CN103456857B - Led芯片及其制备方法 - Google Patents
Led芯片及其制备方法 Download PDFInfo
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- CN103456857B CN103456857B CN201310452781.3A CN201310452781A CN103456857B CN 103456857 B CN103456857 B CN 103456857B CN 201310452781 A CN201310452781 A CN 201310452781A CN 103456857 B CN103456857 B CN 103456857B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 239000004065 semiconductor Substances 0.000 claims abstract description 103
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000011259 mixed solution Substances 0.000 claims description 9
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 230000011218 segmentation Effects 0.000 description 4
- 241000208340 Araliaceae Species 0.000 description 3
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 3
- 235000003140 Panax quinquefolius Nutrition 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 235000008434 ginseng Nutrition 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000005034 decoration Methods 0.000 description 1
- 238000002224 dissection Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- -1 wherein Substances 0.000 description 1
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CN201310452781.3A CN103456857B (zh) | 2013-09-27 | 2013-09-27 | Led芯片及其制备方法 |
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CN201310452781.3A CN103456857B (zh) | 2013-09-27 | 2013-09-27 | Led芯片及其制备方法 |
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CN103456857A CN103456857A (zh) | 2013-12-18 |
CN103456857B true CN103456857B (zh) | 2016-03-16 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI531085B (zh) * | 2014-02-25 | 2016-04-21 | 璨圓光電股份有限公司 | 發光二極體晶片 |
CN109427565B (zh) * | 2017-09-01 | 2021-09-24 | 晶能光电(江西)有限公司 | 一种晶圆切割方法 |
CN109427566A (zh) * | 2017-09-01 | 2019-03-05 | 晶能光电(江西)有限公司 | 一种晶圆切割方法 |
CN110010728B (zh) * | 2019-03-25 | 2021-05-18 | 大连德豪光电科技有限公司 | 发光二极管芯片的制备方法 |
CN110010733B (zh) * | 2019-03-25 | 2021-01-15 | 大连德豪光电科技有限公司 | 发光二极管芯片的制备方法及发光二极管芯片 |
CN111864025A (zh) * | 2019-04-30 | 2020-10-30 | 云谷(固安)科技有限公司 | 微型发光二极管及其制作方法、显示装置 |
CN111896856B (zh) * | 2020-08-12 | 2023-05-23 | 江西乾照光电有限公司 | 一种芯片电性能测试***及方法 |
CN113540144A (zh) * | 2021-06-18 | 2021-10-22 | 泉州三安半导体科技有限公司 | 实现多颗led芯片esd测试的晶圆、正装led芯片及其制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101924116A (zh) * | 2009-06-12 | 2010-12-22 | 刘胜 | 可扩展的超大尺寸发光二极管芯片及制造方法 |
CN102263176A (zh) * | 2010-05-24 | 2011-11-30 | Lg伊诺特有限公司 | 发光器件、发光器件封装以及发光装置*** |
CN102668132A (zh) * | 2009-06-10 | 2012-09-12 | 克里公司 | 发光二极管(led)晶圆的前端划线以及结果器件 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20080258165A1 (en) * | 2007-04-23 | 2008-10-23 | Goldeneye, Inc. | Light emitting diode chip |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102668132A (zh) * | 2009-06-10 | 2012-09-12 | 克里公司 | 发光二极管(led)晶圆的前端划线以及结果器件 |
CN101924116A (zh) * | 2009-06-12 | 2010-12-22 | 刘胜 | 可扩展的超大尺寸发光二极管芯片及制造方法 |
CN102263176A (zh) * | 2010-05-24 | 2011-11-30 | Lg伊诺特有限公司 | 发光器件、发光器件封装以及发光装置*** |
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Address after: 215123 Suzhou Province Industrial Park, Jiangsu new road, No. 8 Applicant after: FOCUS LIGHTINGS TECHNOLOGY CO., LTD. Address before: 215123 Suzhou Province Industrial Park, Jiangsu new road, No. 8 Applicant before: Focus Lightings Tech Inc. |
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Effective date of registration: 20200904 Address after: 223800 west side of development avenue of Suqian economic and Technological Development Zone in Jiangsu province (room 2005 of business center) Patentee after: FOCUS LIGHTINGS TECHNOLOGY (SUQIAN) Co.,Ltd. Address before: 215123 No. 8 Qing Qing Road, Suzhou Industrial Park, Jiangsu, China Patentee before: FOCUS LIGHTINGS SCIENCE & TECHNOLOGY Co.,Ltd. |
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Address after: 223800 south of Dongwu Road, Suqian Economic and Technological Development Zone, Jiangsu Province Patentee after: FOCUS LIGHTINGS TECHNOLOGY (SUQIAN) Co.,Ltd. Address before: 223800 west side of development avenue of Suqian economic and Technological Development Zone in Jiangsu province (room 2005 of business center) Patentee before: FOCUS LIGHTINGS TECHNOLOGY (SUQIAN) Co.,Ltd. |