CN205353123U - Rf probe atomic force microscope system - Google Patents
Rf probe atomic force microscope system Download PDFInfo
- Publication number
- CN205353123U CN205353123U CN201620047377.7U CN201620047377U CN205353123U CN 205353123 U CN205353123 U CN 205353123U CN 201620047377 U CN201620047377 U CN 201620047377U CN 205353123 U CN205353123 U CN 205353123U
- Authority
- CN
- China
- Prior art keywords
- probe
- radio frequency
- atomic force
- sample
- tuning fork
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The utility model relates to a rf probe atomic force microscope system, this system include rf probe (1), radio frequency resonance circuit (2), radio frequency playback circuit (3), quartzy tuning fork detector (4), tuning fork regulation and control circuit (5), the three -dimensional sample platform (6) of XYZ, atomic force microscope controller (7) and RF signal generator, preamplifier and universal meter (8). With the equipment of rf probe and quartzy tuning fork detector, the signal through quartzy tuning fork detector feeds back, interval between control needle point and the sample. Be connected radio transmission line on the probe and the inductance on the radio frequency resonance circuit and form LC radio frequency resonance circuit, utilize radio frequency resonance circuit to the sensitivity characteristic of reactance (capacitive reactance and impedance), when probe needle point during at the the sample surface point by point scanning, will arouse resonance circuit resonant frequency's change, utilize here resonant frequency as feedback signal to realize the formation of image of the sample surface appearance.
Description
Technical field
The present invention relates to a kind of rf probe atomic force microscopy system, belong to microscopic appearance imaging field.
Background technology
Atomic force microscope (AtomicForceMicroscope, it is called for short AFM) it is a kind of analytical tool for research material surface texture, utilize micro-cantilever impression and amplify on cantilever between tapering probe and tested sample atoms active force to present the surface characteristic of sample, the surfaces such as conductor, quasiconductor, insulator can be carried out the imaging of micro-nano precision, the research in the fields such as Surface Science, material science, life sciences there is great meaning and is widely applied prospect, is a kind of strong characterization method.The operation principle of AFM is the surface characteristic that the contact by detecting between atom, atomic linkage, van der waals force or Casimir effect etc. present sample.The tetchy micro-cantilever one end of faint power will be fixed, the small needle point of the other end is close to sample, owing to there is atomic weak repulsive force between needle point sophisticated atomic and sample surfaces atom, by controlling the constant of this power when scanning, the cantilever beam with needle point would correspond to the equipotential surface of needle point and sample surfaces interatomic force and is being perpendicular to the surface direction undulatory motion of sample.During scanning sample, sensor is utilized to detect these changes, by detecting the cantilever beam change in location corresponding to scanning each point, it is possible to obtain the information of sample surface morphology.
Relative to scanning electron microscope, AFM has many advantages: (1) AFM can provide real three-dimension surface；(2) sample need not be carried out any special handling by AFM；(3) operating environment requirements is low, can at ambient pressure even at can works fine under liquid environment.
At present, conventional AFM detects interatomic active force by laser, quadrant photodetector, tuning fork etc., thus obtaining the surface information of testee.Conventional AFM system detects cantilever beam deformation due to needs optics or mechanical system; generally adopt contact mode, noncontact mode and three kinds of main operating modes of percussion mode; often causing the damage of sample and probe tip, the impact popped one's head in is too big, and scanning speed is slower.
The purpose of the present invention is aiming at the deficiency in prior art, a kind of new AFM scan formation method is provided, under noncontact mode, sample surfaces can being carried out topography scan, it does not have power acts on sample surfaces, what efficiently avoid sample surfaces and probe tip contacts intrinsic damage.Meanwhile, fed back as signal by radio frequency resonant frequency, utilize the high speed characteristics of radio circuit, it is achieved that the function of high-velocity scanning imaging.
Summary of the invention
In view of the deficiency that prior art exists, the purpose of the present invention aims to provide a kind of rf probe atomic force microscopy system, solves the above-mentioned drawback of the atomic force microscopy system of routine.The resonant frequency utilizing radio frequency resonant circuit carries out signal feedback, thus realizing the function of high-velocity scanning imaging.Power is not had to act on sample surfaces, will not lesioned sample surface and needle point.
The present invention is achieved through the following technical solutions:
A kind of rf probe AFM system, including rf probe, radio frequency resonant circuit, radio frequency reading circuit, quartz tuning-fork detector, tuning fork regulating circuit, XYZ three-dimensional sample platform, AFM controller and other electro-kinetic instrument equipment, such as radio-frequency signal generator, preamplifier, circuit tester etc..Described rf probe is used for scanning sample surfaces as a kind of AFM probe, probe trunk is integrated with radio-frequency transmission line, for the input of radiofrequency signal, output and ground connection；Described radio frequency resonant circuit is connected with the microstrip line on rf probe, form LC radio frequency resonant circuit, utilize the radioresonance circuit sensitivity characteristic to reactance (capacitive reactance and impedance), when probe tip is when sample surfaces point by point scanning, the change of resonance frequency will be caused, by radio-frequency driven and detection circuit resonant frequency signal inputted the feed-back channel of AFM, thus realizing sample surface morphology imaging；Described radio frequency reading circuit includes power divider, attenuator, low-noise amplifier, frequency mixer and low pass filter etc., it is responsible for the distribution of radio frequency FD feed, decay, the mixing of radiofrequency signal, filtering and amplification detection, the high speed readout of radio frequency resonant signal during for driving rf probe, scanning；Described XYZ three-dimensional sample platform, for placing and mobile example, it is achieved three-dimensional appearance scanning imagery；Described quartz tuning-fork detector is integrated with probe, and is connected with tuning fork regulating circuit, is used for controlling atomic force microscopy needle point and sample interval；Described XYZ three-dimensional sample platform is used for bearing sample；Described AFM controller includes signal processing unit and scanning monitor, described scanning monitor is connected with quartz tuning-fork signal and XYZ three-dimensional sample platform, described signal processing unit is connected with rf probe and radio frequency reading circuit signal, realize conversion and the transmission of signal, carry out imaging and the display of sample surface morphology.
The working implementations of this rf probe AFM system is: be first bonded at by rf probe on a sidewall of quartz tuning-fork；Two electrodes of tuning fork detection access in tuning fork regulating circuit, tuning fork regulating circuit is connected with AFM controller, utilizing the piezoelectric effect of the quartz tuning-fork interaction force to characterize between sample and needle point, its output signal of telecommunication controls the spacing between sample and needle point as feedback signal；Then, the radio-frequency transmission line on rf probe trunk is connected with radio frequency resonant circuit, and accesses in radio frequency reading circuit, and be connected with AFM controller；Sample is positioned on XYZ three-dimensional sample platform, control the needle point of probe longitudinally close to sample surfaces, when needle point and sample interval sufficiently small and when producing atomic force effect, quartz tuning-fork detector will detect cantilever deflection of beam, thus controlling the distance of probe tip and sample surface；Make probe be under noncontact mode, start rf probe scanning feedback control system；When Sample Scan, XYZ three-dimensional sample platform changes the locus of sample, Capacitance Coupled effect due to sample surfaces Yu rf probe, coupling electric capacity fluctuates with sample surface morphology, due to the radioresonance circuit sensitivity characteristic to reactance (capacitive reactance and impedance), when probe tip is when sample surfaces point by point scanning, the resonant frequency of radio frequency resonant circuit also will offset therewith；Resonant frequency is inputted to AFM controller as feedback signal, by the process of signal and conversion, it is achieved the imaging of sample surface morphology and display, it is thus achieved that the information on sample surface.
The present invention is based on conventional AFM, mutually integrated with conventional AFM probe for radio frequency resonant circuit, utilizing the radio frequency resonant circuit sensitivity characteristic to reactance (capacitive reactance and impedance), during using scanning, the resonant frequency of radio frequency resonant circuit is as feedback signal, substantially increases scanning speed.The function of the conventional AFM of this system inherited and the high speed characteristics of radio circuit, both available tuning fork signal fed back, to Sample Scan；Available radiofrequency signal is fed back again, it is achieved that the function of high-velocity scanning imaging, and under noncontact mode, efficiently avoid the damage of sample surfaces and probe tip during scanning.
Accompanying drawing explanation
Fig. 1 is the structured flowchart of a rf probe AFM system case study on implementation provided by the invention；
In figure, each labelling represents respectively: 1-radio frequency atomic force probe, 2-radio frequency resonant circuit, 3-radio frequency reading circuit, 4-quartz tuning-fork detector, 5-tuning fork regulating circuit, 6-XYZ three-dimensional sample platform, 7-AFM controller, other equipments of 8-AFM system, such as radio-frequency signal generator, preamplifier, circuit tester etc.
Fig. 2 is a kind of rf probe provided by the invention；
In figure, each labelling represents respectively: 11-probe trunk, 12-radio frequency microstrip line
Fig. 3 is the schematic diagram that probe assembles with quartz tuning-fork；
Fig. 4 is the fundamental diagram of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, technical scheme is further described.
Being illustrated in figure 1 a structured flowchart being embodied as case of rf probe AFM system of the present invention, this rf probe AFM system mainly includes radio frequency atomic force probe 1, radio frequency resonant circuit 2, radio frequency reading circuit 3, quartz tuning-fork detector 4, tuning fork regulating circuit 5, XYZ three-dimensional sample platform 6, AFM controller 7 and other equipments 8.Wherein, radio frequency atomic force probe 1 is the core of this system.
This rf probe 1 can be the silicon probe of beam type or non-cantilever beam type, fiber probe, Si3N4Probe, as being integrated with radio-frequency transmission line 12 on the trunk 11 of Fig. 2 probe.
This XYZ three-dimensional sample platform 6 is for placing the sample of surface topography to be detected, it is possible to make sample produce X, Y, Z three-D displacement, it is achieved the 3-D scanning of sample.
This AFM controller 7 is for the process of scan control and signal, it is achieved the conversion of signal and transmission, carries out imaging and the display of sample surface morphology.
This quartz tuning-fork detector 4 adopts the quartz crystal oscillator that resonant frequency is 32.768kHz conventional in circuit, is assembled on a sidewall of tuning fork 4 by probe 1 with glue, as it is shown on figure 3, probe 1 needle point direction can be perpendicular or parallel with tuning fork 4 electrode surface direction.The two of tuning fork 4 electrodes are accessed in tuning fork regulating circuit 5, and this tuning fork regulating circuit 5 is accessed on AFM controller 7, utilize the piezoelectric effect of quartz tuning-fork 4 interaction force to characterize between sample and needle point.Sample is placed on XYZ three-dimensional sample platform 6, when AFM works, control the needle point of probe longitudinally close to sample surfaces, driven by other electro-kinetic instrument equipment 8 and detect this feedback signal, and signal is fed back to AFM controller 7, thus control probe tip and the distance of sample room (as making sample and needle point keep permanent high).
By encapsulation technology, by the radio frequency microstrip line 12 on rf probe 1 and the inductance connection on radio frequency resonant circuit 2, then this resonance circuit is accessed in radio frequency reading circuit 3.Rf probe 1 after integrated is passed through quartz tuning-fork 4 convergence sample surfaces, carries out topography scan.Shown in the fundamental diagram of rf probe AFM system as of the present invention in Fig. 4, under noncontact mode (such as constant height mode), rf probe 1 is coupled with sample surfaces by Capacitance Coupled, owing to the radioresonance circuit 2 after integrated with rf probe 1 is extremely sensitive to the change of reactance (capacitive reactance and impedance), when probe tip is when sample surfaces point by point scanning, coupling electric capacity fluctuates with sample surface morphology, thus causing the change of the resonant frequency of radio circuit.Radio frequency resonant circuit is driven by other electro-kinetic instrument equipment 8, and by radio frequency reading circuit 3 high speed readout resonant frequency signal, using resonant frequency as feedback signal transmission to AFM controller 7 in, and through the process of signal, it is achieved the imaging of sample surface morphology and display.
The present invention is based on conventional AFM, except the purpose that the impression of available micro-cantilever and the active force that amplifies on cantilever between tapering probe and tested sample atoms reach detection.The present invention is also to being carried out below improvement, and radio frequency resonant circuit 2 is mutually integrated with conventional AFM probe, utilizes the radioresonance circuit sensitivity characteristic to reactance (capacitive reactance and impedance), using resonant frequency as feedback, it is achieved the function of high-velocity scanning.Compared to prior art, there is advantages that the feature inheriting radio circuit at a high speed, scanning speed is fast；Can work under noncontact mode, it is to avoid the damage of sample surfaces and probe tip.
What finally illustrate is, above example is only in order to illustrate technical scheme and unrestricted, although the present invention being described in detail with reference to preferred embodiment, it will be understood by those within the art that, technical scheme can be modified or equivalent replacement, without deviating from objective and the scope of technical solution of the present invention, it all should be encompassed in the middle of scope of the presently claimed invention.
Claims (8)
1. a rf probe atomic force microscopy system, including rf probe, radio frequency resonant circuit, radio frequency reading circuit, quartz tuning-fork detector, tuning fork regulating circuit, XYZ three-dimensional sample platform, atomic force microscope controller and radio-frequency signal generator, preamplifier and circuit tester；Wherein, described rf probe is used for scanning sample surfaces as a kind of atomic force microscope probe；Described radio frequency resonant circuit is for LC radio frequency resonant circuit integrally formed with the microstrip line on rf probe；Described radio frequency reading circuit includes power divider, attenuator, low-noise amplifier, frequency mixer and low pass filter, it is responsible for the distribution of radio-frequency input signals, decay, the mixing of radiofrequency signal, filtering and amplification detection, for driving radio frequency resonant signal when rf probe, detection high speed readout scanning；Described XYZ three-dimensional sample platform, for placing and mobile example, it is achieved three-dimensional appearance scanning imagery；Described atomic force microscope controller includes signal processing unit and scanning monitor, it is used for controlling atomic force microscopy needle point and sample interval in conjunction with described quartz tuning-fork detector, tuning fork regulating circuit and XYZ three-dimensional sample platform, and realize conversion and the transmission of signal, finally realize imaging and the display of sample surface morphology；
It is characterized in that: be assembled on the side arm of quartz tuning-fork detector by the needle point of rf probe, two electrodes of tuning fork are linked into tuning fork regulating circuit, are then attached on atomic force microscope controller；Radio-frequency transmission line on rf probe trunk is connected with radio frequency resonant circuit formation LC radio frequency resonant circuit；Being linked in radio frequency reading circuit by LC radio frequency resonant circuit, radio frequency reading circuit is connected with atomic force microscope controller；Utilize integrated after rf probe the sample on XYZ three-dimensional sample platform is carried out topography scan, the resonant frequency signal of LC radio frequency resonant circuit is fed back in atomic force microscope controller, it is achieved the imaging of sample surface morphology and display.
2. a kind of rf probe atomic force microscopy system according to claim 1, the trunk of rf probe is integrated with radio-frequency transmission line.
3. a kind of rf probe atomic force microscopy system according to claim 1, the needle point of rf probe is the silicon probe of beam type or non-cantilever beam type, fiber probe, Si3N4Probe.
4. a kind of rf probe atomic force microscopy system according to claim 1, it is characterized in that radio frequency resonant circuit is integrated with radio frequency inductive, transmission-type or reflective LC radio frequency resonant circuit is formed with the radio-frequency transmission line on rf probe, it is provided that the input of radiofrequency signal and output after being connected.
5. a kind of rf probe atomic force microscopy system according to claim 1, the integrated operation to atomic force microscopy system of needle point of rf probe is: apply glue on prong, probe and the tuning fork being stained with glue are fitted together, then by with the radio-frequency transmission line on tuning fork probe trunk after integrated by going between, it is connected with the radio frequency inductive on radio frequency resonant circuit, forms the complex of radio frequency atomic force probe.
6. a kind of rf probe atomic force microscopy system according to claim 1, the rf probe integrated with tuning fork, its needle point direction and tuning fork electrode surface direction are perpendicular or parallel, make quartz tuning-fork detector be in and rap or shearing force pattern.
7. a kind of rf probe atomic force microscopy system according to claim 1, utilizes tuning fork to control the spacing of probe tip and sample surfaces, and residing scan pattern is noncontact mode.
8. a kind of rf probe atomic force microscopy system according to claim 1, its needle point contact sample surfaces, the feedback of signal is carried out by tuning fork deformation；Or under noncontact mode, utilize radiofrequency signal to feed back.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620047377.7U CN205353123U (en) | 2016-01-18 | 2016-01-18 | Rf probe atomic force microscope system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620047377.7U CN205353123U (en) | 2016-01-18 | 2016-01-18 | Rf probe atomic force microscope system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205353123U true CN205353123U (en) | 2016-06-29 |
Family
ID=56176334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620047377.7U Expired - Fee Related CN205353123U (en) | 2016-01-18 | 2016-01-18 | Rf probe atomic force microscope system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205353123U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105467160A (en) * | 2016-01-18 | 2016-04-06 | 江南大学 | Radio frequency probe atomic force microscope system |
-
2016
- 2016-01-18 CN CN201620047377.7U patent/CN205353123U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105467160A (en) * | 2016-01-18 | 2016-04-06 | 江南大学 | Radio frequency probe atomic force microscope system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Rost et al. | Scanning probe microscopes go video rate and beyond | |
| CN105467160B (en) | A kind of rf probe atomic force microscopy system | |
| US8266718B2 (en) | Modulated microwave microscopy and probes used therewith | |
| Torbrügge et al. | Application of the KolibriSensor® to combined atomic-resolution scanning tunneling microscopy and noncontact atomic-force microscopy imaging | |
| CN100370263C (en) | Method and apparatus for measuring material piezoelectric coefficient by using scanning near-field microwave microscopy | |
| US20060152232A1 (en) | Method and apparatus for inspection of high frequency and microwave hybrid circuits and printed circuit boards | |
| US6823724B1 (en) | Method and apparatus for measuring values of physical property | |
| US6845655B2 (en) | Heterodyne feedback system for scanning force microscopy and the like | |
| Rode et al. | Modification of a commercial atomic force microscopy for low-noise, high-resolution frequency-modulation imaging in liquid environment | |
| US20200191827A1 (en) | Multiple integrated tips scanning probe microscope | |
| CN108802431A (en) | A kind of detection method of the scanning probe microscopy with magnetic-electric signal detecting function | |
| CN101329247B (en) | Combined microscope for scanning atomic force and tunnel current under atmosphere | |
| CN102654516A (en) | Displacement detection mechanism and scanning probe mircoscope using the same | |
| CN205353123U (en) | Rf probe atomic force microscope system | |
| CN105842485A (en) | Dual-probe scanning ionic conductive microscope system based on balance bridge and imaging method thereof | |
| US6683451B1 (en) | Magnetic resonance force microscope for the study of biological systems | |
| US20020092982A1 (en) | High frequency dithering probe for high speed scanning probe microscope | |
| CN102998483A (en) | Atomic force microscope system with quartz tuning fork | |
| CN107462745A (en) | A kind of apparatus and method of the quadrature amplitude scanning imagery pattern of SICM | |
| CN102928624B (en) | Radio-frequency single-electron transistor scanning probe and application thereof | |
| CN109387670A (en) | A kind of SICM voltage modulated imaging device and method based on difference noise reduction | |
| CN105352584A (en) | Weak signal detection method based on capacitive sensor | |
| CN107228957A (en) | The system measured using STM current signal to AFM signals | |
| CN205426954U (en) | Radio frequency atomic force microscope scans probe | |
| CN113092826B (en) | Scanning probe microscope system and measuring method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160629 Termination date: 20170118 |