CN103590020B - Pallet component and there is its MOCVD device - Google Patents
Pallet component and there is its MOCVD device Download PDFInfo
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- CN103590020B CN103590020B CN201210286546.9A CN201210286546A CN103590020B CN 103590020 B CN103590020 B CN 103590020B CN 201210286546 A CN201210286546 A CN 201210286546A CN 103590020 B CN103590020 B CN 103590020B
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Abstract
The present invention proposes a kind of pallet component, comprising: rotatable bracket; And multiple layer tray, described multiple layer tray is vertically intervally installed, and orlop pallet is arranged on described bracket, is connected between the upper tray in adjacent two layers pallet and lower tray by supporting component, the edge of the contiguous described pallet of described supporting component.According to the pallet component of the embodiment of the present invention, bracket is adopted to support multiple layer tray, it is more steady when multiple layer tray is rotated, again because the adjacent two-layer pallet in multiple layer tray adopts edge supports assembly to connect, thus can not block and cut air feeding in center air-flow, be conducive to air feeding in center air-flow and form steady laminar flow on the surface of pallet, improve technological effect.The invention allows for a kind of MOCVD device with above-mentioned pallet component.
Description
Technical field
The present invention relates to a kind of pallet component and there is its MOCVD device.
Background technology
MOCVD(MetalOrganicChemicalVaporDeposition) technology is the main method of the thin layer monocrystalline of growth iii-v, II-VI group compound and alloy; it have component thickness interfacial energy is enough accurately controlled, lower maintenance cost, mass-producing the advantage such as industrial production, therefore progressively become the main volume production technology of the photoelectron materials such as gallium arsenide, indium phosphide, gan.As the major process unit of above-mentioned photoelectron material, MOCVD device depreciable cost and use cost occupy the very high share of photoelectron material cost.
At present, the mainstream technology route improving the employing of MOCVD production capacity improves automatization, namely uses mechanical manipulator to pick and place substrate at comparatively high temps.On mainstream technology route basis, increase MOCVD production capacity further, just need continuous enlargement reaction chamber capacity.But strengthen reaction chamber capacity further, need adopt many support holder structures, many support holder structures support inlet flow field, and thermo parameters method easily produces detrimentally affect, and itself is subject to thermal stress damage.
The tray support system of tradition MOCVD device is made up of turning axle, graphite pallet, pallet link button, core support ring.Pallet link button is linked togather through graphite pallet, core support ring and turning axle.Motor drives whole tray support system to rotate by turning axle.
The pallet of prior art is central supporting, there is central support structure steady, and center key connects pallet and easily ftractures by thermal stresses, and cutting central gas stream when core support ring and key rotate, on pallet, easily form the shortcoming of turbulent flow.
Summary of the invention
The present invention is intended at least to solve one of technical problem existed in prior art.
For this reason, one object of the present invention is that proposing a kind of central air induction air flow energy that makes forms the pallet component of steady laminar flow at tray surface.
Another object of the present invention is to propose a kind of MOCVD device with above-mentioned pallet component.
The pallet component of embodiment according to a first aspect of the present invention, comprising: rotatable bracket; And multiple layer tray, described multiple layer tray is vertically intervally installed, and orlop pallet is arranged on described bracket, is connected between the upper tray in adjacent two layers pallet and lower tray by supporting component, the edge of the contiguous described pallet of described supporting component.
According to the pallet component of the embodiment of the present invention, bracket is adopted to support multiple layer tray, it is more steady when multiple layer tray is rotated, again because the adjacent two-layer pallet in multiple layer tray adopts edge supports assembly to connect, thus can not block and cut air feeding in center air-flow, be conducive to air feeding in center air-flow and form steady laminar flow on the surface of pallet, improve technological effect.
In addition, according to pallet component of the present invention, also there is following additional technical feature:
Particularly, described supporting component comprises: multiple first supporting pin, the lower surface of described upper tray and the upper surface of described lower tray are formed with multiple first pin-and-holes with described multiple first supporting pin adaptation respectively, and leave gap between described first supporting pin and described first pin-and-hole; Second supporting pin, the lower surface of described upper tray and the upper surface of described lower tray are formed with the second pin-and-hole with described second supporting pin adaptation, the contact internal walls of described second supporting pin and described second pin-and-hole respectively.Thus by stress situation when improving pallet rotary heating, make pallet not easily by Thermal cracking.
In an example of the present invention, described first pin-and-hole is square hole, and the cross section of described first supporting pin is square with described first pin-and-hole adaptation, and described second pin-and-hole is fan-shaped, and the cross section of described second supporting pin is fan-shaped with described second pin-and-hole adaptation.
In another example of the present invention, the cross section of described first supporting pin and the second supporting pin is circle, and described first and second pin-and-holes are circular port.
According to some embodiments of the present invention, described second supporting pin is two, and along described pallet diametrically, and described multiple first supporting pin is four and circumference along described pallet is uniformly distributed.Thus multiple layer tray spin stabilization can be ensured further, and improve by stress situation when further ensuring pallet rotary heating, ensure that pallet not easily by Thermal cracking.
According to other embodiments of the present invention, described first and second supporting pins are spacedly distributed along the circumference of described pallet.Thus multiple layer tray spin stabilization can be ensured further, and improve by stress situation when further ensuring pallet rotary heating, ensure that pallet not easily by Thermal cracking.
Particularly, the upper surface of described bracket is formed with groove, the lower surface of described undermost pallet is formed with the projection with described groove fit.Thus, be convenient to multiple layer tray and be installed on bracket.
Further, rotation link button is also provided with between described projection and described groove.Thus, this rotation link button can transmitting torque, ensure that multiple layer tray can steadily rotate.
Alternatively, described bracket is driven by motor and rotates.
The MOCVD device of embodiment according to a second aspect of the present invention, comprising: cavity, has chamber in described cavity; Pallet component, described pallet component is located in described chamber, and described pallet component is the pallet component of embodiment according to a first aspect of the present invention; With central air induction pipe, described central air induction pipe runs through the center of described multiple layer tray and has the production well corresponding with every layer of pallet.
According to the MOCVD device of the embodiment of the present invention, by adopting pallet component, ensure that the charge air flow entering into pallet component center from central inlet pipe can form steady laminar flow at every layer of pallet, ensure that technological effect, and multiple layer tray is not easily by Thermal cracking, has saved cost.
Additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the front view of the pallet component according to the embodiment of the present invention;
Fig. 2 is the vertical view when pallet component shown in Fig. 1 is placed with substrate to be processed;
Fig. 3 is the enlarged view of part A in Fig. 2; With
Fig. 4 is the enlarged view of part B in Fig. 2.
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; It can be mechanical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, particular case above-mentioned term concrete meaning in the present invention can be understood.In addition, in describing the invention, except as otherwise noted, the implication of " multiple " is two or more.
Describe the pallet component 100 according to the embodiment of the present invention below with reference to Fig. 1-Fig. 4, this pallet component 100 can be placed with substrate to be processed to process it.
As shown in Figure 1, pallet component 100 according to the embodiment of the present invention comprises: bracket 1 and multiple layer tray 2, wherein, bracket 1 is rotatable, multiple layer tray 2 is vertically intervally installed, orlop pallet 2a is arranged on bracket 1, the upper tray in adjacent two layers pallet and being connected by supporting component 3 between lower tray, the edge of the contiguous pallet 2 of supporting component 3.
The adjacent two layers pallet 2 of multiple layer tray 2 is connected by supporting component 3, and orlop pallet 2a is arranged on bracket 1, and multiple layer tray 2 can be driven when bracket 1 rotates to rotate.Preferably, bracket 1 is driven by motor (scheming not shown) and rotates, and in the example of fig. 1, bracket 1 is connected with motor by coupling screw 5.As shown in Figure 2, the center of the every one deck pallet 2 in multiple layer tray 2 is formed with centre hole 23, the inlet pipe of air feeding in center system can pass centre hole, process gas distribution is supplied to multiple layer tray 2 to process the substrate to be processed be placed on multiple layer tray 2.
According to the pallet component 100 of the embodiment of the present invention, bracket 1 is adopted to support multiple layer tray 2, it is more steady when multiple layer tray 2 is rotated, again because the adjacent two-layer pallet in multiple layer tray 2 adopts edge supports assembly 3 to connect, thus can not block and cut air feeding in center air-flow, be conducive to air feeding in center air-flow and form steady laminar flow on the surface of pallet 2, improve technological effect.
Particularly, supporting component 3 comprises: multiple first supporting pin 30 and the second supporting pin 31, wherein, the upper surface of the lower surface of the upper tray of pallet 2 and the lower tray of pallet 2 is formed with respectively multiple first pin-and-holes 20 with multiple first supporting pin 30 adaptation, and leaves gap between the first supporting pin 30 and the first pin-and-hole 20.The upper surface of the lower surface of the upper tray of pallet 2 and the lower tray of pallet 2 is formed with respectively the contact internal walls of the second pin-and-hole 21, second supporting pin 31 with the second supporting pin 31 adaptation and the second pin-and-hole 21.
In other words, the first supporting pin 30 only can play the effect of support tray 2, and when pallet 2 rotates, the first supporting pin 30 is not by rotational shear effect.The contact internal walls of the second supporting pin 31 and the second pin-and-hole 21, not only play the effect of support tray 2, when pallet 2 rotates, the second supporting pin 31 can be subject to rotational shear effect, thus to improve when pallet 2 rotates by stress situation, make pallet 2 not easily by Thermal cracking.
As shown in Figure 3 and Figure 4, in some embodiments of the invention, the first pin-and-hole 20 is square hole, and the cross section of the first supporting pin 30 is square with the first pin-and-hole 20 adaptation, second pin-and-hole 21 is fan-shaped, and the cross section of the second supporting pin 31 is fan-shaped with the second pin-and-hole 21 adaptation.Certainly the present invention is not limited thereto, the cross section of the first supporting pin 30 and the second supporting pin 31 also can be circle, and the first pin-and-hole 20 and the second pin-and-hole 21 can be circular port.
Further, the second supporting pin 31 is two, and along the diametrically setting of pallet 2, and the first supporting pin 30 is four and circumference along pallet 2 is uniformly distributed.Certainly the present invention is not limited thereto, the first supporting pin 30 and the second supporting pin 31 can be spacedly distributed along the circumference of pallet 2.In the figure 2 example, the first supporting pin 30 is four, and the second supporting pin 31 is two, and four the first supporting pins 30 and two the second supporting pins 31 are spacedly distributed along the circumference of pallet 2, and two the second supporting pins 31 along pallet 2 diametrically.Thus multiple layer tray 2 spin stabilization can be ensured further, and improve by stress situation when further ensuring pallet 2 rotary heating, ensure that pallet 2 not easily by Thermal cracking.
According to some embodiments of the present invention, as shown in Figure 1, the upper surface of bracket 1 is formed with groove 10, the lower surface of undermost pallet 2a is formed with the projection 22 coordinated with groove 10.Thus, be convenient to multiple layer tray 2 and be installed on bracket 1.Further, rotation link button 4 is also provided with between protruding 22 and groove 10.Thus, this rotation link button 4 can transmitting torque, ensure that multiple layer tray 2 can steadily rotate.
According to the pallet component 100 of the embodiment of the present invention, supported by bracket 1 and drive multiple layer tray 2 to rotate, multiple layer tray 2 is made to rotate steadily, and the supporting component 3 by edge between adjacent upper tray and lower tray connects, multiple first supporting pins 30 in supporting component 3 play a part to support, second supporting pin 31 not only plays support and is also subject to rotating shearing stress effect, thus by stress situation when improving pallet 2 rotary heating, ensure that pallet 2 not easily by Thermal cracking, again due to the edge of the contiguous pallet 2 of supporting component 3, can not block and the air feeding in center air-flow cutting multiple layer tray 2, be conducive to air feeding in center air-flow and form steady laminar flow on the surface of pallet 2, improve technological effect.
MOCVD(MetalOrganicChemicalVaporDeposition according to the embodiment of the present invention is described below) equipment, this MOCVD device comprises: cavity (scheming not shown), pallet component 100 and central air induction pipe (scheming not shown), wherein, there is in cavity chamber (scheming not shown), pallet component 100 is located in chamber, and pallet component 100 is the pallet component 100 of embodiment according to a first aspect of the present invention.Central air induction pipe runs through the center of multiple layer tray 100 and has the production well (scheme not shown) corresponding with every layer of pallet.
According to the MOCVD device of the embodiment of the present invention, by adopting the pallet component 100 described according to the above embodiment of the present invention, can ensure that the charge air flow entering into pallet component 100 center from central inlet pipe can form steady laminar flow at every layer of pallet 2, ensure that technological effect, and multiple layer tray 2 is not easily by Thermal cracking, has saved cost.
According to the MOCVD device of the embodiment of the present invention other form and operation be all known for those of ordinary skills, be not described in detail here.
In the description of this specification sheets, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and describe embodiments of the invention, those having ordinary skill in the art will appreciate that: can carry out multiple change, amendment, replacement and modification to these embodiments when not departing from principle of the present invention and aim, scope of the present invention is by claim and equivalents thereof.
Claims (10)
1. a pallet component, is characterized in that, comprising:
Rotatable bracket; With
Multiple layer tray, described multiple layer tray is vertically intervally installed, orlop pallet is arranged on described bracket, connected by supporting component between upper tray in adjacent two layers pallet and lower tray, the edge of the contiguous described pallet of described supporting component, described in every one deck, the center of pallet is formed with centre hole, and the inlet pipe of air feeding in center system is adapted to pass through described centre hole.
2. pallet component according to claim 1, is characterized in that, described supporting component comprises:
Multiple first supporting pin, the lower surface of described upper tray and the upper surface of described lower tray is formed with multiple first pin-and-holes with described multiple first supporting pin adaptation respectively, and leaves gap between described first supporting pin and described first pin-and-hole;
Multiple second supporting pin, the lower surface of described upper tray and the upper surface of described lower tray are formed with the second pin-and-hole with described second supporting pin adaptation, the contact internal walls of described second supporting pin and described second pin-and-hole respectively.
3. pallet component according to claim 2, it is characterized in that, described first pin-and-hole is square hole, and the cross section of described first supporting pin is square with described first pin-and-hole adaptation, described second pin-and-hole is fan-shaped, and the cross section of described second supporting pin is fan-shaped with described second pin-and-hole adaptation.
4. pallet component according to claim 2, is characterized in that, the cross section of described first supporting pin and the second supporting pin is circle, and described first and second pin-and-holes are circular port.
5. the pallet component according to any one of claim 2-4, is characterized in that, described second supporting pin is two, and along the diametrically setting of described pallet, and described multiple first supporting pin is four and circumference along described pallet is uniformly distributed.
6. the pallet component according to any one of claim 2-4, is characterized in that, described first and second supporting pins are spacedly distributed along the circumference of described pallet.
7. pallet component according to claim 1, is characterized in that, the upper surface of described bracket is formed with groove, the lower surface of described undermost pallet is formed with the projection with described groove fit.
8. pallet component according to claim 7, is characterized in that, is also provided with rotation link button between described projection and described groove.
9. pallet component according to claim 1, is characterized in that, described bracket is driven by motor and rotates.
10. a MOCVD device, is characterized in that, comprising:
Cavity, has chamber in described cavity;
Pallet component, described pallet component is located in described chamber, and described pallet component is the pallet component according to any one of claim 1-9; With
Central air induction pipe, described central air induction pipe runs through the center of described multiple layer tray and has the production well corresponding with every layer of pallet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210286546.9A CN103590020B (en) | 2012-08-13 | 2012-08-13 | Pallet component and there is its MOCVD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210286546.9A CN103590020B (en) | 2012-08-13 | 2012-08-13 | Pallet component and there is its MOCVD device |
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| Publication Number | Publication Date |
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| CN103590020A CN103590020A (en) | 2014-02-19 |
| CN103590020B true CN103590020B (en) | 2015-12-02 |
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| CN201210286546.9A Active CN103590020B (en) | 2012-08-13 | 2012-08-13 | Pallet component and there is its MOCVD device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103800082B (en) * | 2014-02-24 | 2015-12-02 | 哈尔滨工程大学 | The disc type Multi-layer Store device of rotary expansion |
| CN111088526B (en) * | 2019-12-27 | 2021-05-11 | 季华实验室 | Multi-piece loaded silicon carbide epitaxial growth equipment |
| CN112921306B (en) * | 2021-01-20 | 2023-04-11 | 龙鳞(深圳)新材料科技有限公司 | Vapor deposition coating system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201729880U (en) * | 2010-05-28 | 2011-02-02 | 中芯国际集成电路制造(上海)有限公司 | Pin for fore-vacuum chamber tray |
| CN202067787U (en) * | 2011-05-05 | 2011-12-07 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tray component and substrate processing equipment comprising same |
| CN102485953A (en) * | 2010-12-01 | 2012-06-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pallet device and crystallized film growth device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0521353A (en) * | 1991-02-20 | 1993-01-29 | Sumitomo Metal Ind Ltd | Manufacture of compound semiconductor |
| CN102560431B (en) * | 2010-12-21 | 2015-02-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Metal organic chemical vapor deposition device and chamber assembly thereof |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201729880U (en) * | 2010-05-28 | 2011-02-02 | 中芯国际集成电路制造(上海)有限公司 | Pin for fore-vacuum chamber tray |
| CN102485953A (en) * | 2010-12-01 | 2012-06-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pallet device and crystallized film growth device |
| CN202067787U (en) * | 2011-05-05 | 2011-12-07 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tray component and substrate processing equipment comprising same |
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| CN103590020A (en) | 2014-02-19 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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