CN103290364A - 连续式真空蒸发镀膜装置 - Google Patents
连续式真空蒸发镀膜装置 Download PDFInfo
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- CN103290364A CN103290364A CN2013101968570A CN201310196857A CN103290364A CN 103290364 A CN103290364 A CN 103290364A CN 2013101968570 A CN2013101968570 A CN 2013101968570A CN 201310196857 A CN201310196857 A CN 201310196857A CN 103290364 A CN103290364 A CN 103290364A
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- 238000007738 vacuum evaporation Methods 0.000 title claims abstract description 32
- 239000007888 film coating Substances 0.000 title abstract 9
- 238000009501 film coating Methods 0.000 title abstract 9
- 230000007704 transition Effects 0.000 claims abstract description 220
- 239000000463 material Substances 0.000 claims abstract description 101
- 238000000576 coating method Methods 0.000 claims description 197
- 239000011248 coating agent Substances 0.000 claims description 190
- 238000001704 evaporation Methods 0.000 claims description 28
- 230000008020 evaporation Effects 0.000 claims description 27
- 230000003044 adaptive effect Effects 0.000 claims description 8
- 238000012544 monitoring process Methods 0.000 claims description 8
- 238000010849 ion bombardment Methods 0.000 claims description 4
- 239000006200 vaporizer Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 3
- 238000007747 plating Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 10
- 238000005086 pumping Methods 0.000 description 7
- 239000000523 sample Substances 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 6
- 230000009183 running Effects 0.000 description 6
- 238000005566 electron beam evaporation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000004087 circulation Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000007630 basic procedure Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
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CN201310196857.0A CN103290364B (zh) | 2013-05-23 | 2013-05-23 | 连续式真空蒸发镀膜装置 |
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CN201310196857.0A CN103290364B (zh) | 2013-05-23 | 2013-05-23 | 连续式真空蒸发镀膜装置 |
Publications (2)
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CN103290364A true CN103290364A (zh) | 2013-09-11 |
CN103290364B CN103290364B (zh) | 2015-11-18 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109468611A (zh) * | 2018-12-25 | 2019-03-15 | 东莞市粒米薄膜科技有限公司 | 真空镀膜装置 |
CN112080731A (zh) * | 2020-07-22 | 2020-12-15 | 湘潭宏大真空技术股份有限公司 | 多室连续光学镀膜机 |
CN113061870A (zh) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | 一种用于光学薄膜元器件的连续真空镀膜生产线及方法 |
CN116397206A (zh) * | 2022-06-21 | 2023-07-07 | 费勉仪器科技(南京)有限公司 | 可拆卸连接装置、样品架及真空进样*** |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101463471A (zh) * | 2009-01-12 | 2009-06-24 | 浙江嘉远格隆能源股份有限公司 | 一种连续化薄膜真空沉积方法及装置 |
CN101956174A (zh) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | 循环蒸镀装置 |
JP2011068980A (ja) * | 2009-05-04 | 2011-04-07 | Samsung Mobile Display Co Ltd | 有機物蒸着装置及び蒸着方法 |
CN102051581A (zh) * | 2010-12-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | 基片镀膜处理*** |
WO2012090753A1 (ja) * | 2010-12-28 | 2012-07-05 | トッキ株式会社 | 成膜装置 |
CN203333745U (zh) * | 2013-05-23 | 2013-12-11 | 深圳市生波尔机电设备有限公司 | 连续式真空蒸发镀膜装置 |
-
2013
- 2013-05-23 CN CN201310196857.0A patent/CN103290364B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101463471A (zh) * | 2009-01-12 | 2009-06-24 | 浙江嘉远格隆能源股份有限公司 | 一种连续化薄膜真空沉积方法及装置 |
JP2011068980A (ja) * | 2009-05-04 | 2011-04-07 | Samsung Mobile Display Co Ltd | 有機物蒸着装置及び蒸着方法 |
CN101956174A (zh) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | 循环蒸镀装置 |
WO2012090753A1 (ja) * | 2010-12-28 | 2012-07-05 | トッキ株式会社 | 成膜装置 |
CN102051581A (zh) * | 2010-12-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | 基片镀膜处理*** |
CN203333745U (zh) * | 2013-05-23 | 2013-12-11 | 深圳市生波尔机电设备有限公司 | 连续式真空蒸发镀膜装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109468611A (zh) * | 2018-12-25 | 2019-03-15 | 东莞市粒米薄膜科技有限公司 | 真空镀膜装置 |
CN112080731A (zh) * | 2020-07-22 | 2020-12-15 | 湘潭宏大真空技术股份有限公司 | 多室连续光学镀膜机 |
CN112080731B (zh) * | 2020-07-22 | 2022-10-18 | 湘潭宏大真空技术股份有限公司 | 多室连续光学镀膜机 |
CN113061870A (zh) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | 一种用于光学薄膜元器件的连续真空镀膜生产线及方法 |
CN116397206A (zh) * | 2022-06-21 | 2023-07-07 | 费勉仪器科技(南京)有限公司 | 可拆卸连接装置、样品架及真空进样*** |
CN116397206B (zh) * | 2022-06-21 | 2024-01-23 | 费勉仪器科技(南京)有限公司 | 可拆卸连接装置、样品架及真空进样*** |
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Publication number | Publication date |
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CN103290364B (zh) | 2015-11-18 |
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Effective date of registration: 20180601 Address after: 528400 Room 403, four floor, government side economic and trade building, 25 of ban Fu town, 25 of ban Fu Road, Zhongshan, Guangdong. Patentee after: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Address before: 518000 Shenzhen, Guangdong Province, Shenzhen Pingshan new Shenzhen Export Processing Zone No. 2, A building, west of the first floor. Patentee before: SHENZHEN SMEE Co.,Ltd. |
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Denomination of invention: Continuous vacuum evaporation film coating device Effective date of registration: 20191023 Granted publication date: 20151118 Pledgee: Science and Technology Branch of Torch Development Zone of Zhongshan Rural Commercial Bank Co.,Ltd. Pledgor: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Registration number: Y2019980000293 |
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Date of cancellation: 20220124 Granted publication date: 20151118 Pledgee: Science and Technology Branch of Torch Development Zone of Zhongshan Rural Commercial Bank Co.,Ltd. Pledgor: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Registration number: Y2019980000293 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
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Address after: Building 4, Haiyin Technology Industrial Park, No.1 Industrial Avenue, Banfu Community, Banfu Town, Zhongshan City, Guangdong Province, 528400 Patentee after: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. Address before: 528400 Room 403, four floor, government side economic and trade building, 25 of ban Fu town, 25 of ban Fu Road, Zhongshan, Guangdong. Patentee before: Guangdong Sheng Boer Photoelectric Technology Co.,Ltd. |
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