CN102879858B - Single-fiber three-way multiplexer with grating - Google Patents
Single-fiber three-way multiplexer with grating Download PDFInfo
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- CN102879858B CN102879858B CN201210419042.XA CN201210419042A CN102879858B CN 102879858 B CN102879858 B CN 102879858B CN 201210419042 A CN201210419042 A CN 201210419042A CN 102879858 B CN102879858 B CN 102879858B
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Abstract
The invention provides a single-fiber three-way multiplexer with a grating. The single-fiber three-way multiplexer with the grating at least comprises an input waveguide used for being connected with an optical wave signal with a first wavelength and a second wavelength, an uploading waveguide used for being connected with an optical wave signal with a third wavelength, a first output waveguide, a second output waveguide and a multi-mode waveguide coupler, wherein the multi-mode waveguide coupler is used for separating a first wavelength signal and a second wavelength signal; the first wavelength signal and the second wavelength signal are output through the first output waveguide and the second output waveguide respectively; and in addition, the grating of the multi-mode waveguide coupler can reflect the optical wave signal with the third wavelength; the optical wave signal is output by the input waveguide; and preferably, the input waveguide, the uploading waveguide, the first output waveguide, the second output waveguide and the multi-mode waveguide coupler are formed by etching a semiconductor substrate. The single-fiber three-way multiplexer has the advantages of being compact and small in structure, completely compatible with the manufacturing process and a complementary metal oxide semiconductor (CMOS) process, free from a complex process, and low in processing cost.
Description
Technical field
The present invention relates to intelligent acess network field, particularly relate to a kind of single-fiber three-way multiplexer with grating.
Background technology
Along with the incremental advances of intelligent acess network technology, and the increase of the portfolio such as IPTV, video request program and online game, the demand of user to access bandwidth increases further, require more and more higher to intelligent acess network, fiber to the home technology (FTTH) has become the main technical schemes of intelligent acess network, and EPON (PON) technology is the mainstream technology of FTTH, it can realize video, voice, data unification of three nets.For in the PON technology of FTTH, the core devices realizing communicating between optical line terminal (OLT) and terminal user is exactly single-fiber three-way multiplexer, work out meet communication bandwidth requirement, low cost, miniaturization single-fiber three-way multiplexer be the actual demand of application, therefore have very important significance.These actual requirements are also the key factors of restriction FTTH Technique Popularizing.
The major function of single-fiber three-way multiplexer, that the wavelength 1310nm signal multiplexing that the voice signal of wavelength 1490nm that exported by OLT and the vision signal of wavelength 1550nm and user upload enters an optical fiber, user can receive the voice signal of wavelength 1490nm and the vision signal of wavelength 1550nm respectively by receiver, and by uploading waveguide, local data is uploaded to OLT.The single-fiber three-way multiplexer of current practical application is made up of discrete device, has and be not easy to encapsulation, the large and high in cost of production shortcoming of coupling loss; And another kind is very little due to the refringence between sandwich layer and covering based on the triplexer of Planar Lightwave Circuit Technology (PLC), cause its device size still larger.In addition, the triplexer based on PLC often uses the mode of multimode waveguide coupling mechanism (MMI) and the mutual cascade of array waveguide grating (AWG) to realize multiplexing function, makes the structure of device compact not.
Along with the development of semiconductor technology, Si and SiO
2height refraction poor (2.0) provide possibility for the integrated optical wave guide device realizing nano optical wave guide and extra small yardstick.And the CMOS technology used in the manufacturing process of Si Nanowire Waveguides and existing electronics industry can be completely compatible, and be low cost, large batch of production provides possibility.Therefore relative to traditional triplexer, how to provide a kind of low cost, small size, the triplexer of high integration, become the technical task that those skilled in the art need to solve.
Summary of the invention
The shortcoming of prior art in view of the above, the object of the present invention is to provide the single-fiber three-way multiplexer with grating that a kind of compact conformation cost is low.
For achieving the above object and other relevant objects, the invention provides a kind of single-fiber three-way multiplexer with grating, it at least comprises:
For accessing the input waveguide of the lightwave signal of first wave length and second wave length;
Waveguide is uploaded for what access the lightwave signal of the 3rd wavelength;
First output waveguide;
Second output waveguide;
Connect described input waveguide respectively by port, upload waveguide, the multimode waveguide coupling mechanism of the first output waveguide and the second output waveguide, for separating of described first wave length signal and second wave length signal, and make both be exported by the first output waveguide and the second output waveguide respectively, described multimode waveguide coupling mechanism also has grating, described grating can reflect the lightwave signal of described 3rd wavelength, and makes this lightwave signal export OLT to by input waveguide.
Preferably, described input waveguide, upload waveguide, the first output waveguide, the second output waveguide and multimode waveguide coupling mechanism all by being formed the etching of semiconductor base; More preferably, by being formed the top layer silicon etching of silicon-on-insulator.
Preferably, described input waveguide, upload waveguide, the first output waveguide and the second output waveguide and be Nanowire Waveguides.
Preferably, described input waveguide, to upload waveguide, the first output waveguide and the second output waveguide all tapered.
Preferably, described grating is by being formed the light engraving erosion of described semiconductor base.
Preferably, described grating comprises Bragg grating.
As mentioned above, the single-fiber three-way multiplexer with grating of the present invention, has following beneficial effect: to be embedded in by grating on multimode waveguide coupling mechanism to realize the multiplexing function of three wavelength, to make the structure of device extremely compact; Based on the Si Nanowire Waveguides processing technology of silicon-on-insulator and CMOS technology completely compatible, without the need to complicated technology, processing cost is low; Based on Si Nanowire Waveguides, for providing huge refringence between sandwich layer and covering, the size of device can be reduced greatly, increase substantially integrated level.
Accompanying drawing explanation
Fig. 1 is shown as the two-dimensional structure schematic diagram with the single-fiber three-way multiplexer of grating of the present invention.
Fig. 2 is shown as the three-dimensional structure schematic diagram with the single-fiber three-way multiplexer of grating of the present invention.
Element numbers explanation
Embodiment
By particular specific embodiment, embodiments of the present invention are described below, person skilled in the art scholar the content disclosed by this instructions can understand other advantages of the present invention and effect easily.
Refer to Fig. 1 to Fig. 2.Notice, structure, ratio, size etc. that this instructions institute accompanying drawings illustrates, content all only in order to coordinate instructions to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, under the prerequisite not affecting effect that the present invention can produce and the object that can reach, all should still drop in the covering scope of disclosed technology contents.Simultaneously, quote in this instructions as " on ", D score, "left", "right", " centre " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the present invention.
As shown in the figure, the invention provides a kind of single-fiber three-way multiplexer with grating.Described single-fiber three-way multiplexer 1 at least comprises: input waveguide 11, upload waveguide 12, first output waveguide 13, second output waveguide 14 and multimode waveguide coupling mechanism 15.
Described input waveguide 11 is for accessing the lightwave signal of first wave length and second wave length.
Wherein, the lightwave signal of first wave length and second wave length comprises the lightwave signal of any wavelength, and preferably, the lightwave signal of first wave length and second wave length is respectively voice signal and vision signal, such as, the lightwave signal of first wave length is the voice signal of wavelength 1490nm; The lightwave signal of second wave length is the vision signal of wavelength 1550nm.
Described input waveguide 11 is by being formed the etching of semiconductor base, such as, as shown in Figure 2, the top layer silicon 21 of input waveguide 11 pairs of silicon-on-insulators 2 etches, form 4 Si Nanowire Waveguides, wherein a Si Nanowire Waveguides in left side is as input waveguide 11.
In addition, further the Si Nanowire Waveguides as input waveguide 11 can be etched into taper, such as, taper as shown in Figure 1, reduces loss thus.
Describedly upload waveguide 12 for accessing the lightwave signal of the 3rd wavelength.
Wherein, the 3rd wavelength signals comprises the lightwave signal being different from arbitrarily first wave length and second wave length, and preferably, the 3rd wavelength signals is user's up-delivering signal, such as, is the lightwave signal of wavelength 1310nm.
Describedly upload waveguide 12 also by being formed the etching of semiconductor base, such as, as shown in Figure 2, a Si Nanowire Waveguides in left side is as uploading waveguide 12.
In addition, also can will be etched into taper as the Si Nanowire Waveguides uploading waveguide 12 shown in Fig. 2 further, such as, taper as shown in Figure 1, reduces loss thus.
Described first output waveguide 13 is for output light-wave signal, and it is also by being formed the etching of semiconductor base, and such as, as shown in Figure 2, a Si Nanowire Waveguides on right side is as the first output waveguide 13.
In addition, also further the Si Nanowire Waveguides as the first output waveguide 13 shown in Fig. 2 can be etched into taper, such as, taper as shown in Figure 1, reduces loss thus.
Described second output waveguide 14 is for output light-wave signal, and it is also by being formed the etching of semiconductor base, and such as, as shown in Figure 2, a Si Nanowire Waveguides on right side is as the second output waveguide 14.
In addition, also further the Si Nanowire Waveguides as the second output waveguide 14 shown in Fig. 2 can be etched into taper, such as, taper as shown in Figure 1, reduces loss thus.
Described multimode waveguide coupling mechanism 15 has 4 port (not shown)s, and these 4 ports connect input waveguide 11 respectively, upload waveguide 12, first output waveguide 13 and the second output waveguide 14; Described multimode waveguide coupling mechanism 15 also has grating 151, as shown in Figure 1.
Described multimode waveguide coupling mechanism 15 is also by being formed the etching of semiconductor base, and such as, as shown in Figure 2, wherein, described grating 151 is by being formed the light engraving erosion of top layer silicon 21.
Wherein, described grating 151 comprises any lightwave signal that can reflect described 3rd wavelength, and makes the grating that this lightwave signal is exported by input waveguide, preferably, includes but not limited to Bragg grating etc.
As seen from Figure 1, the lightwave signal of wavelength 1490nm and 1550nm that input waveguide 11 accesses by this multimode waveguide coupling mechanism 15 separately, and from the lightwave signal of the first output waveguide 13 output wavelength 1490nm, lightwave signal from the second output waveguide 14 output wavelength 1550nm; The lightwave signal of the wavelength 1310nm that waveguide 12 accesses is uploaded in grating 151 reflection of this multimode waveguide coupling mechanism 15 simultaneously, the lightwave signal of wavelength 1310nm is exported by input waveguide 11, does not affect the lightwave signal of input waveguide 11 transmission wavelength 1490nm and 1550nm simultaneously.
In sum, what the single-fiber three-way multiplexer with grating of the present invention was taked is that the method etched on silicon-on-insulator is made, Si Nanowire Waveguides and SiO
2refringence huge between substrate will reduce the size of device greatly, and based on the Si Nanowire Waveguides processing technology of silicon-on-insulator and CMOS technology completely compatible, without the need to complicated technology, processing cost is low; In addition, the Bragg grating that light engraving loses to be embedded on multimode waveguide coupling mechanism to realize the multiplexing function of three wavelength, to make the structure of device extremely compact.So the present invention effectively overcomes various shortcoming of the prior art, thus has high industrial utilization.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any person skilled in the art scholar all without prejudice under spirit of the present invention and category, can modify above-described embodiment or changes.Therefore, such as have in art usually know the knowledgeable do not depart from complete under disclosed spirit and technological thought all equivalence modify or change, must be contained by claim of the present invention.
Claims (5)
1. there is a single-fiber three-way multiplexer for grating, it is characterized in that, described in there is grating single-fiber three-way multiplexer at least comprise:
For accessing the input waveguide of the lightwave signal of first wave length and second wave length;
Waveguide is uploaded for what access the lightwave signal of the 3rd wavelength;
First output waveguide;
Second output waveguide;
Connect described input waveguide respectively by port, upload waveguide, the multimode waveguide coupling mechanism of the first output waveguide and the second output waveguide, for separating of described first wave length signal and second wave length signal, and make both be exported by the first output waveguide and the second output waveguide respectively, described multimode waveguide coupling mechanism also has Bragg grating, described Bragg grating can reflect the lightwave signal of described 3rd wavelength, and this lightwave signal is exported by input waveguide;
Described input waveguide, to upload waveguide, the first output waveguide and the second output waveguide all tapered, wherein, input waveguide with upload the side that waveguide is in described multimode waveguide coupling mechanism, the first output waveguide and the second output waveguide are in the opposite side of described multimode waveguide coupling mechanism;
Described input waveguide, upload waveguide, the first output waveguide and the second output waveguide and be Nanowire Waveguides.
2. the single-fiber three-way multiplexer with grating according to claim 1, is characterized in that: described input waveguide, upload waveguide, the first output waveguide, the second output waveguide and multimode waveguide coupling mechanism all by being formed the etching of semiconductor base.
3. the single-fiber three-way multiplexer with grating according to claim 2, is characterized in that: described semiconductor base comprises silicon-on-insulator.
4. the single-fiber three-way multiplexer with grating according to claim 2, is characterized in that: described grating is by being formed the light engraving erosion of described semiconductor base.
5. the single-fiber three-way multiplexer with grating according to claim 1, is characterized in that: the lightwave signal of first wave length and second wave length is respectively voice signal and vision signal; 3rd wavelength signals is user's up-delivering signal.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104426604B (en) * | 2013-09-10 | 2017-02-08 | 中国电信股份有限公司 | Single-fiber three-way multiplexer for optical network unit and monolithic integrated reflector |
| CN105572796B (en) * | 2016-03-07 | 2018-08-21 | 龙岩学院 | A kind of path filter up and down based on antisymmetry multimode Bragg waveguide grating |
| CN106950659A (en) * | 2017-05-11 | 2017-07-14 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN110637245B (en) * | 2017-06-16 | 2020-12-01 | 华为技术有限公司 | Optical add drop multiplexer |
| CN111239895B (en) * | 2020-02-26 | 2020-11-13 | 北京邮电大学 | Waveguide coupling structure and light emitter system |
| CN117008249B (en) * | 2023-10-07 | 2024-04-02 | 之江实验室 | Lithium niobate wavelength division multiplexer and optical signal multiplexing method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1719754A (en) * | 2005-07-14 | 2006-01-11 | 四川飞阳科技有限公司 | Plane integrated single fibre three-directional optical signal processing chip device |
| CN101464540A (en) * | 2007-12-19 | 2009-06-24 | 中国科学院半导体研究所 | Mixed integral single fibre three-way device |
-
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1719754A (en) * | 2005-07-14 | 2006-01-11 | 四川飞阳科技有限公司 | Plane integrated single fibre three-directional optical signal processing chip device |
| CN101464540A (en) * | 2007-12-19 | 2009-06-24 | 中国科学院半导体研究所 | Mixed integral single fibre three-way device |
Non-Patent Citations (1)
| Title |
|---|
| 基于Si纳米线AWG的超紧凑单纤三向滤波器设计;安俊明，等;《光电子˙激光》;20100831;第21卷(第8期);1115-1118 * |
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Effective date of registration: 20170615 Address after: 226009 Jiangsu city of Nantong province science and Technology Industrial Park of Su Tong Jiang Cheng Road No. 1088 Jiang Bei Lou Park Development Research Co-patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Patentee after: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Address before: 226009 Nantong science and Technology Industrial Park, Su Tong Road, Jiangsu, No. 14, No. 30 Co-patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: JIANGSU SUNFY OPTOELECTRONICS TECHNOLOGY CO.,LTD. Co-patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Address after: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee after: Nantong Xinwei Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee before: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address after: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee after: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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