CN103543612A - Moving-iron cableless six-degree-of-freedom magnetic levitation motion platform with vacuum cover - Google Patents
Moving-iron cableless six-degree-of-freedom magnetic levitation motion platform with vacuum cover Download PDFInfo
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Abstract
The invention discloses a moving-iron cableless six-degree-of-freedom magnetic levitation motion platform with a vacuum cover and is mainly applied to semiconductor photoetching equipment. The magnetic levitation motion platform comprises a base, a stator, a rotor, a slide holder and a measurement system, wherein a three-axis gyroscope, a three-axis accelerator, a power supply module and a wireless signal output module are arranged between the rotor and the slide holder and are integrated on a circuit board; the rotor and the stator are respectively arranged in a vacuum cavity. The moving-iron cableless six-degree-of-freedom magnetic levitation motion platform realizes high-precision measurement by adopting a planar grating scale measurement system and also realizes a cableless design of the magnetic levitation motion platform by applying a wireless charging technology and a wireless signal transmission technology, and moving parts of the magnetic levitation motion platform can realize large-angle free rotation in a horizontal plane; therefore, the interference resistance of a workbench and the control bandwidth of a control system are greatly improved; meanwhile, the influence of gas released by certain pouring sealants on photoetching is avoided during extreme ultraviolet photoetching.
Description
Technical field
The present invention relates to the floating worktable of a kind of magnetic, relate in particular to a kind of six-freedom-degree magnetic suspension worktable, be mainly used in semiconductor lithography equipment, belong to ultraprecise processing and checkout equipment technical field.
Background technology
The micro displacement workbench with high precision and response fast has extremely important status in Modern Manufacturing Technology, is regarded as the important symbol of a national hi-tech development level.In ultra-precision machine tool, ultra-precise micro displacement workbench, for feed system is carried out to error compensation, is realized ultraprecise processing; In large scale integrated circuit is manufactured, ultra-precise micro displacement workbench carries out microposition and micro-feeding for lithographic equipment; In scanning probe microscopy, ultra-precise micro displacement workbench is used for measuring sample surface morphology, carries out nanoprocessing; Aspect bioengineering, ultra-precise micro displacement workbench has been used for the operation to cell, realizes biological operation through engineering approaches; Aspect medical science, ultra-precise micro displacement workbench, for microsurgery, to alleviate doctor's burden, shortens operating time, improves success ratio.Ultra-precise micro displacement workbench is also widely used in fiber alignment, the processing of MEMS system, encapsulation and assembling, and in galvanochemistry processing and other fields.
In semiconductor lithography equipment, litho machine is to manufacture specially integrated circuit.According to the International Technology Roadmap for Semiconductors of version in 2005,2007 will be with the integrated circuit of the photoetching technique production live width 65nm of 193nm, 2010 by the integrated circuit of production live width 45nm, the integrated circuit of production live width 32nm in 2013.The resolution of litho machine is expressed from the next:
By the numerical aperture NA of lithographic projection system and technological parameter k1 are extended to its practical limit and increase immersion system, use wavelength can produce the integrated circuit of 65nm live width for the etching system of 193nm excimer light source, people also wish to continue to use 193nm immersion system to produce the integrated circuit of 45nm live width.Adopt the technology of existing 193nm, in no case can produce the integrated circuit of 32nm live width, must seek new developing direction, adopt the extreme ultraviolet photolithographic of 13.5nm light can realize more high-resolution leap.
Summarize at present nanoscale micro displacement workbench present Research both at home and abroad, in order to meet the requirement of extreme ultraviolet photolithographic equipment high precision, high-speed, heavy load, high dynamic perfromance.Adopt the silicon wafer stage technology of magnetic-floating plane motor just can meet the requirement of lithographic equipment, but while there is extreme ultraviolet photolithographic, some casting glues of magnetic-floating plane motor can discharge some gases, can produce certain impact to photoetching, and the deficiencies such as cable disturbed motion that have a large amount of power supplys and sensor on planar motor, its performance is subject to certain limitation.
Summary of the invention
The present invention aims to provide a kind of moving-iron type with vacuum (-tight) housing without cable six-freedom-degree magnetic suspension motion platform, make it applicable to extreme ultraviolet (EUV) photo-etching machine silicon chip platform worktable, also can be used in ultraprecise processing and detection to realize six-freedom motion, and there is mover without cable, superpower antijamming capability, the high features such as bandwidth of controlling.
Technical scheme of the present invention is as follows:
The moving-iron type of vacuum (-tight) housing is without a cable six-freedom-degree magnetic suspension motion platform, and this magnetic transportation by driving moving platform contains pedestal, stator, mover, slide holder and measuring system, and described mover is comprised of halbach permanent magnet array and magnet steel backboard; Described stator is to arrange by organizing coil unit the coil array forming more; Described measuring system comprises plane grating chi measuring system and current vortex sensor; It is characterized in that: between described mover and slide holder, be also provided with a three-axis gyroscope, three axis accelerometer, power module and a wireless signal output module; Described three-axis gyroscope, three axis accelerometer, power module and wireless signal output module are integrated on a wiring board; Described three-axis gyroscope is measured respectively mover around the angle of X-axis, Y-axis and Z axis rotation; Described three axis accelerometer is measured respectively mover along the linear acceleration of X-axis, Y-axis and Z axis; On described stator, be provided with a reception of wireless signals module, described three-axis gyroscope and the measuring-signal of three axis accelerometer are to carry out radio communication by described wireless signal output module and the reception of wireless signals module being arranged on stator; Described current vortex sensor becomes in the gap between arranged in arrays each coil unit on stator, and the gauge head of current vortex sensor is placed straight up; On the position at an angle of stator, be provided with three laser triangulation sensors, wherein along directions X, be provided with two laser triangulation sensors, along Y-direction, be provided with a laser triangulation sensor, three laser triangulation sensors and the demarcation of doing six degree of freedom for described three-axis gyroscope and three axis accelerometer together with described current vortex sensor;
Described magnetic transportation by driving moving platform also contains a mover vacuum chamber and a stator vacuum chamber, and described mover, slide holder, three-axis gyroscope, three axis accelerometer, power module, wireless signal output module and plane grating measuring system are placed in mover vacuum chamber; Described stator, current vortex sensor, laser triangulation sensor and pedestal are placed in stator vacuum chamber, described mover vacuum chamber and described stator vacuum chamber are independent of one another, are connected respectively by gas piping with two vacuum pumps that are positioned at vacuum chamber outside.
Another technology of this women is characterized in that: described plane grating chi measuring system comprises four plane grating chis and some grating reading heads, and these four plane grating chis are separately positioned on the upper surface of slide holder, and is close to four sides of slide holder; Described some grating reading heads be separately positioned on plane grating chi directly over along the center line direction of two quadratures in stator upper surface, and and plane grating chi between keep gap.
Power module of the present invention adopts power module that can wireless charging, can contain rechargeable battery, electric power receiver and Wireless charging coil by wireless charging power module, in the circuit board, described Wireless charging coil is arranged on the position at any one angle on stator in described electric power receiver setting.
Coil array of the present invention forms along directions X and Y-direction arrangement respectively by organizing coil unit more, and every group of coil unit at least comprises three square coils, two adjacent groups coil unit perpendicular array.Described coil unit adopts the coil groups of lamination quadrature coiling, or adopt the individual layer rectangular coil coil groups of lamination perpendicular array and horizontal positioned from the bottom to top, or the coil groups of employing rectangular coil horizontal positioned, or the coil groups that adopts rectangular coil vertically to place, or adopt lamination quadrature to print the coil groups of PCB circuit; The multiple that the coil quantity of each described coil groups is 3, each coil is comprised of electrified wire and coil rack.
Permanent magnet array in mover of the present invention is comprised of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of magnet steel backboard with Halbach two-dimensional array form, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, forms closed magnetic path.
The present invention has the following advantages and the technique effect of high-lighting: the motion parts of this magnetic transportation by driving moving platform and fixed part are arranged at respectively among a vacuum (-tight) housing, avoided when extreme ultraviolet photolithographic the impact that some gases that some casting glues of magnetic-floating plane motor discharge produce photoetching.In addition, compared with prior art, this magnetic transportation by driving moving platform also adopts plane grating chi measuring system to realize high-acruracy survey, adopt three-axis gyroscope to measure the angle of mover, with three axis accelerometer, measure the linear displacement of mover, and with laser triangulation sensor and current vortex sensor be three-axis gyroscope and three axis accelerometer carry out real-time Zero positioning prevent drift, and wireless charging technology and wireless signal transmission techniques have been used, realize magnetic transportation by driving moving platform without cable designs, make the motion parts of magnetic transportation by driving moving platform can in surface level, realize rotating freely of wide-angle, greatly improved the antijamming capability of worktable, improved the control bandwidth of control system simultaneously.
Accompanying drawing explanation
Fig. 1 is that a kind of moving-iron type with vacuum (-tight) housing provided by the invention is without the structural representation of cable six-freedom-degree magnetic suspension motion platform.
Fig. 2 expresses the three-dimensional blast structural drawing that removes mover vacuum chamber and stator vacuum chamber.
Fig. 3 expresses three-axis gyroscope, three axis accelerometer, power module and wiring board scheme of installation.
Fig. 4 is the Zero calibration process flow diagram of six-freedom-degree magnetic suspension motion platform of the present invention.
Fig. 5 a, Fig. 5 b, Fig. 5 c, Fig. 5 d and Fig. 5 e express several different version that coil unit of the present invention adopts.
Fig. 6 a, 6b are two kinds of permanent magnet array structural drawing in mover of the present invention.
In figure: 1-pedestal; 2-slide holder; 4-magnet steel backboard; 5-three-axis gyroscope; 6-three axis accelerometer; 7-power module; 8-wiring board; 9-coil unit; 10-coil rack; 11-current vortex sensor; 12-plane grating chi measuring system; 13-halbach permanent magnet array; 14-coil array; 15-laser triangulation sensor; The main permanent magnet of 16-first; The main permanent magnet of 17-second; The attached permanent magnet of 18-; 19-wireless signal output module; 20-reception of wireless signals module; 21-Wireless charging coil; 22-mover vacuum chamber; 23-stator vacuum chamber; 24-electric power receiver; 31-plane grating chi; 32-plane grating read head.
Embodiment
Fig. 1 be a kind of moving-iron type with vacuum (-tight) housing provided by the invention without the structural representation of cable six-freedom-degree magnetic suspension motion platform, Fig. 2 is the three-dimensional blast structural drawing that removes mover vacuum chamber and stator vacuum chamber; This magnetic transportation by driving moving platform contains pedestal 1, stator, mover, slide holder 2 and measuring system, and described mover contains halbach permanent magnet array 13 and magnet steel backboard 4; Described stator is to arrange by organizing coil unit 9 coil array 14 forming more; Described measuring system comprises plane grating chi measuring system 12, current vortex sensor 11 and laser triangulation sensor 15; Between described mover and slide holder 2, be also provided with a three-axis gyroscope 5, three axis accelerometer 6, power module 7 and a wireless signal output module 19; Described three-axis gyroscope 5, three axis accelerometer 6, power module 7 and wireless signal output module 19 are integrated on a wiring board 8, and described three-axis gyroscope 5 can be measured respectively mover around the angle of X-axis, Y-axis and Z axis rotation; Described three axis accelerometer 6 can be measured respectively mover along the linear acceleration of X-axis, Y-axis and Z axis.On described stator, be provided with a reception of wireless signals module 20, described three-axis gyroscope 5 and the measuring-signal of three axis accelerometer 6 are to carry out radio communication by described wireless signal output module 19 and the reception of wireless signals module 20 being arranged on stator.In gap between described 11 one-tenth arranged in arrays of current vortex sensor each coil unit 9 on stator, and the gauge head of current vortex sensor 11 is placed straight up; On the position at any one angle of stator, be provided with three laser triangulation sensors 15, wherein along directions X, be provided with two laser triangulation sensors 15, along Y-direction, be provided with a laser triangulation sensor 15, three laser triangulation sensors and described current vortex sensor 11 are used in conjunction with, for three-axis gyroscope 5, three axis accelerometer 6 are done the location position of space six degree of freedom, as shown in Figure 2.
Described power module 7 adopts can wireless charging power module, can contain rechargeable battery, electric power receiver 24 and Wireless charging coil 21 by wireless charging power module, described Wireless charging coil 21 is arranged in a definite position of magnetic transportation by driving moving platform stator coil array 14.Power module 7 is also installed an electric power receiver 24, and this electric power receiver 24 can be battery and carries out wireless charging; When battery electric power is inadequate, can the inoperative period by mover componental movement above Wireless charging coil 21, give Wireless charging coil 21 logical upper high-frequency current, just can make the inductive coil generation current in electric power receiver 24, thereby charge the battery, as shown in Figure 3.
Described magnetic transportation by driving moving platform also contains a mover vacuum chamber 22 and a stator vacuum chamber 23, and described mover, slide holder 2, three-axis gyroscope 5, three axis accelerometer 6, power module 7, wireless signal output module 19 and plane grating measuring system 12 are placed in mover vacuum chamber 22; Described stator, current vortex sensor 11, laser triangulation sensor 15 and pedestal 1 are placed in stator vacuum chamber 23, described mover vacuum chamber 22 and described stator vacuum chamber 23 are independent of one another, are vacuumized respectively by two vacuum pumps that are positioned at vacuum chamber outside.
Described plane grating chi measuring system 12 comprises four plane grating chis 31 and some grating reading heads 32, and these four plane grating chis 31 are separately positioned on the upper surface of slide holder 2, and is close to 2 four sides of slide holder; Described some grating reading heads 32 be separately positioned on plane grating chi 31 directly in the center line direction of two quadratures in described stator upper surface, and and plane grating chi 31 between keep gap.The mover part of this magnetic transportation by driving moving platform can implementation space six degree of freedom motion, without cable, disturb, can in surface level, around 360 °, rotate freely.
Fig. 5 represents the structural drawing of five kinds of coil winding modes of magnetic transportation by driving moving platform.The coil manufacture of described coil unit adopts five kinds of forms: the first coil unit adopts the coil groups of lamination quadrature coiling, as shown in Fig. 5 (a); Or adopt the individual layer rectangular coil coil groups of lamination perpendicular array and horizontal positioned from the bottom to top, as shown in Fig. 5 (b); Or the coil groups of employing rectangular coil horizontal positioned, as shown in Fig. 5 (c); Or the coil groups that adopts rectangular coil vertically to place, as shown in Fig. 5 (d); Or the coil groups that adopts lamination quadrature to print PCB circuit, as shown in Figure 5 (e) shows.The multiple that the coil quantity of each coil groups is 3, each coil is comprised of electrified wire and coil rack 10.
Fig. 6 represents two kinds of permanent magnet array structural drawing of magnetic transportation by driving moving platform.The permanent magnet array of magnetic transportation by driving moving cell is comprised of main permanent magnet and attached permanent magnet 18, main permanent magnet (the main permanent magnet 17 of the first main permanent magnet 16, second) is adhesively fixed on the surface of magnet steel backboard 4 with Halbach one-dimensional array form or two-dimensional planar array form with attached permanent magnet 18, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, forms closed magnetic path.
The course of work of the present invention is as follows:
Magnetic direction, hot-wire coil direction of current that the permanent magnet of this magnetic transportation by driving moving platform produces, and the Lorentz force direction producing both are mutually vertical.Every group of coil unit can be simultaneously at permanent magnet array institute orthogonal both direction planar, and provide thrust on this three degree of freedom of in-plane of vertical permanent magnet array place.
In the present embodiment, as shown in Figure 4, first, this magnetic transportation by driving moving platform stator coil powers on, and because most of sensors of measuring system are all the measurements of increment type, now needs advanced line sensor to demarcate.At one jiao of magnetic transportation by driving moving platform stator three laser triangulation sensors 15 that arrange, and be positioned at current vortex sensor 11 on coil array 14 and be just intended for that zero-bit demarcates.Wherein along directions X, be provided with two laser triangulation sensors 15, can measure respectively the position along directions X of magnetic transportation by driving moving platform mover and the angle of inclination of rotating around Z-direction; Along Y-direction, be provided with a laser triangulation sensor 15, measure magnetic transportation by driving moving platform mover along the position of Y-direction; Be positioned at current vortex sensor 11 arrays on coil array 14, can measure magnetic transportation by driving moving platform mover along the position of Y-direction, and around X-direction and the angle of inclination of rotating around Y direction.After completing above process, can determine that magnetic transportation by driving moving platform mover is positioned at the position of magnetic transportation by driving moving platform stator, simultaneously, also the three-axis gyroscope 5 that is arranged on magnetic transportation by driving moving platform mover and the initial position of three axis accelerometer 6 have been determined, because 5 work a period of times of three-axis gyroscope will drift about, so need to constantly repeat above Zero positioning process.
Completed after the initial position demarcation of three-axis gyroscope 5 and three axis accelerometer 6, need to carry out the adjustment of laser interferometer measurement system 12.First, wireless signal output module 19 and reception of wireless signals module 20 are constantly by the position signalling notice control system of three-axis gyroscope 5 and three axis accelerometer 6, the measuring-signal of transmission of wireless signals can adopt WIFI, bluetooth or the mode such as infrared, by control system, constantly adjust the pose of magnetic transportation by driving moving platform mover in magnetic field, then adjust plane grating chi, can be in allowed band normal light echo work, so far completed the adjustment of plane grating chi measuring system 12, under magnetic transportation by driving moving platform normal operating conditions, all need plane grating chi measuring system 12 to carry out high precision position measurement.
The power supply mode of three-axis gyroscope 5 and three axis accelerometer 6 adopts installs power module 7 on wiring board 8, power module 7 is also installed an electric power receiver 24, this electric power receiver 24 can be battery and carries out wireless charging, when battery electric power is inadequate, can be in the inoperative period by mover componental movement to being arranged in above the Wireless charging coil 21 of a definite position of large-scale coil array assembly 14, give Wireless charging coil 21 logical upper high-frequency current, just can make the inductive coil generation current in electric power receiver 24, thereby charge the battery.
The present invention compared with prior art, adopts Radio Transmission Technology, wireless power technology and without cable designs, and mover can be in surface level be rotated freely around 360 °, has greatly improved the antijamming capability of worktable, has improved the control bandwidth of control system simultaneously.
Claims (6)
1. the moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree magnetic suspension motion platform, this magnetic transportation by driving moving platform contains pedestal (1), stator, mover, slide holder (2) and measuring system, and described mover is comprised of halbach permanent magnet array (13) and magnet steel backboard (4); Described stator is to arrange by organizing coil unit (9) coil array (14) forming more; Described measuring system comprises plane grating chi measuring system (12) and current vortex sensor (11); It is characterized in that: between described mover and slide holder (2), be also provided with a three-axis gyroscope (5), a three axis accelerometer (6), power module (7) and wireless signal output module (19); Described three-axis gyroscope (5), three axis accelerometer (6), power module (7) and wireless signal output module (19) are integrated on a wiring board (8); Described three-axis gyroscope (5) is measured respectively mover around the angle of X-axis, Y-axis and Z axis rotation; Described three axis accelerometer (6) is measured respectively mover along the linear acceleration of X-axis, Y-axis and Z axis; On described stator, be provided with a reception of wireless signals module (20), the measuring-signal of described three-axis gyroscope (5) and three axis accelerometer (6) is to carry out radio communication by described wireless signal output module (19) and the reception of wireless signals module (20) being arranged on stator; Described current vortex sensor (11) becomes in the gap between arranged in arrays each coil unit (9) on stator, and the gauge head of current vortex sensor (11) is placed straight up; On the position at an angle of stator, be provided with three laser triangulation sensors (15), wherein along directions X, be provided with two laser triangulation sensors (15), along Y-direction, be provided with a laser triangulation sensor (15), three laser triangulation sensors (15) and the demarcation of doing six degree of freedom for described three-axis gyroscope (5) and three axis accelerometer (6) together with described current vortex sensor (11);
Described magnetic transportation by driving moving platform also contains a mover vacuum chamber (22) and a stator vacuum chamber (23), and described mover, slide holder (2), three-axis gyroscope (5), three axis accelerometer (6), power module (7), wireless signal output module (19) and plane grating measuring system (12) are placed in mover vacuum chamber (22); Described stator, current vortex sensor (11), laser triangulation sensor (15) and pedestal (1) are placed in stator vacuum chamber (23), described mover vacuum chamber (22) and described stator vacuum chamber (23) are independent of one another, are connected respectively by gas piping with two vacuum pumps that are positioned at vacuum chamber outside.
2. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree magnetic suspension motion platform, it is characterized in that: described plane grating chi measuring system (12) comprises four plane grating chis (31) and some grating reading heads (32), these four plane grating chis (31) are separately positioned on the upper surface of slide holder (2), and are close to (2) four sides of slide holder; Described some grating reading heads (32) be separately positioned on plane grating chi (31) directly in the center line direction of two quadratures in described stator upper surface, and and plane grating chi (31) between keep gap.
3. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree magnetic suspension motion platform, it is characterized in that: described power module (7) adopts power module that can wireless charging, can contain rechargeable battery, electric power receiver (24) and Wireless charging coil (21) by wireless charging power module, it is upper that described electric power receiver (24) is arranged on wiring board (8), and described Wireless charging coil (21) is arranged on the position at any one angle on stator.
4. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree magnetic suspension motion platform, it is characterized in that: described coil array (14) forms along directions X and Y-direction arrangement respectively by organizing coil unit more, every group of coil unit at least comprises three square coils, two adjacent groups coil unit perpendicular array.
5. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree magnetic suspension motion platform, it is characterized in that: described coil unit adopts the coil groups (5a) of lamination quadrature coiling, or adopt the individual layer rectangular coil coil groups (5b) of lamination perpendicular array and horizontal positioned from the bottom to top, or the coil groups (5c) of employing rectangular coil horizontal positioned, or the coil groups (5d) that adopts rectangular coil vertically to place, or adopt lamination quadrature to print the coil groups (5e) of PCB circuit; The multiple that the coil quantity of each described coil groups is 3, each coil is comprised of electrified wire and coil rack (10).
6. a kind of moving-iron type with vacuum (-tight) housing as claimed in claim 1 is without cable six-freedom-degree magnetic suspension motion platform, it is characterized in that: the permanent magnet array in described mover is comprised of main permanent magnet and attached permanent magnet, main permanent magnet and attached permanent magnet are adhesively fixed on the surface of magnet steel backboard with Halbach two-dimensional array form, adjacent main permanent magnet is mutually vertical with the magnetic direction of attached permanent magnet, between each permanent magnet, forms closed magnetic path.
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| CN201310447559.4A CN103543612B (en) | 2013-09-25 | 2013-09-25 | A kind of moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree maglev motion platform |
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| CN201310447559.4A CN103543612B (en) | 2013-09-25 | 2013-09-25 | A kind of moving-iron type with vacuum (-tight) housing is without cable six-freedom-degree maglev motion platform |
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| CN103543612B CN103543612B (en) | 2015-09-30 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016169362A1 (en) * | 2015-04-23 | 2016-10-27 | 清华大学 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage |
| NL1042221A (en) * | 2016-01-14 | 2017-07-21 | Harbin Institute Technology | Arc vector rotation wafer stage switching method and device based on plane grating measurement for dynamic magnetic maglev dual-wafer stage |
| CN109192474A (en) * | 2015-12-17 | 2019-01-11 | 三星电机株式会社 | Wirelessly communicate coil, coil module and the mobile terminal using the coil module |
| CN110067810A (en) * | 2019-05-15 | 2019-07-30 | 深圳傲科海科技有限公司 | Suspension control method, controller, support equipment and readable storage medium storing program for executing |
| CN118074435A (en) * | 2024-04-18 | 2024-05-24 | 佛山市增广智能科技有限公司 | Mover pose detection device and method for planar motor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1484850A (en) * | 2001-08-08 | 2004-03-24 | 尼康株式会社 | Stage system exposure device and method of manufacturing device |
| CN1260772C (en) * | 1999-10-07 | 2006-06-21 | 株式会社尼康 | Substrate, stage device, method of driving stage, exposure system and exposure method |
| JP2009266883A (en) * | 2008-04-22 | 2009-11-12 | Nikon Corp | Stage apparatus, aligner, and method for manufacturing device |
| CN101551598B (en) * | 2009-04-03 | 2010-12-01 | 清华大学 | Double-stage switching system of photoetching machine wafer stage |
| JP2011119320A (en) * | 2009-12-01 | 2011-06-16 | Yaskawa Electric Corp | thetaZ DRIVE DEVICE AND STAGE DEVICE WITH THE SAME, AND INSPECTION DEVICE |
-
2013
- 2013-09-25 CN CN201310447559.4A patent/CN103543612B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1260772C (en) * | 1999-10-07 | 2006-06-21 | 株式会社尼康 | Substrate, stage device, method of driving stage, exposure system and exposure method |
| CN1484850A (en) * | 2001-08-08 | 2004-03-24 | 尼康株式会社 | Stage system exposure device and method of manufacturing device |
| JP2009266883A (en) * | 2008-04-22 | 2009-11-12 | Nikon Corp | Stage apparatus, aligner, and method for manufacturing device |
| CN101551598B (en) * | 2009-04-03 | 2010-12-01 | 清华大学 | Double-stage switching system of photoetching machine wafer stage |
| JP2011119320A (en) * | 2009-12-01 | 2011-06-16 | Yaskawa Electric Corp | thetaZ DRIVE DEVICE AND STAGE DEVICE WITH THE SAME, AND INSPECTION DEVICE |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016169362A1 (en) * | 2015-04-23 | 2016-10-27 | 清华大学 | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage |
| US9995569B2 (en) | 2015-04-23 | 2018-06-12 | Tsinghua University | Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage |
| CN109192474A (en) * | 2015-12-17 | 2019-01-11 | 三星电机株式会社 | Wirelessly communicate coil, coil module and the mobile terminal using the coil module |
| CN109192474B (en) * | 2015-12-17 | 2021-06-11 | 株式会社Wits | Wireless communication coil, coil module and mobile terminal using coil module |
| NL1042221A (en) * | 2016-01-14 | 2017-07-21 | Harbin Institute Technology | Arc vector rotation wafer stage switching method and device based on plane grating measurement for dynamic magnetic maglev dual-wafer stage |
| CN110067810A (en) * | 2019-05-15 | 2019-07-30 | 深圳傲科海科技有限公司 | Suspension control method, controller, support equipment and readable storage medium storing program for executing |
| CN110067810B (en) * | 2019-05-15 | 2024-04-16 | 傲基科技股份有限公司 | Suspension control method, controller, support apparatus, and readable storage medium |
| CN118074435A (en) * | 2024-04-18 | 2024-05-24 | 佛山市增广智能科技有限公司 | Mover pose detection device and method for planar motor |
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