TWM408100U - Four-drive alignment mechanism - Google Patents
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- TWM408100U TWM408100U TW99225699U TW99225699U TWM408100U TW M408100 U TWM408100 U TW M408100U TW 99225699 U TW99225699 U TW 99225699U TW 99225699 U TW99225699 U TW 99225699U TW M408100 U TWM408100 U TW M408100U
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Description
M408100 五、新型說明： 【新型所屬之技術領域】 本新型係關於一種四驅動對位對準機構，特別是指一種 消除量測平台於X轴與γ軸間產生之干涉誤差，且量測平台 進行旋轉運動時，其旋轉中心會落在量測平台中心點，而具 有向精度、高速度特性之四驅動對位對準機構。 【先前技術】 按’近年來，縣高科技產業的發|，精度的要求也愈 置測儀器的高精度化，加 、電子資訊機器、原子力 來愈高，工具機、各種產業機械、f 上超精密加工機、半導體製程裝置、 顯微鏡等機具的精度已經達到微/奈米等級。載具平台是影響 上述機具精度最主要的因辛一.此 戈京之，目刚已經有多種型式之載 具平台，主要可以分為串聯式平台與並聯式平台。 串聯式平台是目前當見的韵且亚A . » b .M408100 V. New Description: [New Technology Field] This new type is about a four-drive alignment alignment mechanism, especially the interference error caused by the elimination of the measurement platform between the X-axis and the γ-axis, and the measurement platform. When the rotary motion is performed, the center of rotation falls on the center point of the measurement platform, and the four-drive alignment alignment mechanism has the characteristics of accuracy and high speed. [Prior technology] According to the 'in recent years, the county's high-tech industry's hair|, the accuracy requirements are also increasingly high-precision instruments, plus, electronic information equipment, atomic force, the higher, machine tools, various industrial machinery, f The precision of ultra-precision processing machines, semiconductor process equipment, microscopes, etc. has reached the micro/nano level. The vehicle platform is the most important factor influencing the accuracy of the above-mentioned machines. This Gejingzhi has many types of vehicle platforms, which can be divided into series platforms and parallel platforms. The tandem platform is the rhyme that is currently seen and sub-A. » b.
並聯式平台係以多個驅動系統控制一 統控制一個以上之軸向運 3 M408100 動ι括平移運動與旋轉運動，具有多轴同動之特性，但是 由於目刖的量測技術無法達到大範圍多抽量測，以及並聯式 機構剛f生較弱等因素，因此並聯式平台之精度不如串聯式平 台兩。 卜另有種以二組平移旋轉單元結合三組驅動系統 與—自由單元所组成的載具平台，該平台是藉由三組驅動系 統間相互之配合，以達到χ軸、γ軸與一旋轉動元件之三自 籲由度運動’但是該旋轉運動之中心會因為三組驅動系統造成 不固定之現象。 【新型内容】 本創作之目的即在於提供—種利用模組化之多個零組件 方式組合規劃平台機構’使其具有極佳剛性之四驅動對位對 準機構β 本創作之次一目的係在於提供一種零組件搭配之使用壽 鲁命較為長久，相對亦能減少很多修護上和生產上的時間，有 效地提升整體品質及良率之四驅動對位對準機構。 可達成上述創作目的之四驅動對位對準機構，主要包含 有安裝於固定平台之兩組第一平移旋轉單元、兩組第二平移 旋轉單元，以及-固定於該等平移旋轉單元上之量岡平△, 其中’利用該等平移旋轉單元中之驅動單元、兩可相㈣性 位移之平移元件與旋轉單元，可使驅動單元適當作動時，得 4 丄υυ 透過該等第一平移旋轉單元個別驅動、第二平移旋轉單元 個別驅動或第-平移旋轉單元與第二平移旋轉單元共同驅 動該量測平台往χ轴或υ轴位移或往預定方向旋轉。 本創作所提供！測平台，利用四組平移旋轉單元與四組 單疋可提供量測平台在乂轴'¥抽與旋轉方向之位移 :動，而可有效消除各軸運動時所造成的干涉誤差，並提高 ^測平台精度，同時，該量測平台之旋轉中心可準確地落在 量測平台之t心點’以有效地控制旋轉角度，另外，採用四 組對稱式驅動單元’亦可用以加速線性定位與角度定位。 【實施方式】 請參閲圖-至圖三，本創作所提供之四驅動對位對準機 構較佳實施例，主要包括有：該平台機構可用以安裝於一預 定形態之m定平台丨上，同時’該平台機構包括有二組第一 平移旋轉單元3、二組第二平移旋轉單元3，及—量測平台 2，以下係針對該等組成元件逐一說明。 有關於該等第-平移旋轉單元3,請再參閱圖四，其係 對角設置於固定平台】上，且分別包括有—安裝於固定平台 1上之驅動單元41…可受該驅動單元Μ «轴方向驅動口 位移之第-平移元件3]、一可隨該第一平移元件3"立移或 產生相對彈性位移之第二平以件32，以及—可隨該第二平 移元件32位移及提供旋轉作用之碇轉單元5。 M4U8100The parallel platform is controlled by multiple drive systems to control more than one axial movement. 3 M408100 includes the translational motion and the rotary motion. It has the characteristics of multi-axis motion, but it cannot achieve a wide range due to the measurement technology. Pumping measurement, and the parallel mechanism is just weak, so the accuracy of the parallel platform is not as good as that of the tandem platform. Another kind of carrier platform consisting of two sets of translational rotation units combined with three sets of drive system and free unit, the platform is matched by three sets of drive systems to achieve the χ axis, the γ axis and a rotation. The third component of the moving element is the motion of the degree of motion 'but the center of the rotating motion will be unfixed due to the three sets of drive systems. [New Content] The purpose of this creation is to provide a four-drive alignment alignment mechanism that uses a modular multi-component combination planning platform mechanism to make it extremely rigid. It is to provide a four-part alignment alignment mechanism that uses a combination of components and longevity, which can reduce the time of repair and production, and effectively improve the overall quality and yield. The four-drive alignment alignment mechanism capable of achieving the above-mentioned creation purpose mainly comprises two sets of first translational rotation units mounted on a fixed platform, two sets of second translational rotation units, and an amount fixed to the translational rotation units冈平△, where 'using the driving unit in the translational rotation unit, the two translating elements of the four-phase displacement, and the rotating unit, when the driving unit is properly actuated, 4 丄υυ through the first translational rotation unit The driving, the second translational rotation unit, the individual drive or the first translational rotation unit and the second translational rotation unit jointly drive the measurement platform to rotate toward the x-axis or the x-axis or to rotate in a predetermined direction. Provided by this creation! The measuring platform utilizes four sets of translational rotation units and four sets of single cymbals to provide the measurement platform in the displacement of the ' axis '¥ pumping and rotating direction: moving, which can effectively eliminate the interference error caused by the movement of each axis, and improve ^ The accuracy of the platform is measured. At the same time, the rotation center of the measurement platform can accurately fall on the t-point of the measurement platform to effectively control the rotation angle. In addition, four sets of symmetric drive units can also be used to accelerate linear positioning. Angle positioning. [Embodiment] Referring to FIG. 3 to FIG. 3, a preferred embodiment of the four-drive alignment alignment mechanism provided by the present invention mainly includes: the platform mechanism can be installed on a predetermined platform. At the same time, the platform mechanism includes two sets of first translational rotation units 3, two sets of second translational rotation units 3, and a measurement platform 2, which are described one by one for the constituent elements. Regarding the first-translational rotation unit 3, please refer to FIG. 4 again, which is diagonally disposed on the fixed platform, and respectively includes a driving unit 41 mounted on the fixed platform 1 to be driven by the driving unit. «the first translational element 3 of the axial direction drive port displacement", a second flat member 32 that can move or produce a relative elastic displacement with the first translational element 3, and - can be displaced with the second translational element 32 And a rotation unit 5 that provides a rotation. M4U8100
有Μ於該等赏_ 罘—平移旋轉單元3，，其係對角設置於固 定平台1上，並虚楚 亚與第一平移旋轉單元3之安裝方向相差九十 度’且分別包括古 文裝於固定平台1上之驅動單元4】、一 可受該驅動單元4 仕Υ軸方向驅動位移之第一平移元件 31、一可隨該第— 移凡件31位移或產生相對彈性位移之 第二平移元件3 2，I、； η 以及一可隨該第二平移元件32位移及提 供旋轉作用之旋轉單元5。In contrast to the _ 罘 - translational rotation unit 3, the diagonally disposed on the fixed platform 1 and the difference between the installation direction of the first translational rotation unit 3 and the first translational rotation unit 3 a driving unit 4 on the fixed platform 1 , a first translating element 31 that can be driven to be displaced by the driving axis of the driving unit 4, a second displacement element that can be displaced with the first moving element 31 or a relative elastic displacement The translating element 3 2, I, η and a rotating unit 5 displaceable with the second translating element 32 and providing a rotational action.
有關於該量測平台2 ’本實施例之量測平台2概呈矩形 板狀且四角隅分別固定於該等第—平移旋轉單元3與第二 平移旋轉單元3，之斿Μ留l 之紅轉早tl 5上，而可隨之作χ軸或¥軸 位移或往預定方向旋轉。 需特別說明的是’本實施例之驅動單元41係設為一馬 達或線性馬達，因此，可藉由該馬達驅動一線性移動裝置如 螺杯與螺巾目、線性滑軌與滑塊後，再連動相連之第—平移元 件3 1產生位移；如線性移動裝置為螺桿42與螺帽μ時， 其可經由馬達之正轉與反轉驅動一螺桿42，如圖四所示，再 藉由螺設於螺桿42上之螺帽33連動相連之第一平移元件Η 產生位移。如線性移動裝置為線性滑轨與滑塊時，其可經由 線性馬達直接驅動第一平移元件31產生位移。另外，請再 參閱圖五至圖九，本實施例安裝於第二平移元件32之旋轉 單元5更進一步包括有： 6With respect to the measuring platform 2', the measuring platform 2 of the embodiment has a rectangular plate shape and the four corners are respectively fixed to the first-translational rotating unit 3 and the second translational rotating unit 3, and the red is left. Turn early on tl 5, and then rotate as the χ or ¥ axis or rotate in the predetermined direction. It should be specially noted that the driving unit 41 of the present embodiment is configured as a motor or a linear motor, so that a linear moving device such as a screw cup and a screw head, a linear slide rail and a slider can be driven by the motor. The first translational element 31 is connected to the displacement; if the linear movement device is the screw 42 and the nut μ, it can drive a screw 42 through the forward and reverse rotation of the motor, as shown in FIG. The nut 33 provided on the screw 42 is coupled to the first translation element Η to be displaced. When the linear moving device is a linear slide and a slider, it can directly drive the first translational element 31 to generate displacement via a linear motor. In addition, referring to FIG. 5 to FIG. 9, the rotating unit 5 installed in the second translating member 32 of the present embodiment further includes: 6
M408100 I —底盤51 ’其内部周圍形成有一容置空間511，該容置 二間511周壁形成有預定形狀之環槽512，而該底盤亦再設 有定位部5 1 3 ; —轉動元件52’可設置於底盤51之容置空間511中， 且相對環槽512的一端環設有一凹槽部521，同時，該轉動 兀件52頂面設有複數螺孔522，可藉由螺栓56與量測平台 2之相對部位相互螺鎖固定； 固定元件54 ’係固定於底盤5 1頂端，且其周圍亦形 成有限位槽541 ’該固定元件54其上係可開設通孔542，供 螺栓55經由通孔542與底盤51之定位部513螺固結合，或 供螺栓55經由通孔542通過底盤51定位部513螺鎖固定於 第二平移元件32上，如圖七所示；或如圖六所示，該固定 το件54其底部設置有複數導接部543,該導接部543可直接 設置於底盤5丨之定位部513,導接部能以緊配合方式與 底盤51之定位部513固定，或是固定元件54以導接部5杓 定位設置於底盤51之定位部513後，再以粘著劑將固定元 件54與底盤51固定。其中，該限位槽541亦與該凹槽部“卜 環槽512共同形成一滾動槽空間。 複數滾動體53，係為滚珠、滾子以及滾柱，其可分別容 納分佈於該底盤51之環槽512、轉動元件52之凹槽部521 與固定元件54之限位槽541所共同界定的滾動槽空間中； 7 M4U8100The M408100 I - the chassis 51 ′ has an accommodating space 511 formed therein, and the two 511 peripheral walls are formed with a ring groove 512 of a predetermined shape, and the chassis is further provided with a positioning portion 5 1 3 ; It can be disposed in the accommodating space 511 of the chassis 51, and a groove portion 521 is disposed on one end of the ring groove 512. At the same time, the top surface of the rotating element 52 is provided with a plurality of screw holes 522, which can be supported by the bolt 56 The opposite parts of the measuring platform 2 are screwed and fixed to each other; the fixing member 54' is fixed to the top end of the chassis 51, and a limiting groove 541 is formed around the fixing member 54. The fixing member 54 is provided with a through hole 542 for the bolt 55 to pass through. The through hole 542 is screwed into the positioning portion 513 of the chassis 51, or the bolt 55 is screwed to the second translating member 32 via the through hole 542 through the positioning portion 513 of the chassis 51, as shown in FIG. 7; or as shown in FIG. The fixed portion 154 is provided with a plurality of guiding portions 543 at the bottom thereof. The guiding portion 543 can be directly disposed on the positioning portion 513 of the chassis 5, and the guiding portion can be fixed to the positioning portion 513 of the chassis 51 in a tight fitting manner. Or the fixing member 54 is positioned at the bottom with the guiding portion 5杓51 of the positioning portion 513, and then to the adhesive 54 and the fixing member 51 is fixed to the chassis. The limiting groove 541 also forms a rolling groove space together with the groove portion 1024. The plurality of rolling elements 53 are balls, rollers and rollers, which are respectively accommodated and distributed on the chassis 51. The ring groove 512, the groove portion 521 of the rotating member 52 and the limiting groove 541 of the fixing member 54 are defined in the rolling groove space; 7 M4U8100
凊參閱圖十_ ,本創作四驅動對位對準機構，當欲進" X軸方向位移時，可啟動平台機構上兩組第_平移旋轉單: 3中可為馬達之驱動單元41 μ軸之同—方向作動，進^ 動螺杯42上之螺帽33、該連結於螺帽33上之第一平移元件 ?:以及位於第-平移元件31上之第二平移元件”與:： 早兀5 ’均可被帶動而往又軸方向位移，·當然，在此期間， 由於另外兩組第二平移旋轉單元3,之驅動單元41是不動 的’但其第二平移元件32與第一平移元件31間是可作奈米 級之相對彈性位移的，因此，該第二平移旋轉單元3，上之 紅轉單元5亦可藉由該奈米級之微幅彈性位移特性，而一 起隨著第-平移旋轉單元3往又轴方向位移，使該量測平台 2整體得以順利往Χ軸方向位移，而不會產生X轴與Υ轴方 向之干涉誤差。 請參閱圖十，當本創作欲進行丫軸方向之位移時，可啟 動平台機構上組第二平移旋轉單元3，中可為馬達之驅動 單元41往Υ軸之同一方向位移作動，同樣地，雖然另外兩 組第一平移旋轉單元3之驅動單元41並沒有啟動，但仍可 使整體量測平台2往Υ軸之同一方向作奈米級之微幅位移作 動0 請參閱圖十二，當本創作欲以某一中心基準點作預定角 度之旋轉位移作動時，第一個情形是只需將一組第—平移旋 $凊 Refer to Figure 10_, the creation of the four-drive alignment mechanism, when you want to enter the X-axis direction displacement, you can start the two sets of _ translation rotary table on the platform: 3 can be the motor drive unit 41 The same as the direction of the μ axis, the nut 33 on the screw cup 42, the first translation element connected to the nut 33, and the second translation element on the first translation element 31 are: : the early 兀 5 ' can be driven to move in the axial direction again. Of course, during this period, the drive unit 41 is stationary because of the other two sets of second translational rotation units 3, but its second translational element 32 The first translational element 31 can be used as a relative elastic displacement of the nanometer. Therefore, the red translation unit 5 of the second translational rotation unit 3 can also be subjected to the micro-elastic displacement characteristic of the nanometer. Together with the displacement of the first-translational rotation unit 3 in the direction of the other axis, the measurement platform 2 as a whole can be smoothly displaced in the direction of the x-axis without interfering errors in the direction of the X-axis and the x-axis. See Figure 10, when When the creation wants to shift the direction of the x-axis, the platform mechanism can be activated to be the second group. The translation rotary unit 3 can be displaced by the driving unit 41 of the motor in the same direction of the x-axis. Similarly, although the driving units 41 of the other two sets of the first translational rotation units 3 are not activated, the overall measurement can be performed. The platform 2 makes the nano-level displacement operation in the same direction of the Υ axis. Please refer to Figure 12. When the creation wants to rotate at a predetermined angle with a certain central reference point, the first situation is only a set of first-translation
M4U61UUM4U61UU
轉單元3之㈣^ 41往預定^财向位移作動，或分 別將兩組第一平移旋轉單元3之驅動單元41往叉轴之不同 方向位移作動’便可在兩組第一平移旋轉單元3與兩組第二 平移旋轉早幻上之旋轉單元5上產生旋轉作用，使量測 平^2整個得以往敎方向作旋轉位移。當然，該量測平台 2 %轉位移之第二個情形，亦可利用—組第二平移旋轉單元 3之媒動早兀41往預定之7轴方向位移作動或分別將兩 組第二平移旋轉單元3,之驅動單元41往丫轴之不同方向位 作動來達成。此外，當上述兩種情形同時發生時，亦可使 量測平台2達成所需之旋轉位移作用。 本創作具有多數個特徵，第—個特徵在於利用該等第一 平移旋轉單元3與第二平移旋轉單元3，中之驅動單元4】， 可使量測平台2達到快速定位效果。 本創作第二個特徵在於制該等第—平移旋轉單元3血 第二平移旋轉單元3,中之旋轉單元5,可提供量測平台； 旋轉之用。 本創作第三個特徵在於制第—平移元件η與第二平 移元件32間可作奈米級之微幅彈性位移特性，可有效地消 除第-平移旋轉單元3與第二平移旋轉單元3，在X轴與Y 軸間產生之干涉誤差’此外，亦可使量測平台2在工作中承 U ’仍㈣有良好精度，並達到奈米級三自 9 mueioo 9 由度微動平台之實質效益。 本創作所提供之四㈣對位對準機構，與前述引證案及 其他習用技術相互比較時，更具有下列之優點·· 一、本創作採用四組驅動單元41料兩組第—平移旋 轉單元W第二平料轉單元3,之㈣源，可藉助呈 具有可控制性、高頻響應之純，以及微小化等優點，以消 除量測平台2在X軸 釉與Y轴間產生之干涉誤差，並可確保量 測平台2進行旋轉運動時，装 ye , 其旋轉中心传以準確地落於量測 平台2之中心點，而遠到宾 _ 連』问精度、尚速度之實質效益。 二、本創作利用第一平蒋斿絲„ _ 一， 十移紅轉早疋3與第二平移旋轉單 元3所採用具線性運動特性夕笛 τ „ 锊〖生之第一平移元件31與第二平移 兀件32，以及具旋轉特性之 将早705 5又汁，由於其運動模 式均屬於動摩擦，因此，整 ^ . 11摩擦力較小，且最小移動單位 準確，更具有熱變位小、精度安 ^ 萌度女疋、裝配容易，以及具互換 性及擴充性等諸多特性。 、 二、本創作之第一平蒋祐絲„ _ 3，轉早70:3與第二平移旋轉單元 3 ’均計’因此’不但檢測與維修容易更 可個別針龍㈣零件㈣維修或更換， 用壽命，並提升產品品質與良率。 ^長整體之使 综上所述，本案不但 用物品增進上述多項功效Γ…屬創新’並能較習 〜已充分符合新穎性及進步性之The (4)^41 of the rotating unit 3 is actuated to the predetermined fiscal displacement, or the driving units 41 of the two sets of the first translational rotating unit 3 are respectively displaced to the different directions of the fork shaft to operate in the two sets of the first translational rotation unit 3 A rotation action is generated on the rotating unit 5 with the two sets of second translational rotations on the early illusion, so that the measurement is flat and the entire 敎 direction is rotationally displaced. Of course, the second case of the 2% rotation displacement of the measuring platform can also be performed by using the medium movement of the second translational rotation unit 3 to move to the predetermined 7-axis direction or respectively rotating the two groups of the second translation. The unit 3, the drive unit 41 is actuated in different directions of the x-axis. In addition, when the above two situations occur simultaneously, the measuring platform 2 can also be made to achieve the desired rotational displacement effect. The present invention has a plurality of features. The first feature is that the measurement platform 2 can be quickly positioned by using the first translational rotation unit 3 and the second translational rotation unit 3. The second feature of the present invention is to make the first-translational rotation unit 3, the second translational rotation unit 3, and the rotation unit 5, which can provide a measurement platform; for rotation. The third feature of the present invention is that the micro-amplitude displacement characteristic of the nano-level between the first translational element η and the second translational component 32 can be effectively eliminated, and the first-translational rotation unit 3 and the second translational rotation unit 3 can be effectively eliminated. The interference error generated between the X-axis and the Y-axis' can also make the measurement platform 2 work in the U' still (4) with good precision, and achieve the substantial benefits of the nano-level 3 from 9 mueioo 9 degree micro-motion platform . The four (four) alignment alignment mechanism provided by the present invention has the following advantages when compared with the aforementioned citations and other conventional techniques. 1. The author uses four sets of driving units 41 to feed two sets of pan-rotating units. The second flat material transfer unit 3, the (four) source, can eliminate the interference between the X-axis glaze and the Y-axis by the measuring platform 2 by virtue of being controllable, purely high-frequency response, and miniaturization. The error can be ensured when the measuring platform 2 performs the rotary motion, and the center of rotation is accurately placed on the center point of the measuring platform 2, and the actual benefit of the accuracy and the speed is far away. Second, the creation uses the first Ping Jiang Yusi „ _ one, ten shift red turn early 疋 3 and the second translation rotary unit 3 has a linear motion characteristic 夕笛τ „ 锊〗 〖The first translation element 31 and the second translation兀 32, and the rotation characteristics will be 705 5 juice, because its movement mode is dynamic friction, therefore, the whole ^ 11 friction is small, and the minimum movement unit is accurate, more thermal displacement, precision ^ Meng Duo, easy to assemble, and interchangeable and expandable features. Second, the first Ping Jiangyou silk „ _ 3, the early 70:3 and the second translational rotation unit 3 'all counts' therefore 'not only detection and maintenance is easier, individual needles (four) parts (four) repair or replacement, with Life expectancy, and improve product quality and yield. ^Long overall, in summary, this case not only uses items to enhance the above-mentioned multiple functions... It is innovative and can be compared with the new ones
糾U6iUU ， 法定創作專利要件，爰依法提出申請騎 新型專利申上主垒 心、 貝局核准本件 申明案，以勵發明，至感德便。 【圖式簡單說明】 圖係本創作平台機構之立體外觀組合圖。 圖二係本創作平台機構之立體分解示意圖。 圖三係本創作平台機構之俯視平面圖。 圖四係本創作旋轉單元之剖面分解示意圖。 圖五係本創作旋轉單元第一實施例之剖面。 圖六係本創作旋轉單 早兀第一實鞑例之剖面示意圖。 七係本創相轉單元㈣於第二㈣元件 圖八係本創作平移旋轉單元之立體示意圖。^圖。 圖九係本創作旋轉單元之分解示意圖。 圖十係本創作量測平台 意圖 。 …轴方向位移作動之俯視示 示二Η本創作量測平…轴方向位移作動之俯视 位移作動 之 圖十一係本創作量 俯視示意圖》 測平台往預定方向旋轉 【主要元件符號說明】 1固定平台 2量測平台 3第一平移旋轉單元 M408100 3’第二平移旋轉單元 3 1第一平移元件 32第二平移元件 33螺帽 4 1驅動單元 42螺桿Correcting U6iUU, the statutory creation of patent requirements, 提出laws to apply for riding a new type of patent application on the main base, the approval of this case by the Bay Bureau, in order to invent invention, to the sense of virtue. [Simple description of the diagram] The diagram is a combination of the three-dimensional appearance of the creation platform mechanism. Figure 2 is a three-dimensional exploded view of the creation platform mechanism. Figure 3 is a top plan view of the creation platform. Figure 4 is a schematic exploded view of the rotating unit of the present invention. Figure 5 is a cross section of the first embodiment of the present rotating unit. Figure 6 is a schematic cross-sectional view of the first actual example of the rotation of this creation. The seven series of the phase-inducing unit (4) in the second (four) component Figure 8 is a three-dimensional schematic diagram of the translational rotation unit. ^ Figure. Figure 9 is an exploded view of the rotating unit of the present invention. Figure 10 is the intention of this creation measurement platform. ...the axial direction displacement actuation diagram shows the second Η 创作 创作 ... ... ... ... ... 轴 轴 轴 轴 轴 轴 轴 轴 俯视 俯视 俯视 俯视 俯视 俯视 俯视 俯视 俯视 俯视 俯视 俯视 俯视 俯视 十一 十一 十一 十一 十一 十一 十一 十一 十一 十一 十一 》 》 》 》 》 》 》 》 2 measuring platform 3 first translational rotation unit M408100 3' second translational rotation unit 3 1 first translational element 32 second translational element 33 nut 4 1 drive unit 42 screw
5旋轉單元 51底盤 5 1 1容置空間 512環槽 513定位部 52轉動元件 521凹槽部 522螺孔 53滾動體 54固定元件 541限位槽 542通孔 543導接部 55螺栓 56螺栓 125 Rotating unit 51 Chassis 5 1 1 accommodating space 512 ring groove 513 positioning part 52 rotating element 521 groove part 522 screw hole 53 rolling element 54 fixing element 541 limit groove 542 through hole 543 guide part 55 bolt 56 bolt 12
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99225699U TWM408100U (en) | 2007-01-17 | 2007-01-17 | Four-drive alignment mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW99225699U TWM408100U (en) | 2007-01-17 | 2007-01-17 | Four-drive alignment mechanism |
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| Publication Number | Publication Date |
|---|---|
| TWM408100U true TWM408100U (en) | 2011-07-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW99225699U TWM408100U (en) | 2007-01-17 | 2007-01-17 | Four-drive alignment mechanism |
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| TW (1) | TWM408100U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104007768A (en) * | 2013-02-25 | 2014-08-27 | 全研科技有限公司 | Origin regression method of four-axis coplanar alignment platform |
| TWI455789B (en) * | 2011-11-22 | 2014-10-11 | ||
| TWI458585B (en) * | 2012-04-25 | 2014-11-01 | 中原大學 | Oblique-driven platform structure |
-
2007
- 2007-01-17 TW TW99225699U patent/TWM408100U/en not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI455789B (en) * | 2011-11-22 | 2014-10-11 | ||
| TWI458585B (en) * | 2012-04-25 | 2014-11-01 | 中原大學 | Oblique-driven platform structure |
| CN104007768A (en) * | 2013-02-25 | 2014-08-27 | 全研科技有限公司 | Origin regression method of four-axis coplanar alignment platform |
| CN104007768B (en) * | 2013-02-25 | 2017-04-12 | 全研科技有限公司 | Origin regression method of four-axis coplanar alignment platform |
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