CN103555206A - 稀土抛光粉及其制备方法 - Google Patents
稀土抛光粉及其制备方法 Download PDFInfo
- Publication number
- CN103555206A CN103555206A CN201310501157.8A CN201310501157A CN103555206A CN 103555206 A CN103555206 A CN 103555206A CN 201310501157 A CN201310501157 A CN 201310501157A CN 103555206 A CN103555206 A CN 103555206A
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- CN
- China
- Prior art keywords
- rare earth
- polishing powder
- cerium
- oxide
- treo
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052761 rare earth metal Inorganic materials 0.000 title claims abstract description 82
- 150000002910 rare earth metals Chemical class 0.000 title claims abstract description 76
- 238000005498 polishing Methods 0.000 title claims abstract description 74
- 239000000843 powder Substances 0.000 title claims abstract description 59
- 238000002360 preparation method Methods 0.000 title claims abstract description 19
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims abstract description 18
- 239000005995 Aluminium silicate Substances 0.000 claims abstract description 16
- 235000012211 aluminium silicate Nutrition 0.000 claims abstract description 16
- 229910000323 aluminium silicate Inorganic materials 0.000 claims abstract description 12
- PZZYQPZGQPZBDN-UHFFFAOYSA-N aluminium silicate Chemical compound O=[Al]O[Si](=O)O[Al]=O PZZYQPZGQPZBDN-UHFFFAOYSA-N 0.000 claims abstract description 11
- LPAWMRUUNWKLMO-UHFFFAOYSA-N cerium(3+) lanthanum(3+) oxygen(2-) praseodymium(3+) Chemical compound [O-2].[Pr+3].[Ce+3].[La+3] LPAWMRUUNWKLMO-UHFFFAOYSA-N 0.000 claims abstract description 9
- ONLCZUHLGCEKRZ-UHFFFAOYSA-N cerium(3+) lanthanum(3+) oxygen(2-) Chemical group [O--].[O--].[O--].[La+3].[Ce+3] ONLCZUHLGCEKRZ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000000498 ball milling Methods 0.000 claims abstract description 3
- 229910052684 Cerium Inorganic materials 0.000 claims description 24
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 24
- 239000002002 slurry Substances 0.000 claims description 13
- NZPIUJUFIFZSPW-UHFFFAOYSA-H lanthanum carbonate Chemical compound [La+3].[La+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O NZPIUJUFIFZSPW-UHFFFAOYSA-H 0.000 claims description 12
- 238000013019 agitation Methods 0.000 claims description 8
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 claims description 5
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 4
- WMGSQTMJHBYJMQ-UHFFFAOYSA-N aluminum;magnesium;silicate Chemical compound [Mg+2].[Al+3].[O-][Si]([O-])([O-])[O-] WMGSQTMJHBYJMQ-UHFFFAOYSA-N 0.000 claims description 3
- HPTYUNKZVDYXLP-UHFFFAOYSA-N aluminum;trihydroxy(trihydroxysilyloxy)silane;hydrate Chemical compound O.[Al].[Al].O[Si](O)(O)O[Si](O)(O)O HPTYUNKZVDYXLP-UHFFFAOYSA-N 0.000 claims description 3
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052621 halloysite Inorganic materials 0.000 claims description 3
- 238000013467 fragmentation Methods 0.000 claims description 2
- 238000006062 fragmentation reaction Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- -1 rare earth carbonate Chemical class 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 239000011737 fluorine Substances 0.000 abstract description 9
- 229910052731 fluorine Inorganic materials 0.000 abstract description 9
- 230000008901 benefit Effects 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 238000003912 environmental pollution Methods 0.000 abstract description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 11
- 238000009413 insulation Methods 0.000 description 10
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 8
- 229910000420 cerium oxide Inorganic materials 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 238000000227 grinding Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 239000003082 abrasive agent Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 229910052777 Praseodymium Inorganic materials 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000004334 fluoridation Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- MMKQUGHLEMYQSG-UHFFFAOYSA-N oxygen(2-);praseodymium(3+) Chemical compound [O-2].[O-2].[O-2].[Pr+3].[Pr+3] MMKQUGHLEMYQSG-UHFFFAOYSA-N 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 210000002966 serum Anatomy 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052728 basic metal Inorganic materials 0.000 description 1
- 150000003818 basic metals Chemical class 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000002356 laser light scattering Methods 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005185 salting out Methods 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
S0.5 | S1.5 | S2.5 | S3.5 | S4.5 | S5.5 | S6.5 | Sa | |
实施例1 | 2.46 | 2.36 | 2.63 | 2.38 | 2.76 | 2.59 | 2.59 | 2.54 |
实施例2 | 1.80 | 2.01 | 2.19 | 2.16 | 2.12 | 2.15 | 2.18 | 2.09 |
实施例3 | 1.93 | 2.31 | 2.51 | 2.48 | 2.48 | 2.53 | 2.49 | 2.39 |
实施例4 | 1.98 | 2.01 | 2.09 | 2.06 | 2.12 | 2.05 | 2.11 | 2.06 |
实施例5 | 1.98 | 2.04 | 2.10 | 2.08 | 2.09 | 2.06 | 2.05 | 2.06 |
对比实施例1 | 1.89 | 1.83 | 1.76 | 1.7 | 1.52 | 1.49 | 1.45 | 1.67 |
Claims (8)
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CN103555206A true CN103555206A (zh) | 2014-02-05 |
CN103555206B CN103555206B (zh) | 2015-07-08 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104562019A (zh) * | 2015-01-09 | 2015-04-29 | 西南石油大学 | 一种环保型酸性化学抛光液及化学抛光方法 |
CN106675416A (zh) * | 2016-11-30 | 2017-05-17 | 安徽电气集团股份有限公司 | 一种稀土材料抛光粉 |
CN107502202A (zh) * | 2017-10-16 | 2017-12-22 | 淄博包钢灵芝稀土高科技股份有限公司 | 无氟稀土抛光粉组合物及其制备方法 |
CN115724454A (zh) * | 2022-09-30 | 2023-03-03 | 深圳市聚芯半导体材料有限公司 | 一种氧化镧铈固溶体颗粒及其制备方法和应用 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1176283A (zh) * | 1996-08-29 | 1998-03-18 | 住友化学工业株式会社 | 磨料组合物及其用途 |
CN102337083A (zh) * | 2011-07-19 | 2012-02-01 | 上海华明高纳稀土新材料有限公司 | 精密型稀土抛光粉及其制备方法 |
CN102898953A (zh) * | 2012-10-31 | 2013-01-30 | 上海华明高纳稀土新材料有限公司 | 铈基混合稀土抛光材料及其制备方法 |
CN103254870A (zh) * | 2013-05-19 | 2013-08-21 | 郭尧 | 一种氧化镧铈稀土抛光粉及其制备方法 |
-
2013
- 2013-10-22 CN CN201310501157.8A patent/CN103555206B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1176283A (zh) * | 1996-08-29 | 1998-03-18 | 住友化学工业株式会社 | 磨料组合物及其用途 |
CN102337083A (zh) * | 2011-07-19 | 2012-02-01 | 上海华明高纳稀土新材料有限公司 | 精密型稀土抛光粉及其制备方法 |
CN102898953A (zh) * | 2012-10-31 | 2013-01-30 | 上海华明高纳稀土新材料有限公司 | 铈基混合稀土抛光材料及其制备方法 |
CN103254870A (zh) * | 2013-05-19 | 2013-08-21 | 郭尧 | 一种氧化镧铈稀土抛光粉及其制备方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104562019A (zh) * | 2015-01-09 | 2015-04-29 | 西南石油大学 | 一种环保型酸性化学抛光液及化学抛光方法 |
CN104562019B (zh) * | 2015-01-09 | 2017-04-12 | 西南石油大学 | 一种环保型酸性化学抛光液及化学抛光方法 |
CN106675416A (zh) * | 2016-11-30 | 2017-05-17 | 安徽电气集团股份有限公司 | 一种稀土材料抛光粉 |
CN107502202A (zh) * | 2017-10-16 | 2017-12-22 | 淄博包钢灵芝稀土高科技股份有限公司 | 无氟稀土抛光粉组合物及其制备方法 |
CN115724454A (zh) * | 2022-09-30 | 2023-03-03 | 深圳市聚芯半导体材料有限公司 | 一种氧化镧铈固溶体颗粒及其制备方法和应用 |
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Denomination of invention: Rare earth polishing powder and its preparation method Effective date of registration: 20220620 Granted publication date: 20150708 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2022310000067 |
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Date of cancellation: 20230625 Granted publication date: 20150708 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2022310000067 |
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Denomination of invention: Rare earth polishing powder and its preparation method Effective date of registration: 20230627 Granted publication date: 20150708 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2023310000314 |
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Granted publication date: 20150708 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2023310000314 |
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Denomination of invention: Rare earth polishing powder and its preparation method Granted publication date: 20150708 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2024310000534 |
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