CN102936717A - 一种紧凑高效的准扩散弧冷阴极弧源 - Google Patents
一种紧凑高效的准扩散弧冷阴极弧源 Download PDFInfo
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103205711A (zh) * | 2013-04-16 | 2013-07-17 | 温州职业技术学院 | 一种非平衡动态拱形兼容轴向导引磁场辅助离子镀装置 |
CN105305664A (zh) * | 2014-07-26 | 2016-02-03 | 崔文剑 | 电机骨架及采用该电机骨架的盘式电机 |
CN106409635A (zh) * | 2016-10-19 | 2017-02-15 | 中国科学院西安光学精密机械研究所 | 一种用于超快电子脉冲横向压缩的短磁聚焦装置及方法 |
CN109267018A (zh) * | 2017-07-18 | 2019-01-25 | 平高集团有限公司 | 一种快速等离子体镀膜方法及装置 |
CN109763112A (zh) * | 2019-03-01 | 2019-05-17 | 深圳南科超膜材料技术有限公司 | 一种非等径磁过滤*** |
CN110939935A (zh) * | 2019-12-02 | 2020-03-31 | 西安航天动力研究所 | 一种快速启停的紧凑型等离子体气化燃烧炉 |
WO2021006821A1 (en) * | 2019-07-11 | 2021-01-14 | Staton S.R.O. | Vacuum arc cathode source of plasma with enhanced magnetic field configuration and method of its operation |
CN114411101A (zh) * | 2022-01-26 | 2022-04-29 | 纳狮新材料有限公司 | 用于电弧蒸发装置的阴极弧蒸发源以及电弧蒸发装置 |
JP2022525349A (ja) * | 2019-03-15 | 2022-05-12 | ナノフィルム テクノロジーズ インターナショナル リミテッド | 改良されたカソードアーク源 |
Families Citing this family (1)
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CN106644177B (zh) * | 2017-01-06 | 2019-04-05 | 北京工业大学 | 一种测量交流焊接电弧热量输出的方法 |
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CN1029568C (zh) * | 1991-06-01 | 1995-08-23 | 中国科学院电工研究所 | 大电流多弧斑受控真空电弧蒸发源 |
CN101358328A (zh) * | 2007-12-28 | 2009-02-04 | 中国科学院金属研究所 | 一种动态受控电弧离子镀弧源 |
WO2009022184A2 (en) * | 2007-08-15 | 2009-02-19 | Gencoa Ltd | Low impedance plasma |
CN202945317U (zh) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | 一种二极旋转耦合磁场辅助准扩散弧冷阴极离子镀装置 |
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CN1029568C (zh) * | 1991-06-01 | 1995-08-23 | 中国科学院电工研究所 | 大电流多弧斑受控真空电弧蒸发源 |
WO2009022184A2 (en) * | 2007-08-15 | 2009-02-19 | Gencoa Ltd | Low impedance plasma |
CN101358328A (zh) * | 2007-12-28 | 2009-02-04 | 中国科学院金属研究所 | 一种动态受控电弧离子镀弧源 |
CN202945317U (zh) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | 一种二极旋转耦合磁场辅助准扩散弧冷阴极离子镀装置 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103205711A (zh) * | 2013-04-16 | 2013-07-17 | 温州职业技术学院 | 一种非平衡动态拱形兼容轴向导引磁场辅助离子镀装置 |
CN103205711B (zh) * | 2013-04-16 | 2015-09-16 | 温州职业技术学院 | 一种非平衡动态拱形兼容轴向导引磁场辅助离子镀装置 |
CN105305664A (zh) * | 2014-07-26 | 2016-02-03 | 崔文剑 | 电机骨架及采用该电机骨架的盘式电机 |
CN105305664B (zh) * | 2014-07-26 | 2017-11-17 | 崔文剑 | 电机骨架及采用该电机骨架的盘式电机 |
CN106409635A (zh) * | 2016-10-19 | 2017-02-15 | 中国科学院西安光学精密机械研究所 | 一种用于超快电子脉冲横向压缩的短磁聚焦装置及方法 |
CN106409635B (zh) * | 2016-10-19 | 2017-12-05 | 中国科学院西安光学精密机械研究所 | 一种用于超快电子脉冲横向压缩的短磁聚焦装置及方法 |
CN109267018A (zh) * | 2017-07-18 | 2019-01-25 | 平高集团有限公司 | 一种快速等离子体镀膜方法及装置 |
CN109267018B (zh) * | 2017-07-18 | 2021-12-17 | 平高集团有限公司 | 一种快速等离子体镀膜方法及装置 |
CN109763112A (zh) * | 2019-03-01 | 2019-05-17 | 深圳南科超膜材料技术有限公司 | 一种非等径磁过滤*** |
US11926890B2 (en) | 2019-03-15 | 2024-03-12 | Nanofilm Technologies International Limited | Cathode arc source |
JP7390396B2 (ja) | 2019-03-15 | 2023-12-01 | ナノフィルム テクノロジーズ インターナショナル リミテッド | 改良されたカソードアーク源 |
JP2022525349A (ja) * | 2019-03-15 | 2022-05-12 | ナノフィルム テクノロジーズ インターナショナル リミテッド | 改良されたカソードアーク源 |
EP3997965A4 (en) * | 2019-07-11 | 2023-07-19 | Staton S.R.O. | CATHODIC PLASMA VACUUM ARC SOURCE WITH IMPROVED MAGNETIC FIELD CONFIGURATION AND METHOD OF OPERATION |
WO2021006821A1 (en) * | 2019-07-11 | 2021-01-14 | Staton S.R.O. | Vacuum arc cathode source of plasma with enhanced magnetic field configuration and method of its operation |
CN110939935A (zh) * | 2019-12-02 | 2020-03-31 | 西安航天动力研究所 | 一种快速启停的紧凑型等离子体气化燃烧炉 |
CN110939935B (zh) * | 2019-12-02 | 2021-05-04 | 西安航天动力研究所 | 一种快速启停的紧凑型等离子体气化燃烧炉 |
CN114411101A (zh) * | 2022-01-26 | 2022-04-29 | 纳狮新材料有限公司 | 用于电弧蒸发装置的阴极弧蒸发源以及电弧蒸发装置 |
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