested surface, and the gradient distribution of measurement result is manuscript
Paper shape be distributed z value along the growth rate of oxy in-plane twice namely z value to twice of x, y local derviation sum；The calculating of drift angle
Method are as follows: tangent, as drift angle are negated to gradient value；
4) it calculates and chooses sub-aperture edge greatest gradient Gsub and corresponding angle [alpha] sub, sub-aperture edge greatest gradient is by 1/ (6
Pixel/period × interferometer resolution ratio) it determines, corresponding angle [alpha] sub is by negating just sub- aperture edge greatest gradient Gsub
Cut acquisition；
5) select area size of the manuscript paper shape distribution gradient value less than sub-aperture edge greatest gradient Gsub as sub-aperture
The size of diameter selects relative rotation angle α adj of the α sub/3 as adjacent sub-aperture, the number n of sub-aperture to pass through α max/ α
Adj and rounding up is calculated；
6) respectively counterclockwise and clockwise by precision rotation platform (4) control heavy caliber glancing incidence reflection focus lamp (5) to be measured
It rotates, is divided into α adj between the angle of rotation, every rotation one-shot measurement is primary, pendulous frequency n, obtains n sub- aperture plane shapes point
Cloth data；
7) existing rim of the mouth diameter stitching algorithm is pressed, the inclination system of adjacent rim of the mouth diameter is calculated by the distribution of rim of the mouth diameter overlapping region face shape
Several and axial translation coefficient realizes that diameter data in rim of the mouth splice to obtain unified KB mirror surface-shaped testing result.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110375640B (en) * | 2019-06-06 | 2020-12-29 | 杭州电子科技大学 | Rotary phase-shift interferometer for measuring transparent object and measuring method |
| CN110360923B (en) * | 2019-06-06 | 2020-12-29 | 杭州电子科技大学 | Phase shift interferometer with rotatable measured surface and measuring method |
| CN111707191B (en) * | 2020-06-30 | 2021-09-07 | 西安工业大学 | Alignment method for absolute detection center of rotation and translation of planar optical element |
| CN112525099B (en) * | 2020-11-16 | 2022-09-06 | 南京理工大学 | Device and method for absolute inspection of large-caliber planar interferometer by using rotation translation method |
| CN112964203B (en) * | 2021-02-08 | 2022-09-16 | 杭州晶耐科光电技术有限公司 | Glancing incidence common-path self-interference device for detecting rough plane surface type |
| CN114993206A (en) * | 2022-06-10 | 2022-09-02 | 北京创思工贸有限公司 | Large-caliber convex surface shape detection system |
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