CN106767406A - Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform - Google Patents
Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform Download PDFInfo
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- CN106767406A CN106767406A CN201611186605.XA CN201611186605A CN106767406A CN 106767406 A CN106767406 A CN 106767406A CN 201611186605 A CN201611186605 A CN 201611186605A CN 106767406 A CN106767406 A CN 106767406A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B17/00—Systems involving the use of models or simulators of said systems
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Abstract
The invention discloses a kind of micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform,The system is made up of Precision Position Location System and Computer go system two parts,Precision Position Location System is by the first computer for connecting successively in order,DSPACE controller boards,Piezoelectric ceramics controller,Piezoelectric ceramic actuator is constituted,The Computer go system is by zoom microscopic system,CCD camera,Second computer,Precision positioning objective table,Motion control card is constituted,The second computer of wherein described Computer go system is connected with dSPACE controller boards by RS232 serial ports,The piezoelectric ceramics controller is connected with dSPACE controller boards by digital analog converter DAC interfaces and analog-digital converter ADC interface,The piezoelectric ceramic actuator is used to connect driving compliant mechanism platform.Compact conformation of the invention, strong antijamming capability, with high-resolution, can realize to multiple degrees of freedom compliant mechanism platform closed-loop real-time online control.
Description
Technical field
The present invention relates to the technical field of Precision Position Location System, a kind of micro-nano alignment system is referred in particular to and its to submissive machine
The closed-loop On-Line Control Method of structure platform.
Background technology
With science and technology continue to develop, precision positioning technology as one of key technology, in sophisticated industry and scientific research
In it is more and more important.Corresponding Precision Position Location System, is widely used in miniature weaving and knitting preparation and manufactures, semiconductor technology,
In the fields such as Ultra-precision Turning, bioengineering, life and medical technology.As an important composition portion in Precision Position Location System
Point, micro-nano alignment system can provide the micron order step-wise displacement with Nano grade resolution ratio.Piezoelectric ceramic actuator has
High resolution, response is fast, small volume, and thrust is big, the advantages of without heating.Compliant mechanism has fricton-tight friction, be not required to lubrication and
The advantage of high resolution.Micro-nano alignment system is widely used in by the compliant mechanism of Piezoelectric Ceramic.In order to obtain preferably
Positioning precision and tracking precision, generally require to realize the full closed loop control of full platform.Common micro-nano alignment system uses electric capacity
Sensor, laser interferometer, laser displacement sensor is used as survey tool, there is provided feedback signal.At present by Computer go
System is used in micro-nano alignment system or little as survey tool.
Computer go system is to integrate being capable of achieving for light microscope, visual imaging and computer vision technique
In real time, the measuring table of Visual retrieval.The composition of micro- vision system mainly includes light microscope, light source, video camera, image
Hardware and the image processing softwares such as capture card, precision positioning objective table.Its principle is by microscope and imaging device (CCD
Video camera, image pick-up card etc.) the IMAQ of measurand to computer, then with image processing techniques, computer
The technology such as vision or artificial intelligence such as is processed the image for collecting, is recognized at the operation, so as to complete micro- vision system want
Asking for task.Computer go has following advantage：Non-contacting measurement；Possesses multi-degree of freedom measurement ability；High
Resolution ratio.It is that this is applied into the maximum advantage of micro-nano alignment system wherein to have multi-degree of freedom measurement ability.This micro- vision
System has a wide range of applications in fields such as microscopic measurement, imagings.
The content of the invention
A kind of shortcoming and defect it is an object of the invention to overcome prior art, there is provided micro-nano alignment system and its to soft
Along the closed-loop On-Line Control Method of mechanism platform, the system architecture is compact, strong antijamming capability, with high-resolution, can
Realize controlling multiple degrees of freedom compliant mechanism platform closed-loop real-time online.
To achieve the above object, technical scheme provided by the present invention, as follows：
A kind of micro-nano alignment system, is made up of, the precision Precision Position Location System and Computer go system two parts
Alignment system by connect successively in order the first computer, dSPACE controller boards, piezoelectric ceramics controller, piezoelectric ceramics drive
Dynamic device composition, the Computer go system is by zoom microscopic system, CCD camera, second computer, precision positioning loading
Platform, motion control card composition, wherein the second computer of the Computer go system is by RS232 serial ports and dSPACE
Controller board is connected, and the piezoelectric ceramics controller is by digital analog converter DAC interfaces and analog-digital converter
ADC interface is connected with dSPACE controller boards, and the piezoelectric ceramic actuator is used to connect driving compliant mechanism platform, described
Compliant mechanism platform is placed on precision positioning objective table, and the precision positioning objective table is calculated by motion control card and second
Machine is connected, and the CCD camera connects second computer, for gathering zoom microscopic system.
The model DS1104 of the dSPACE controller boards, is integrated with 8 16 bit digital analog converter DAC interfaces, 8
Individual 16 analog-digital converter ADC interfaces, 1 Digital I/O interfaces, 1 PWM interfaces, 2 Inc interfaces, 1 RS232
Serial interface and 1 RS422/RS485 interface.
The piezoelectric ceramics controller is core XE-501 tomorrow piezoelectric ceramics controllers, includes voltage amplification module.
The piezoelectric ceramic actuator is core PST tomorrow 150/7/60VS12 piezoelectric ceramic actuators, and being built-in with resistance should
Become sheet type sensor SGS.
First computer is the computer equipped with Control Desk and Matlab softwares.
The above-mentioned micro-nano alignment system of the present invention is to the closed-loop On-Line Control Method of compliant mechanism platform, including following step
Suddenly：
1) ADAPTIVE CONTROL of piezoelectric ceramic actuator is designed
Real-time Collection piezoelectric ceramic actuator input signal and output signal, using improved Prandtl-Ishinskii
Model is used as inversion model, and its expression formula in discrete domain is as follows：
Wherein, operator Fri[y] (t) is as follows
Fri[y] (t)=max (y (t)-ri,min(y(t)+ri,Fri[y](t)))
Fri[y] (0)=max (y (t)-ri,min(y(t)+ri,0))
In above formula, H-1[y (t), r]=[y (t), y (t)2,Fr1[y](t),...,Frn[y](t)]TWithOutput vector and weight vectors are represented respectively, and y (t) and v (t) represent piezoelectric ceramics input displacement respectively
And output voltage, n represents the number of threshold value, and q and a is coefficient, riRepresent i-th threshold, p (ri) represent that i-th threshold is corresponding
Weight number, Fri[y] (t) represents the corresponding operator value of i-th threshold；T represents the time, meets tj<t≤tj+1, 0≤j≤N-1, this
Outer 0=t0＜ t1＜ ... ＜ tN=tEIt is time interval [0, tE] graduation, to ensure each time subinterval [tj,tj+1] on
The monotonicity of input signal y (t) in face；On the basis of inversion model, adaptive control laws are designed using least mean square algorithm, allowed
Weight vectorsOnline updating, wherein only needing to the renewal of coefficient q and a real-time online, other specification value is protected
Hold constant；VectorqKAnd aKIt is respectively weight vectorsQ and a from
The form of expression in domain is dissipated, its specific online updating is as follows：
qk+1=qk+2μ·(yd(k)-y(k))·yd(k))
ak+1=ak+2μ·(yd(k)-y(k))·yd(k)2
Wherein, μ is coefficient, ydK (), y (k) are respectively that preferable input displacement, reality output displacement are showed in discrete domain
Form；
2) compliant mechanism platform is demarcated using micro- vision system, determines that image coordinate is closed with the platform coordinates of motion
System, and the input/output relation matrix of platform is obtained, it is specific as follows：
Complete step 1) after, with reference to Control Desk softwares, realize online to piezoelectric ceramic actuator control adaptive
Should control, L represents piezoelectric ceramics input displacement, be input into multigroup different piezoelectric ceramics input displacements, be obtained by Computer go
Correspondence picture displacement is taken, finally by Matlab off-line calibrations, image coordinate and platform coordinates of motion relation is determined, and obtain soft
Along the input/output relation matrix Q of mechanism's platform, its associated expression is as follows：
Wherein x, y and theta are respectively compliant mechanism platform x direction displacements, the displacement of y directions and turning around x-y plane
Angle.
3) micro-nano alignment system full closed loop control program is designed, Computer go system and dSPACE communication protocols are completed
View, realizes the closed-loop On-line Control to compliant mechanism platform, specific as follows：
Complete step 2) in platform demarcate after, obtain image coordinate and platform coordinates of motion relation, compiled using C language
The S function write completes Computer go system and dSPACE serial communications, so as to realize that micro- vision system is believed platform displacement
Number online feedback；Step 2 is then utilized in the Simulink templates) in compliant mechanism platform input/output relation inverse matrix Q-1,
And combine step 1) in ADAPTIVE CONTROL, design whole micro-nano alignment system Closed-loop Control Strategy,
WithIt is respectively that ideal is input into pose and actually enters pose, pose deviation e (t) before them is as follows
It is shown：
In order to obtain more preferable closed-loop control effect, deviation signal e (t) is retrodeviated by obtaining amendment after switch function treatment
Difference e'(t), it is as follows：
Wherein δ is a boundary value；
Finally, realized to compliant mechanism platform in x and y both direction real-time online closed-loop controls by dSPACE systems.
The present invention compared with prior art, has the following advantages that and beneficial effect：
Present invention employs Computer go systematic survey moving platform pose, the tradition such as the laser displacement sensor that compares
For sensor, with multi-degree of freedom measurement ability, non-contacting measurement, the advantages of resolution ratio high.In addition, by RS232
Serial communication, the micro-nano alignment system is realized to multiple degrees of freedom compliant mechanism platform by micro- vision system and dSPACE systems
Closed-loop On-line Control, obtain positioning precision higher.
Brief description of the drawings
Fig. 1 is the composition schematic diagram of micro-nano alignment system of the present invention.
Fig. 2 is piezoelectric ceramic actuator Self Adaptive Control schematic diagram of the present invention.
Fig. 3 is micro-nano alignment system full closed loop control schematic diagram of the present invention.
Specific embodiment
With reference to specific embodiment, the present invention is described further.
As shown in figure 1, the micro-nano alignment system that the present embodiment is provided, by Precision Position Location System and Computer go system
Two parts are constituted；Precision Position Location System is by the first computer 1, dSPACE DS1104 controller boards 2, core XE-501 tomorrow piezoelectricity
Ceramic controller 5, three core PST tomorrow 150/7/60VS12 piezoelectric ceramic actuators 6,7,8 are constituted, wherein XE-501 piezoelectricity
Controller 5 includes voltage amplification module, and piezoelectric ceramic actuator is built-in with resistance strain-gauge transducer (SGS), dSPACE
8 16 bit digital analog converter (DAC) interfaces, 4,8 16 analog-digital converters are integrated with DS1104 controller boards
(ADC) interface 3,1 Digital I/O interface, 1 PWM interface, 2 Inc interfaces, 1 RS232 serial interface 17 and 1
RS422/RS485 interfaces；First computer 1 is the computer equipped with Control Desk and Matlab softwares.Computer
Micro- vision system includes the axle precision positioning objective tables 10 of x-y two, and the zoom of Navitar companies of U.S. 12X Ultra Zoom is micro-
System (being equipped with 50X microlens 11, spectroscope 12, stationary lens 13, and Bright Light LED coaxial-illuminatings device 15), moral
AVT companies of state Manta G201 CCD cameras 14, data wire 17, second computer 18, motion control card 19.The computer is micro-
The second computer of vision system is connected with dSPACE DS1104 controller boards 2 by RS232 serial ports 16, the piezoelectricity
Ceramic controller 5 be by three digital analog converter (DAC) interfaces 4 and three analog-digital converter (ADC) interfaces 3 with
DSPACE DS1104 controller boards 2 are connected, and the piezoelectric ceramic actuator 6,7,8 is used to connect driving three freedom meek
Mechanism's platform 9.The CCD camera 14 connects second computer 18 by data wire 17, and for gathering zoom microscopic system, three certainly
It is placed on the axle precision positioning objective tables 10 of x-y two by degree compliant mechanism platform 9, the axle precision positioning objective tables 10 of the x-y two
It is connected with second computer 18 by motion control card 19.
It is below closed-loop On-Line Control Method of the above-mentioned micro-nano alignment system of the present embodiment to compliant mechanism platform, its tool
Body process is as follows：
1) ADAPTIVE CONTROL of piezoelectric ceramic actuator is designed.
Fig. 2 gives the self-adaptation control method of piezoelectric ceramic actuator, and inversion model is improved Prandtl- in figure
Ishinskii models, its expression formula in discrete domain is as follows：
Wherein operator Fri[y] (t) is as follows
Fri[y] (t)=max (y (t)-ri,min(y(t)+ri,Fri[y](t)))
Fri[y] (0)=max (y (t)-ri,min(y(t)+ri,0))
In above formula, H-1[y (t), r]=[y (t), y (t)2,Fr1[y](t),...,Frn[y](t)]TWithOutput vector and weight vectors are represented respectively, and y (t) and v (t) represent piezoelectric ceramics input bit respectively
Move and output voltage, n represents the number of threshold value, and q and a is coefficient, riRepresent i-th threshold, p (ri) represent i-th threshold correspondence
Weight number, Fri[y] (t) represents the corresponding operator value of i-th threshold.T represents the time, meets tj<t≤tj+1, 0≤j≤N-1,
In addition 0=t0＜ t1＜ ... ＜ tN=tEIt is time interval [0, tE] graduation, to ensure each time subinterval [tj,tj+1]
The monotonicity of input signal y (t) above.
On the basis of inversion model, adaptive control laws are designed using least mean square algorithm, allow weight vectorsOnline updating, wherein only needing to the renewal of coefficient q and a real-time online, other specification value keeps constant.
Y in figuredK (), y (k) is respectively preferable input displacement and reality output the displacement form of expression in discrete domain.VectorqKAnd aKIt is respectively weight vectorsQ and a show shape in discrete domain
Formula, its specific online updating is as follows：
qk+1=qk+2μ·(yd(k)-y(k))·yd(k))
ak+1=ak+2μ·(yd(k)-y(k))·yd(k)2
Wherein μ is coefficient, and 0.55 is set in the present embodiment.
2) compliant mechanism platform is demarcated using micro- vision system, determines that image coordinate is closed with the platform coordinates of motion
System, and obtain the input/output relation matrix of platform.
Complete step 1) after, with reference to Control Desk softwares, realize online to three piezoelectric ceramic actuator controls
Self Adaptive Control.L1, L2, L31,2, No. 3 piezoelectric ceramics input displacements are represented respectively, are input into multigroup different piezoelectric ceramics input bits
Move, correspondence picture displacement is obtained by Computer go.Finally by Matlab off-line calibrations, image coordinate and platform are determined
Coordinates of motion relation, and the input/output relation matrix Q of compliant mechanism platform is obtained, its associated expression is as follows：
Wherein x, y and theta are respectively compliant mechanism platform x direction displacements, the displacement of y directions, and turning around x-y plane
Angle.
3) micro-nano alignment system full closed loop control program is designed, Computer go system and dSPACE communication protocols are completed
View, realizes the closed-loop On-line Control to compliant mechanism platform.
Complete step 2) in platform demarcate after, obtain image coordinate and platform coordinates of motion relation, compiled using C language
The S function write completes Computer go system and dSPACE serial communications, so as to realize that micro- vision system is believed platform displacement
Number online feedback.Step 2 is then utilized in the Simulink templates) in compliant mechanism platform input/output relation inverse matrix Q-1, and combine step 1) in Self Adaptive Control, design whole micro-nano alignment system Closed-loop Control Strategy, as shown in Figure 3.Due to this
Compliant mechanism gantry angle of rotation is too small in embodiment, therefore only considers the displacement of x, y both direction.
With It is respectively that ideal is input into pose and actually enters pose, the following institute of pose deviation e (t) before them
Show：
In order to obtain more preferable closed-loop control effect, deviation signal e (t) is carried out obtaining amendment after switch function treatment to retrodeviate
Difference e'(t), it is as follows：
Wherein δ is a boundary value, and 0.4 is set in the present embodiment.
It is last to be realized to compliant mechanism platform in x and y both direction real-time online closed-loop controls by dSPACE systems.
Embodiment described above is only the preferred embodiments of the invention, not limits practical range of the invention with this, therefore
The change that all shapes according to the present invention, principle are made, all should cover within the scope of the present invention.
Claims (6)
1. a kind of micro-nano alignment system, it is characterised in that：It is made up of Precision Position Location System and Computer go system two parts,
The Precision Position Location System is by the first computer, dSPACE controller boards, piezoelectric ceramics controller, the pressure that connect successively in order
Electroceramics driver is constituted, and the Computer go system is fixed by zoom microscopic system, CCD camera, second computer, precision
Position objective table, motion control card composition, wherein the second computer of the Computer go system be by RS232 serial ports with
DSPACE controller boards are connected, and the piezoelectric ceramics controller is by digital analog converter DAC interfaces and simulation numeral
Converter ADC interface is connected with dSPACE controller boards, and the piezoelectric ceramic actuator is used for connection and drives compliant mechanism to put down
Platform, the compliant mechanism platform is placed on precision positioning objective table, the precision positioning objective table by motion control card with
Second computer is connected, and the CCD camera connects second computer, for gathering zoom microscopic system.
2. a kind of micro-nano alignment system according to claim 1, it is characterised in that：The model of the dSPACE controller boards
Be DS1104, be integrated with 8 16 bit digital analog converter DAC interfaces, 8 16 analog-digital converter ADC interfaces, 1
Digital I/O interfaces, 1 PWM interfaces, 2 Inc interfaces, 1 RS232 serial interface and 1 RS422/RS485 interface.
3. a kind of micro-nano alignment system according to claim 1, it is characterised in that：The piezoelectric ceramics controller is that core is bright
Its XE-501 piezoelectric ceramics controller, includes voltage amplification module.
4. a kind of micro-nano alignment system according to claim 1, it is characterised in that：The piezoelectric ceramic actuator is that core is bright
Its PST 150/7/60VS12 piezoelectric ceramic actuator, is built-in with resistance strain-gauge transducer SGS.
5. a kind of micro-nano alignment system according to claim 1, it is characterised in that：First computer be equipped with
The computer of Control Desk and Matlab softwares.
6. micro-nano alignment system described in a kind of claim 1 is to the closed-loop On-Line Control Method of compliant mechanism platform, its feature
It is to comprise the following steps：
1) ADAPTIVE CONTROL of piezoelectric ceramic actuator is designed
Real-time Collection piezoelectric ceramic actuator input signal and output signal, using improved Prandtl-Ishinskii models
Used as inversion model, its expression formula in discrete domain is as follows：
Wherein, operator Fri[y] (t) is as follows
Fri[y] (t)=max (y (t)-ri,min(y(t)+ri,Fri[y](t)))
Fri[y] (0)=max (y (t)-ri,min(y(t)+ri,0))
In above formula, H-1[y (t), r]=[y (t), y (t)2,Fr1[y](t),...,Frn[y](t)]TWithOutput vector and weight vectors are represented respectively, and y (t) and v (t) represent piezoelectric ceramics input displacement respectively
And output voltage, n represents the number of threshold value, and q and a is coefficient, riRepresent i-th threshold, p (ri) represent that i-th threshold is corresponding
Weight number, Fri[y] (t) represents the corresponding operator value of i-th threshold；T represents the time, meets tj<t≤tj+1, 0≤j≤N-1, this
Outer 0=t0＜ t1＜ ... ＜ tN=tEIt is time interval [0, tE] graduation, to ensure each time subinterval [tj,tj+1] on
The monotonicity of input signal y (t) in face；On the basis of inversion model, adaptive control laws are designed using least mean square algorithm, allowed
Weight vectorsOnline updating, wherein only needing to the renewal of coefficient q and a real-time online, other specification value is protected
Hold constant；VectorqKAnd aKIt is respectively weight vectorsQ and a from
The form of expression in domain is dissipated, its specific online updating is as follows：
qk+1=qk+2μ·(yd(k)-y(k))·yd(k))
ak+1=ak+2μ·(yd(k)-y(k))·yd(k)2
Wherein, μ is coefficient, ydK (), y (k) are respectively preferable input displacement, reality output displacement form of expression in discrete domain；
2) compliant mechanism platform is demarcated using micro- vision system, determines image coordinate and platform coordinates of motion relation, and
The input/output relation matrix of platform is obtained, it is specific as follows：
Complete step 1) after, with reference to Control Desk softwares, realize controlling online adaptive control to piezoelectric ceramic actuator
System, L represents piezoelectric ceramics input displacement, is input into multigroup different piezoelectric ceramics input displacements, obtains right by Computer go
Picture displacement is answered, finally by Matlab off-line calibrations, image coordinate and platform coordinates of motion relation is determined, and obtain submissive machine
The input/output relation matrix Q of structure platform, its associated expression is as follows：
Wherein x, y and theta are respectively compliant mechanism platform x direction displacements, the displacement of y directions and the corner around x-y plane；
3) micro-nano alignment system full closed loop control program is designed, Computer go system and dSPACE communication protocols is completed, it is real
It is specific as follows now to the closed-loop On-line Control of compliant mechanism platform：
Complete step 2) in platform demarcate after, obtain image coordinate and platform coordinates of motion relation, adopt what is shown a C language
S function completes Computer go system and dSPACE serial communications, so as to realize that micro- vision system exists to platform displacement signal
Line feeds back；Step 2 is then utilized in the Simulink templates) in compliant mechanism platform input/output relation inverse matrix Q-1, and
With reference to step 1) in ADAPTIVE CONTROL, design whole micro-nano alignment system Closed-loop Control Strategy,
WithIt is respectively that ideal is input into pose and actually enters pose, pose deviation e (t) before them is as follows
It is shown：
In order to obtain more preferable closed-loop control effect, by deviation signal e (t) by switch function treatment after corrected after deviation e'
(t), it is as follows：
Wherein δ is a boundary value；
Finally, realized to compliant mechanism platform in x and y both direction real-time online closed-loop controls by dSPACE systems.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109060607A (en) * | 2018-05-23 | 2018-12-21 | 山东理工大学 | A kind of submissive operating device and liquid bridge power automatic testing method of view-based access control model feedback |
| CN109214098A (en) * | 2018-09-19 | 2019-01-15 | 山东大学 | A kind of remaining life prediction technique towards micro-nano locating platform |
| CN110068267A (en) * | 2019-05-06 | 2019-07-30 | 广东工业大学 | Evaluate the space nanometer positioning and detection device and method of micro-vision measurement performance |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030197925A1 (en) * | 2002-04-18 | 2003-10-23 | Leica Microsystems Wetzlar Gmbh | Autofocus method for a microscope, and system for adjusting the focus for a microscope |
| JP2006308709A (en) * | 2005-04-27 | 2006-11-09 | Tohoku Univ | Microscope stage, and focal position measuring instrument and confocal microscope system |
| CN2854663Y (en) * | 2005-11-18 | 2007-01-03 | 北京工业大学 | Automatic precision positioning visual servo mechanism device of microdevice |
| CN102136300A (en) * | 2011-02-10 | 2011-07-27 | 南京师范大学 | Three-section combined type ultraprecise positioning table and positioning method thereof |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102323490A (en) * | 2011-10-13 | 2012-01-18 | 南京信息工程大学 | Rectilinear vibration modulation minitype electrostatic field sensor |
| CN103116276A (en) * | 2013-03-04 | 2013-05-22 | 广西大学 | Piezoelectric ceramic objective driver control method |
| CN103264385A (en) * | 2013-05-08 | 2013-08-28 | 袁庆丹 | Automatic microoperation device |
| CN104281087A (en) * | 2013-07-01 | 2015-01-14 | 李苗 | Piezoelectric precise driving control system through machine vision technology |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104440141A (en) * | 2013-09-17 | 2015-03-25 | 李志刚 | Ultra precision positioning workbench with nanometer resolution |
| CN104820439A (en) * | 2015-04-16 | 2015-08-05 | 华南理工大学 | Parallel connection platform tracking control device and method using visual equipment as sensor |
| WO2015120734A1 (en) * | 2014-02-17 | 2015-08-20 | 华南理工大学 | Special testing device and method for correcting welding track based on machine vision |
| CN104913731A (en) * | 2014-11-16 | 2015-09-16 | 徐云鹏 | Laser differential confocal microscope measurement and control system |
| CN206420438U (en) * | 2016-12-20 | 2017-08-18 | 华南理工大学 | A kind of micro-nano alignment system controllable based on micro- vision closed-loop |
-
2016
- 2016-12-20 CN CN201611186605.XA patent/CN106767406B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030197925A1 (en) * | 2002-04-18 | 2003-10-23 | Leica Microsystems Wetzlar Gmbh | Autofocus method for a microscope, and system for adjusting the focus for a microscope |
| JP2006308709A (en) * | 2005-04-27 | 2006-11-09 | Tohoku Univ | Microscope stage, and focal position measuring instrument and confocal microscope system |
| CN2854663Y (en) * | 2005-11-18 | 2007-01-03 | 北京工业大学 | Automatic precision positioning visual servo mechanism device of microdevice |
| CN102136300A (en) * | 2011-02-10 | 2011-07-27 | 南京师范大学 | Three-section combined type ultraprecise positioning table and positioning method thereof |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102323490A (en) * | 2011-10-13 | 2012-01-18 | 南京信息工程大学 | Rectilinear vibration modulation minitype electrostatic field sensor |
| CN103116276A (en) * | 2013-03-04 | 2013-05-22 | 广西大学 | Piezoelectric ceramic objective driver control method |
| CN103264385A (en) * | 2013-05-08 | 2013-08-28 | 袁庆丹 | Automatic microoperation device |
| CN104281087A (en) * | 2013-07-01 | 2015-01-14 | 李苗 | Piezoelectric precise driving control system through machine vision technology |
| CN104440141A (en) * | 2013-09-17 | 2015-03-25 | 李志刚 | Ultra precision positioning workbench with nanometer resolution |
| WO2015120734A1 (en) * | 2014-02-17 | 2015-08-20 | 华南理工大学 | Special testing device and method for correcting welding track based on machine vision |
| CN104317218A (en) * | 2014-10-11 | 2015-01-28 | 华南理工大学 | Precise micro-dynamic parallel locating system and method for micro-nano operation environment |
| CN104913731A (en) * | 2014-11-16 | 2015-09-16 | 徐云鹏 | Laser differential confocal microscope measurement and control system |
| CN104820439A (en) * | 2015-04-16 | 2015-08-05 | 华南理工大学 | Parallel connection platform tracking control device and method using visual equipment as sensor |
| CN206420438U (en) * | 2016-12-20 | 2017-08-18 | 华南理工大学 | A kind of micro-nano alignment system controllable based on micro- vision closed-loop |
Non-Patent Citations (4)
| Title |
|---|
| 张宪民等: "基于视觉的三自由度微动平台输入耦合研究", 《振动.测试与诊断》 * |
| 张宪民等: "基于视觉的三自由度微动平台输入耦合研究", 《振动.测试与诊断》, vol. 33, no. 01, 15 February 2013 (2013-02-15), pages 1 - 5 * |
| 肖献强等: "压电型宏/微双驱动精密定位机构的建模与控制", 《农业机械学报》 * |
| 肖献强等: "压电型宏/微双驱动精密定位机构的建模与控制", 《农业机械学报》, vol. 38, no. 11, 25 November 2007 (2007-11-25), pages 140 - 143 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109060607A (en) * | 2018-05-23 | 2018-12-21 | 山东理工大学 | A kind of submissive operating device and liquid bridge power automatic testing method of view-based access control model feedback |
| CN109060607B (en) * | 2018-05-23 | 2021-02-26 | 山东理工大学 | Compliant operation device based on visual feedback and liquid bridge force automatic detection method |
| CN109214098A (en) * | 2018-09-19 | 2019-01-15 | 山东大学 | A kind of remaining life prediction technique towards micro-nano locating platform |
| CN109214098B (en) * | 2018-09-19 | 2022-06-21 | 山东大学 | Method for predicting residual service life of micro-nano positioning platform |
| CN110068267A (en) * | 2019-05-06 | 2019-07-30 | 广东工业大学 | Evaluate the space nanometer positioning and detection device and method of micro-vision measurement performance |
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