CN102936718B - 一种多结构耦合磁场适应型旋转弧离子镀装置 - Google Patents
一种多结构耦合磁场适应型旋转弧离子镀装置 Download PDFInfo
- Publication number
- CN102936718B CN102936718B CN201210444627.7A CN201210444627A CN102936718B CN 102936718 B CN102936718 B CN 102936718B CN 201210444627 A CN201210444627 A CN 201210444627A CN 102936718 B CN102936718 B CN 102936718B
- Authority
- CN
- China
- Prior art keywords
- target
- ion plating
- magnetic field
- flange
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007733 ion plating Methods 0.000 title claims abstract description 201
- 230000008878 coupling Effects 0.000 title claims abstract description 75
- 238000010168 coupling process Methods 0.000 title claims abstract description 75
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 75
- 238000001816 cooling Methods 0.000 claims abstract description 32
- 239000013077 target material Substances 0.000 claims abstract description 5
- 239000000498 cooling water Substances 0.000 claims description 109
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 90
- 238000009413 insulation Methods 0.000 claims description 75
- 230000006978 adaptation Effects 0.000 claims description 50
- 239000002826 coolant Substances 0.000 claims description 39
- 230000027455 binding Effects 0.000 claims description 37
- 238000009739 binding Methods 0.000 claims description 35
- 238000007789 sealing Methods 0.000 claims description 33
- 229910001220 stainless steel Inorganic materials 0.000 claims description 27
- 239000010935 stainless steel Substances 0.000 claims description 27
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 24
- 229910052802 copper Inorganic materials 0.000 claims description 22
- 239000010949 copper Substances 0.000 claims description 22
- 238000004804 winding Methods 0.000 claims description 21
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 16
- 230000004224 protection Effects 0.000 claims description 16
- 230000000630 rising effect Effects 0.000 claims description 12
- 230000035699 permeability Effects 0.000 claims description 9
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 6
- 239000011162 core material Substances 0.000 claims description 6
- 238000003860 storage Methods 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000005457 optimization Methods 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 238000005097 cold rolling Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000009826 distribution Methods 0.000 abstract description 31
- 238000000576 coating method Methods 0.000 abstract description 11
- 239000011248 coating agent Substances 0.000 abstract description 9
- 238000005530 etching Methods 0.000 abstract description 8
- 239000002245 particle Substances 0.000 abstract description 6
- 230000009471 action Effects 0.000 abstract description 3
- 238000000151 deposition Methods 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract description 3
- 239000002131 composite material Substances 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 26
- 230000001052 transient effect Effects 0.000 description 18
- 238000010586 diagram Methods 0.000 description 16
- 230000033001 locomotion Effects 0.000 description 14
- 230000000694 effects Effects 0.000 description 11
- 238000010276 construction Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 230000001154 acute effect Effects 0.000 description 8
- 239000000306 component Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 208000035126 Facies Diseases 0.000 description 2
- 239000008358 core component Substances 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
Landscapes
- Plasma Technology (AREA)
Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210444627.7A CN102936718B (zh) | 2012-11-08 | 2012-11-08 | 一种多结构耦合磁场适应型旋转弧离子镀装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210444627.7A CN102936718B (zh) | 2012-11-08 | 2012-11-08 | 一种多结构耦合磁场适应型旋转弧离子镀装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102936718A CN102936718A (zh) | 2013-02-20 |
CN102936718B true CN102936718B (zh) | 2014-07-09 |
Family
ID=47695639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210444627.7A Active CN102936718B (zh) | 2012-11-08 | 2012-11-08 | 一种多结构耦合磁场适应型旋转弧离子镀装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102936718B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103132020B (zh) * | 2013-03-17 | 2018-04-20 | 广东世创金属科技股份有限公司 | 一种改进结构的电弧靶及其控制*** |
CN103205711B (zh) * | 2013-04-16 | 2015-09-16 | 温州职业技术学院 | 一种非平衡动态拱形兼容轴向导引磁场辅助离子镀装置 |
CN108385066B (zh) * | 2018-02-26 | 2020-05-12 | 温州职业技术学院 | 一种无氢金属掺杂类金刚石涂层制备方法及其制品 |
CN108624848B (zh) * | 2018-07-04 | 2024-07-16 | 深圳海容高新材料科技有限公司 | 集cvd和pvd一体的真空镀膜设备及真空镀膜方法 |
CN110026414B (zh) * | 2019-04-24 | 2021-09-07 | 义乌了尘环保科技有限公司 | 一种利用旋转弧等离子体处置废物的装置和方法 |
CN110295351B (zh) * | 2019-05-27 | 2024-02-27 | 东莞市汇成真空科技有限公司 | 一种通过翻转式靶门隔离靶体的镀膜机 |
CN111621751B (zh) * | 2020-05-15 | 2023-03-21 | 温州职业技术学院 | 一种多模式调制弧源装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201132848Y (zh) * | 2007-12-12 | 2008-10-15 | 中国科学院金属研究所 | 一种利用电弧离子镀沉积高质量薄膜的装置 |
CN201158701Y (zh) * | 2008-01-09 | 2008-12-03 | 中国科学院金属研究所 | 耦合磁场辅助电弧离子镀沉积装置 |
CN101363116A (zh) * | 2008-03-26 | 2009-02-11 | 中国科学院金属研究所 | 多模式可编程调制的旋转横向磁场控制的电弧离子镀装置 |
CN202945320U (zh) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | 一种多型复合磁场可选紧凑旋转磁场辅助离子镀弧源装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0715879D0 (en) * | 2007-08-15 | 2007-09-26 | Gencoa Ltd | Low impedance plasma |
-
2012
- 2012-11-08 CN CN201210444627.7A patent/CN102936718B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201132848Y (zh) * | 2007-12-12 | 2008-10-15 | 中国科学院金属研究所 | 一种利用电弧离子镀沉积高质量薄膜的装置 |
CN201158701Y (zh) * | 2008-01-09 | 2008-12-03 | 中国科学院金属研究所 | 耦合磁场辅助电弧离子镀沉积装置 |
CN101363116A (zh) * | 2008-03-26 | 2009-02-11 | 中国科学院金属研究所 | 多模式可编程调制的旋转横向磁场控制的电弧离子镀装置 |
CN202945320U (zh) * | 2012-11-08 | 2013-05-22 | 温州职业技术学院 | 一种多型复合磁场可选紧凑旋转磁场辅助离子镀弧源装置 |
Also Published As
Publication number | Publication date |
---|---|
CN102936718A (zh) | 2013-02-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102936718B (zh) | 一种多结构耦合磁场适应型旋转弧离子镀装置 | |
CN102936717B (zh) | 一种紧凑高效的准扩散弧冷阴极弧源 | |
CN101437354B (zh) | 等离子体处理装置 | |
CN202945317U (zh) | 一种二极旋转耦合磁场辅助准扩散弧冷阴极离子镀装置 | |
CN101363116B (zh) | 多模式可编程调制的旋转横向磁场控制的电弧离子镀装置 | |
CN101363115B (zh) | 旋转磁控电弧离子镀弧源 | |
CN105407621B (zh) | 一种紧凑型d‑d中子发生器 | |
CN111219306B (zh) | 一种双磁屏的霍尔推力器 | |
CN201158702Y (zh) | 一种改善电弧离子镀沉积工艺的动态磁控弧源装置 | |
CN103841742B (zh) | 磁旋弧等离子发生器 | |
CN202945320U (zh) | 一种多型复合磁场可选紧凑旋转磁场辅助离子镀弧源装置 | |
CN203159702U (zh) | 一种多结构耦合磁场兼容的离子镀装置 | |
CN101812667A (zh) | 磁控溅射镀膜阴极装置 | |
CN203065569U (zh) | 一种多磁场结构适应性控制磁场组装置 | |
CN101250687A (zh) | 一种矩形平面磁控溅射阴极 | |
CN101358330A (zh) | 一种结构紧凑的多功能磁控离子镀弧源装置 | |
CN103643213A (zh) | 一种旋转横向磁场耦合轴向磁场辅助电弧离子镀装置 | |
CN102612863A (zh) | 产生等离子体的微波天线 | |
CN201688691U (zh) | 感应器无水冷的中频炉 | |
CN104770069A (zh) | 用于产生等离子体的同轴微波施加器 | |
CN203569181U (zh) | 一种旋转横向磁场耦合轴向磁场辅助电弧离子镀装置 | |
CN201190180Y (zh) | 一种离子镀弧斑控制装置 | |
CN202945315U (zh) | 一种高效动态耦合磁控弧源装置 | |
CN103205711B (zh) | 一种非平衡动态拱形兼容轴向导引磁场辅助离子镀装置 | |
WO2023143094A1 (zh) | 半导体工艺设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180110 Address after: 325024 Zhejiang Province, Wenzhou city Longwan District Tonghai road and Jinhai Road Interchange southbound 100 meters West Patentee after: WENZHOU CICEL VACUUM MACHINE CO.,LTD. Address before: 325035 Zhejiang province Chashan Wenzhou Higher Education Park (Wenzhou University) Patentee before: Wenzhou Vocational & Technical College |
|
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 325024 Xingteng Road, Yongxing street, Longwan District, Wenzhou, Zhejiang Province, No. 4 Patentee after: WENZHOU CICEL VACUUM MACHINE CO.,LTD. Address before: 325024 Zhejiang Province, Wenzhou city Longwan District Tonghai road and Jinhai Road Interchange southbound 100 meters West Patentee before: WENZHOU CICEL VACUUM MACHINE CO.,LTD. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240603 Address after: No. 16 Jiangxin Road, Tongzhou Bay Jianghai Joint Development Demonstration Zone, Nantong City, Jiangsu Province, 226333 Patentee after: Jiangsu Chicheng Vacuum Technology Co.,Ltd. Country or region after: China Address before: No.4, Xingteng Road, Yongxing street, Longwan District, Wenzhou City, Zhejiang Province Patentee before: WENZHOU CICEL VACUUM MACHINE CO.,LTD. Country or region before: China |