CN103230899A - 一种用于冲扫激光传输光学***中微小颗粒的进气节流板装置 - Google Patents
一种用于冲扫激光传输光学***中微小颗粒的进气节流板装置 Download PDFInfo
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
CN201689004U (zh) * | 2010-06-08 | 2010-12-29 | 济南海能仪器有限公司 | 氮吹仪预热配气装置 |
CN201819830U (zh) * | 2010-08-31 | 2011-05-04 | 潍坊瑞格测试仪器有限公司 | 氮吹仪的供气装置 |
CN102179123A (zh) * | 2011-05-12 | 2011-09-14 | 卓卫民 | 一种基于气体节流的气液交换装置 |
CN202538530U (zh) * | 2012-04-05 | 2012-11-21 | 营口中润环境科技有限公司 | 百叶窗袋式除尘器 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5001873A (en) * | 1989-06-26 | 1991-03-26 | American Air Liquide | Method and apparatus for in situ cleaning of excimer laser optics |
CN201689004U (zh) * | 2010-06-08 | 2010-12-29 | 济南海能仪器有限公司 | 氮吹仪预热配气装置 |
CN201819830U (zh) * | 2010-08-31 | 2011-05-04 | 潍坊瑞格测试仪器有限公司 | 氮吹仪的供气装置 |
CN102179123A (zh) * | 2011-05-12 | 2011-09-14 | 卓卫民 | 一种基于气体节流的气液交换装置 |
CN202538530U (zh) * | 2012-04-05 | 2012-11-21 | 营口中润环境科技有限公司 | 百叶窗袋式除尘器 |
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Inventor after: Cao Yongzhi Inventor after: Yu Fuli Inventor after: Lu Lihua Inventor after: Zhang Qingchun Inventor after: Liang Yingchun Inventor before: Liang Yingchun Inventor before: Cao Yongzhi Inventor before: Yu Fuli Inventor before: Lu Lihua Inventor before: Zhang Qingchun |
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Free format text: CORRECT: INVENTOR; FROM: LIANG YINGCHUN CAO YONGZHI YU FULI LU LIHUA ZHANG QINGCHUN TO: CAO YONGZHIYU FULI LU LIHUA ZHANG QINGCHUN LIANG YINGCHUN |
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