CN103579351A - 一种具有超结埋层的横向扩散金属氧化物半导体器件 - Google Patents
一种具有超结埋层的横向扩散金属氧化物半导体器件 Download PDFInfo
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- CN103579351A CN103579351A CN201310598158.9A CN201310598158A CN103579351A CN 103579351 A CN103579351 A CN 103579351A CN 201310598158 A CN201310598158 A CN 201310598158A CN 103579351 A CN103579351 A CN 103579351A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 13
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000009792 diffusion process Methods 0.000 claims description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 7
- 229920005591 polysilicon Polymers 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 7
- 230000000295 complement effect Effects 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 238000002513 implantation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000012010 growth Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0873—Drain regions
- H01L29/0882—Disposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/7824—Lateral DMOS transistors, i.e. LDMOS transistors with a substrate comprising an insulating layer, e.g. SOI-LDMOS transistors
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
Abstract
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CN201310598158.9A CN103579351A (zh) | 2013-11-22 | 2013-11-22 | 一种具有超结埋层的横向扩散金属氧化物半导体器件 |
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CN201310598158.9A CN103579351A (zh) | 2013-11-22 | 2013-11-22 | 一种具有超结埋层的横向扩散金属氧化物半导体器件 |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104701381A (zh) * | 2015-03-03 | 2015-06-10 | 南京邮电大学 | 一种p柱区阶梯掺杂的二维类sj/resurf ldmos器件及其制造方法 |
CN104916696A (zh) * | 2014-03-14 | 2015-09-16 | 株式会社东芝 | 半导体器件 |
US20170054018A1 (en) * | 2014-05-04 | 2017-02-23 | Csmc Technologies Fab1 Co., Ltd. | Laterally diffused metal oxide semiconductor device and manufacturing method therefor |
CN107359195A (zh) * | 2017-07-31 | 2017-11-17 | 电子科技大学 | 一种高耐压横向超结器件 |
CN108063158A (zh) * | 2017-12-06 | 2018-05-22 | 重庆邮电大学 | 一种具有槽型氧化层和横向超结的ldmos器件 |
CN108231902A (zh) * | 2018-01-05 | 2018-06-29 | 桂林电子科技大学 | 具有串联槽栅结构的多叠层功率器件 |
CN108807525A (zh) * | 2017-10-23 | 2018-11-13 | 苏州捷芯威半导体有限公司 | 半导体器件及其制作方法 |
CN111244157A (zh) * | 2020-01-20 | 2020-06-05 | 电子科技大学 | 一种横向半导体器件及其制造方法 |
CN111969038A (zh) * | 2020-08-06 | 2020-11-20 | 互升科技(深圳)有限公司 | 一种场效应管制备方法及场效应管 |
CN112133740A (zh) * | 2020-08-06 | 2020-12-25 | 互升科技(深圳)有限公司 | 一种多层外延mos管器件及其制备方法 |
CN112530805A (zh) * | 2019-09-19 | 2021-03-19 | 无锡华润上华科技有限公司 | 横向双扩散金属氧化物半导体器件及制作方法、电子装置 |
CN113270500A (zh) * | 2021-05-17 | 2021-08-17 | 电子科技大学 | 一种功率半导体器件 |
WO2022142229A1 (zh) * | 2020-12-30 | 2022-07-07 | 无锡华润上华科技有限公司 | 横向扩散金属氧化物半导体器件及其制造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070114602A1 (en) * | 2005-11-24 | 2007-05-24 | Kabushiki Kaisha Toshiba | Semiconductor device |
CN102593007A (zh) * | 2012-03-21 | 2012-07-18 | 中国科学院上海微***与信息技术研究所 | 一种内嵌多p岛n沟道超结器件及其制备方法 |
-
2013
- 2013-11-22 CN CN201310598158.9A patent/CN103579351A/zh active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070114602A1 (en) * | 2005-11-24 | 2007-05-24 | Kabushiki Kaisha Toshiba | Semiconductor device |
CN102593007A (zh) * | 2012-03-21 | 2012-07-18 | 中国科学院上海微***与信息技术研究所 | 一种内嵌多p岛n沟道超结器件及其制备方法 |
Non-Patent Citations (2)
Title |
---|
王文廉: ""横向超结功率器件的REBULF理论与新技术"", 《万方学位论文数据库》 * |
王文廉: ""横向超结功率器件的REBULF理论与新技术"", 《万方学位论文数据库》, 3 August 2011 (2011-08-03) * |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104916696A (zh) * | 2014-03-14 | 2015-09-16 | 株式会社东芝 | 半导体器件 |
KR101929639B1 (ko) * | 2014-05-04 | 2018-12-14 | 씨에스엠씨 테크놀로지스 에프에이비1 코., 엘티디. | 측면 확산된 금속 산화 반도체 디바이스 및 그 제조 방법 |
US9837532B2 (en) * | 2014-05-04 | 2017-12-05 | Csmc Technologies Fab1 Co., Ltd. | Laterally diffused metal oxide semiconductor device and manufacturing method therefor |
US20170054018A1 (en) * | 2014-05-04 | 2017-02-23 | Csmc Technologies Fab1 Co., Ltd. | Laterally diffused metal oxide semiconductor device and manufacturing method therefor |
CN104701381A (zh) * | 2015-03-03 | 2015-06-10 | 南京邮电大学 | 一种p柱区阶梯掺杂的二维类sj/resurf ldmos器件及其制造方法 |
CN107359195A (zh) * | 2017-07-31 | 2017-11-17 | 电子科技大学 | 一种高耐压横向超结器件 |
CN107359195B (zh) * | 2017-07-31 | 2020-12-29 | 电子科技大学 | 一种高耐压横向超结器件 |
CN108807525A (zh) * | 2017-10-23 | 2018-11-13 | 苏州捷芯威半导体有限公司 | 半导体器件及其制作方法 |
CN108063158A (zh) * | 2017-12-06 | 2018-05-22 | 重庆邮电大学 | 一种具有槽型氧化层和横向超结的ldmos器件 |
CN108231902A (zh) * | 2018-01-05 | 2018-06-29 | 桂林电子科技大学 | 具有串联槽栅结构的多叠层功率器件 |
CN112530805A (zh) * | 2019-09-19 | 2021-03-19 | 无锡华润上华科技有限公司 | 横向双扩散金属氧化物半导体器件及制作方法、电子装置 |
CN112530805B (zh) * | 2019-09-19 | 2022-04-05 | 无锡华润上华科技有限公司 | 横向双扩散金属氧化物半导体器件及制作方法、电子装置 |
CN111244157B (zh) * | 2020-01-20 | 2021-12-03 | 电子科技大学 | 一种横向半导体器件及其制造方法 |
CN111244157A (zh) * | 2020-01-20 | 2020-06-05 | 电子科技大学 | 一种横向半导体器件及其制造方法 |
CN112133740B (zh) * | 2020-08-06 | 2024-05-24 | 互升科技(深圳)有限公司 | 一种多层外延mos管器件及其制备方法 |
CN112133740A (zh) * | 2020-08-06 | 2020-12-25 | 互升科技(深圳)有限公司 | 一种多层外延mos管器件及其制备方法 |
CN111969038A (zh) * | 2020-08-06 | 2020-11-20 | 互升科技(深圳)有限公司 | 一种场效应管制备方法及场效应管 |
WO2022142229A1 (zh) * | 2020-12-30 | 2022-07-07 | 无锡华润上华科技有限公司 | 横向扩散金属氧化物半导体器件及其制造方法 |
CN113270500A (zh) * | 2021-05-17 | 2021-08-17 | 电子科技大学 | 一种功率半导体器件 |
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