CN102903650B - 半导体元件测试装置 - Google Patents
半导体元件测试装置 Download PDFInfo
- Publication number
- CN102903650B CN102903650B CN201110396786.XA CN201110396786A CN102903650B CN 102903650 B CN102903650 B CN 102903650B CN 201110396786 A CN201110396786 A CN 201110396786A CN 102903650 B CN102903650 B CN 102903650B
- Authority
- CN
- China
- Prior art keywords
- contact
- semiconductor device
- circuit board
- testing apparatus
- device testing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 93
- 239000004065 semiconductor Substances 0.000 title claims abstract description 49
- 239000000523 sample Substances 0.000 claims description 58
- 238000012546 transfer Methods 0.000 claims description 31
- 238000000034 method Methods 0.000 description 11
- 230000008054 signal transmission Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims (28)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100126726A TWI443341B (zh) | 2011-07-28 | 2011-07-28 | 半導體元件測試裝置 |
TW100126726 | 2011-07-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102903650A CN102903650A (zh) | 2013-01-30 |
CN102903650B true CN102903650B (zh) | 2015-03-25 |
Family
ID=47575832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110396786.XA Active CN102903650B (zh) | 2011-07-28 | 2011-12-05 | 半导体元件测试装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8988092B2 (zh) |
CN (1) | CN102903650B (zh) |
TW (1) | TWI443341B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI551870B (zh) * | 2015-02-26 | 2016-10-01 | 思達科技股份有限公司 | 測試組件與其製作方法 |
TWI604198B (zh) * | 2016-06-22 | 2017-11-01 | 思達科技股份有限公司 | 測試裝置、夾持組件及探針卡載具 |
CN113013143B (zh) * | 2019-12-20 | 2022-10-11 | 深圳市海思半导体有限公司 | 一种晶圆及测试板卡 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5532612A (en) * | 1994-07-19 | 1996-07-02 | Liang; Louis H. | Methods and apparatus for test and burn-in of integrated circuit devices |
TW201042266A (en) * | 2009-05-26 | 2010-12-01 | Mpi Corp | Replaceable probe device and probe card using the same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4757256A (en) * | 1985-05-10 | 1988-07-12 | Micro-Probe, Inc. | High density probe card |
US6720501B1 (en) | 1998-04-14 | 2004-04-13 | Formfactor, Inc. | PC board having clustered blind vias |
US6856150B2 (en) | 2001-04-10 | 2005-02-15 | Formfactor, Inc. | Probe card with coplanar daughter card |
TW546858B (en) | 2001-07-11 | 2003-08-11 | Formfactor Inc | Method of manufacturing a probe card |
US6967557B2 (en) | 2003-08-26 | 2005-11-22 | International Business Machines Corporation | Wafer test space transformer |
US7307433B2 (en) * | 2004-04-21 | 2007-12-11 | Formfactor, Inc. | Intelligent probe card architecture |
US7245134B2 (en) * | 2005-01-31 | 2007-07-17 | Formfactor, Inc. | Probe card assembly including a programmable device to selectively route signals from channels of a test system controller to probes |
JP4905507B2 (ja) | 2009-06-26 | 2012-03-28 | 山一電機株式会社 | プローブカード |
-
2011
- 2011-07-28 TW TW100126726A patent/TWI443341B/zh active
- 2011-11-28 US US13/305,028 patent/US8988092B2/en active Active
- 2011-12-05 CN CN201110396786.XA patent/CN102903650B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5532612A (en) * | 1994-07-19 | 1996-07-02 | Liang; Louis H. | Methods and apparatus for test and burn-in of integrated circuit devices |
TW201042266A (en) * | 2009-05-26 | 2010-12-01 | Mpi Corp | Replaceable probe device and probe card using the same |
Also Published As
Publication number | Publication date |
---|---|
TW201305565A (zh) | 2013-02-01 |
CN102903650A (zh) | 2013-01-30 |
US8988092B2 (en) | 2015-03-24 |
US20130027072A1 (en) | 2013-01-31 |
TWI443341B (zh) | 2014-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20130299221A1 (en) | Space transformer for probe card and method of manufacturing the same | |
TWI758677B (zh) | 中介物、基座、基座組裝體及電路板組裝體 | |
CN101398461A (zh) | 一种芯片静电放电测试装置 | |
CN102903650B (zh) | 半导体元件测试装置 | |
TW202028762A (zh) | 半導體元件測試載具 | |
TW201812307A (zh) | 測試用電路板及其操作方法 | |
JP2012103028A (ja) | テスト用ボード | |
TW201531714A (zh) | 電路板及測試方法 | |
US20010026168A1 (en) | Tester for semiconductor device | |
KR102007261B1 (ko) | 양방향 도전성 모듈 | |
CN217522001U (zh) | 测试结构、量子芯片 | |
TW200413740A (en) | Adapter for testing one or more conductor assemblies | |
KR20120076265A (ko) | 프로브 카드용 세라믹 기판 및 그 제조방법 | |
CN114944380A (zh) | 测试结构、量子芯片及其制作和测试方法 | |
US6507205B1 (en) | Load board with matrix card for interfacing to test device | |
KR101467381B1 (ko) | 반도체 검사장치 | |
TW201546463A (zh) | 半導體測試載具及其測試針頭模組 | |
JP3070437U (ja) | 半導体試験装置 | |
KR101458119B1 (ko) | 프로브 카드 | |
US20070252607A1 (en) | Method of manufacturing circuit module, collective board for circuit module, and circuit module manufactured by the method | |
KR20190061647A (ko) | 프로브 카드용 공간 변환기 및 그 제조방법 | |
CN101329365B (zh) | 探针卡及其组合装配方法 | |
TWI413777B (zh) | Multi - power circuit board and its application probe card | |
KR101358788B1 (ko) | 고밀도 프로브 카드 및 그 제조방법 | |
TWM426129U (en) | Probing apparatus for semiconductor devices |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20181212 Address after: Room 1106, 11F Comet Valley Space-time Building, No. 4 Luyu East Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province Patentee after: Starr Technology (Wuhan) Co., Ltd. Address before: Hsinchu City, Taiwan, China Patentee before: Sida Science and Technology Co., Ltd. |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20130130 Assignee: Decott Testing Technology (Suzhou) Co., Ltd Assignor: Starr Technology (Wuhan) Co.,Ltd. Contract record no.: X2020980003101 Denomination of invention: Semiconductor device testing apparatus Granted publication date: 20150325 License type: Exclusive License Record date: 20200616 |